IFPAC SM January 21-24, 2001, Instrumentation€¦ · Developing “plug” from either a Developing “plug” from either a ... Designing a Sample Conditioning System IR-4000 (2.5

Instrumentation

Frank Ruiz, Ruiz & AssociatesSteve Doe, Parker Hannifin Corporation

IFPAC SM - 2001Fifteenth International ForumProcess Analytical ChemistrySM

January 21-24, 2001,Amelia Island, Florida, U.S.A

Surface Mount Technology for Surface Mount Technology for Sample Conditioning SystemsSample Conditioning Systems

AgendaAgendaPart I: Mechanics, Steve DoePart I: Mechanics, Steve Doe

��Surface Mount History in the Semiconductor IndustrySurface Mount History in the Semiconductor Industry��Substrate Design: SP76 Parallels & EnhancementsSubstrate Design: SP76 Parallels & Enhancements��Elastomer or Metallic Device Interface Seals?Elastomer or Metallic Device Interface Seals?

Part II: System Design, Frank RuizPart II: System Design, Frank Ruiz��Device Design for System FlexibilityDevice Design for System Flexibility��Designing a Sample Conditioning SystemDesigning a Sample Conditioning System��Future DevelopmentsFuture Developments


Surface Mount HistorySurface Mount History�� Parker: surface mount supplier to semiconductor Parker: surface mount supplier to semiconductor

market for several yearsmarket for several years


Surface Mount HistorySurface Mount History�� SP76 based on Semiconductor Industry 1½” footprintSP76 based on Semiconductor Industry 1½” footprint�� SEMI organization forum for industry standardsSEMI organization forum for industry standards�� Initial SEMI surface mount effort in early 1990’sInitial SEMI surface mount effort in early 1990’s�� Motivations similar to those of today’s Petrochemical Motivations similar to those of today’s Petrochemical

IndustryIndustry�� Market penetration most significant in AsiaMarket penetration most significant in Asia�� Global Standard for interface seal?Global Standard for interface seal?�� 1111//88” footprint being introduced (and embraced)” footprint being introduced (and embraced)�� Semiconductor Industry Use: Gas DeliverySemiconductor Industry Use: Gas Delivery

Analytical Industry Use: Sample ConditioningAnalytical Industry Use: Sample Conditioning


Substrate DesignSubstrate Design�� Meets SP76 designMeets SP76 design

specification for specification for elastomeric seal elastomeric seal option, however...option, however...


Substrate DesignSubstrate Design�� Achieves addedAchieves added

system flexibilitysystem flexibilitywith 5 streams, with 5 streams, and…and…


Substrate DesignSubstrate Design�� Provides ability Provides ability

to mount largerto mount largerdevices such asdevices such ascurrent designs current designs for flow controllers,for flow controllers,regulators and otherregulators and otherdevices. devices.


Substrate DesignSubstrate Design




Substrate Block to Block SealingSubstrate Block to Block Sealing�� Incorporates standard OIncorporates standard O--RingRing

seal (size 2seal (size 2--007)007)�� 11//88” through hole w/ ” through hole w/ counterbore counterbore to to

capture ocapture o--ringring

�� Blocking flow passagesBlocking flow passagesprovides system flexibilityprovides system flexibility

�� Developing “plug” from either a Developing “plug” from either a solid elastomer or metallic disksolid elastomer or metallic diskmolded into Omolded into O--RingRing








Elastomeric or Metallic Device Seals?Elastomeric or Metallic Device Seals?Pro’sPro’s Con’sCon’s

�� Elastomeric:Elastomeric: Used in numerous Used in numerous 1x101x10--44 cc He/seccc He/secsample systemssample systems leak integrity leak integrity devices; entrenched,devices; entrenched,successful technologysuccessful technology

�� Metallic: Metallic: 1x101x10--1010 cc He/seccc He/sec Seal & mating surfaces Seal & mating surfaces leak integrityleak integrity subject to handlingsubject to handling

damage resulting in damage resulting in leaksleaks


Elastomeric or Metallic Device Seals?Elastomeric or Metallic Device Seals?

Conclusion:Conclusion:Recommend Elastomeric for majority of sampling systems Recommend Elastomeric for majority of sampling systems

and Metallic for PPB detection level applicationsand Metallic for PPB detection level applications


Designing a Sample Conditioning SystemDesigning a Sample Conditioning System

(1.5 CR) (1.5 CL)(1.5 CL) (1.5 C)

A A B C CB

A A- B-B C-C

(1.5 CR5)

D D

-DD

1.5" BASE BLOCKS



1.5" BASE 2.375" BASE

TWO STANDARD BASE SIZES


COMPONENTS

TEMP.SENSOR

PRESS.XTR PRESSURE TRANSDUCER

TEMPERATURE SENSOR

FILTER

NEEDLE VALVE

3-WAY VALVE

BALL VALVE

PRESSURE REDUCING REGULATOR

BACK PRESSURE REGULATOR

RELIEF VALVE

FLOW CONTROLLER



IR-4000

(2.5 CL)

PRESSURE REGULATOR

12

3L

345

D

D

Three Inlet ports tiedtogether inside the body of the component.

All three Outlet portsare common to thediaphragm cavity.

D-D

1 2 3 4 5

1 2 3 4 5

SpringHole

CHANNEL #

IR-4000 BODY

E E

E-E

PRESSURE REDUCING REGULATOR IR-4000 EXAMPLE

ComponentINLETComponent

OUTLET BLANK


IN INBLOCKED

OUT OUTBLOCKED

BLANKIR-4000

(2.5 C)

PRESSURE REGULATOR

12

3L

345

A A

INOUT

BLOCKED

BLANK

CHANNELNUMBERS

A A-

(2.5 C)

1

2345

PRIMARY FLOW DIRECTION

These inlet channels are connectedtogether inside the component.

These outlet ports are connectedtogether inside the component.

The number in the circle is the channelto which this port is connected."3L" Is Channel 3, Left Center Port.


IR-4000

IR-4000 CONNECTIONS TO SUBSTRATE(TOP VIEW OF SUBSTRATE)

IR-4000

(2.5 CL) (2.5 CR)

IR-4000

(2.5 C)

PRESSURE REGULATOR

12

3L

345

IR-4000

(2.5 C)

PRESSURE REGULATOR

12

345

PRESSURE REGULATOR

12

3R3

45

PRESSURE REGULATOR

123

45

3L 3R

OUTLETOF COMPONENT

INLETOF COMPONENT

BLANK OUTLETOF COMPONENT

PLUGGED


H2OTemp

AIR

AIR

ZEROPARKER

STREAM SWITCH

FLOWCONTROLLER

O2

Temp

FLOWCONTROLLER

ZEROPUMP

R-max

PARKERSTREAM SWITCH

R-max N2

RETURN HDR.

NeSSI SYSTEM 3


H2OTemp

AIR

C

AIR

ZEROPARKER

STREAM SWITCH

C

FLOWCONTROLLER

O2

Temp

FLOWCONTROLLER

ZEROPUMP

R-max

PARKERSTREAM SWITCH

R-maxN2

RETURN HDR.

CIRCUIT 1

CIRCUIT 2

4

6

7

9

2

3

1

NeSSI SYSTEM 3(Modified)


H2OTemp

AIR

FLOWCONTROLLER

ZEROPUMPPARKER

STREAM SWITCH

R-max

N2

RETURN HDR.

4

6

2

9

2

3

1

O2



IR-4000

IR-4000 CONNECTIONS TO SUBSTRATE(TOP VIEW OF SUBSTRATE)

IR-4000

(2.5 CL) (2.5 CR)

IR-4000

(2.5 C)

PRESSURE REGULATOR

12

3L

345

IR-4000

(2.5 C)

PRESSURE REGULATOR

12

345

PRESSURE REGULATOR

12

3R3

45

PRESSURE REGULATOR

123

45

3L 3R

OUTLETOF COMPONENT

INLETOF COMPONENT

BLANK OUTLETOF COMPONENT

PLUGGED


COMMON

NORMALLY CLOSED

NORMALLY OPEN

AIR

3-WAY R-max

FILTER

(1.5 CR)

H2O CELL

(1.5 CR)

FLOW CONTROLLERWITH EXTERNAL NEEDLE VALVE

UPSTREAM REFERENCE

(2.5 CL)

DOME

DOME

BPR-4000

(2.5 CL)


123

3L45

IR-4000

(2.5 CR)

PRESSURE REGULATOR

3R45

123

4 3R

33R4

a123

ANALYZERCELL

METERING VALVE1.5" SUBSTRATE

123

3R45 FLOW

CONTROLLER

23

3L4

15

1

4

2

3

(2.5 C)

2

1

3

12

(2.5 CR)

4

(1.5 CL)

TEMP. SENSOR1.5" SUBSTRATE

12

3L

345

TEMP

a

NeSSI SYSTEMNo. 3

H20 ANALYZER

ACTUATING AIR

ASPIRATOR

ACTUATING AIR

VENT RECOVERY

ASPIRATOR

SAMPLE IN

RTN.

RETURN HDR.

IN

9

6

BY-PASS

4

TO R-max

FROM R-max

FROM R-max

3TO R-max


H2O

Temp

AIR

FLOWCONTROLLER

ZEROPUMPPARKER

STREAM SWITCH

R-max

N2

RETURN HDR.


4

6

7

9

2

3

1

O2

5 10


COMMON

NORMALLY CLOSED

NORMALLY OPEN

AIR

3-WAY R-max

FILTER

(1.5 CR)

(1.5 C)

FLOW CONTROLLERWITH EXTERNAL NEEDLE VALVE

UPSTREAM REFERENCE

(2.5 CL)

DOME

DOME

BPR-4000

(2.5 CL)


123

3L45

IR-4000

(2.5 CR)

PRESSURE REGULATOR

3R45

123

4 3R

3

METERING VALVE1.5" SUBSTRATE

123

3R45 FLOW

CONTROLLER

23

3L4

15

1

4

2

3

(2.5 C)

2

1

3

12

4

(1.5 C)

TEMP. SENSOR1.5" SUBSTRATE

123

345

TEMP

NeSSI SYSTEMNo. 3

EXTERNAL H20 ANALYZER

ACTUATING AIR

VENT RECOVERY

ASPIRATOR

ACTUATING AIR

RETURN

ASPIRATOR

SAMPLE IN

RTN.

RETURN HDR.

IN

9

67

BY-PASS

4

TO R-max

FROM R-max

FROM R-max

3TO R-max

5TO ANALYZER

5

10 FROM ANALYZER

10FROMANALYZER

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Future Developments (Steve & Frank)Future Developments (Steve & Frank)�� Solicit input from other suppliers to include analyzer & sensor Solicit input from other suppliers to include analyzer & sensor

devices on stickdevices on stick�� Develop automation software for system designDevelop automation software for system design�� Develop pricing for total offeringDevelop pricing for total offering�� ReRe--present system with updates at PITTCONpresent system with updates at PITTCON--20012001�� Build betaBuild beta--site system for field testing?site system for field testing?


Thank you!Thank you!

Questions?Questions?

IFPAC SM January 21-24, 2001, Instrumentation€¦ · Developing “plug” from either a Developing “plug” from either a ... Designing a Sample Conditioning System IR-4000 (2.5

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