GE Research develops high performance, navigation grade MEMS inertial sensors targeted for autonomous systems in GPS denied harsh environments. Our inertial platform process enables gyroscopes and accelerometers, including GE’s own proprietary solutions ideal for miniaturized gyrocompassing and short-term navigation applications. The team works with our partners to develop system solutions that are capable of high temperature, high vibration and high shock environments. The GE Research team also has expanded solutions with custom algorithms for north finding applications and sensor fusion with machine learning for error cancellation over long mission profiles. Inertial Sensing GE Research Inertial MEMS Capabilities GE Research Offerings • Navigation grade MEMS gyroscope • Collocated MEMS gyroscope and accelerometer • MEMS gyrocompassing with <0.5° heading accuracy • High temp capable MEMS with control electronics • High aspect ratio, thick silicon (>100um) SOI process • Wafer level vacuum capping • Thru-silicon via (TSV) • 28,000 sq. ft. class 100 cleanroom • ISO 9001:2015 certified, ITAR compliant • Navigation grade MEMS gyroscope and accelerometers • Inertial sensor design and multi-physics modeling • Microsystems design and package integration • Prototype to small volume MEMS fabrication • MEMS characterization and reliability testing Low drift, Low ARW Gyrocompassing Navigation grade Thick silicon SOI Wafer level vacuum seal Technology Brief GE Research For additional information, please contact: Todd Miller GE Research Electronics and Sensing Commercial Director Email: [email protected] Nav-Grade Multi-Ring Gyroscope High-Q MEMS inertial sensors with wafer level vacuum sealing MEMS inertial sensor characteristics (Typical) • ARW:< 0.01°/√h, VRW:<3mm/s/√h • In-run Bias instability: <0.1°/h (gyro), <0.5ug (accel) • Frequency stability: <1ppb • North finding accuracy: <0.5° • Temperature: -55°~200°C
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GE Research develops high performance, navigation grade MEMS inertial sensors targeted for autonomous systems in GPS denied harsh environments. Our inertial platform process enables gyroscopes and accelerometers, including GE’s own proprietary solutions ideal for miniaturized gyrocompassing and short-term navigation applications. The team works with our partners to develop system solutions that are capable of high temperature, high vibration and high shock environments. The GE Research team also has expanded solutions with custom algorithms for north finding applications and sensor fusion with machine learning for error cancellation over long mission profiles.
Inertial Sensing
GE Research Inertial MEMS Capabilities
GE Research Offerings
• Navigation grade MEMS gyroscope • Collocated MEMS gyroscope and accelerometer• MEMS gyrocompassing with <0.5° heading accuracy• High temp capable MEMS with control electronics• High aspect ratio, thick silicon (>100um) SOI process• Wafer level vacuum capping • Thru-silicon via (TSV)• 28,000 sq. ft. class 100 cleanroom• ISO 9001:2015 certified, ITAR compliant
• Navigation grade MEMS gyroscope and accelerometers• Inertial sensor design and multi-physics modeling • Microsystems design and package integration• Prototype to small volume MEMS fabrication • MEMS characterization and reliability testing
Low drift, Low ARW Gyrocompassing Navigation grade Thick silicon SOI Wafer level vacuum seal
Technology BriefGE Research
For additional information, please contact:Todd MillerGE ResearchElectronics and SensingCommercial DirectorEmail: [email protected]
Nav-Grade Multi-Ring Gyroscope
High-Q MEMS inertial sensors with wafer level vacuum sealing
MEMS inertial sensor characteristics (Typical)• ARW:< 0.01°/√h, VRW:<3mm/s/√h• In-run Bias instability: <0.1°/h (gyro), <0.5ug (accel)• Frequency stability: <1ppb• North finding accuracy: <0.5°• Temperature: -55°~200°C
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