M M M M M PART NUMBER Example : M4.1V MT 2V1 l / K A/B : B1/4 MS 1 2 3 4 5 6 7 M4.1 M4.1 M4.1 M4.1 M4.1 1 - Valve Series and Surface Finish M4.1U Ra 0,15μm EP (6 μin Ra) M4.1V Ra 0,25μm EP (10 μin Ra) M4.1S Ra 0,4μm nonEP (15 μin Ra) 3 - Valve Configurations 2V1 2 ports in line See below for other configurations 5 - Seat Material K PCTFE (Kel-F ® ) V PI (Vespel ® ) P PVDF M Metal (on request) 4 - Body Material (others on request) A AISI 316L, VAR I AISI 316L H Hastelloy ® (on request) 2 - Valve Actuation (Standard: Normally Closed=NC) QT Manually actuated - Quarter Turn MT Manually actuated - Multi Turn LP Pneumatically actuated - Low Pressure HP Pneumatically actuated - High Pressure (Add - NO - for Normally Open version) (Add - NF - for Normally Close version) Standard colour: for handles: white (other colours on request) for LP actuators: NO=green NF=blue for HP actuators: NO/NF=white GAZEL ® -Female (face seal)* BWO for standard welding heads GAZEL ® -Male (face seal)* 6 - End Connections V1/4-F GAZEL ® 1/4" - Female (Face Seal)* V1/4-M GAZEL ® 1/4" - Male (Face Seal)* B1/4 BWO 1/4" - Standard (Orbital Weld) B6 BWO 6 mm (Orbital Weld) RDB 6 SAGALOK Double ring Fittings: 6 mm RDB 1/4 SAGALOK Double ring Fitting: 1/4” M4.1 SPRINGLESS DIAPHRAGM VALVES FOR HP AND UHP APPLICATIONS (STANDARD AND GAS SPECIFIC) A total component solution, from source to process M4.1-leaf 09-2 HOW TO ORDER 7 - Options MS Valve fitted with locking service FT Panel mounting — Back mounting CI Electric limit switch (LP actuators only) SELF SELF SELF SELF SELF A-V A-V A-V A-V A-V alves & Fittings S.A. alves & Fittings S.A. alves & Fittings S.A. alves & Fittings S.A. alves & Fittings S.A. - L-7505 Lintgen, G.-D. of Luxembourg Tel. *352 - 32 78 32 - 1, fax *352 - 32 78 32 322, www.rotarex.com, [email protected]*All GAZEL ® Face Seals are VCR ® compatible. VCR ® is a registered trade mark of CAJON CO., HASTELLOY ® is a registered trade mark of CABOT Corp. , Kel-F ® is a registered trade mark of 3M company, Vespel ® is a registered trade mark of DUPONT, ELGILOY ® is a registered trade mark of ELGILOY Company. SAGALOK Double ring Fitting Valve configurations 4.1 4.1 4.1 4.1 4.1 M4.1-leaf 09-2
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HOW TO ORDER - rotarex-gmbh.de · M4.1 M4.1 Precision electropolishing of all internal surfaces Laser welded diaphragm for maximum reliability Compact size Low particule generation
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Transcript
MMMMMPA R T N U M B E R
Example : M4.1V MT 2V1 l / K A/B : B1/4 MS1 2 3 4 5 6 7
M4.1M4.1M4.1M4.1M4.1
1 - Va l v e S e r i e s a n d S u r f a c e F i n i s h
M4.1U Ra 0,15µm EP (6 µin Ra)M4.1V Ra 0,25µm EP (10 µin Ra)M4.1S Ra 0,4µm nonEP (15 µin Ra)
3 - Va l v e C o n f i g u r a t i o n s
2V1 2 ports in line
See below for other configurations
5 - Seat Material
K PCTFE (Kel-F®)V PI (Vespel®)P PVDFM Metal (on request)
4 - Body Material (others on request)
A AISI 316L, VARI AISI 316LH Hastelloy® (on request)
(Add - NO - for Normally Open version)(Add - NF - for normally close version)
GAZEL® -Female(face seal)*
GAZEL® -Male(face seal)*
7 - Options
FT Panel mounting— Back mountingMRE1 Electric limit switch (LP/HP actuators)MRE2 Electric limit switchES (LP/HP actuators)S Security Bonnet in case of bellows failure
5 - Seat Material
K PCTFE (Kel-F®)V PI (Vespel®)M AISI 316L Metal seat*
*not available for HP applications
3 - Va l v e C o n f i g u r a t i o n s
2V1 2 ports in line
Refer to the selection guide for other configurations
1 - Va l v e S e r i e s a n d S u r f a c e F i n i s h
U4-U6 U UHP - Ra 0,15µm EP (6µin Ra)U4-U6 V HP - Ra 0,25µm EP (10µin Ra)U4-U6 S Standard - Ra 0,4µm (15 µin Ra)
Valve Configurations
SAGALOK Doublering fitting
BWO for micro-welding heads
U4/
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U4-U6U4-U6U4-U6U4-U6U4-U6U4-U6U4-U6U4-U6U4-U6U4-U6 T E C H N I CA L DATAF E A T U R E a u n i q u e p r o v e n d e s i g n
C O N S T R U C T I O N M A T E R I A L S
U4/
U6-
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U4/
U6-
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D I M E N S I O N S
Small gas absorptionand desorption fromseat material
Laser or electron beam weldedbellows ensure high leaktightness integrity
Metal to metal sealing tothe atmosphere
Fully contained seat
High leak integrity
Visual indication of valve position(open /closed)
P n e u m a t i c Ac t u a t i o n
Va l v e G r a d e & M a t e r i a l s
Pa r t s S V UBody Stainless Steel 316L
Body Surface Finish < 0,4 µm non EP (15µin Ra) < 0,25 µm EP (10µin Ra) < 0,15 µm EP (6µin Ra)
Bellows and gas wetted parts Stainless Steel 316L
Non-wetted parts Stainless Steel or alloys
Seat material PCTFE (Kel-F®)
Pa r t s Low Pressure High Pressure
Bellows Stainless Steel 316L
Seat PCTFE / PI (Vespel®)
Actuator body Anodized aluminum
(white-painted for U grade)
T E C H N I CA L D ATA
Fluid Media Standard, High and Ultra High Purity, corrosive and non-corrosive gases
Max working pressure U4/U6 Manual 240 bar (3500 PSI)
U4/U6 Pneumatic - Low Pressure 30 bar (435 PSI)
U4/U6 Pneumatic - High Pressure 200 bar (2900 PSI)
Min. operating pressure Vacuum
Pneumatic actuator opening pressure 5 to 7 bar (75 to 100 PSI)
Cerified max. Helium across the seat leak rate (at max. pressure) < 1.10-9 mbar.l/sec
Number of ports 2, 3, 4, 5 or 6Controlled (PC)
electropolishing for bettercorrosion resistance
The SIR 100 Regulator was created in response to the industry’s needs for a low pressure non tieddiaphragm regulator for specialty source gas service, i.e. gas cabinets. The design and materialof construction, plus some unique features make it an ideal choice for gas source applicationswith the reactive and hazardous gases the Semiconductor and Allied Industries use.
Ergonomic Design
Spherical ball for ultrasmooth control
2,3,4,5, or 6 ports optionsavailable
Metal to metal sealto atmosphere
diaphragm counterbalance springs
Excellent response at lowpressures (droop, hysteresis,
No spring in the wetted areafor zero particle emission
Excellent response at highand low pressures (droop,
hysteresis, creep)
2,3,4 or 6 ports optionsavailable
Ergonomic Design
Gas specific solutions(Body and Seat Materials)
Metal to metal seal toatmosphere
Sealed bonnet forextra protection
diaphragm counterbalance springs
The SI 240 Regulator was created in response to the industry’s need for a High Pressure, Springless, Tied Diaphragm Regulatorand the SI 260 Regulator for a High Flow, High Pressure, Springless, Tied Diaphragm Regulator for specialty source gas service,i.e. gas cabinets.The design and materials of construction, plus some unique features make it an idealchoice for gas source applications with reactive and hazardous gases the Semiconductor and Allied Industries use.• Unique features include a special leak test port that enables the diaphragm seal to be outboard leak tested ‹10-9 mbar.l/sec range at high pressure.• Precise control of the gas discharge with minimum deviation caused by the supply pressure effect.• Counter balance springs outside the gas stream to ensure the unit functions correctly with downstream vacuum and upstream high pressure• A unique spherical ball pressure pad to give ultra smooth delivery pressure adjustment• Choice of delivery pressure: 2, 4 or 7 bar / 30, 60 or 100 psi
The SI 240 regulator is designed with minimum face to face dimensions, to meet the requirements of all gas system manufacturers.The SI 260 regulator is designed for high flow rates of HCl and N2O etc.
S U R FAC E F I N I S HU: < Ra 0,15µm Ep. (6µin Ra) V: < Ra 0,25µm Ep. (10µin Ra) S:< Ra 0,4µm nonEP(15µin Ra)
Pa r t s M a t e r i a l sWetted parts Body AISI 316L, VAR, Hastelloy®
Diaphragm Hastelloy®
Seat PCTFE (Kel-F®) / PI (Vespel®) / PVDF
Poppet AISI 316L, VAR, Hastelloy®
Non-wetted parts Bonnet Nickel Plated Brass
Handle Extruded Plastic
Others Stainless Steel or others
F L O W C U R V E S
Manufactured to the THREE STTHREE STTHREE STTHREE STTHREE STAR PROCESSAR PROCESSAR PROCESSAR PROCESSAR PROCESS®®®®®
T E C H N I CA L DAT A
Fluid Media Standard, High and Ultra High Purity, corrosive and non-corrosive gasesInlet pressure 240 bar (3500 PSI)
Outlet pressure 2 - 4 - 7 bar (30 - 60 - 100 PSI)
Temperature range -20°C to + 80°C (-2F to 176F)
Nominal Flow 150 slpm (N2)
Flow Coefficient (Cv) SI 240: CV = 0,09 / SI 260: CV = 0,2
A t o t a l c o m p o n e n t s o l u t i o n , f r o m s o u r c e t o p r o c e s s
SI22
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SI 220SI 220SI 220SI 220SI 220
5 - Outlet regulated Pressure
3b 3 bar - 45 PSI8b 8 bar - 116 PSI10b 10 bar - 145 PSI15b 15 bar - 217 PSI25b 25 bar - 365 PSI50b 50 bar - 725 PSI
Note : Inlet Pressure: upto 240 bar (3500 PSI)
6 - End Connections
V-1/4 F GAZEL® 1/4" - Female (face seal)V-3/8 F GAZEL® 3/8" - Female (face seal)V 1/4 M GAZEL® 1/4" - Male (face seal)V-3/8 M GAZEL® 3/8" - Male (face seal)V-FI GAZEL® 1/4" - Internal Female (face seal)
4 - S e a t M a t e r i a l
K PCTFE (Kel-F®)
2 - P o r t s C o n f i g u r a t i o n s
2V1 2 ports in line
See below for other ports configurations
1 - S e r i e & S u r f a c e F i n i s h
SI 220 U Ra 0,15µm Ep. (6µin Ra)SI 220 V Ra 0,25µm Ep. (10µin Ra)SI 220 S Ra 0,4µm nonEP(15µin Ra)
3 - Body Material (others on request)
A AISI 316L, VARI AISI 316LH Hastelloy® (on request)
SI 220SI 220SI 220SI 220SI 220
SI 220DIAPHRAGMPRESSURE REGULATORFOR HP & UHP APPLICATIONS
PA R T N U M B E R
Example : SI 220U 2V1 A / K 10 b A/B : V-3/8 F1 2 3 4 5 6
H O W T O O R D E R
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Configurations
T E C H N I CA L DATAF E A T U R E a u n i q u e p r o v e n d e s i g n
D I M E N S I O N SC O N S T R U C T I O N M A T E R I A L S
SI22
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SI 220SI 220SI 220SI 220SI 220 SI 220SI 220SI 220SI 220SI 220
SI22
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Metal to metal seal toAtmosphere
Minimal wetted surfaces foroptimal purging
Controlled (PC)electropolishing
for better corrosion resistance
No spring in the wetted areafor zero particle emission
Excellent response at highand low pressures (droop,
hysteresis, creep)
2,3,4 or 6 ports optionsavailable
Ergonomic Design
Gas specific solutions(Body and Seat Materials)
Spherical ball for ultrasmooth control
Sealed bonnet forextra protection
diaphragm counterbalance springs
The SI 220 Regulator was created in response to the industry’s need for a Highflow, High Pressure, Springless, Tied DiaphragmRegulator for specialty source gas service, i.e. gas cabinets.The design and materials of construction, plus some unique features make it anideal choice for gas source applications with reactive and hazardous gases the Semiconductor and Allied Industries use.
• Unique features include a special leak test port that enables the diaphragm seal to be outboard leak tested ‹10-9 mbar.l/secrange at high pressure.
• Precise control of the gas discharge with minimum deviation caused by the supply pressure effect.• Counter balance springs outside the gas stream to ensure the unit functions correctly with downstream vacuum and upstream
high pressure• A unique spherical ball pressure pad to give ultra smooth delivery pressure adjustment• Choice of delivery pressure: 3, 8, 10, 15, 25 or 50 bar / 45, 116, 145, 217, 365 or 725 psi
S U R FAC E F I N I S HU: < Ra 0,15µm Ep. (6µin Ra) V: < Ra 0,25µm Ep. (10µin Ra) S:< Ra 0,4µm nonEP(15µin Ra)
Pa r t s M a t e r i a l sWetted parts Body AISI 316L, VAR, Hastelloy®
Diaphragm Hastelloy®
Seat PCTFE (Kel-F®)
Poppet AISI 316L, VAR, Hastelloy®
Non-wetted parts Bonnet Nickel Plated Brass
Handle Extruded Plastic
Others Stainless Steel or others
F L O W C U R V E S
Manufactured to the THREE STTHREE STTHREE STTHREE STTHREE STAR PROCESSAR PROCESSAR PROCESSAR PROCESSAR PROCESS®®®®®
T E C H N I CA L D ATA
Fluid Media Standard, High and Ultra High Purity, corrosive and non-corrosive gases Inlet pressure 240 bar (3500 PSI)
SI 15 U Ra 0,15µm Ep. (6µin Ra)SI 15 V Ra 0,25µm Ep. (10µin Ra)SI 15 S Ra 0,4µm nonEP(15µin Ra)
3 - Body Material (others on request)
A AISI 316L, VAR (on request)I AISI 316LH Hastelloy® (on request)
SI 15SI 15SI 15SI 15SI 15
SI 15HIGH FLOW DIAPHRAGMPRESSURE REGULATORFOR HP & UHP APPLICATIONS
PA R T N U M B E R
Example : SI 15U 2V1 A / K 8b A/B : V-M1 2 3 4 5 6
5 - Outlet Regulated Pressure
8b 8 bar - 120 psiNote: Inlet Pressure = upto 25 bar (360 psi)
Configurations
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T E C H N I CA L DATAF E A T U R E a u n i q u e p r o v e n d e s i g n
D I M E N S I O N SC O N S T R U C T I O N M A T E R I A L S
SI15
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SI 15SI 15SI 15SI 15SI 15 SI 15SI 15SI 15SI 15SI 15
SI15
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Minimal wettedsurfaces foroptimal purging
Controlled (PC)electropolishing
for better corrosion resistance
Excellent response(droop, hysteresis,
creep)
2,3,4 or 6 ports optionsavailable
Ergonomic Design
Spherical ball for ultrasmooth control
Sealed bonnet forextra protection
The SI 15 Regulator was created in response to the industry’s needs for High Flow Applications (tipically 1/2") for specialtysource gas service, i.e. gas cabinets.
• The balanced valve minimizes the effect of inlet pressure fluctuations on outlet pressure and reduces the efforts on the seat toincrease life time of the regulator
• Precise control of the gas discharge with minimum deviation caused by the supply pressure effect.• Excellent performance characteristics• A unique spherical ball pressure pad to give ultra smooth delivery pressure adjustment• Delivery pressure of 8 bar (120 psi)
S U R FAC E F I N I S HU: < Ra 0,15µm Ep. (6µin Ra) V: < Ra 0,25µm Ep. (10µin Ra) S:< Ra 0,4µm nonEP(15µin Ra)
Pa r t s M a t e r i a l sWetted parts Body AISI 316L, VAR, Hastelloy®
Diaphragm AISI 304
Seat NBR
Poppet AISI 316L, VAR, Hastelloy®
Non-wetted parts Bonnet Nickel Plated Brass
Handle Extruded Plastic
Others Stainless Steel or others
Manufactured to the THREE STTHREE STTHREE STTHREE STTHREE STAR PROCESSAR PROCESSAR PROCESSAR PROCESSAR PROCESS®®®®®
T E C H N I CA L D ATA
Fluid Media Standard, High and Ultra High Purity, corrosive and non-corrosive gases Inlet pressure 25 bar (360 PSI)
(Add - NO - for Normally Open version)(Add - NF - for normally close version)
Standard colour:for handles: white (other colours on request)for LP actuators: NO=green NF=bluefor HP actuators: NO/NF=white
GAZEL® -Female(face seal)*
BWO for standardwelding heads
GAZEL® -Male(face seal)*
7 - Options
MS Valve fitted with locking device (manual)FT Panel mounting— Back mountingCI Electric limit switch (LP actuators only)
5 - Seat Material
K PCTFE (Kel-F®)V PI (Vespel®)P PVDFM Metal (on request)
3 - Va l v e C o n f i g u r a t i o n s
2V1 2 ports in line
See below for other configurations
1 - Va l v e S e r i e s a n d S u r f a c e F i n i s h
M8.1U Ra 0,15µm EP (6 µin Ra)M8.1V Ra 0,25µm EP (10 µin Ra)M8.1S Ra 0,4µm nonEP (15 µin Ra)
Valve Configurations
SAGALOK Doublering fitting
M8.
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M8.1M8.1M8.1M8.1M8.1M8.1M8.1M8.1M8.1M8.1 T E C H N I CA L DATAF E A T U R E a u n i q u e p r o v e n d e s i g n
C O N S T R U C T I O N M A T E R I A L S
M8.
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D I M E N S I O N S
M8.1 Quarter turn (QT) valve
M8.1Bottom view
M8.1 Multi turn valve (MT)with on/off window
M8.1- High PressurePneumatic valve
M8.1- Pneumatic valveLow Pressure
Precisionelectropolishingof all internal surfaces
Laser weldeddiaphragm formaximum reliability
Compact size
Low particulegeneration
Selected Stainless Steels for low sulfurcontent as well as optimized impuritylevels
Visual Open/Closeindicator
Fully functionalfrom vacuum to
rated pressure
Aerodynamic fullyswept flow passage
Tied diaphragm designfor positive seat opening
and retractation
Excellentpurgeability
Unique high pressureoutboard leak test port
ø 25.4 (1.0)
The M8-1 was designed in response to the industry’s needs for a compact HIGH FLOW high/low pressure valve dedicated to gasdistribution techniques that require high flow rates. This valve is ideal for handling high flow gases such as HCl, N2O, etc. upstream anddownstream of the source regulator. Its compact size and standard panel mount holes enable it to be integrated into gas supplysystems where previously only standard valves with low Cv’s could be used.
M a n u a l A c t u a t i o n P n e u m a t i c Ac t u a t i o n
Va l v e G r a d e & M a t e r i a l s
Pa r t s M8.1S M8.1V M8.1U
Body SS 316L SS 316L SS 316L VAR
Wetted parts Surface Finish < 0,4 µm non EP (15µin Ra) < 0,25 µm EP (10µin Ra) < 0,15 µm EP (6µin Ra)
Diaphragm Hastelloy®
Seat Material Kel-F® (Vespel®, PVDF, metal on request)
Non-wetted Backup diaphragms Elgiloy®
parts all others Stainless Steel or alloys
Pa r t s f o r a l l v a l v e g r a d e s
Upper spindle Brass
Handle Aluminum or
Extruded Plastic
All others Stainless Steel or Alloys
Pa r t s Low Pressure High Pressure
Actuator Body SS 316 L Aluminum
Piston Aluminum
O-rings NBR - PC 851
All others Stainless Steel or Alloys
Manufactured to the THREE STTHREE STTHREE STTHREE STTHREE STAR PROCESS AR PROCESS AR PROCESS AR PROCESS AR PROCESS ®®®®®
T E C H N I CA L D ATA
Fluid Media Standard, High and Ultra High Purity, corrosive and non-corrosive gases
Max working pressure M8.1 Manual vacuum to 240 bar (3500 PSI)
(Add - NO - for Normally Open version)(Add - NF - for normally close version)
4 - Seat Material
K PCTFE (Kel-F®)V PI (Vespel®)P PVDFM Metal (on request)
1 - Va l v e S e r i e s a n d S u r f a c e F i n i s h
M4.1/M8.1VB U Ra 0,15µm EP (6 µin Ra)M4.1/M8.1VB V Ra 0,25µm EP (10 µin Ra)M4.1/M8.1VB S Ra 0,4µm nonEP (15 µin Ra)
VB= Standard vertical purge blockVT= Vee-Block with transverse purge portVTD= Vee-Block with right-hand purge portVTG= Vee-Block with left-hand purge port
6 - Options
MS Valve fitted with locking device (manual)FT Panel mounting— Back mountingCI Electric limit switch (LP actuators only)
3 - Body Material (others on request)
I AISI 316LA AISI 316L, VARH Hastelloy® (on request)
M 4.1/ M8.1VBM 4.1/ M8.1VBM 4.1/ M8.1VBM 4.1/ M8.1VBM 4.1/ M8.1VBM4.1/ M8.1VBM4.1/ M8.1VBM4.1/ M8.1VBM4.1/ M8.1VBM4.1/ M8.1VB T E C H N I CA L DATAF E A T U R E a u n i q u e p r o v e n d e s i g n
C O N S T R U C T I O N M A T E R I A L S
M4-
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D I M E N S I O N S
4 mounting holes M5 thread located 45°from center line on a 1.00 (25.4) circle
For right-hand purge only: please order under ref. M4.1-M8.1 VTD
For left-hand purge only: please order under ref. M4.1-M8.1 VTG
Developed fromproven M4.1/m8.1valve technology
Gas specific solutions (bodyand seat materials)
No spring in the wetted areafor zero particle emission
A t o t a l c o m p o n e n t s o l u t i o n , f r o m s o u r c e t o p r o c e s s
M20
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H O W T O O R D E R M20M20M20M20M20
2020202020
M20SPRINGLESS DIAPHRAGM VALVESFOR HP AND UHP APPLICATIONS(STANDARD AND GAS SPECIFIC)
PA R T N U M B E R
Example : M20 U MT 2V1 I / K A/B : B3/4 FT1 2 3 4 5 6 7
6 - End Connections for 2VPEG/2VPSG/2V1P2/2VI
V 3/4-F GAZEL® 3/4" - Female (Face Seal*)V 3/4-M GAZEL® 3/4" - Male (Face Seal*)B 3/4 BWO 3/4" (Butt Orbital Weld)B1 BWO 1” (Butt Orbital Weld)V1-M GAZEL® 1”- Male (Face Seal*)SAGALOK Double Ring Fittings on requestMetric BWO available on requestPurge port available as GAZEL® 1/4” male
3 - Valve Configurations2V1 2 ports in line2VPEG 2 Ports in line, upstream purge port - left side2VPSG 2 Ports in line, downstream purge port - left side2V1P2 2 Ports in line, 2 purge ports upstream/
downstream/left sideFor “Tee” configurations please refer to M12
1- Valve Series
M20-U UHP - Ra 0.15µm Ep. (6µin Ra)M20-V HP/UHP - Ra 0.25µm Ep. (10µin Ra)M20-S HP Version - Ra 0.4µm (15µin Ra) non EP
2 - Valve Actuation
MT Multi-Turn HandwheelPP2 Pneumatically actuated
(Normally close version)
Standard colour for handles: white (other colourson request)for pneumatic actuators: blue
7 - Options
FT Panel Mounting— Back MountingCI Electric Limit Switch (PP2 actuators)
5 - Seat Material
K PCTFE (Kel-F®)V PI (Vespel®)P PVDF
4 - Body Material (others on request)
I AISI 316 LH Hastelloy (on request)
GAZEL® -Female(face seal)*
BWO for standardwelding heads
GAZEL® -Male(face seal)*
Configuration withpurge ports
T E C H N I CA L DATAF E A T U R E a u n i q u e p r o v e n d e s i g n
C O N S T R U C T I O N M A T E R I A L S
M20
-lea
f 09-
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M20M20M20M20M20 M20M20M20M20M20
M20
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D I M E N S I O N S
M20-PP2
M20-MT
M20-Bottom view
D I M E N S I O N S
Metal to Metalsealing to
atmosphere
Tied diaphragm design for positiveseat opening and retractation
Low particle emission
Fully swept flow path
Small internal volume
Easy purgeability
Reduced gas absorption anddesorption from seat material
Clean operation, no rubbing
Fully containedSeat
Selected Stainless Steels for lowsulfur content as well as
optimized impurity levels
Excellent flow coefficient
Manufactured to the THREE STTHREE STTHREE STTHREE STTHREE STAR PROCESSAR PROCESSAR PROCESSAR PROCESSAR PROCESS®
P n e u m a t i c Ac t u a t i o n
Pa r t s PP2
O-ring NBR
Actuator Body Aluminum Anodized
M a n u a l Ac t u a t i o n
Upper Spindle Stainless Steel
Handle Aluminum
All others Stainless Steel or Alloys
Va l v e G r a d e & M a t e r i a l s
Pa r t s S V UBody Stainless Steel 316L
Body Surface Finish < 0,4 µm (15µin Ra) non EP < 0,25 µm (10µin Ra) EP < 0,15 µm (6µin Ra) EP
Diaphragms Elgiloy®
Seat material PCTFE (Kel-F®) / PVDF or Vespel® (on request)
Backup diaphragm Elgiloy®
All others Stainless Steel or alloysNon-wetted parts
Wetted parts
T E C H N I C A L DAT A
Fluid Media High and Ultra High Purity, corrosive and non-corrosive gases
Max operating pressure M20 MT manual 15 bar (215 PSI)
M20 PP2 pneumatic 15 bar (215 PSI)
Min. operating pressure Vacuum (for manual only)
Actuator opening pressure 5 to 7 bar (75 to 105 PSI)
A t o t a l c o m p o n e n t s o l u t i o n , f r o m s o u r c e t o p r o c e s s
M12
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2
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H O W T O O R D E R M12M12M12M12M12
1212121212
M12SPRINGLESS DIAPHRAGM VALVESFOR HP AND UHP APPLICATIONS(STANDARD AND GAS SPECIFIC)
PA R T N U M B E R
Example : M12 U MT 2V1 I / K A/B : B1/2 FT1 2 3 4 5 6 7
6a - End Connections for 2VPEG/2VPSG/2V1P2/2VI
V 1/2-F GAZEL® 1/2" - Female (Face Seal*)V 1/2-M GAZEL® 1/2" - Male (Face Seal*)B 1/2 BWO 1/2" - (Butt Orbital Weld)B 3/4 BWO 3/4" (Butt Orbital Weld)SAGALOK (Double Ring Fittings on request)Metric BWO available on requestPurge port available as BWO 1/4” or GAZEL® 1/4” male
6b - End Connections for 3VT/3VTPSB 1/2 BWO 1/2" - (Butt Orbital Weld)B 3/4 BWO 3/4" (Butt Orbital Weld)B1 BWO 1” (Butt Orbital Weld)V1/2-F GAZEL® 1/2" - Female (Face Seal*)V1/2-M GAZEL® 1/2" - Male (Face Seal*)V3/4-M GAZEL® 3/4" - Male (Face Seal*)V3/4-F GAZEL® 3/4" - Female (Face Seal*)SAGALOK (Double Ring Fittings on request)Branch available as GAZEL® 1/4” or BWO 1/4” or 1/2”Metric BWO available on requestPurge port available as GAZEL® 1/4” male
3 - Valve Configuration2V1 2 ports in line2VPEG 2 Ports in line, upstream purge port - left side2VPSG 2 Ports in line, downstream purge port - left side2V1P2 2 Ports in line, 2 purge ports upstream/
downstream/left side3VT 2 ports in line, full passage, downstream
branch (“Te” Valve)3VTPS 2 ports in line, full passage, downstream
branch, downstream purge port
1- Valve Series
M12-U UHP - Ra 0.15 µm Ep. (6 µin Ra)M12-V HP/UHP - Ra 0.25 µm Ep. (10 µin Ra)M12-S HP Version - Ra 0.4 µm non EP (15 µin Ra)
2 - Valve Actuation
MT Multi-Turn HandwheelPP2 Pneumatically actuated
(Normally close version)
Standard colour:for handles: white (other colours on request)for pneumatic actuators: blue
4 - Body Material (others on request)
I AISI 316 LH Hastelloy® (on request)
7 - Options
FT Panel Mounting— Back MountingCI Electric Limit Switch (PP2 actuators)
5 - Seat Material
K PCTFE (Kel-F®)V PI (Vespel®)P PVDF
GAZEL® -Female(face seal)*
BWO for standardwelding heads
GAZEL® -Male(face seal)*
Configuration withpurge ports
Configuration 3VT
T E C H N I CA L DATAF E A T U R E a u n i q u e p r o v e n d e s i g n
C O N S T R U C T I O N M A T E R I A L S
M12
-lea
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M12M12M12M12M12 M12M12M12M12M12
M12
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2
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D I M E N S I O N S
Metal to Metalsealing to
atmosphere
Tied diaphragm design for positiveseat opening and retractation
Low particle emission
Fully swept flow path
Small internal volume
Easy purgeability
Reduced gas absorption anddesorption from seat material
Clean operation, no rubbing
Fully contained Seat
Selected Stainless Steels for lowsulfur content as well as
optimized impurity levels
Excellent flow coefficient
P n e u m a t i c Ac t u a t i o n
Pa r t s PP2
O-ring NBR
Actuator Body Aluminum Anodized
M a n u a l Ac t u a t i o n
Upper Spindle Stainless Steel
Handle Aluminum
All others Stainless Steel or Alloys
Va l v e G r a d e & M a t e r i a l s
Pa r t s S V UBody Stainless Steel 316L
Body Surface Finish < 0,4 µm (15µin Ra) non EP < 0,25 µm (10µin Ra) EP < 0,15 µm (6µin Ra) EP
Diaphragms Elgiloy®
Seat material PCTFE (Kel-F®) / PVDF or Vespel® (on request)
Backup diaphragm Elgiloy®
All others Stainless Steel or alloysNon-wetted parts
Wetted parts
M12-PP2
M12-MT
M12-Bottom view
D I M E N S I O N S
Manufactured to the THREE STTHREE STTHREE STTHREE STTHREE STAR PROCESSAR PROCESSAR PROCESSAR PROCESSAR PROCESS®®®®®
Fluid Media High Purity and UHP, corrosive and non-corrosive gases
Max operating pressure M12 MT manual 15 bar (215 PSI)
M12 PP2 pneumatic 15 bar (215 PSI)
Min. operating pressure Vacuum (for manual only)
Actuator opening pressure 5 to 7 bar (75 to 105 PSI)
MT Multi-Turn HandwheelLP Pneumatically actuated - normally closeStandard Colour:for handles: white (other colours on request)for LP actuators: NF=blue
4 - Body Material (others on request)
I AISI 316L
L 16
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2
5 - Seat Material
K PCTFE (Kel-F®) 6 - End Connections
V 1/2-F GAZEL® 1/2" - Female (Face Seal*)V 1/2-M GAZEL® 1/2" - Male (Face Seal*)B 1/2 BWO 1/2" - (Butt Orbital Weld)B 3/4 BWO 3/4" - (Butt Orbital Weld)SAGALOK Double Ring Fittings and metric ButtOrbital Weld available on request
3 - Valve Configurations
2V1 2 ports in line3VT 2 ports in Line « Full passage »;
downstream branch « Te valve »
1 - Valve Series & Surface finish
L16 V - Ra 0.25µm Ep. (10 µin Ra)
7 - Options
FT Panel Mounting— Back MountingCI Electric Limit Switch (LP Actuator)
Same dimensions for : GAZEL® Male or Female (Face seal), and BWO (for Butt Orbital Weld)).
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LLLLL1616161616
A t o t a l c o m p o n e n t s o l u t i o n , f r o m s o u r c e t o p r o c e s s
L 16DIAPHRAGM LINE VALVE FORHIGH PURITY LIQUID APPLICATIONS
L 16
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H O W T O O R D E R L16L16L16L16L16
2V1= 2 ports
3VT= Tee Valve
T E C H N I CA L DATAF E A T U R E a u n i q u e p r o v e n d e s i g n
D I M E N S I O N SC O N S T R U C T I O N M A T E R I A L S
L 16
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L16L16L16L16L16 L16L16L16L16L16
Fully functional fromvacuum to rated pressure
Precision electropolishingof all internal surfaces
Low particulegeneration
Excellent purgeability
Aerodynamic fullyswept flow passage
L 16
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Manufactured to the THREE STTHREE STTHREE STTHREE STTHREE STAR PROCESSAR PROCESSAR PROCESSAR PROCESSAR PROCESS®®®®®
Selected Stainless Steels forlow sulfur content as well asoptimized impurity levels
Va l v e G r a d e & M a t e r i a l s
Pa r t s L16V
Body SS 316L
Surface Finish < 0.25 µm EP (10 µin Ra)
Diaphragm Elgiloy®
Seat material PCTFE (Kel-F®)
Backup diaphram Elgiloy®
All others Brass, Stainless Steel or alloys
Parts
Actuator Body Aluminium
Piston Aluminium
Upper spindel Brass
O-rings Nbr-PC 851
All others Stainless steel 316L
P n e u m a t i c A c t u a t i o n
Parts for all valve grades
Upper spindel Brass
Handle AluminiumAll others Stainless Steel 316L
M a n u a l A c t u a t i o n
T E C H N I CA L DAT A
Fluid Media Standard, HP, High purity, corrosive and non-corrosive fluid
Certified max. Helium across the seat leak rate (at max. pressure) <10-7 mbar.l/sec
Wetted volume < 21.6 cc
Mounting Panel or back mounting
Non-wettedParts
L16 LP
Dimensions H
Open Close
Manual MT 103 (4,06”) 100,5 (3,96”)
Pneumatic LP 141,5 (5,57”)
Wetted Parts
L16 Button-view
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Individual serial numberfor full traceability
Assembling, testing and packagingin cleanroom class 10
L16 MT
D I M E N S I O N S KD/KYKD/KYKD/KYKD/KYKD/KY
KD
/KY-
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K D f u l l f l o w Va l v e s - O u t l i n e d i m e n s i o n sValve Serie Flow Length Length Length Height Height Height Diameter Dim. Dim. Body Height to Aprox.
Coefficient Body End Conn. Total Body Total Total+Grip Handle Ppi to Conn Ppo to Conn Width tub. center WeightCV LB LEC LT HB HBT HBT* WD Ppi Ppo lg HTC
KD/KYBELLOWS SEALED SHUT OFF LINE VALVES FORUHP AND HP BULK GAS APPLICATIONS
KD
/KY-
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K Y h i g h f l o w Va l v e s - O u t l i n e d i m e n s i o n sValve Serie Flow Length Length Length Height Height Height Diameter Dimension Dimension Body Height to Aprox.
Coefficient Body End Conn. Total Body Total Total+Grip Handle PPi to Conn. PP to PP Width tube center WeightCV LB LEC LT HB HBT HBT* WD Ppi Ppo lg HTC
A t o t a l c o m p o n e n t s o l u t i o n , f r o m s o u r c e t o p r o c e s s
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Easy grip handle
Very smooth operationeven at 30 bar
Very high Cv Values
End connections invarious tube sizes(metric and imperial)
Positive shut off to preventover torquing of overstressing the bellows
Compact design
Electro-polished wettedsurfaces down to Ra<10µinch (0,25 µm)
KD
/KY-
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The KD and KY valves are bellows sealed shut off line valves designed for UHP and HP Piping systems.The high integrity makes these valves suitable for a wide range of toxic hazardeous, corrosive orflammable fluid applications: bulk gas distribution systems, indoors gas distribution systems, vacuumpiping systems, centralized distribution systems for solvents
Limited KEL-F surfaceexposed to the fluid toprevent from permeation
Integrated versionsavailable
Tube extensions, purgeconnections or fittings
available
No internal particleshedding components
Individual serial numberfor full traceability
High Flow bellow sealed valve11/2" up to 4"
Assemblind, testing &packaging in Class 10
Cleanroom
Double bag packagingwith Nitrogen supplied
from liquid source
Cleaned for highpurity service
High resolution spindle
Full flow bellow sealed Valvefrom 1/2" up to 1"
F E A T U R E a u n i q u e p r o v e n d e s i g n