Keysight Technologies Optics and Laser Heads for Laser ...€¦ · 01/12/2017 · Choosing a backplane based on the other system electronics you want to use or the outputs you need,

Keysight TechnologiesOptics and Laser Heads for Laser-InterferometerPositioning Systems

Technical Overview

Choose from a large selection of optical components for system design flexibility

Table of Contents

4 Design Your System for Peak Performance5 Laser Head Specifications7 Directing Optics Specifications9 Measurement Optics Specifications9 Linear Optics10 Single Beam Optics11 Plane Mirror Optics13 Differential Interferometer15 Multi-Axis Optics23 Wavelength Tracker24 Accessory Specifications25 Receiver Specifications28 Optics and Laser Head Configuration Guide29 Example Configurations

Introduction

This product overview provides details on the laser heads, receivers, andoptics used by all Keysight Technologies laser interferometer positioning systems. Together with the electronics information contained in companion data sheets, this information will enable you to specify your entire laser positioning system. Select from the following companion data sheets:

– Keysight Laser Interferometer Systems – High Performance Laser Interferometer Positioning Systems for VMEbus – Complete, PC-compatible, Closed-loop Laser Positioning

Design Your System for Peak Performance

The wide variety of optics and laser heads from Keysight gives you maximum design flexibility to achieve your performance goals.

In addition to a full range of conventional optics, multi-axis optics provide new pos-sibilities for extremely accurate positioning system designs. Several laser heads offer different sizes and axis velocities to meet your requirements. Remote receivers withfiber-optic pickups allow maximum layout flexibility while removing electronics heat from the measurement area for superior repeatability. Optical wavelength tracking also assists you in achieving unsurpassed measurement repeatability.

This product overview covers laser head specifications. Then, the major part of the product overview is devoted to the many optics Keysight has developed for directing the laser beam and making a wide variety of measurements. Accessories and receivers arecovered next. Finally, an extensive configuration guide illustrates a number of optical layouts for specific applications. These examples are provided to help you design an optical layout that meets your measurement needs.

Configuring Your SystemAll laser-interferometer positioningsystems use a laser head, optics, andelectronics. After investigating thechoices in this product overview andits companion electronics data sheets,you can configure your system by:

1. Choosing a backplane based on the other system electronics you want to use or the outputs you need,

2. Choosing a laser head based on size and velocity requirements,

3. Selecting the optics that best match your application needs, and

4. Selecting the environmental compensation that meets your accuracy needs.

Measurement

Compensat

Laser Head

Optics • Directing • Measurement

Object Under Control

• Power Amplifier • Drive Motor • Servo-Loop Compensation

Host Computer

Compensat

Laser Head

Optics • Directing • Measurement

Object Under Control

• Power Amplifier • Drive Motor • Servo-Loop Compensation

Host Computer

Elec

Measurement

Compensatation

MeasurementReceivers

EnvironmentalSensors

ation

MeasurementReceivers

ectronics

EnvironmentalSensors

ation

PowerSupply

4 | Keysight | Optics and Laser Heads for Laser-Interferometer Positioning Systems - Technical Overview

Laser Head Specifications

Four laser heads are available for different size, velocity, and interface requirements.

The Keysight 5517 series of laser heads provides choices for all available size and velocity requirements in a consistent interface. The 5517A is the basic laser head. The 5517B offers 25% greater axis velocity in a smaller package. The 5517C offers still higher velocity, 75% higher than the 5517A. The 5517D offers the highest axis velocity and is the same size as the 5517B.

Standard beam diameter is 6 mm. In addition, there are two beam size options available for the 5517C. Option 003 provides a 3-mm beam diameter for use with the Keysight 10719A and 10721A differential interferometers and 10737L/R compact three-axis interferometers. Option 009 provides a 9-mm beam diameter for use with the 10735A and 10736A three-axis interferometers. The larger beam allows these interferometers a larger angular range of measurement.

Finally, the Keysight 5501B laser head is available to replace the previous 5501A laser head in existing applications that require the same polarization, cabling, and electrical power as the 5501A. The 5501B also offers improved accuracy, reliability, and service-ability compared to the previous 5501A.

All laser heads use a proven long-life laser tube with a demonstrated Mean Time Between Failure greater than 50,000 hours of operation, making them the most reliable lasers of their type available.

Keysight 5501B and 5517A/B/C/D Laser Heads

Physical CharacteristicsWeight:5517A: 5.5 kg (12 lb)5517B/C/D: 3.4 kg (7.5 lb)5501B: 3.4 kg (7.5 lb)Warm-Up Time: less than 10 minutes (5 minutes typical)Magnetic Field Strength (Non-Operating):Does not exceed 5.25 milli-Gauss at a distance of 4.6 m (15 ft) from any point on the surface of the packaged Laser Head.Clearance required for cabling:5517A: 12.0 cm (4.72 in) beyond back of unit5517B/C/D: 10.16 cm (4.0 in) beyond back of unit5501B: 7.5 cm (3.0 in) beyond back of unit

PowerPower Requirements:(5517A) +15V ±0.3V at 2.5A max –15V ±0.3V at 0.02A max(5517B/C/D) +15V ±0.3V at 2.2A max –15V ±0.3V at 0.02A max(5501B) +15V ±0.3V at 0.79A max –15V ±0.3V at 0.67A max

Power Dissipation (nominal):Warm-Up: 35W (5517A/B/C/D)Operation: 23W (5517A/B/C/D)Maximum: 21.9W (5501B)

Laser Characteristics

Type: Helium-Neon, Continuous Wave,Two-FrequencyMinimum Beam Power Output: 180 μWMaximum Beam Power Output: 1 mWStd. Beam Diameter: 6 mm (0.25 in) typical5517C Opt 003:3 mm (0.125 in)5517C Opt 009:9 mm (0.375 in)Vacuum Wavelength Accuracy(3 s, lifetime): ±0.1 ppm (±0.02 ppm with factory calibration to MIL-STD 45662)Nominal Vacuum Wavelength:632.991372 nm (5501B, 5517A/B)632.991354 nm (5517C/D)Vacuum Wavelength Stability (one hour): ±0.002 ppm typicalVacuum Wavelength Stability (life-time): ±0.02 ppm typical

Safety Classification:Class 2 Laser Product conforming toU.S. National Center for Devices andRadiological Health Regulations 21 CFR 1040.10 and 1040.11.

Reference Frequency:5517A: 1.5–2.0 MHz5517B: 1.9–2.4 MHz5517C: 2.4–3.0 MHz5517D: 3.4–4.0 MHz5501B: 1.5–2.0 MHz


Keysight 5517A

Keysight 5501B, 5517B, 5517C, 5517DKeysight 5517B/C/DRear Panel

Keysight 5501BRear Panel

192.0 mm(7.56)

25.0 mm(0.98)

83.0 mm(3.27)

435.0 mm(17.13)

22.3 mm DIA(0.88)

118.0 mm(4.65)

BEAM55.1 mm

(2.17)

83.7 mm(3.30)

118.0 mm(4.65)

49.5 mm(1.95)

120.0 mm MIN CLEAR(4.72)

360.0 mm(14.17)

458.0 mm(18.03)

479.0 mm(18.85)

167.5 mm(6.59)

83.7 mm(3.30)

M8 X 1.25 THREAD(3 PLACES)

142.0 mm(5.59)

13.0 mm(0.51)

6 mm(0.24)DIA

BEAM

128.3(5.05)

128.3(5.05)

3.2 (0.13 DIAL.E.D.

8 PLACES

53.3(2.30 in)

34.6(1.36)

17.7(0.70)

70.1(2.76)

45.6(1.80 in)

20.2(.80 in)

19.3(0.76)

3.2 (0.13) DIAL.E.D.

8 PLACES

70.1(2.76)

34.6(1.36)

17.7(0.70)

19.3(0.76)

78.6(3.1)

25.4 MAX(1.00)

DETAIL3 PLACES

FULLRADIUS

13.7(0.54)

7.11(0.28)

11.43(0.45) BEAM

79.5 ±1.0(3.13 ±0.04)

325.2 ±1(12.80 ±0.04)

6 (0.24) DIA BEAM

6.55(0.26)

10.7(0.42)

208.3(8.20)

139.6(5.50)

132.0(5.20)

CL

358.6(14.12)

68.0(2.68)

106.4(4.19)

128.3(5.05)

CL

43.4 DIA(1.71)

101.6(4.0)

Note: Dimensions of all drawings in this product overview are given in millimeters,with corresponding dimensions in inches given in parentheses.

LASER LIGHTDO NOT STARE INTO BEAM

MAXIMUM OUTPUT 1 mwPULSE SPEC continuous waveLASER MEDIUM helium neonCLASS II LASER PRODUCT

CAUTION


Directing Optics Specifications

A variety of beam splitting and directing optics allows maximum flexibility in optical layouts. Unless otherwise noted, all optics are designed for beam diameters of 6 mm or less. These optics all have housings for standard mounting techniques.

Beams of 9-mm diameter can be used with the Keysight 10735A/10736A to provide greater angular range. For directing 9-mm beams, the 10725A, 10726A, and 10728A must be used. These are bare optics that require user-supplied mounts.

Beam Splitting and Directing Optics

10700A 33% Beam SplitterUse: Reflects 1/3 of the total incoming laser beam, transmits 2/3Weight: 62 g (2.2 oz)

10701A 50% Beam SplitterUse: Reflects 1/2 of the total incoming laser beam, transmits 1/2Weight: 62 g (2.2 oz)

10707A Beam BenderUse: Bends incoming beam at a 90° angleWeight: 58 g (2.1 oz)

19.6 mm(0.77)

#6-32 UNC (2 PLC’S) THRU CLEARANCEFOR #4 OR 2.5 mm

0.8 mm (0.03)OFFSET

19.6 mm(0.77 TYP)

10.16 mm APERTURE(0.40 DIA)

#4-40(0.15 DEEP)(2 SIDES)

19.6 mm(0.77)

25.4 mm(1.0)

25.4 mm(1.0)

CL CL

19.6 mm(0.77)

25.4 mm(1.0)

25.4 mm(1.0)


RETURN

ENTRANCE

RETURN

53.3 mm(2.10)

50.8 mm(2.00)

21.6 mm(0.85)

12.7 mm(0.50)

12.7 mm(0.50)

12.7 mm(0.50)

19.1 mm(0.75)

12.7 mm(0.50)19.1 mm

(0.75)

TYP35.6 mm

(1.40)EXIT

RETURN

4 HOLES8/32 UNC

ALL FACES

EXIT

RETURN

10567A Dual Beam Beam SplitterUse: 50% beam splitter which allows both of the split beams to return through the splitter parallel to the incoming beam. Useful when it is necessary to minimize the number of optical ports (for example in a vacuum chamber), or when both receivers must be mounted in the same area.Weight: 317 g (11.3 oz)

10725A 9-mm Laser Beam SplitterUse: 50% beam splitter; divides the beaminto equal parts, transmits one part straight through and bends the other part at a 90-degree angle. It is designed for use with beams of 9-mm diameter and smaller. This bare optic requires a user-supplied mount.Weight: 2 g (0.07 oz)

10726A 9-mm Laser Beam BenderUse: Bends incoming beam at a 90 degreeangle. Like the 10725A, it is designed foruse with beams of 9-mm diameter andsmaller and is a bare optic that requiresa user-supplied mount.Weight: 10 g (0.35 oz)

10728A 9-mm Laser Beam Plane MirrorUse: Normal incidence plane mirror. Likethe 10725A, it is designed for use withbeams of 9-mm diameter and smallerand is a bare optic that requires a usersup-plied mount.Weight: 21 g (0.74 oz)

2.41± 0.25

019.3 ± 0.13

22

30.48

1

45ϒ

5.59

7.62

1 Minimum clear aperture: central 10.05 x 26.92 mm ellipse

4 x R 4

34

34

38

38

6.35

Minimum clear aperture: central 34 x 34 mm


Measurement Optics Specifications

A variety of optics allows maximum measurement flexibility. Unless otherwisenoted, all optics are designed for beam diameters of 6 mm or less.

The Keysight 10702A linear interferometer is the basic interferometer forlinear measurements, while the small 10705A single-beam interferometer isdesigned for use in confined spaces.

For multi-axis stages, plane mirror interferometers such as the Keysight10706B are commonly used (see pages 11 and 12.) The 10716A high-resolutionplane mirror interferometer provides twice the resolution of the 10706B for the most precise applications (see page 14.) The 10715A is a plane mirror interferometer designed for differential measurements (see page 13.) The 10724A plane mirror reflector may be used with these plane mirror interferometers for single-axis measurements (see page 12.)

The Keysight 10719A one-axis and 10721A two-axis differential interferometers are designed to optimize the accuracy and repeatability of IC-fabrication equipment by referencing the position of the wafer stage directly to the optics column. The Keysight 10735A and 10736A three-axis interferometers make three measurements simultaneous-ly (linear,yaw, and pitch or roll) for precise wafer positioning in IC-fabrication equipment and other precision stage applications. See pages 15 through 22 for details on these optics.

The Keysight 10717A wavelength tracker monitors changes in the index of refraction of air to optically compensate for environmental changes (see page 23).

Linear Optics

10702A Linear InterferometerUse: For general-purpose, single-axis measurements. If the interferometer is the moving component, then 10702A Opt. 001Windows MUST be ordered, and the interferometer cannot be used to bend thebeam.Weight:10702A: 232 g (8.2 oz)10702A Opt. 001: 246 g (8.7 oz)

BEAM SPACING

#4-40 SCREWS (2)12.7 mm

(0.50)

28.5 mm(1.12 DIA)

32 mm(1.26 TYP)

38.2 mm(1.50)

38.2 mm(1.50)

20.83 mmAPERTURE(0.82 DIA)

#6-32 UNC (4 PLC'S)THRU CLEARANCE FOR #4 OR 2.5 mm

33.3 mm(1.31)

(4 SIDES)

#4-40 x 0.25 DEEP

62.0 mm(2.44)

CL

CL


10703A ReflectorUse: Paired with 10702A (or 10702A Opt. 001) linear interferometer. Cube corner reflector simplifies alignment. If mass is extremely critical, this component is available without housing (10713B). Weight of the bare cube corner is 11.4 g (0.4 oz).Weight: 42 g (1.5 oz)

Single Beam Optics

10704A ReflectorUse: Paired with the 10705A single beaminterferometer. Cube corner reflector simplifies alignment. If mass is extremely critical, this component is available without housing (10713C). Weight of the bare cube corner is 1.4 g (0.05 oz).Weight: 10.5 g (0.4 oz)

10705A Single Beam InterferometerUse: Low mass/limited space single-axismeasurements such as disk-drive applications. Can be used to bend the beam, butcannot be used as the moving component.Weight: 85.5 g (3 oz)

3 mm(0.12)

33.3 mm (1.31)


37.6 mm(1.48 DIA)

28.4 mm(1.12 DIA)

2.5 mm(0.10)

23.9 mm(0.94)

2.5 mm(0.10)


19.5 mm(0.77)

BOLT CIRCLE

20.5 mm(0.81 DIA)

15.2 mm(0.60)

2.5 mm(0.10)

14.3 mm(0.56)

8.9 mmAPERTURE

(0.35)

25.4 mm(1.00)

25.4 mm(1.00)

#2-56 SCREWS (2)

19.6 mm(0.77 TYP)

#6-32 UNC (4 PLC’s) THRUCLEARANCE FOR #4 OR 2.5 mm

19.5 mm(0.77)

#2-56(4 PLACES)

19.5 mm(0.77)

39.6 mm(1.56)

15.2 mm DIA(0.60)CL

CL

8.9 mmAPERTURE

(0.35)

25.4 mm(1.00)

25.4 mm(1.00)

#2-56 SCREWS (2)

19.6 mm(0.77 TYP)

#6-32 UNC (4 PLC’s) THRUCLEARANCE FOR #4 OR 2.5 mm

19.5 mm(0.77)

#2-56(4 PLACES)

19.5 mm(0.77)

39.6 mm(1.56)

15.2 mm DIA(0.60)CL

CL


Plane Mirror Optics

10706B High-Stability Plane Mirror InterferometerUse: Multiple axis applications such as X-Y stage. Can be used to bend the beam, butcannot be used as the moving component. This thermally stable optic is an exact functional replacement for the 10706A plane mirror interferometer. The 10706B design improves measurement stability during temperature changes that affect the optics byreducing measurement drift to 1/12 the value typically achieved by conventional plane mirror interferometers such as the 10706A.Weight: 323 g (11.4 oz)

Thermal Drift Coefficient (Change of indicated distance per °C temperature change): 0.04 μm/°C (1.6 μin/°C) typical. Other specifications same as 10706A.

Typical Measurement Mirror Alignment Requirements for 10706A and B (as a function of distance):152 mm (6 in): ±6 arc-min from normal305 mm (12 in): ±3 arc-min from normal508 mm (20 in): ±1.5 arc-min from normal

CL

#4-40 SCREWS (2)BEAMSPACING

12.7 mm(0.50)

28.4 mm(1.12 DIA)

38.1 mm(1.50)

20.8 mmAPERTURE(0.82 DIA) 33.3 mm

(1.31)4-40

0.25 DEEP (4 SIDES)

28.5 mm(1.12 DIA)

38.1 mm(1.50) 14 mm

(0.55)

#6-32 UNC (4 PLC’S)THRU CLEARANCE FOR #4 OR 2.5 mm

32 mm(1.26 TYP)

38.2 mm(1.50)

85.9 mm(3.38)


Interferometer Thermal DriftThis plot shows the measurement drift during optics temperature changes for a conven-tional plane mirror interferometer compared with the 10706B high stability plane mirror interferometer, the 10715A differential interferometer, and the 10716A high resolution interferometer. The 10706B is nearly as stable as the more expensive 10715A and far more stable than the conventional plane mirror interferometer. The 10716A has the samestability as the 10706B with two times better resolution. For example, with ±0.5°C temperature control, measurement drift with the 10706B and 10716A is typically ±0.02 microns (±0.8 μin) compared with ±0.25 microns (±10 μin) with a conventional plane mirror interferometer.

10724A Plane Mirror ReflectorUse: This reflector may be used with the 10706A and B, 10715A, and 10716A interferometers for single-axis measurements.Weight: 50 g (1.8 oz)Adjustment Range: ±1° (Alignment hardware included)Reflectance: 98% at normal incidence

Recommended Plane Mirror Specifications (for 10706A and B, 10715A, and 10716A reflectors)Reflectance: 98% at 633 nm at normal incidenceFlatness: Flatness deviations will appear as measurement errors when the mirror is scanned perpendicular to the beam. Recommended range is l /4 (0.16 μm or 6 μin) to l/20 (0.03 μm or 1.2 μin) dependent on accuracy requirements.Optical Surface Quality: 60–40 per Mil 0-13830

+1.75

+1.50

+1.25

+1.00

+.75

+.50

+.25

+0.00

-.250 2.4 4.8 7.2 12 14.4 16.8 19.2 21.6 249.6

DRIFT AND TEMPERATURE vs. TIME

TIME (Hrs.)

MEA

SURE

MEN

T D

RIFT

(Mic

rons

)

TEMPERA

TURE (°C)

27.00

26.50

26.00

25.50

25.00

24.50

24.00

23.50

23.00

INTERFEROMETER TEMPERATURE

CONVENTIONALPLANE-MIRRORINTERFEROMETER

10715A

10706B & 10716A

INTERFEROMETER TEMPERATURE

MEASUREMENT DRIFT

2X ø 3.556 mm (0.140) THRU

ø 36.068 mm(1.420)

ø 32.766 mm(1.290)

ø 22.860 mm(0.900) APERTURE

3X 2-56 NC-CLASS 3 THRU120ϒAPART

28.388 mm(1.118 DIA)

42.164 mm(1.660 DIA)

3.810 mm(0.150)

20.066 mm(0.790)


Differential Interferometer

10715A Differential InterferometerUse: Performs differential measurements between the supplied reference mirror and a measurement plane mirror. Provides the best long-term stability of any plane mirrorinterferometer in plane mirror applications.Minimizes deadpath. The Keysight 10715Aeliminates thermal drift in measurements because the entire optical path through theinterferometer is common mode. Alignment is slightly more complex than the 10706A/B.

For optical layouts requiring the interferometer to turn the beam, the 10715A Opt. 001 must be used.

Weight:Interferometer: 594 g (1.31 lb)Reference Mirror: 3.2 g (0.1 oz)

Typical Measurement and Reference Mirror Alignment Requirements(as a function of distance):±2.5 arc-min for 152 mm (6 in)±1.3 arc-min for 305 mm (12 in)±0.7 arc-min for 508 mm (20 in)

For complete dimensions see drawing on next page.

8.1 mm

5.1 mm

EITHER BOTHREFERENCE OR

MEASUREMENTBEAMS

2 X R 3.6 mm

2 X R 3.2 mm

6.3 mm

12.7 mm

EITHER BOTHREFERENCE OR

MEASUREMENTBEAMS

18.3 mm

5.1 mm3.4 mm

9.9 mm

22.9 mm

57ϒ 23'

PART NUMBER: 10715-20205WEIGHT: 3.2 GRAMS

Reference Mirror for Keysight 10715A


10716A High-Resolution InterferometerUse: Single and multiple axis high-resolution applications such as precision X-Y stages. The Keysight 10716A high-resolution interferometer improves the system measurementaccuracy and repeatability by providing two times better measurement resolution along with the same thermal stability as the 10706B.

For optical layouts requiring the interferometer to turn the beam, the 10716A Opt. 001 must be used.

Weight: 502 g (1.11 lb)

Thermal Drift Coefficient (Change of indicated distance per °C temperature change): 0.04 μm/°C (1.6 μin/°C) typical

Typical Measurement Mirror Alignment Requirements:Depends on the distance between the interferometer and plane mirror. Typical mirror pitch/yaw angles are:±6 arc-min for 152 mm (6 in)±3 arc-min for 305 mm (12 in)±2 arc-min for 508 mm (20 in)

TO RECEIVER

FROM LASER

90.2 mm*(3.55)

12.7 mm(0.50) SYM @ CL

38.9 mm(1.53)

28.4 mm(1.12)

6-32 UNC(4 PLC’S)

THRUCLEARANCE

FOR #4 OR2.5 mm

32.0 mm(1.26)

32.0 mm(1.26)

8.1 mm(0.32)

85.9 mm(3.38)

12.7 mm(0.50)

TO MIRRORS

28.4 mm(1.12)

14.0 mm(0.55)

38.1 mm(1.50)

12.7 mm(0.50)

23.9 mm(0.94)

A B

*FOR 10715A OPTION 001 and 10716A Option 001 THIS DIMENSION IS 100.1 mm (3.94)

Keysight 10715A and 10716A


Multi-Axis Optics

Improve Positioning Accuracy for Sub-0.5-micron Lithography and Other ApplicationsKeysight offers three styles of multi-axis interferometers that make linear and angular measurements. This gives you greater control of multi-axis stages and allows better overall system accuracy.

Each style is available in two models. These six interferometers provide linear and angular measurements for up to five degrees of stage freedom (X, Y, pitch, roll, and yaw). This gives you the capability to measure and position an object with higher precision than linear measurements alone. Finer linewidths in ICs and more accurate parts can result from the additional angular measurement and control available with these interferometers.

The Keysight 10719A and 10721A perform one- and two-axis differential measurements respectively. Differential measurements provide highly accurate position information using an object such as an optical column as a position reference. This reduces system errors in those applications.

The Keysight 10737R, 10737L, 10735A, and 10736A each perform three measurements, one linear and two angular. These three measurement paths have built-in interaxis alignment to give high system accuracy. The 10737R and 10737L use a 3-mm laser beam for a compact optic package. The 10735A and 10736A can use a 9-mm laser beam to providethe widest angle range available.

Increase system accuracy and reduce costs – Maximize system accuracy. Multi-axis optics provide measurement and control of stage rotations

for improved overlay accuracy. – Maximize thermal stability. Monolithic optics and equal glass path lengths minimize errors due to

thermal drift. – Maximize mechanical stability. Monolithic optics provide tight interaxis coupling and minimize

errors due to vibration. – Minimize error due to interaxis misalignment. Optical design provides guaranteed interaxis

parallelism, no longer dependent on installation. – Lower installation costs. Referenced optics, kinematic installation, prealigned fiber-optic receiver

mounts, and no interaxis adjustments make installation easy. – Lower manufacturing costs. Multi-axis optics reduce the number of components to install. – Lower service cost. Fiber-optic receivers are mounted in a convenient location, and Keysight

multi-axis interferometers are easy to remove or install.

Keysight 10719A and 10721A

Keysight 10735A and 10736A Option 001


Multi-axis measurements allow smaller linewidths, wider fields, and higher throughputsSmall linewidths and stage motion errors due to imperfect ways generally require state-of-the-art wafer steppers to control rotational misalignment about the Z axis (Yaw). This has typically been done with two discrete interferometers that require careful alignment during installation.

Keysight now offers multi-axis interferometers that make linear and rotational measure-ments in a single compact package, conserving valuable space. The interferometers were designed for excellent built-in parallelism, providing an interaxis alignment superior to a careful alignment of discrete interferometers. This helps improve the grid accuracy needed for smaller linewidths.

Internal optics are referenced to their housings, allowing the interferometers to be kinematically located, then bolted into a precision mount without adjustment. Built-in parallelism and referenced optics save the manufacture and service time due to difficult multi-axis alignments. These features also help achieve better overlay accuracy than typically possible with discrete interferometers.

Pitch and roll measurements enhance wide field optical lithography To reduce linewidths, optical lithography systems such as i-line and deep UV are moving toward larger numerical apertures. The shallower depth of field resulting from a larger numerical aperture can require site-by-site wafer leveling about the X and Y axis (pitch and roll) to achieve focus over a wide field. Unfortunately, X-Y alignment accuracy suffers because the Abbé error, neutralized during the global alignment, changes during wafer leveling.

Keysight multi-axis interferometers can measure the pitch and roll of the multi-axis stage due to leveling and stage movement errors, making it possible to calculate and compensate for the change in Abbé error. The quick correction saves the time of performing a site-by-site alignment, thus improving throughput.

Mirror mapping improves multi-axis stage performance The yaw of a multi-axis stage is measured using a two- or three-axis interferometer located on either the X or Y axis. When yaw is measured redundantly (on both the X and Y axes), the system has the additional capability of mirror mapping. Mirror mapping allows you to measure and compensate the flatness deviations in the stage mirrors. This improves total system accuracy.

Applications – Lithography – Precision machining – Advanced metrology – R & D on multi-axis stage control – Stage travel characterization – Stage or tool alignment

Y A W

ROL LP I T C H

Multi-axis interferometric measurements of stage angles enhance the accuracy and throughput of fine-line, wide-field lithography systems.


The 10719A and 10721A allow column-referenced measurementsThe Keysight 10719A and 10721A one-axis and two-axis differential interferometers measure the linear distance between two objects, instead of the distance between the interferometer and an object. This offers a high degree of immunity to unwanted inter-ferometer displacement such as the thermal expansion between the optical column and the interferometer. Errors common to the reference and measurement path are removed because both are equally affected. This improves overlay accuracy in some lithography systems. The Abbé offset error is also decreased by using a small 3-mm beam.

Both interferometers are modular and compact, making it easier to build customized measurement systems with one to six axes.

The 10719A makes either a differential linear or angular measurement. The linear measurement gauges the displacement between two objects such as an optical column and a stage. Alternatively, the 10719A measures either pitch or roll.

The 10721A simultaneously performs two differential measurements, linear and angular (yaw) displacement. Both measurements reference an external mirror mounted to an object such as a column.

Column referencing enhances semiconductor inspectionMask and IC inspection typically require the stage to be moved linearly by small incre-ments with respect to an inspection instrument such as a microscope. This is required in order to compare a desired image with the newly created image. The 10719A was designed to make linear measurements referencing an object such as an inspection tool.

X-ray systems benefit from column referencing X-rays provide finer linewidth lithography because the wavelengths are shorter than optical wavelengths. Slight yaw misalignment reduces the capability even more in these systems than optical lithography systems, because of the finer linewidths. A method to achieve the required accuracy is to reference the multi-axis stage movement to the mask holder. The 10719A and 10721A have been optimized to perform these measurements.

Additional features that increase accuracy and decrease cost

– Monolithic optics – Guaranteed interaxis parallelism – Prealigned fiber-optic remote receiver

mounting – Referenced optics – Kinematic installation

Improve overlay accuracy with the Keysight 10719A/10721A by referencing the image-making column.

Column

Stage

10719Aor

10721A

MeasurementMirror

ReferenceMirror

Wafer Ref. BeamMeas. Beam


10719A One-Axis Differential InterferometerUse: Single- and multiple-axis applications where the stage must e linearly positioned with respect to an external object such as a column or inspection tool. Alternatively, an angle is measured when both reference and measurement beams measure to the same mirror.SpecificationsWeight: 300 g (11 oz)Axes: Linear, pitch, or rollAvailable Beam Size: 3 mmThermal Drift Coefficient (Average):150 nm (5.9 μin) /°CResolution*Linear: 0.6 nmPitch/roll: 0.03 μrad (0.007 arc-sec)Angular Range** (at 300 mm):Pitch/roll: ±0.44 mrad (±1.5 arc-min)Parallelism (Input to output beams):<0.1 mrad (20 arc-sec)

10721A Two-Axis Differential InterferometerUse: Multi-axis applications where the stage must be positioned linearly and angularly with respect to an external object such as a column or inspection tool.SpecificationsWeight: 300 g (11 oz)Axes: Linear and yawAvailable Beam Size: 3 mmThermal Drift Coefficient (Average):150 nm (5.9 μin) /°CResolution*Linear: 0.6 nmYaw: 0.05 μrad (0.01 arc-sec)Angular Range** (at 300 mm):Yaw: ±0.44 mrad (±1.5 arc-min)Parallelism (Input to output beams):<0.1 mrad (20 arc-sec)

10719A/10721A Instal-lation Requirements/RecommendationsInstallation and Alignment: Kinematic installation requires a referenced surface. See “Laser and Optics Users Manual” for complete installation procedure. Interaxis Alignment: All internal optics are referenced to mounting surface and prealigned. Receivers: Keysight 10780F fiber optic remote receivers.Receiver Alignment: Self aligning when mounted to interferometer.Measurement and Reference (Plane) Mirror Recommendations: Same as 10706A/B; see page 11.

NOTE: Flatness deviations will appear as measurement errors when the mirror is translated across the beam. The mirror mount should not bend the mirror. If accuracy requirements demand it, mirror flatness may be calibrated (scanned and stored in the system controller) to be used as a correction factor.

1. * Resolution is dependent on the electronics used. These specifications are for the 10897B electronics.

2. ** Angular range is the maximum measurement mirror angle due to all components (i.e., yaw and pitch or yaw and roll) between the measurement mirror and the interferometer for a 6-axis system. Angular range is dependent on the measurement distance. Angular range is reduced when the reference mirror is misaligned.

10721A

28.98 mm(1.141) 19.05 mm

(0.750)

9.12 mm(0.359)

Output Aperture #1 Output

Aperture #2InputAperturefor 3 mm

input beam

Fiber Opticsensor head

mounting pins

Four mounting holeson top and bottom

surfaces. (6-32)

57.15 mm(2.250)

9.12 mm(0.359)

7.16 mm(0.282)

3.18 mm(0.125)

9.53 mm(0.375)

12.70 mm(0.500)

19.86 mm(0.782)7.16 mm(0.282)

31.75 mm(1.250)

Ref

Meas

31.75 mm(1.250)

31.75 mm(1.250)

31.75 mm(1.250)

Four beams to reference mirror

Four beams to measurement mirror

12.70 mm (0.500)spacing betweenlinear measurements

19.05 mm(0.750)

60.33 mm(2.375)

38.10 mm(1.500)

Two beams to reference mirror

Two beams to measurement mirror

10719A/10721A

10719A

InputAperturefor 3 mm

input beam

31.75 mm(1.250)

12.70 mm(0.500)

12.70 mm(0.500)

OutputAperture (or Input)

Rear View Front View

10719A 10721A

NOTE:Dimensions givenin millimeters and (inches)


Three-Axis Interferometers

10737L and 10737R Compact Three-Axis InterferometersImprove positioning accuracy of precision equipment with lowercost, multi-axis laser measurements. Multi-axis measurements improve accuracy by providing greater control of multi-axis stages. Each linear and angular degree of freedom can be measured and controlled to compensate for mechanical imperfections in the stage’s motion. The Keysight 10737L and 10737R compact three-axis interferometers provide this capability in a more compact, lower-cost package than the 10735A and 10736A three-axis interfer-ometers. This allows higher accuracy from multi-axis measurements to be achieved in smaller, lower-cost equipment than was previously possible.

Each 10737L and 10737R makes three linear measurements. Two angular measurements can be calculated from this data. Two of these interferometers used together provide redundant yaw measurements, which allow mirror mapping. Mirror mapping improves accuracy by compensating for mirror flatness deviations.

The 10737L and 10737R also reduce installation time and cost. All three axes are aligned simultaneously in a process similar to alignment of the 10706B high-stability plane mirror Interferometer. Both interferometers include built-in remote pickups for 10780F Option 001 remote receivers, which simplifies installation and alignment. A simple snap connection for the fiber optic cable quickly connects the receiver to the remote pickups.

The 10737L and 10737R differ only in measurement beam direction; the 10737L turns the beam to the left and the 10737R turns the beam to the right. Both interferometers use the 3-mm beam diameter from the Keysight 5517C Option 003 Laser Head.

Improve positioning accuracy with more compact, lower-cost multi-axis measurements with the 10737L and 10737R compact three-axis interferometers.

Specifications

10737L & 10737R Specifications Comparison to 10735A & 10736A

Linear Resolution 5 nm*0.6 nm**

5 nm*0.6 nm**

Yaw Resolution 0.35 μrad (0.07 arc-sec)*0.04 μrad (0.01 arc-sec)**

0.2 μrad (0.04 arc-sec)*0.025 μrad (0.005 arc-sec)**

Pitch & Roll Resolution 0.7 μrad (0.14 arc-sec)*0.1 μrad (0.02 arc-sec)**

0.24 μrad (0.05 arc-sec)*0.03 μrad (0.006 arc-sec)**

Yaw Range††† ±0.44 mrad (±1.5 arc-min) ±1 mrad (±3.4 arc-min)†±1.5 mrad (±5.1 arc-min)††

Pitch & Roll Range††† ±0.44 mrad (±1.5 arc-min) ±1 mrad (±3.4 arc-min)†

1. * Using 5527A/B, 10885A, 10895A electronics.2. ** Using 10897B electronics.3. † Using 6-mm beam diameter.4. †† Using 9-mm beam diameter.5. ††† At a distance of 300 mm, maximum measurement mirror angle due to all components (i.e., yaw

and pitch or yaw and roll) between the measurement mirror and the interferometer. A six-axis system is assumed.


Linear Range: 10 m (33 ft) total for all three axesOperating Temperature: 0–40°C (17–23°C to ensure system non-linearity specification)Thermal Drift Coefficient: 0.1 μm/°C (40 μin/°C) typical average for each axisWeight: 490 g (18 oz)

Materials Used:Housing: stainless steel and aluminumOptics: optical grade glassAdhesives: vacuum gradeReceiver inserts: urethane foam, acetal, 15% glass fill polyester

Installation:Uses 3-mm beam available from 5517C Option 003. Requires three 10780F Option 001 Remote Receivers. Compatible with the 10710A Mount.

Measurement (Plane) Mirror Recommendations

Reflectance: 98% at 633 nm at normal incidence.Flatness: Flatness deviations will appear as measurement errors when the mirror is scanned perpendicular to the beam.Recommended range l/4 (0.16 μm or 6 μin)to l/20 (0.03 μm or 1.2 μin) dependent on accuracy requirements.

Optical Surface Quality:60–40 per Mil 0-13830.

InputAperture

22.63 mm(0.891)

38.2 mm(1.50)

17.3 mm(0.68)

64.1mm(2.53)

3.0 mm(0.12)

119 mm(4.69)

76.11 mm(3.00)

7.19 mm(0.283)

7.19 mm(0.283)

7.19 mm(0.283)

7.19 mm(0.283)

32 mm(1.26)

32 mm(1.26)

60.1 mm(2.37)

17.3 mm(0.68)

TOP VIEW

From Laser

To Plane Mirror

3x Fiber-Optic Connectorsfor 10780F Option 001 Receivers

4x drilled for clearance of 4-40 screwand tapped 6-32 UNC-2B X .250 deep4X this side and 4x far side

The Keysight 10737L. The dimensions of the 10737R are identical.


The 10735A and 10736A are three-axis optical benches in single packagesThe 10735A and 10736A three-axis interferometers put the functionality of an optical bench with multiple beam benders, beam splitters, and three interferometers in a single high-performance package. This eliminates expensive, time-consuming interaxis setup and alignment. The interferometers split an incoming laser beam into three beams to measure linear distance, pitch, and yaw; or linear distance, roll, and yaw. Custom Keysight factory fixtures and measuring equipment align and lock the parallel beams to guaranteed specifications for greater stability and accuracy than is practical with discrete components. This gives you greater overall system performance.

Multi-axis installation simplified All axes are referenced to the interferometer’s mounting surface for easy kinematic installation onto a user-supplied reference surface. This makes installation as easy as sliding the interferometer into place and bolting it down. The interferometers differ in the beam pattern they produce on the measurement mirror, providing flexibility in system design.

Three-axis interferometers provide the highest angular performance available The 10735A and 10736A provide the highest resolution, widest angular range, and most accurately aligned three-axis interferometers available off-the-shelf. The high angular resolution gives you greater control over your multi-axis stage, enabling superior grid accuracy in lithography applications. The wide angular measurement range, with a 9-mm laser beam, allows both global and site-by-site stage correction under interferometric control. This helps to achieve high positioning accuracy without degrading throughput.

Additional features that increase accuracy and decrease cost

– Wide angle range – Monolithic optics – Guaranteed interaxis parallelism – Prealigned fiber-optic remote – receiver mounting – Referenced optics – Kinematic installation

The Keysight 10735A and 10736A replace three interferometers and multiple beam benders and beam splitters with a rigid, high-performance package.


3 Axis Interferometer

10735A

3 Axis Interferometer

10736A

31.25 mm(1.23)

42.5 mm(1.67)

Axis 1 Axis 2 Axis 1 Axis 2

Axis 3

10735A 10736A

10735A

10736A

3X 13.11 mm(0.52)

21.0 mm(0.83)

26.0 mm(1.02)

Measurement Beam Patterns

105.0 mm(4.13)

179.0 mm(7.05)

203.5 mm(8.01)

88.5 mm(3.48)

5.5 mm(0.22)

11.0 mm(0.43)4X Mounting Holes

51.3 mm(2.02)

60.0 mm(2.36)

Input Aperture

Axis 3

NOTE:Dimensions given in millimeters and (inches)

1. * Resolution is dependent on the electronics used. These specifications are for the Keysight 10897B electronics.

2. ** Angular range is the maximum angle between the measurement mirror and the interferometer for a 6-axis system. Angular range is dependent on the measurement distance. Both angles (pitch and yaw or roll and yaw) can be at the angular limit concurrently.

10735A/10736A Three-Axis InterferomatersUse: Multi-axis applications where linear and angular control of the stage is required. The Keysight 10735A and 10736A provide three linear measurements. Two angular measurements can be calculated from this data. When an interferometer is placed along the X axis, yaw (q z), and pitch (q y) can be derived in addition to linear (X) displacement. When it is placed on the Y axis, yaw (q z), and roll (q x) can be derived in addition to linear (Y) displacement. Redundant yaw is useful when mapping measurement mirrors, which provides improved accuracy. The 10735A and 10736A differ in their measurement beam patterns (see drawing). Keysight 10736A Option 001 provides a beam bender for fixed compensation axis.

10735A/10736A Installation RecommendationsInstallation and Alignment: Kinematic installation procedure requires three referenced pins mounted onto a referenced surface. See “Laser and Optics Users Manual” for complete installation procedure.Interaxis Alignment: All internal optics are referenced to the mounting surface and prealigned.Receivers: Keysight 10780F Fiber Optic Remote Receivers.Receiver Alignment: Self aligning when mounted to interferometer.Measurement (Plane) MirrorRecommendations: Same as 10706A/B; see page 11.

SpecificationsWeight: 5.5 kg (12 lbs)Axes: 3 linear axes which provide linear (X), pitch, and yaw; or linear (Y), roll, and yaw. Available Beam Diameter: 3/6/9 mmThermal Drift Coefficient (Average):Axes 1 & 2: 40 nm (1.6 μin) /°CAxis 3: 100 nm (3.9 μin) /°CResolution*Linear: 0.6 nmYaw: 0.024 μrad (0.005 arc-sec)Pitch/roll: 0.03 μrad (0.006 arc-sec)Angular Range (at 300 mm displacement)**Pitch/roll: ±1 mrad (±3.4 arc-min)Yaw (for 6-mm beams): ±1 mrad(±3.4 arc-min)Yaw (for 9-mm beams): ±1.5 mrad(±5.1 arc-min)Parallelism (Measurement beams):Axes 1 & 2: <40 μrad (8 arc-sec)Axes 1 & 3: <50 μrad (11 arc-sec)


Wavelength Tracker

10717A Wavelength TrackerUse: Tracks changes in the air’s index of refraction to optically compensate for environmental changes.Weight: 1.7 kg (3.7 lb)Kinematic Mounting:Angular Adjustment Range (at nominal position):Pitch: ±1°Yaw: ±1°Translation Adjustment Range (at nominal position):Vertical: ±3 mm (0.12 in)Horizontal: ±3 mm (0.12 in)Mounting Hardware Quantity:3,10-32 UNF2A ScrewsMinimum Mounting Clearance Required:3 mm (0.12 in) around perimeter.Calibration: Not required.Interface: Measurement receiver, cable, and appropriate electronics required.

A B

LASER MOUNTING SURFACE

INPUT BEAM FROM LASER

OUTPUT BEAM TO RECEIVER

15.88 mm(0.625)

177.80 ± 0.25 mm(7.000 ± .010)

MOUNTING HOLES3 X 10-32 UNF 2A X 13 (0.5) DP

12.70 m(0.500)

32 mm(1.25)

67 mm(2.63)

CENTERLINE OF LASER BEAM

8.13 mm(0.320) MAX

260.35 mm(10.25)

30.10 ± 0.13 mm(1.185 ± .005)

39.62 mm(1.560)

79.25 mm(3.120)

30.10 ± 0.13 mm(1.185 ± .005)


Accessory Specifications

Optics mounts can make alignment faster and easier, and are available for most optics. Detailed specifications are below.

Optics Mounts

10710A Adjustable MountUse: Mount for Keysight 10700A, 10701A, 10705A, and 10707AWeight: 88.2 g (3.2 oz)Angular Adjustment Range:Yaw: ±8°Tilt: ±8°

10711A Adjustable MountUse: Mount for Keysight 10702A, 10706A/B,10715A, and 10716AWeight: 141.1 g (5 oz)Angular Adjustment:Yaw: ±5°Tilt: ±5 °

10722A Plane Mirror ConverterUse: With an additional 10703A, the 10722A can be used to convert a 10702A linear interferometer into a 10706A plane mirror interferometer. With an additional 10723A, the 10722A can be used to convert a 10702A into a 10706B.Weight: 35.5 g (1.3 oz)

10723A High-Stability AdapterUse: If you already use the 10706A, you can easily convert it to a 10706B with the 10723A high-stability adapter. With the 10723A you can obtain the much higher thermal stability of the 10706B at nominal cost and effort.Weight: 49 g (1.7 oz)

10710A

10711A

10722A

10723A

#4-40 THRU

4 PLC’S

CLEARANCE FOR #4 SCREW (3 mm)

41.66 mm(1.64)

47.0 mm(1.85)

19.6 mm(0.77)

CLEARANCE FOR #4-40 CAP SCREW

OPPOSITE SIDE

19.56 mm(0.77)

12.7 mm DIATHRU(0.50)

YAW

32.0 mm(1.26)

59.7 mm(2.35)

64.77 mm(2.55)

32.0 mm(1.26)

CLEARANCE FOR #4-40 CAP SCREW

2 PLC’S

38.1 mm(1.50)

CLEARANCE FOR#4 SCREW

(2.5 mm SCREW)

33.27 mm(1.31)

25.4 mm DIATHRU(1.00)

#4-40THRU

4 PLC’S

YAW

TILT

31.75 mm(1.25) 12.7 mm

(0.50)

25.4 mm(1.00)

12.7 mm(0.50)

BEAM SPACING

10702A10706A/B

10715A10716A

27.9 mm(1.10)

12.7 mm(0.50)

25.4 mm (1.00)

BEAM CENTER LINE

10700A10701A10705A10707A

TILT

10710A 10711A


Receiver Specifications

Two different measurement receivers are available to give you design flexibility and maximum system performance. One receiver is required for each measurement axis (including wavelength tracker). The Keysight 10780C affords the highest sensitivity and lowest cost. The 10780F provides slightly less sensitivity, but can improve system performance by enabling you to mount heat-dissipating receiver electronics away from the measurement area. Hence, higher measurement stability and the resulting accuracy and repeatability are obtained. The fiber optic cable used to attach the remote sensor to the receiver electronics allows design flexibility and easier access to the receiver gain adjustment.

PhotodetectorInsulating

Mounting Pads

Beam Diameter6 mm(0.24)

107.8 mm(4.25)

114.8 mm(4.52)

76.0 mm(3.0)

38.1 mm(1.50)

11.4 mm(0.45)

15.2 mm(0.60)

9.9 mm(0.39)

7.6 mm(0.30)

12.7 mm(0.50)

2.3 mm(0.09 TYP)

Clearance holefor M3 (6-32) Screw

(2 PLC)Use Only Nylon Mounting Screw2360-0369 to Avoid Ground Loop

Beam Spacing

LED

1.8 mm (0.070)Gain Adjustment

54.7 mm(2.15)

24.0 mm (0.945)

Keysight 10780C Receiver


10780C Receiver and 10780F Remote Receiver SpecificationsTypical Power Requirements:+15 volts at 136 mAMaximum Sensitivity:1.5 μW (10780C)2.2 μW (10780F with 2-m cable)(10780F becomes 5.0 μW with a 10-m fiber cable.)Heat Dissipation:0.0 W for remote sensor2.0 W typical for receiverOutput Signal:Differential square wave at Doppler-shifted split frequency (100 kHz to 7.2 MHz).Fiber Optic Cable Length (10780F):2 m standard10 m maximum recommendedAlignment Tolerances:Roll: ±3 degreesPitch: ±1 degreeYaw: ±1 degree(10780F is self aligning when mounted to the 10715A, 10716A, 10717A, 10719A, 10721A, 10735A, and 10736A.)Weight:136 g (4.8 oz) for 10780C126 g (4.5 oz) for 10780F26 g (0.9 oz) for remote sensor with 2-m cable

114.8 mm(4.52)

7.6 mm(0.30)

76 mm(3.0)

R35 mm Minimum(1.4) Bend Radius

43.1 mm(1.70)

22.4 mm(0.88)

15.5 mm(0.61)

3.5 mm(0.14)

19.1 mm(0.75)

23.8 mm(0.94)

107.8 mm(4.25)

19.1 mm(0.75)38.1 mm

(1.50)

6.0 mm(0.24)

7.6 mm(0.30) 9.9 mm

(0.39)

7.6 mm(0.30)

Clearance hole for M3 (6-32) Screw (2 PLC)

Clearance hole for M3 (6-32) Screw (2 PLC)

BeamDiameter

BeamSpacing

Photodetector

12.7mm(0.50)

1.8 mm (0.070)

24.0 mm (0.945)54.7 mm

(2.15)

LED

Keysight 10780F Remote Receiver


0ptics and Laser Head Configuration Guide

Use this configuration guide to design your Keysight laser interferometer positioning system. Generally you will first refer to the appropriate electronics data sheet and choose the electronics accordingly. Then you select your laser head based on size and axis velocity requirements. Next, sketch your optical configuration. From this layout, determine your optics needs.

Component Needs Comments

Laser Head One required per system5517A Laser Head, lowest velocity, largest size5517B Laser Head, 25% more velocity, small size5517C Laser Head, 75% more velocity, small size Opt. 003 3-mm beam diameter for use with 10719A and 10721A Opt. 009 9-mm beam diameter5517D Laser Head, highest velocity, small size5501B Laser Head, lowest velocity, small size, interface same as 5501A

Factory Calibration to MIL-STD 45662 is available at extra cost, and may be specified in the order.

Directing Optics Order as required to manipulate beam path to your configuration

10700A 33% Beam Splitter10701A 50% Beam Splitter10707A Beam Bender10567A Dual Beam Splitter—useful in vacuum10725A 9-mm Laser Beam Splitter10726A 9-mm Laser Beam Bender10728A 9-mm Laser Beam Plane Mirror

Measurement Optics 1 interferometer-plus-reflector pair required per axis10702A Linear Interferometer Opt. 001 Windows—required if interferometer is the moving component10703A Reflector—paired with 10702A10704A Reflector—paired with 10705A10705A Single Beam Interferometer10706B High-Stability Plane Mirror Interferometer10713B 1-inch Cube Corner10713C 1/2-inch Cube Corner10713D 1/4-inch Cube Corner10715A Differential Interferometer Opt. 001 Turned Configuration10716A High-Resolution Interferometer Opt. 001 Turned Configuration10724A Plane Mirror Reflector10719A One-Axis Differential Interferometer, requires 3-mm beam10721A Two-Axis Differential Interferometer, requires 3-mm beam10735A Three-Axis Interferometer10736A Three-Axis Interferometer Opt. 001 Adds beam bender10737L Compact Three-Axis Interferometer (Left)10737R Compact Three-Axis Interferometer (Right)


Measurement Optics Summary

10702A 10705A 10706B 10715A 10716A

Application General Purpose Low-Mass, Limited Space

Plane Mirror High-Accuracy Plane Mirror

High-ResolutionPlane Mirror

Optics Resolution l/2 (316.5 nm) l /2 (316.5 nm) l/4 (158.25 nm) l/4 (158.25 nm) l/8 (79 nm)

System Resolution* l /64 (10 nm) l/64 (10 nm) l /128 (5 nm) l /128 (5 nm) l/256 (2.5 nm)

Beam Separation 12.7 mm (1/2 in)

n/asingle beam

12.7 mm(1/2 in)

12.7 mm(1/2 in)

12.7 mm (1/2 in)

Reflector 10703A 10704A 10724A 10724A 10724A

Reflector Weight 42 g(1.5 oz)

10.5 g(0.4 oz)

50 g(1.8 oz)

50g(1.8 oz)

50g(1.8 oz) 10711A

Mount Used 10711A 10710A 10711A 10711A 10711A

10717A 10719A 10721A 10735A 10736A

Application Wavelength of Light Compensation

One-Axis Differential Measurements (Plane Mirror)

Two-Axis Differential Measurements (Plane Mirror)

Three-Axis Measurements (distance, pitch, yaw) (Plane Mirror)

Three-Axis Measurements (distance, pitch, yaw) (Plane Mirror)

Optics ResolutionLinear l/4 (158.25 nm) l/4 (158.25 nm) l/4 (158.25 nm) l /4 (158.25 nm) l /4 (158.25 nm)

System Resolution*LinearPitch

Yaw

l/128 (5 nm) l/128 (5 nm) 0.26 μrad

(0.054 arc-sec)

l/128 (5 nm) 0.4 μrad

(0.08 arc-sec)N/A

l/128 (5 nm)0.24 μrad

(0.05 arc-sec)0.2 μrad

(0.04 arc-sec)

l /128 (5 nm)0.24 μrad

(0.05 arc-sec)0.2 μrad

(0.04 arc-sec)

Beam Separation N/A see drawing see drawing see drawing see drawing

Reflector Integral Custom Custom Custom Custom

Reflector Weight N/A Custom Custom Custom Custom

Mount Used Integral Custom Custom Custom Custom

1. * When used with the Keysight 5527B Laser Positioning Transducer System, 10885A PC Axis Board, or 10895A Laser Axis Board for VMEbus.2. System resolution is improved by a factor of 2 when using the Keysight 10889B PC Servo Axis Card. The 10897B improves system resolution by a factor of 8.

Specifications throughout this document describe warranted performance. Supplemental characteristics (indicated by TYPICAL or AVERAGE) are intended to provide nonwarranted performance information useful in general application.


Example Configurations

Example 1—Single-Axis Sys-tem for Servo-Track Writing1 - 5517B/C Laser Head1 - 10705A Single Beam Interferometer1 - 10704A Reflector (or use bare

corner cube)1 - 10780C/F Receiver1 - 10710A Optics Mount

Example 2—Multi-Axis System for a Coordinate Measuring Machine1 - 5517B Laser Head3 - 10702A Linear Interferometer3 - 10703A Retroreflector2 - 10700A 33% Beamsplitter1 - 10701A 50% Beamsplitter3 - 10707A Beam Bender1 - 10717A Wavelength Tracker4 - 10780C/F Receiver6 - 10710A Adjustable Mount3 - 10711A Adjustable Mount

5517A/B

10705A

10780C/F

10704A

10703A

10703A

10702A10780C/F

10702A

10707A

10707A

10701A10780C/F

10780C/F

10717A

10703A

10707A

10700A

10700A10780C/F

10702A

10707A

5517B

Z

X

Y


Example 3—Multi-Axis System for a Precision X-Y Stage1 - 5517C Laser Head3 - 10701A 50% Beam Splitter3 - 10706B High-Stability Plane Mirror

Interferometer1 - 10707A Beam Bender1 - 10717A Wavelength Tracker4 - 10780C/F Remote Receiver4 - 10710A Optics Mount3 - 10711A Optics Mount

10706BX-axis

10780C/F

10717A

10701A

10780C/F

10707A

5517C

10701A

10780C/F

Y-yaw

10701A

Y-axis

10780C/F

10706B10706B

Yaw

Multi-Axis System for a Precision X-Y Stage as Used in IC Fabrication


5517C Opt. 009

10736A

To Fiber Optic Receivers

Multi-AxisStage

10725A

To Fiber Optic Receivers

10726A

Example 4—Three-Axis X-Y Stage Laser Positioning Sys-tem with Column Referencing1 - 5517C Opt. 003 3-mm Laser Head1 - 10701A 50% Beam Splitter1 - 10707A Beam Splitter1 - 10719A One-Axis Differential

Interferometer1 - 10721A Two-Axis Differential

Interferometer3 - 10780F Remote Receiver3 - 10710A Adjustable Mount

Example 5—Five-Axis X-Y Stage Laser Positioning System1 - 5517C Opt. 009 9-mm Laser Head1 - 10725A 9-mm Laser Beam Splitter2 - 10726A 9-mm Laser Beam Bender2 - 10736A Three-Axis Interferometer6 - 10780F Remote Receiver

5517C Opt. 003

10707A

To 10780FRemote Receiver

Multi-AxisStage

10719A

10701A

10707A

To 10780F Remote

Receivers

Column

10721A



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This information is subject to change without notice.© Keysight Technologies, 2017Published in USA, December 1, 20175964-6190Ewww.keysight.com

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www.keysight.com/go/qualityKeysight Technologies, Inc.DEKRA Certified ISO 9001:2015Quality Management System

Evolving Since 1939Our unique combination of hardware, software, services, and people can help you reach your next breakthrough. We are unlocking the future of technology. From Hewlett-Packard to Agilent to Keysight.

myKeysightwww.keysight.com/find/mykeysightA personalized view into the information most relevant to you.

http://www.keysight.com/find/emt_product_registrationRegister your products to get up-to-date product information and find warranty information.

Keysight Serviceswww.keysight.com/find/serviceKeysight Services can help from acquisition to renewal across your instrument’s lifecycle. Our comprehensive service offerings—one-stop calibration, repair, asset management, technology refresh, consulting, training and more—helps you improve product quality and lower costs.

Keysight Assurance Planswww.keysight.com/find/AssurancePlansUp to ten years of protection and no budgetary surprises to ensure your instruments are operating to specification, so you can rely on accurate measurements.

Keysight Channel Partnerswww.keysight.com/find/channelpartnersGet the best of both worlds: Keysight’s measurement expertise and product breadth, combined with channel partner convenience.

www.keysight.com

http://www.keysight.com/find/contactus

http://www.keysight.com/find/contactus

http://www.keysight.com/go/quality

http://www.keysight.com/find/mykeysight

http://www.keysight.com/find/emt_product_registration

http://www.keysight.com/find/service

http://www.keysight.com/find/AssurancePlans

http://www.keysight.com/find/channelpartners

Keysight Technologies Optics and Laser Heads for Laser ...€¦ · 01/12/2017 · Choosing a backplane based on the other system electronics you want to use or the outputs you need,

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