Top Banner
INTRO TO TDM AND BUM TDM – Top Down Manufacturing BUM – Bottom Up Manufacturing
21

INTRO TO TDM AND BUM TDM – Top Down Manufacturing BUM – Bottom Up Manufacturing.

Dec 19, 2015

Download

Documents

Welcome message from author
This document is posted to help you gain knowledge. Please leave a comment to let me know what you think about it! Share it to your friends and learn new things together.
Transcript
Page 1: INTRO TO TDM AND BUM TDM – Top Down Manufacturing BUM – Bottom Up Manufacturing.

INTRO TO TDM AND BUM

TDM – Top Down Manufacturing

BUM – Bottom Up Manufacturing

Page 2: INTRO TO TDM AND BUM TDM – Top Down Manufacturing BUM – Bottom Up Manufacturing.

TOP DOWN MANUFACTURING

• Materials modified

• Cutting, drilling, milling

• Machinery used

• Many steps needed

• Primary method in integrated circuits industry

Page 3: INTRO TO TDM AND BUM TDM – Top Down Manufacturing BUM – Bottom Up Manufacturing.

BOTTOM UP MANUFACTURING

• Similar to way nature builds objects

• Self-assembly

• Atomic force microscope

• The future of nano-manufacturing?

Page 4: INTRO TO TDM AND BUM TDM – Top Down Manufacturing BUM – Bottom Up Manufacturing.

MOORE’S LAW

• Integrated circuits (ICs) are electronic circuits on a single piece of silicon

• Circuits on ICs are made from many transistors• Since 1965 trend is for the number of transistors

per integrated circuit to double every two years• In 1965 there were 30 transistors per chip• Today, more than 1 billion transistors per chip

Page 5: INTRO TO TDM AND BUM TDM – Top Down Manufacturing BUM – Bottom Up Manufacturing.

MOORE’S LAW

Page 6: INTRO TO TDM AND BUM TDM – Top Down Manufacturing BUM – Bottom Up Manufacturing.

TDM IN SEMICONDUCTOR MANUFACTURING

• Transistors are semiconductor devices• Transistors connected together form circuits• Integrated circuits consists of many

transistors• Many ICs built simultaneously on silicon

wafers• Transistors are built first, then

interconnected• ICs are built in a chip fab

Page 7: INTRO TO TDM AND BUM TDM – Top Down Manufacturing BUM – Bottom Up Manufacturing.

TDM IN SEMICONDUCTOR MANUFACTURING

• ICs are built layer by layer

• Process steps include:

• Wafer photolithography ion implant

• Deposition metallization

• Steps repeated many times for each IC

Page 8: INTRO TO TDM AND BUM TDM – Top Down Manufacturing BUM – Bottom Up Manufacturing.

PHOTOLITHOGRAPHY

• Mask is high quality glass

• Mask has areas marked to block transmission of light

• One mask for every layer of the IC

• Photoresist covers IC

• Ultraviolet light shines through mask onto photoresist

• Photoresist affected by light

Page 9: INTRO TO TDM AND BUM TDM – Top Down Manufacturing BUM – Bottom Up Manufacturing.

PHOTOLITHOGRAPHY

Page 10: INTRO TO TDM AND BUM TDM – Top Down Manufacturing BUM – Bottom Up Manufacturing.

PHOTOLITHOGRAPHY

• Photolithography defines transistor size

• Part of process is to reduce image on mask

• Transistors made of several features

• Feature size defines how small transistors are

• Smallest feature size currently is 45nm

Page 11: INTRO TO TDM AND BUM TDM – Top Down Manufacturing BUM – Bottom Up Manufacturing.

PROBLEM WITH TDM

• TDM processing reaching physical limits

• Difficult to reduce mask images to smaller and smaller levels

• Requires shorter wave length light (X-rays)

• Requires more sophisticated optical systems to reduce images

• This are expensive and technically challenging

Page 12: INTRO TO TDM AND BUM TDM – Top Down Manufacturing BUM – Bottom Up Manufacturing.

Bottom Up Manufacturing

• Possible way to continue Moore’s Law progress

• Build features one atom at a time

• Use forces of nature to accomplish this

• No machining necessary

• Requires proper environmental conditions

Page 13: INTRO TO TDM AND BUM TDM – Top Down Manufacturing BUM – Bottom Up Manufacturing.

AFM

• Atomic force microscope

• Can image atoms

• Can move atoms

• Forces between atom and ATM tip interact

• Measurement of forces used to produce image of atom or to manipulate atoms

• IBM logo made from xenon atoms in 1990

Page 14: INTRO TO TDM AND BUM TDM – Top Down Manufacturing BUM – Bottom Up Manufacturing.

IBM FROM AFM

Page 15: INTRO TO TDM AND BUM TDM – Top Down Manufacturing BUM – Bottom Up Manufacturing.

SELF-ASSEMBLY

• Self-assembly occurs naturally

• Smaller features are created

• Smaller features combine to produce larger features

• Combinations occur until macro structure is built

Page 16: INTRO TO TDM AND BUM TDM – Top Down Manufacturing BUM – Bottom Up Manufacturing.

SELF-ASSEMBLY

Page 17: INTRO TO TDM AND BUM TDM – Top Down Manufacturing BUM – Bottom Up Manufacturing.

SELF-ASSEMBLY

Page 18: INTRO TO TDM AND BUM TDM – Top Down Manufacturing BUM – Bottom Up Manufacturing.

SELF-ASSEMBLY IN SOAP

• Soap bubbles consist od soap molecules and water molecules

• Soap molecule ends react differently with water

• Hydrophili end links with water easily

• Hydrophobic end will not link with water

• Monolayers form to create bubble wall

• Wall is soap-water-soap

Page 20: INTRO TO TDM AND BUM TDM – Top Down Manufacturing BUM – Bottom Up Manufacturing.

PROPERTIES OF NANOSTRUCTURES

• Objects at the nano-scale exhibit unique properties

• Properties may not exist at larger scales

• Color

• Light reflection

• Order