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Effect of Mg doping in the barrier of Effect of Mg doping in the barrier of InGaN/GaN multiple quantum well on InGaN/GaN multiple quantum well on optical power of light-emitting diodes optical power of light-emitting diodes Sang-Heon Han, Chu-Young Cho, Sang-Jun Lee, Tae-Young Park, Tae-Hun Kim, Seung Hyun Park, Sang Won Kang, Je Won Kim, Yong Chun Kim, and Seong-Ju Park APPLIED PHYSICS LETTERS 96, 051113 , 2010 J.K. Lee
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J.K. Lee

Dec 31, 2015

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Effect of Mg doping in the barrier of InGaN/GaN multiple quantum well on optical power of light-emitting diodes. Sang-Heon Han, Chu-Young Cho, Sang-Jun Lee, Tae-Young Park, Tae-Hun Kim, Seung Hyun Park, Sang Won Kang, Je Won Kim, Yong Chun Kim, and Seong-Ju Park - PowerPoint PPT Presentation
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Page 1: J.K. Lee

Effect of Mg doping in the barrier of Effect of Mg doping in the barrier of InGaN/GaN multiple quantum well on optical InGaN/GaN multiple quantum well on optical power of light-emitting diodespower of light-emitting diodes

Sang-Heon Han, Chu-Young Cho, Sang-Jun Lee, Tae-Young Park, Tae-Hun Kim, Seung Hyun Park, Sang Won Kang, Je Won Kim, Yong Chun Kim, and Seong-Ju Park

APPLIED PHYSICS LETTERS 96, 051113 , 2010

J.K. Lee

Page 2: J.K. Lee

OutlineOutline

Introduction

Experiment

Results and discussion

Conclusion

Page 3: J.K. Lee

IntroductionIntroduction

Mg doping in the barriers of MQW enhances photoluminescence intensity, thermal stability, and internal quantum efficiency of LED.

The improvement in output power is attributed to the enhanced hole injection to well layers in MQW with Mg-doped barriers.

Page 4: J.K. Lee

Chip Size : 300*300 μm2

Sapphire

buffer

N-GaN 2μm

MQW 5 period

N

Ti/Au

P-GaN 200 nm

P-AlGaN 20 nm

ITO

P

Ti/Al

ExperimentExperiment

3nm InGaN Well 750℃

8nm GaN Barrier 800℃

A

u-GaN / Mg-doped GaN / u-GaN

B

2 nm / 4 nm / 2 nm

Mg-doped GaN concentration 4.94*1016/cm3

u-GaN concentration 5.02*1018/cm3

Page 5: J.K. Lee

ExperimentExperiment

Mg doped GaN

N-GaN P-AlGaN

Un doped GaN Un doped GaN

Page 6: J.K. Lee

Results and discussionResults and discussion

FIG. 1. (Color online) (a) Room temperature PL spectra of LED A and LED B (inset: high resolution x-ray diffraction -2 scans for the GaN 0002 reflection of LED A and LED B).

Page 7: J.K. Lee

Results and discussionResults and discussion

FIG. 1. (b) PL spectra of LED A before and after RTA, (c) PL spectra of LED B before and after RTA.

15%25%

63%

Page 8: J.K. Lee

Results and discussionResults and discussion

FIG. 2. Color online Integrated PL intensities as a function of 1/T for LED A and LED B.

Page 9: J.K. Lee

Results and discussionResults and discussion

FIG. 3. Color online AFM images of surface morphologies of a LED A and b LED B.

3.8*108/cm2 2.96*108/cm2

9.62 Å 6.98 Å22%22%

Page 10: J.K. Lee

Results and discussionResults and discussion

FIG. 4. Color online a I-V curve of LED A and LED B, b light output power of LED A and LED B as a function of current.

3.54V3.63V

Page 11: J.K. Lee

Results and discussionResults and discussion

FIG. 5. Color online Energy band diagrams of well and barrier layer of LED A and LED B at 4 V, a valence band and b conduction band. Carrier concentration throughout MQW at 4 V, c LED A and d LED B.

Page 12: J.K. Lee

ConclusionConclusion

We investigated the effect of Mg doping in the barrier layers of MQW of InGaN/GaN LED.

PL measurements showed that thermal stability was improved and IQE was increased for LED with Mg-doped MQW barriers.

The reduced defect density and RMS roughness of MQWs were also confirmed by AFM images.

Page 13: J.K. Lee

Influence of Mg Doping on the Morphological, Influence of Mg Doping on the Morphological, Optical, and Structural Properties of Optical, and Structural Properties of InGaN/GaN Multiple Quantum WellsInGaN/GaN Multiple Quantum Wells

Z. CHEN, N. FICHTENBAUM, D. BROWN, S. KELLER, U.K. MISHRA, S.P. DENBAARS, and S. NAKAMURA

Journal of ELECTRONIC MATERIALS, Vol. 37, No. 5, 2008

Page 14: J.K. Lee

OutlineOutline

Introduction

Experiment

Results and discussion

Conclusion

References

Page 15: J.K. Lee

IntroductionIntroduction

The V-defect density was observed to decrease with increasing magnesium doping concentration from 109 cm-2 (no doping) to 106 cm-2 (Cp2Mg: 0.04 sccm) and further to 0 (Cp2 Mg: 0.2 sccm).

These results suggest that magnesium doping in MQWs might improve the optical properties of GaN photonic devices.

Page 16: J.K. Lee

Chip Size : 300*300 μm2

Sapphire

Buffer 25nm

N-GaN 2μm

MQW 5 period

N

Ti/Au

P-GaN 200 nm

P-AlGaN 20 nm

ITO

P

Ti/Al

ExperimentExperiment

Barrier 3 nm

Well 10 nm

Cp2Mg doping precursor flow was from 0 sccm to 0.04 sccm and 0.2sccm.

Page 17: J.K. Lee

Results and discussionResults and discussion

Fig. 1. 5 lm * 5 lm AFM images of InGaN/GaN MQW at different Mg doping levels: (a) 0 sccm, (b) 0.04 sccm, and (c) 0.2 sccm. The height scale is 10 nm for all samples.

0 sccm 0.04 sccm

0.2 sccm

1*109/cm-2 4*106/cm-2

Page 18: J.K. Lee

Results and discussionResults and discussion

Fig. 2. 1 lm * 1 lm AFM images of InGaN/GaN MQW at different Mg doping levels: (a) 0 sccm, (b) 0.04 sccm, and (c) 0.2 sccm. The height scale is 10 nm for all samples.

0 sccm 0.04 sccm

0.2 sccm

Page 19: J.K. Lee

Results and discussionResults and discussion

Fig. 3. PL spectra of InGaN/GaN MQW at different Mg doping levels.

Page 20: J.K. Lee

ConclusionConclusion

The AFM measurements indicated that Mg doping improved the surface morphology of the MQWs and enhanced twodimensional growth.

The density of the V-defects was observed to decrease from 109 cm-2 (undoped) to 106 cm-2 and further to zero with increasing Mg doping concentration.

Page 21: J.K. Lee

ReferencesReferences

1. Sang-Heon Han, Chu-Young Cho, Sang-Jun Lee, Tae-Young Park, Tae-Hun Kim, Seung Hyun Park, Sang Won Kang, Je Won Kim, Yong Chun Kim, and Seong-Ju Park ,” Effect of Mg doping in the barrier of InGaN/GaN multiple quantum well on optical power of light-emitting diodes ” , APPLIED PHYSICS LETTERS 96, 051113 , 2010.

2. Z. Chen, N. Fichtenbaum, D. Brown, S. Keller, U.K. Mishra, S.P. Denbaars, and S. Nakamura ,” Influence of Mg Doping on the Morphological, Optical, and Structural Properties of InGaN/GaN Multiple Quantum Wells ” , Journal of ELECTRONIC MATERIALS, Vol. 37, No. 5, 2008.