ITRS 2009 1 Metrology Roadmap Metrology Roadmap 2010 2010 Europe Europe Adrian Kiermasz (Metryx) Adrian Kiermasz (Metryx) Carlos Beitia ( Carlos Beitia ( CEA LETI MINATEC CEA LETI MINATEC ) ) Philippe Maillot (ST) Philippe Maillot (ST) Delphine Le Cunff (ST) Delphine Le Cunff (ST) Japan Japan Yuichiro Yamazaki (Toshiba) Yuichiro Yamazaki (Toshiba) Masahiko Ikeno (Hitachi High-Tech) Masahiko Ikeno (Hitachi High-Tech) Korea Korea Taiwan Taiwan North America North America Yaw Obeng (NIST) Yaw Obeng (NIST) George Orji (NIST) George Orji (NIST) Jack Martinez (NIST) Jack Martinez (NIST) Dave Seiler (NIST) Dave Seiler (NIST) Ben Bunday (ISMI) Ben Bunday (ISMI) Vic Vartanian (ISMI) Vic Vartanian (ISMI) Alain Diebold (CNSE – Univ. Alain Diebold (CNSE – Univ. Albany) Albany)
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ITRS 2009 1 Metrology Roadmap 2010 EuropeAdrian Kiermasz (Metryx) Carlos Beitia (CEA LETI MINATEC) Philippe Maillot (ST) Delphine Le Cunff (ST) JapanYuichiro.
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ITRS 2009 1
Metrology RoadmapMetrology Roadmap20102010
EuropeEurope Adrian Kiermasz (Metryx)Adrian Kiermasz (Metryx)Carlos Beitia (Carlos Beitia (CEA LETI MINATECCEA LETI MINATEC))Philippe Maillot (ST)Philippe Maillot (ST)Delphine Le Cunff (ST)Delphine Le Cunff (ST)