IoT Enabling Smart Facilities - an Owner Perspective Arthur Chuang Senior Director, 300mm Facility Div., TSMC
IoT Enabling Smart Facilities
- an Owner Perspective
Arthur Chuang
Senior Director, 300mm Facility Div., TSMC
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Arthur Chuang - Bio
EDUCATION
– BS, Mechanical Engineering, National Taiwan University of Science and
Technology
– Ph.D., Civil Engineering, National Taiwan University
OCCUPATION
– Senior Director, 300mm Facility Division, TSMC
– Vice-Chair, High-tech Facility Committee, SEMI Taiwan
ACCOMPLISHMENTS
– TEN Outstanding Project Managers (2011)
– Outstanding Alumnus, Civil Engineering Department, NTU (2014)
– National Industrial Innovation Elite Award (2015)
TSMC Conservation Volunteer (Since 2009)
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Agenda
Evolution of Facility Monitoring and Control
System
What Does Industry 4.0 Mean in High-tech
Facility
How IoT Enabling Smart Facilities
Summary
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FMCS Overview
Facility Monitoring and Control System (FMCS)
Control IO /
Marshalling
Redundant
ControllerRedundant
Controller
Engineer
Workstation
Database
DH Server Operator
WorkstationWeb
Server
Control
Redundant Network
OPC
Server
Control IO /
Marshalling
Control IO /
Marshalling
Control IO /
Marshalling
CIM
SI SCADA
DB Server
System SCADA
Financial
Production
Supply chain
Customer Service
Material
…
Manufacture Scheduling
Quality, Yield, …
…
Asset Management(PM/Materials)
Operation Management
Energy/Quality/ESH
…
SCADA HMI
Network
Control System
IO module
Smart
Instrument
MES
ERP
FAC Management
Control & Monitor
Field Instrument
AP Server AP Server
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FMCS Evolution
Digital Technology Changed FMCS Landscape
1940
Value
Centralized
Control & Monitoring
Hardwired
Panel Boards
Digital Plant
Smart Management
1980 2000 2020 1960Time
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FMCS R&R in Modern Facilities
Improve facility system reliability and availability, reduce
maintenance cost.
Improve situational awareness to reduce ESH incidents and
response time.
Reduce waste and loss to pursue high energy efficiency.
Enhance operation productivity.
Be ready for infrastructure integration with future smart
facility.
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Agenda
Evolution of Facility Monitoring and Control
System
What Does Industry 4.0 Mean in High-tech
Facility
How IoT Enabling Smart Facilities
Summary
8
Industry 4.0
The 4th industrial revolution will be based on Cyber Physical
System (CPS), the Internet of Things (IoT) and the Internet
of Service.
It will generate enormous Big Data streams stored in the
Cloud that can be analyzed for resource-efficient and high
quantity production.
1784 1870 1969
End of
18th century
Start of
20th centuryStart of
1970s
Today
1.0 2.0 3.0 4.0
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Why Cyber Physical System
CPS is a system featuring a tight combination of, and
coordination between, the system’s cyber and physical
elements.
CPS uses computation, communication, and control
embedded in and interacting with physical processes to
add new capabilities (three-in-one) to physical system.
Reference:從集合、整合、融合看工業4.0發展藍圖Science & Technology Policy Research and
Information Center, NAR Labs
Combination Integration Merging
Cyber
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Why Internet of Things
CLOUD
(BIG DATA)
FMCS IoTProcess monitoring
Alarm handling
Process control
Auto operation
Image/sound info.
Operator info.
Environment info.
Material info.
EXTERNAL
Suppliers
management
Environmental
management
INTERNAL
Material management
Energy management
PM management
Cost management
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Agenda
Evolution of Facility Monitoring and Control
System
What Does Industry 4.0 Mean in High-tech
Facility
How IoT Enabling Smart Facilities
Summary
12
Facility Automation
FMCS FrameworkInformation
Management
Control
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FMCS+IoT+Cloud Sketch
Smart Facility Profile
I
ESHMaintenance EnergyReliabilityProductivity
IoT Gateway IoT Gateway
M2M & wirelesssensor network
Building management
Vehicle, asset, person monitoring & controlEmbedded Mobile Energy Consumption
Security & surveillance Every thingsSmart Factory
HMI OPC
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IoT Enabling Smart Facilities
Smart Facility is to apply the concept of “prediction”, so
that the facility system achieves zero-trouble such as zero-
failure and zero-contamination.
Smart Facility is built on the foundation of FMCS system.
IoT is the basic construction to start Smart Facility, so to
develop IoT elements and applications is currently the most
important.
Digitalized
Data
FMCS
Foundation
Cloud
Computing
IOT
Information
Big data
Analysis
Smart
Facility
3D
Model
Industry 4.0Industry 3.0
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Example – Electrical System
Current Pictures:
– Power remote control
– Auto-Switch while abnormal
– Energy information and alarm
monitoring
Better Future?
– Predict fault of high voltage
equipment
– Real time fault analysis and
smart recovery guide
– Build energy map for smart
demand response
High Voltage
TPC
Substation
UP
S
G
Generators
Main
Transformer
M
PLC
Temp.
M
M
Relay M
Abnormal Point
Handling Notice
Troubleshooting GuideLo
ad
Battery Monitoring Vibration MonitoringEnergy Saving
Power SCADA
Vibration, Noise
Partial Discharge
Over Temp.
Battery
SCADA
IoT
Gateway
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Example – Waste Water Treatment
Current Pictures:
– Lack of monitoring for tool waste drain
– Hindsight and labor-intensive
operations along abnormal discharge
Better Future?
– Real-time “devices” for monitoring of
tool drains, such as frequency, volume
and time.
– Smart Operation : Predict water
variation, Optimize treatment
parameter, Minimize chemical
consumption.
Quantity
H2 O
2
UP
W
H2 S
O4
NH
4 OH
HF
IPA
Tools
Chemical
Drain
Sensor
Reclaim & WWT
Sensor
Quality
Smart Water Apps
IoT
Gateway
WWT SCADA SCADA
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Example – Air Abatement System
Current Pictures:
– Equipment status monitoring
– Process performance and
efficiency tracking
– Exhaust sub-main static
pressure monitoring
Better Future?
– Real-time emission
monitoring for emergency
response and audit
– Predictive maintenance
replace preventive
maintenance to eliminate
risk of abnormal emission.
Central Scrubber
VOC Oxidizer
Exhaust Fan
Exhaust Fan
Stack
Stack
ProcessMaterial
Product Tool
Scrubber
(Wet )
(Plasma)
(Adsorb.)Velocity sensorUtility measure sensorRemoval efficiency sensorVibration SensorExhaust concentration and intensity Sensor
Exhaust toatmosphere
Vibration MonitoringConcentration
Monitoring
Performance
Monitoring
AAS ControlSCADA
Internet
Central Weather Bureau
IoT Gateway
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Example – Security System
Current Pictures:
– People identity and access
control
– Video recording and retrieve
– Unlock security equipment &
CCTV tracking (Fire/ gas leak
alarm)
Better Future?
– Acquire ERT member status and
monitor accident situation
– Intelligent video analysis for
property and fire protection
Fire protectionPeople counting Vehicle tracking
Video Analytics
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Agenda
Evolution of Facility Monitoring and Control
System
What Does Industry 4.0 Mean in High-tech
Facility
How IoT Enabling Smart Facilities
Summary
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Future Facility Needs
Develop all kinds of IoT application technique, build the big
database that facility system required.
Develop simulation learning system and technique, as a
training strategy for complete automatic facilities.
Develop cyber physical system (beyond FMCS) for smart…
– Safety management,
– Environmental management, and
– Energy management etc.
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Summary
FMCS automation uses electronics and information technique,
to replace manual operation with automatic control.
Smart Facility is built on the basis of existing automation, and
it collects information with IoT devices, then integrates it to
could for big data analysis via Internet of service, and finally
engineer decides new strategy according to the results.
IoT is basic element of the innovation of future Smart Facility.
Therefore, the development effectiveness of IoT devices will
affect directly the progress of Smart Facility.
SMART
FACILITY