Oral Presentaons 8:00 – 9:00 Breakfast Discussion Forum 1. Latest developments in spuering - methods, feedback control, and cathodes 2. Advancement in HIPIMS Session 4 9:10 Potenals of cyber-physical producon systems in surface technologies (special topic) S. Thiede 9:40 High-performance thermochromic VO 2 -based coangs prepared on glass by a low-temperature (330 °C) scalable technique J. Vlček, D. Kolenatý, T. Bárta, J. Rezek, J. Houška, S. Haviar 10:00 Process stability invesgaon ulizing bipolar HIPIMS for deposion of SiO x coangs A. W. Oniszczuk, P. Różański, P. Lesiuk 10:20 High deposion rate films prepared by reacve HIPIMS P. Mareš, M. Dubau, A. Marek, J. Vyskočil, J Čapek, T. Kozák 10:40 DSMC simulaons of spuered parcle flux and gas rarefacon in DC and HIPIMS magnetron spuering P. Zikán, A. Obrusník, J. Hnilica, N. Britun, P. Jelínek, P. Vašina Coffeebreak Session 5 11:20 Mulfunconal Thin Film Sensorsystem for industrial Applicaons S. Biehl 11:40 Roll-to-Roll Gas Flow Spuer Deposited Copper Chun-Ming Chen, Sz-Ying Chen, Ying-Hung Chen, Ping- Yen Hsieh, Tsung-Han Chen, Kuo-Bing Cheng, Ju-Liang He 12:00 Opons to Tailor Thin Film Properes by Ion Beam Spuer Deposion C. Bundesmann, T. Amelal, R. Feder, D. Spemann 12:20 Super thin CrN coangs with high emissivity on barium fluoride to invesgate heat flux of bubble formaon A. Marn, H. Scheerer, T. Engler, M. Oechsner 12:40 Comparison of Langmuir probe and laser Thomson scaering for plasma density and electron temperaturemeasurements in HIPIMS plasma P. J. Ryan, J. W. Bradley, M. D. Bowden 13:00 Closing remarks Lunch and end of conference Organisaon: Setup starts on Tuesday 18 th June 2019 from 3 p.m. to 5 p.m. | Dismantling starts on Thursday 20 th June 2019 from 2 p.m. (aſter lunch) Information for Exhibitors Earliest date for arrivals of your exhibion material: 14 th June 2019, keyword »HIPIMS 2019« Time and contact informaon for delivery of exhibion material: Stadthalle Braunschweig | Leonhardplatz | 38102 Braunschweig | Germany ST-Conference and 10 th Internaonal Conference of HIPIMS | Braunschweig 2019 | Conference Program Thursday, 20 th June CONFERENCE PROGRAM 19 th – 20 th JUNE 2019 BRAUNSCHWEIG »STADTHALLE BRAUNSCHWEIG« | DE 10 TH International Conference on Fundametals and Industrial Applications of HIPIMS 2019, incl. international conference on sputter technology Society of Vacuum Coaters Sponsors & Conference Supporng Organisaons: st-conference.eu scienfic partner Local organiser: Network of Competence INPLAS e. V. | Bienroder Weg 54E | 38108 Braunschweig | www.inplas.de MORE INFORMATION: ST-CONFERENCE.EU
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JUNE 2019 · 2019. 10. 9. · A.W. Oniszczuk, P. Różański, P. Lesiuk 10:20 High deposition rate films prepared by reactive HIPIMS P. Mareš, M. Dubau, A. Marek, J. Vyskočil, J
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Oral Presentations
8:00 – 9:00 Breakfast Discussion Forum 1. Latest developments in sputtering - methods, feedback control, and cathodes 2. Advancement in HIPIMS
Session 4
9:10 Potentialsofcyber-physicalproductionsystemsin surfacetechnologies(special topic) S. Thiede
9:40 High-performancethermochromicVO2-based coatingspreparedonglassbyalow-temperature (330°C)scalabletechnique J. Vlček, D. Kolenatý, T. Bárta, J. Rezek, J. Houška, S. Haviar
10:00 Processstabilityinvestigationutilizingbipolar HIPIMSfordepositionofSiOx coatings A.W. Oniszczuk, P. Różański, P. Lesiuk
10:20 Highdepositionratefilmspreparedbyreactive HIPIMS P. Mareš, M. Dubau, A. Marek, J. Vyskočil, J Čapek, T. Kozák
10:40 DSMCsimulationsofsputteredparticlefluxandgas rarefactioninDCandHIPIMSmagnetron sputtering P. Zikán, A. Obrusník, J. Hnilica, N. Britun, P. Jelínek, P. Vašina
Coffeebreak
Session 5
11:20 MultifunctionalThinFilmSensorsystemforindustrial Applications S. Biehl
11:40 Roll-to-RollGasFlowSputterDepositedCopper Chun-Ming Chen, Sz-Ying Chen, Ying-Hung Chen, Ping- Yen Hsieh, Tsung-Han Chen, Kuo-Bing Cheng, Ju-Liang He
12:00 OptionstoTailorThinFilmPropertiesbyIonBeamSputterDeposition C. Bundesmann, T. Amelal, R. Feder, D. Spemann
12:20 SuperthinCrNcoatingswithhighemissivityon bariumfluoridetoinvestigateheatfluxofbubble formation A. Martin, H. Scheerer, T. Engler, M. Oechsner
12:40 ComparisonofLangmuirprobeandlaserThomson scatteringforplasmadensityandelectrontemperaturemeasurementsinHIPIMSplasma P. J. Ryan, J. W. Bradley, M. D. Bowden
13:00 Closingremarks
Lunchandendofconference
Organisation:Setup starts on Tuesday 18th June 2019 from 3 p.m. to 5 p.m. | Dismantling starts on Thursday 20th June 2019 from 2 p.m. (after lunch)
Information for Exhibitors
Earliest date for arrivals of your exhibition material: 14th June 2019, keyword»HIPIMS 2019«
11:00 Tribologicalpropertiesoflowpressureplasma nitridedCoCrMoalloyusingHIPIMSdischarge K. Shukla, A.A. Sugumaran, I. Khan, A. P. Ehiasarian, P. Eh Hovespian
11:20 T3orT5:Tungstenbasedconductivecoatings forPEMWEbipolarplates L. Mendizabal 11:40HIPIMSwithpositivevoltagereversal:amethodfor influencingthecoatingpropertiesoninsulating substrates A. Wennberg, I. Fernández
12:00 Conference Photograph
Lunchbreak
SESSION 3
13:00 Combinedcontrolofionizationandstoichiometryin reactivehighlyionizedprocessesforproductionlines T. Schütte, P. Neiß
13:20 Emergingpowersupplytechnologiesfacilitate enhancementsofmagnetronsputteringfor demandingcomplexthinfilms G. Eichenhofer, G. Moser, M. Schweiger, M. Banghard, H. Steins
13:40 AdvancedHIPIMScoatingsthroughKickpulsetechnology J. Hrebik
14:00 Anovelindustrialcoatingsystemforthedeposition ofsmoothhardcoatingscombiningHIPIMSV+and rotatablemagnetrons H. Gabriel, I. Fernandez, J.A. Santiago, A. Wennberg
14:20 HIPIMSbringsdownstress C. Schiffers
14:40 HIPIMS/UBMPVDcoatingequipmentdesigned tocoatuniversalsizedbroaches W.- D. Münz, R. Klink, D. Aleksic
9:00 Onthreedifferentwaystoquantifythedegreeof ionizationinsputteringmagnetrons D. Lundin, A. Butler, N. Brenning, M. A. Raadu, J. T. Gudmundsson, T. Minea
9:20 HIPIMSmagnetizedplasmaafterglowdiagnostic M. Ganciu, B. Butoi, A. Groza, B. Mihalcea
9:40 StudyofMolybdenumPlasmabyHIPIMS D.A. Loch, Arutiun P. Ehiasarian
10:00 DesignofExperimentmethodsasaneffectivetool inindustrialimplementationofHIPIMStechnology W. Gajewski, R. Mroczyński, M. Betiuk, M. Puźniak, P. Domanowski, P. Różański, M. Żelechowski
Coffeebreak
SESSION 2
10:40 Influenceofhighvoltagedischargeontheplasma nitridedzone C. Kipp, P. Kaestner, G. Bräuer
15:00 Guided Postersession1 Slide per poster, max. time for poster introduction: 1 min
P 1 Spatialandtemporalmeasurementsofplasma parametersinabipolarHiPIMsdischarge F. Walk, R. Valizadeh, J.W. Bradley
P2Ontheeffectofstationarymagneticfieldonspatial distributionofdepositionrateandionizedfluxfractionintheHIPIMSdischarge H. Hajihoseini, J. T. Gudmundsson
P3 OverstoichiometricTMNx>1transitionmetalnitrides Z. Čiperová, J. Musil, Š. Kos, M. Jaroš
P 4 PhotocatalyticTa-O-Nfilmspreparedbyreactive HIPIMS Š. Batková, J. Čapek, S. Haviar, J. Houška, R. Čerstvý, M. Krbal, T. Duchoň P5Time-resolvedLangmuirprobediagnosticscarriedoutduringthepositivevoltagepulsesinbipolarHIPIMSdischarges A.D. Pajdarová, T. Kozák, J. Čapek, P. Mareš, M. Čada, Z. Hubička
P6YmOnandYttriumdopedZnOthinfilmsand multilayers H. Arslan, A. Azens, M. Zubkins, J. Purans
P 7 Cryogenicdepositionofthinfilmsbyreactive magnetronsputtering M. Zubkins, J. Gabrusenoks, G. Cikvaidze, L. Bikse, J. Purans
P 8 Design,preparationandinvestigationoftunable metal-dielectriccoatingsforplasmonicapplications A. Belosludtsev, D. Buinovskis, N. Kyžas
P9MovementofsputteredparticlesinthetargetregionofHIPIMSpositedbyhighpowerimpulsemagnetronsputtering J. Held, W. Breilmann, A. von Keudell, V. Schulz-von der Gathen
P10Growthofnanostructuredω-PhaseTitaniumfilms depositedbybiasedHIPIMS D. Dellasega, F. Mirania, D. Vavassoria, C. Contib, M. Beghia, M. Passonia
P11 Effectofmagnetronsputteringdeposition parametersontoelectricalandopticalpropertiesof HfOxNythinfilms M. Puźniak, R. Mroczyński, W. Gajewski, P. Różański, M. Żelechowski
P12Onionizationfractionofsputteredspecies K. Bernátová, M. Fekete, P. Klein, J. Hnilica, P. Vašina
P13Spatialdistributionoftheplasmapotentialfor differentmagnetronmagneticconfigurationsinHIPIMSwithpositivepulses. I. Fernandez-Martinez, V. Bellido
P14PlasmaEmissionmonitorforcontrollingtheionto neutralratioandstoichiometryofHIPIMSprocesses H.Gerdes, J. Rieke, R. Bandorf, T. Schütte, M. Vergöhl, G. Bräuer
P15 GasFlowSputteringofAlNxThinFilmsasaHighTemperatureStrainGauge J. Rivera
P 16 SurfaceprocessesofenergeticmetalionsonHIPIMS targetmaterialsanalysedbyionbeamsputtering R. Buschhaus, M. Budde, A. von Keudell
VENUE:FraunhoferInstituteIST|Sem.2|BienroderWeg54E|38108Braunschweig|DEMonday 17th June 2019 (full day) SVCC-310ISputtering | Dr. Ralf Bandorf, Fraunhofer IST, Germany
Tuesday 18th June 2019 (½ day morning) SVCC-338IApplicationofReactiveSputtering |Dr. Ralf Bandorf, Holger Gerdes, Fraunhofer IST, Germany
Tuesday 18th June (½ day afternoon) SVCC-333IHIPIMSApplications|Prof. Arutiun P. Ehiasarian,Sheffield Hallam University, UK I Dr. Ralf Bandorf, Fraunhofer IST, Germany
18:00 Networking Event with
Awards Ceremony
Meeting point at 18:00 (6 pm):
Rafting station on the Oker, PORT 1, Kurt-Schumacher-Straße 25,