Key Idea For elastically isotropic thi n film Strain Biaxial Elastic Modulus 2 0 ) ( 1 A E 2 0 ) ( A 1 E Evaluation of Elastic Property of Thin Films by MEMS Evaluation of Elastic Property of Thin Films by MEMS 100 200 300 400 500 600 0 50 100 150 200 B ridg e M ethod F re e h a n g M e tho d E /(1- )(G Pa) N e g a tive B ia s V o lta ge (V ) 0.0 0.2 0.4 0.6 0.8 1.0 25 50 75 1 00 on S i on W on S iO 2 BiaxialElastic M odulus (G Pa) T h ickn ess( m) Free- hang Bridge Results
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Key Idea For elastically isotropic thin film Strain Biaxial Elastic Modulus Evaluation of Elastic Property of Thin Films by MEMS Free-hang Bridge Results.
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Key Idea
For elastically isotropic thin film
Strain
Biaxial Elastic Modulus
2
0
)(1 A
E
20 )(A
1
E
Evaluation of Elastic Property of Thin Films by MEMSEvaluation of Elastic Property of Thin Films by MEMS
100 200 300 400 500 600
0
50
100
150
200
Bridge Method
Freehang Method
E/(
1-)
(G
Pa)
Negative Bias Voltage (V)
0.0 0.2 0.4 0.6 0.8 1.0
25
50
75
100
on Si on W on SiO
2
Biax
ial E
last
ic M
odul
us (G
Pa)
Thickness(m)
Free-hang
Bridge
Results
T : Elastic energy
U : Bending strain energy
Δγ : Surface energy
=(- fs+ fv+ sv)
fsT
svfvU
22
2)1(3
B
B
B
ut
tE
BB UT Buckling under Residual Compressive Stress & Energy Balance
Fundamental Adhesion Energy Fundamental Adhesion Energy MeasurementMeasurement
0.22 0.24 0.26 0.28 0.30 0.32 0.34 0.36-10
-5
0
5
10
15
20
25
30
(J
/m2 )
Thickness(m)100 200 300 400 500 600 700
-5
0
5
10
15
20
25
30
(J
/m2 )
Negative Bias Votage(V)
Results
Mirror
Mirror
Mirror
He-Ne laser
PSD
Beam Splitter
Chamber
• Step-
•Motor
•5Interface
System He-Ne laser : 632.8nm
Step-motor : 1 rpm
Lens FL : 500mm
PSD : S1300 (13×13mm)
In-situ stress measurement with temperature variation
i.e. Stress relaxation mechanism.
In-situ stress measurement under various environments