Integrated circuits - FB Physik, FU Berlin · Integrated circuits – Finn Müller-Hansen The first integrated circuit Further thought led me to the conclusion that semiconductors

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Integrated circuits – Finn Müller-Hansen

Seminar talk by Finn Müller-Hansen on May 28, 2013

Integrated circuits

From basic solid state research to application

From simple transistors to modern microelectronics

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How does this work*?

* For example: How can this computer add the two numbers?

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http://www.anandtech.com/show/6409/13inch-retina-macbook-pro-review

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http://www.anandtech.com commons.wikimedia.org

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http://www.anandtech.com

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http://www.cellmatrix.comhttp://www.anandtech.com

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● How was it possible to develop complicated logic circuits like this computer?

● How are modern microchips manufactured?

● And how do microelectronics work?

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Outline

History

Technology

Future

web.mit.eduImages: strims.pl http://www.extremetech.com/wp-content/uploads/2012/06/Quantum.jpg

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Part I

Technology

Future


History of a revolution

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The invention of the transistor

● 1925 Lilienfeld: theory of a field effect transistor

● 1947 Shockley, Bardeen and Brattain: point contact transistor at Bell Labs (Nobel prize in 1956)

● 1950 bipolar junction transistor

commons.wikimedia.org

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The first integrated circuit

Further thought led me to the conclusion that semiconductors were all that were really required – that resistors and capacitors, in particular, could be made from the same material as the active devices [the transistors]. I also realised that, since all of the components could be made of a single material, they could also be made in situ, interconnected to form a complete circuit. I then quickly sketched a proposed design for a flip-flop using these components. Resistors were provided by bulk effect in the silicon, and capacitors by pn-junctions.

Kilby: Invention of the Integrated Circuit

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The first integrated circuit

1958 Jack Kilby at TI (Nobel price 2000)

http://www.ti.com/corp/docs/kilbyctr/jackbuilt.shtml

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Further developments

Between 1958 and 1960:

● Hoerni: planar process

● silicon instead of germanium

● Noyce: aluminium wiring

● Lehovec: insulation by pn-junctions

● J. Last: assembly of first planar IC

● Kahng and Atalla: first MOSFET

Robert Noyce

http://www.computerhope.com

Jean Hoerni Kurt LehovecWho invented the IC?

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Economy

● military and NASA in the semiconductor market

● 1955 Shockley Semiconductor Laboratories

● “Traitorous eight” (Hoerni, Noyce, Moore and others)

● 1957 Fairchild Semiconductors

● mid 1960s patent wars between TI, Fairchild, ...

● late 1960s Intel, AMD, Zilog, etc.

http://www.flickr.com/photos/wimar/4657299405/sizes/o/in/photostream/

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1965G.E. Moore: Cramming More Components onto Integrated Circuits

Moore's Law


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Keeping up with Moore's Law

● Downscaling

● Higher clock frequencies

● material research

● advances in lithography

● new deposition techniques

● multi-core computing

Data from http://www.semiconductors.org/industry_statistics/global_sales_report/

Semiconductor sales 1977-2012

rising capital requirementsreinvestments only possibledue to economic success

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●How was it possible to develop complicated logic circuits like this computer?

● various contributions of inventors and researchers

● cooperation of research, economics, and public sector

● self-fulfilling prophecy of Moore's Law● economic success of IC

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Part II

Future


History

Technology of IC

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Logic● boolean logic

● logic gates implement boolean functions

● examples: NOT, AND, OR, XOR and combinations

● functional complete gates: NAND and NOR

NAND GateOR Gate constructed from NAND


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Example: Adder

Full Adder ...

Part of ALU (arithmetic logic unit) on a CPU (central processing unit)


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CMOS logic

CMOS NAND Gate


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Chip design

Register transfer level

Gate-level description(circuit diagram)

Physical layout

addition of two x bit numbers

http://www.iis.ee.ethz.ch/~kgf/aries/8.html

Example:

logic synthesis

placement,routing, etc.

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Manufacturing of ICs

● chip design● lithography● etching● material deposition● wiring● testing and packaging

www.amd.com

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Lithography

● electron beam lithography for mask production

● 193 nm argon fluoride excimer laser photolithography (deep UV)

● different resist material

● state of the art: 22nm processes

http://britneyspears.ac/physics/fabrication/photolithography.htm

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Beyond the diffraction limit

Optical Proximity Correction

Immersion lithography

Phase shifting techniques

http://www.tf.uni-kiel.de/matwis/amat/admat_en/kap_5/backbone/r5_3_2.html commons.wikimedia.org

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Etching and deposition techniques

● chemical vapor deposition

● physical vapor deposition

● wet chemistry etching

● plasma etching:

● chemical etching● reactive ion etching● sputtering

Clemens, J.T.: Silicon Microelectronics Technology. Bell Labs Technical Journal, 1997

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http://huniv.hongik.ac.kr/~hmed/nanofet.html

TEM image of a modern MISFET

Fabrication of transistors

30nm


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Wiring

completed silicon wafer

Peercy, P.S.: The drive to miniaturization. Nature 406, 2000 http://www.dailytech.com

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How are modern microchips manufactured?

● lithography as a key technology● chip is built in layers● more than 500 single steps● computational power makes design of

next generation possible

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Part III

Technology


History

Future of ICs

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Limiting factors in downscaling of CMOS

● high current density in metal wires

● thickness of gate insulator (high k dielectrics)

● lithography

● EUV (1-10 nm)● electron beam

http://physics.nmsu.edu/~bkiefer/research.html

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Alternatives to silicon?

● Organic semiconductors, spintronics

● Molecular computing (e.g. DNA computer)

● Optical computer (→ presentation on photonic crystals)

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probably not within the next 20 years

http://images.cryhavok.org/v/Quantum+Computer.jpg.html

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How do microelectronics work?

http://techreport.com/forums/viewtopic.php?f=14&t=77469

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References● Bratton, D. et al: Recent progress in high resolution lithography. Polymers for

advanced technologies 17, 2006

● Braun, E.: Revolution in miniature. Cambridge University Press, 1978

● Chen, Y and A. Pépin: Nanofabrication: Conventional and nonconventional methods. Electrophoresis 22, 2001

● Clemens, J.T.: Silicon Microelectronics Technology. Bell Labs Technical Journal, 1997

● Eckert, M. and H. Schubert: Kristalle, Elektronen, Transistoren. Rohwolt Hamburg, 1986

● Kilby, J.S.: Invention of the Integrated Circuit. IEEE Transactions on Electron Devices, vol 23, 1976

● www.halbleiter.org

● Moore, G.E.: Cramming More Components onto Integrated Circuits. Electronics, 1965

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● Peercy, P.S.: The drive to miniaturization. Nature 406, 2000

● Ruge, I and H. Mader: Halbleiter-Technologie. Springer Berlin, Heidelberg, New York, 1991

● Schulz, M.: The end of the road for silicon? Nature 399, 1999

● Seisyan, R.P.: Nanolithography in Microelectronics: A Review. Technical Physics 56, 2011

● Thompson, S.E. and S. Parthasarathy: Moore’s law: the future of Si microelectronics. Materials Today vol. 6, 2006

● Thompson, L.F.: Introduction to Microlithography. American Chemical Society Washington, DC, 1994

● Tietze, U. und C. Schenk: Halbleiter-Schaltungstechnik. Springer Berlin, 1999.

● Waser, R. (ed.): Nanoelectronics and Information Technology. Wiley-VCH Weinheim, 2005

References (II)

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How do microelectronics work?

(If you really want to know it start studying computer engineering.)

Questions?

http://techreport.com/forums/viewtopic.php?f=14&t=77469

Integrated circuits - FB Physik, FU Berlin · Integrated circuits – Finn Müller-Hansen The first integrated circuit Further thought led me to the conclusion that semiconductors

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