1 PHYS 534 (Fall 2008) Module on Microsystems & Microfabrication Lecture 1 Introduction to Microdevices 1 and Microsystems Srikar Vengallatore, McGill University Outline of Lecture •Introduction to Microsystems -Basic definitions and examples -How are they designed? -How are they manufactured? 2
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PHYS 534 (Fall 2008)Module on Microsystems & Microfabrication
Lecture 1
Introduction to Microdevices
1
and Microsystems
Srikar Vengallatore, McGill University
Outline of Lecture
•Introduction to Microsystems
-Basic definitions and examples
-How are they designed?
-How are they manufactured?
2
2
Introduction to Microsystems
Micro: Small SystemInput Output
•System dimensions: 1 mm to 10 cm
•Structural components: 10 nm to 100 μm
3
•Designed and manufactured to performuseful activity
LENGTH SCALES
10-3 m = 1 mm
10-4 m = 100 μm
10-5 m = 10 μm
10-6 m = 1 μm
10-7 m = 100 nm Molecules
Bacteria STRUCTURESFOR
MICROSYSTEMS
4
10-8 m = 10 nm
10-9 m = 1 nm
10-10 m = 0.1 nm
Atoms
3
1 m
1 μm
1 mm
51 nm
1 μm
Source: Kalpakjian and Schmid
Example 1.Integrated Circuit
>1 Million wires per cm2 !>1 Million wires per cm2 !
•No moving parts
•$200 Billion per year
•Revolutionary
6(I.B.M)
Revolutionary(Internet, computers,…)
4
Cross-Section of an I.B.M Integrated Circuit
Copper
Silicon dioxide
7Silicon
Tungsten
1 μm
Example 2: Texas Instruments Micromirrors
11 μm
8DIGITAL LIGHT PROCESSING (DLP)
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9
TorsionalHi
Electron Micrograph of Texas Instruments DMD
Hinge
10www.dlp.com
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11
Samsung DLP TVsDLP Projectors
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7
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Some TerminologyMicrosystems are known by many names…..
•Microdevices•MicroelectronicsMi l t h i l S t (MEMS)•Microelectromechanical Systems (MEMS)
•Microsystems Technology (MST)•Microfluidic systems•Micro total analysis systems (micro-TAS)•Bio-MEMS/ Bio-microsystems•Optical MEMS/ Optical microsystems
1970s: Realization that mechanical components can also be miniaturized
Emergence of micromachined pressure g psensors
Sealed Vacuum CavityMembrane
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Pressure Port (P)
•Estimate pressureby measuring deflection
Pressure Sensors: Principle of Operation
8 mm
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Micromachined Pressure Sensors are now Widely Used
23www.issys-mems.com
1980s: Micro Sensors and Actuators•Sensors for force, acceleration, pressure, mass,….
Micromachined Accelerometers
24~8 million accelerometers are manufactured each year
Analog Devices
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mk F ma ka δ= ⎫⇒ =⎬
Principle of Operation of Accelerometer
aa
F k mδ⇒ =⎬= ⎭
δ
Quasi-Static Accelerometer
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Applications for Micromachined Accelerometers
•Modal analysis of vibratory systems
•Navigation
•Crash Sensors: Air-bag deployment in automobiles
•Protection of hard-disks in laptop computers
•Video games
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•……..
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1980s Micro Actuators: Motion in Microsystems
Linear
ELECTROSTATIC ACTUATORS
Gap, g0
LinearSpring, k
Mass, m
g < g0V+
_
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Fixed electrode
Micro Electro + Mechanical System, or MEMS
Types of Microscale Actuators
• Electrostatic
• Thermal
• Piezoelectric
• Shape Memory Alloy
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Motion is either due to Applied Forces orDifferential Expansion and Contraction
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α1
α2
THERMAL ACTUATORS
α2 α2α1 >
Heat
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1990s: Increasing Focus on Commercialization
Important Trends
•Microsystem community focused on Utility(design, manufacture, marketing, reliability, cost, etc.)
•Range expanded from Electro + Mechanical to multipleenergy domains
•Optical•Chemical•Radio-Frequency communications
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•Biological•Fluidic•…
There is a complete world of engineering at these scales!
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OPTICAL MICROSYSTEMS FOR DISPLAYS
Silicon Light Machines
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OPTICAL MICROSYSTEMS FOR COMMUNICATIONS
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OPTICAL CROSS-CONNECTS
33Lucent
OPTICAL MICROSYSTEMS FOR SENSING
POLYCHROMATOR
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10 μm
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1990s: Microfluidics and Bio-Microsystems
Texas Instruments
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D. Therriault, Ecole Polytechnique
Microfluidic Networks
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1990s: Micro Needles for Painless Drug Delivery
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Georgia Institute of Technology
IMPLANTABLE CHIPS FOR PROGRAMMED DRUG DELIVERY
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20
39Microchips
EMERGING APPLICATIONS: PORTABLE POWER GENERATION
Direct MethanolFuel cell
40Toshiba
•12 W @ 11 V for 5 hours with one cartridge•No recharge times
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Micro Gas Turbine Engine
41
MIT
Micro Solid-Oxide Fuel Cells
Anode (NiO-YSZ)
Cathode (LSM)
Électrolyte (YSZ)
42McGill University/Ecole Polytechnique
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Refining our Terminology
In this course, we will use MICROSYSTEMS as a synonym for
•Microdevices•Microelectronics•Microelectromechanical Systems (MEMS)•Microsystems Technology (MST)•Microfluidic systems•Micro total analysis systems (micro-TAS)•Bio-MEMS/ Bio-microsystemsO ti l MEMS/ O ti l i t
•Microsystems operate in multiple energy domains(mechanical, fluidic, electrostatic, thermal, magnetic,…)
•Frequently, coupling between different domains(electromechanical; thermoelastic; magnetomechanical,..)
•Critical question: validity of continuum physics
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Approach to Structural Design
•What kind of STRUCTURES (Machine elements) to use?Beams, plates, rods, or membranes?Solid section or shaped cross-section?pMonolithic or composite?Electrostatic or electrothermal actuation?
•What kind of MATERIALS to use?Ceramics, metals, or polymers?Fiber-reinforced composites or layered composites?
51
…
Structural Design is Constrained by Manufacturing Limitations