High Temperature Ferric Chloride Etching Temperature Ferric Chloride Etching An Evaluation of the Process Randy Markle. Chemcut

High Temperature Ferric Chloride Etching

An Evaluation of the Process

Randy MarkleChemcut

MaterialsCarbon Steel 1020 – 0.2%C, 0.45%Mn, 0.25%Si

301 Stainless Steel – 17%Cr, 7%Ni, 0.15%C

304 Stainless Steel – 18.5%Cr, 9.5%Ni, 0.08%C

316 Stainless Steel – 17%Cr, 12%Ni, 2.25%Mo, 0.08%C

410 Stainless Steel – 12%Cr, 0.15%C

430 Stainless Steel – 17%Cr, 0.12%C

Kovar – 29%Ni, 17%Co

Brass – Alloy 260 (Cartridge Brass) – 70%Cu, 30%Zn

Copper – Alloy 110 – 99.9%Cu (min)

Test Image

Process StepsShear to size6” x 6” (15.2cm x 15.2cm)

DegreaseSolvent clean

CleanHand scrubbed & chemical dip

LaminateHot roll laminator, FX930

ExposeTamarack 161B

DevelopChemcut CC8000

EtchChemcut Model 2315

StripChemcut CC8000

Cross sectionBuehler equipment

MeasureVideo-scope

CalculationsGraph & Analyze

Developing

Chemcut CC8000 Developing SystemAtotech Imagine DS – 1.5% v/vTemperature – 85°F (29.4°C) Spray Pressure – 30psi (2.1 bar) Conveyor Speed – 72ipm (1.8 m/m) Dwell Time – 35 seconds

Model 2315

Etching ParametersEtching Solution – RCE SolutionSpecific Gravity – 42°Be (1.41) Free Acid - ~ 0.6%ORP - ~580mvSpray Pressure – 40psi (2.8 bar) Oscillation Rate – 30spmConveyor Speed – 5.0ipm (12.7 cm/m) Etch Time – 4.0 minutes

Stripping

Chemcut CC8000 Stripping SystemRD-56 from RD Chemicals – 10% solutionTemperature – 130°F (54.4°C) Spray Pressure – 30psi (2.1 bar) Conveyor Speed – 18ipm (45.7 cm/m) Stripping Time – 2.0 minutes

5.0-mil (127µ) line 410 Stainless Steel

Calculations from Measurements

Top Spray Etch Rate (mils/min) 130ºF

0.000.250.500.751.001.251.501.752.002.252.502.75

5.0 7.5 10.0 12.5 15.0

Opening Size (mils)

Etch

Rat

e (m

lis/m

in) Steel

301 SST304 SST316 SST410 SST430 SSTKovarBrassCopper

Top Spray Etch Rate (mils/min) 160ºF

0.000.250.500.751.001.251.501.752.002.252.502.753.003.253.50

5.0 7.5 10.0 12.5 15.0

Opening Size (mils)

Etch

Rat

e (m

ils/m

in) Steel


Etch Rate Increase – Top Spray Top Etch Rate Increase from 130F to 160F

Opening Size - Mils AverageMaterial 5.0-mils 7.5-mils 10.0-mils 12.5-mils 15.0-mils Increase

Steel 33.1% 30.2% 39.9% 47.3% 46.7% 39.4%301 SST 38.1% 26.7% 20.0% 16.5% 11.4% 22.5%304 SST 51.8% 29.3% 29.9% 30.3% 27.6% 33.8%316 SST 22.3% 35.7% 43.2% 39.6% 41.1% 36.4%410 SST 22.3% 28.7% 32.0% 28.7% 28.1% 28.0%430 SST 33.5% 35.3% 35.4% 37.2% 40.5% 36.4%

Kovar 38.7% 36.4% 45.1% 46.4% 41.9% 41.7%Brass 31.7% 25.0% 28.4% 31.2% 31.3% 29.5%Copper 32.4% 30.4% 33.3% 29.9% 32.6% 31.7%

Bottom Spray Etch Rate (mils/min) 130ºF

0.00

0.25

0.50

0.75

1.00

1.25

1.50

1.75

2.00

5.0 7.5 10.0 12.5 15.0

Opening Size (mils)

Etch

Rat

e (m

ils/m

in) Steel


Bottom Spray Etch Rate (mils/min) 160ºF

0.00

0.25

0.50

0.75

1.00

1.25

1.50

1.75

2.00

2.25

5.0 7.5 10.0 12.5 15.0

Opening Size (mils)

Etch

Rat

e (m

ils/m

in) Steel


Etch Rate Increase – Bottom SprayBottom Etch Rate Increase from 130F to 160F

Opening Size - Mils AverageMaterial 5.0-mils 7.5-mils 10.0-mils 12.5-mils 15.0-mils Increase

Steel 27.5% 27.7% 45.0% 29.4% 31.9% 32.3%301SST 48.2% 58.1% 49.3% 45.6% 37.3% 47.7%304SST 19.4% 30.1% 32.1% 25.8% 28.1% 27.1%316SST 39.9% 34.5% 31.9% 40.0% 44.8% 38.2%410SST 34.6% 40.1% 38.1% 37.1% 29.3% 35.8%430SST 43.4% 35.8% 34.4% 34.2% 30.7% 35.7%Kovar 35.8% 34.1% 35.9% 33.2% 35.1% 34.8%Brass 34.1% 31.0% 32.6% 32.3% 30.5% 32.1%

Copper 47.8% 42.1% 44.7% 45.1% 44.5% 44.8%

Typical Etching Trend

5.0 7.5 10.0 12.5 15.0

130F

140F150F

160F

0.0

0.5

1.0

1.5

2.0

2.5

3.0

Etch

Rat

e (m

il/m

in)

Opening Size (mils)

Etch Temperature

Copper Etch Rate - Bottom

Steel Etch RatesAverage Increase - 36.0%, 0.11-mil/10ºF

1.52

1.09 1.12

1.36

0.740.87

0.950.98

1.25

0.921.00

1.16

0.00

0.25

0.50

0.75

1.00

1.25

1.50

1.75

2.00

130F 140F 150F 160FEtch Temperature

Etch

Rat

e (m

ils/m

in)

Top SprayBottom SprayAverage

Top - 39.5% Increase

Bottom - 32.4% Increase

301 SST Etch RatesAverage Increase - 33.6%, 0.07-mil/10ºF

1.08

0.93

1.07

0.910.90

0.780.67

0.630.53

0.87

0.770.72

0.00

0.20

0.40

0.60

0.80

1.00

1.20

1.40

1.60

130F 140F 150F 160F

Etch Temperature

Etch

Rat

e (m

ils/m

in)





1.10

1.361.18

1.031.03

0.830.79

0.730.65

0.99

0.880.84

0.00

0.20

0.40

0.60

0.80

1.00

1.20

1.40

1.60

1.80


Etch

Rat

e (m

ils/m

in)





1.44

0.91

1.30

1.111.05

0.85

0.750.66

1.181.08

0.930.86

0.00

0.20

0.40

0.60

0.80

1.00

1.20

1.40

1.60

1.80


Etch

Rat

e (m

ils/m

in)

Top SprayBottom Spray

Average




1.48

1.241.16 1.36 1.34

0.730.84

0.950.990.95

1.10 1.15

0.00

0.20

0.40

0.60

0.80

1.00

1.20

1.40

1.60

1.80


Etch

Rat

e (m

ils/m

in)





0.95

1.04

1.33 1.31

1.42

0.700.77

0.890.87

1.05 1.10 1.19

0.00

0.20

0.40

0.60

0.80

1.00

1.20

1.40

1.60

1.80

130F 140F 150F 160F

Etch Temperature

Etch

Rat

e (m

ils/m

in)




Kovar Etch RatesAverage Increase - 38.1%, 0.11-mil/10ºF

1.341.22

1.110.95

0.980.93

0.84

0.73

1.161.080.98

0.84

0.00

0.20

0.40

0.60

0.80

1.00

1.20

1.40

1.60

1.80

130F 140F 150F 160F

Etch Temperature

Etch

Rat

e (m

ils/m

in)




Brass Etch RatesAverage Increase - 35.0%, 0.21-mil/10ºF

2.872.59

2.282.22

1.981.81

1.61

1.37

2.432.20

1.951.80

0.00

0.50

1.00

1.50

2.00

2.50

3.00

3.50


Etch

Rat

e (m

ils/m

in)




Copper Etch RatesAverage Increase - 31.9%, 0.19-mil/10ºF

2.81

2.38

2.502.46

2.13

1.951.861.64

1.48

2.182.05

1.81

0.00

0.50

1.00

1.50

2.00

2.50

3.00

3.50

130F 140F 150F 160F

Etch Temperature

Etch

Rat

e (m

ils/m

in)




Undercut Ratios – Top SprayPre-etch Undercut Comparison as a Ratio of the Vertical Etch

Etch Temp Opening Steel 301 SST 304 SST 316 SST 410 SST 430 SST Kovar Brass Copper5.0-mil 2.0 1.7 2.0 2.6 2.5 2.7 1.7 2.2 2.17.5-mil 2.1 1.9 2.0 2.1 2.8 2.6 1.8 2.3 2.3

130F 10.0-mil 2.2 1.9 2.2 2.1 3.0 2.8 1.9 2.4 2.512.5-mil 2.2 2.1 2.3 2.1 3.2 2.8 1.9 2.4 2.515.0-mil 2.2 2.1 2.3 2.0 2.9 2.7 1.9 2.5 2.5

Average Undercut Ratio 2.14 1.94 2.16 2.18 2.88 2.72 1.84 2.36 2.385.0-mil 2.2 2.1 2.2 2.1 2.6 2.4 1.9 2.0 2.17.5-mil 1.9 2.1 2.3 2.4 2.6 2.5 2.0 2.1 2.1

160F 10.0-mil 2.0 2.1 2.4 2.5 2.7 2.9 2.1 2.1 2.212.5-mil 2.4 2.3 2.8 2.5 2.8 2.8 2.2 2.6 2.115.0-mil 2.3 2.2 2.4 2.5 2.4 3.2 2.2 2.3 2.4

Average Undercut Ratio 2.16 2.16 2.42 2.40 2.62 2.76 2.08 2.22 2.18

Undercut Ratios – Bottom Spray

Pre-Etch Undercut Comparison as a Ratio of the Vertical EtchEtch Temp Opening (u) Steel 301SST 304SST 316SST 410SST 430SST Kovar Copper Brass

5.0-mil 2.8 1.2 1.4 1.5 2.3 1.9 1.4 2.7 2.87.5-mil 2.9 1.4 1.6 1.6 2.6 2.1 1.7 3.2 3.0

130F 10.0-mil 3.6 1.3 1.8 1.9 3.0 2.4 1.7 3.4 3.112.5-mil 2.7 1.4 2.0 2.0 3.0 2.5 1.8 3.4 3.115.0-mil 2.8 1.4 1.8 1.8 3.0 2.3 1.7 3.2 3.1

Average Undercut Ratio 3.0 1.3 1.7 1.8 2.8 2.2 1.7 3.2 3.05.0-mil 2.4 1.8 3.0 2.3 2.7 2.2 2.0 2.7 2.57.5-mil 2.5 2.0 2.7 2.5 3.0 2.4 2.2 2.7 2.5

160F 10.0-mil 2.6 2.2 2.9 2.8 3.2 2.6 2.4 2.8 2.612.5-mil 2.8 2.3 3.0 2.7 3.3 2.7 2.3 2.8 2.815.0-mil 3.0 2.1 3.0 2.9 3.2 2.7 2.4 2.9 2.8

Average Undercut Ratio 2.7 2.1 2.9 2.6 3.1 2.5 2.3 2.8 2.6

Steel Undercut Ratios

2.16

2.66

2.362.14

2.04 2.02

2.44

2.32

2.95

2.222.22

2.52

0

0.5

1

1.5

2

2.5

3

3.5

130F 140F 150F 160F

Etch Temperature

Und

ercu

t Rat

ios


Average - 2.33

St. Dev. - 0.10

301 SST Undercut Ratios

2.09

2.162.141.961.94

1.34

1.601.74

1.941.731.67

0

0.5

1

1.5

2

2.5

3

130F 140F 150F 160F

Etch Temperature

Und

ercu

t Rat

ios


Average - 1.86 St. Dev. - 0.19


2.16 2.20

2.562.66

2.92

2.48

2.14

1.72

2.76

1.96

0

0.5

1

1.5

2

2.5

3

3.5

130F 140F 150F 160F

Etch Temperature

Und

ercu

t Rat

ios


Average - 2.33

St. Dev. - 0.36


2.402.20

1.94

2.18

2.642.54

2.06

1.76

2.51

1.991.96

2.31

0

0.5

1

1.5

2

2.5

3

130F 140F 150F 160F

Etch Temperature

Und

ercu

t Rat

ios


Average - 2.19

St. Dev. - 0.26


2.62

3.08

2.742.872.88

2.642.88

3.082.80

2.78

0

0.5

1

1.5

2

2.5

3

3.5

4

130F 140F 150F 160F

Etch Temperature

Und

ercu

t Rat

ios

Top SprayBottom SprayAvergae

Average - 2.83

St. Dev. - 0.07


2.522.662.762.72 2.66 2.70

2.442.24

2.522.50

0

0.5

1

1.5

2

2.5

3

3.5

4

130F 140F 150F 160F

Etch Temperature

Und

ercu

t Rat

ios


Average - 2.58

St. Dev. - 0.08

Kovar Undercut Ratios

2.082.02

1.781.84

2.26

1.621.66

2.16

1.691.76

0

0.5

1

1.5

2

2.5

3

130F 140F 150F 160FEtch temperature

Und

ercu

t Rat

ios


Average - 1.89

St. Dev. - 0.21

Brass Undercut Ratios

2.22

2.64

2.302.18

2.36

3.063.203.02

2.48

2.702.652.64

0

0.5

1

1.5

2

2.5

3

3.5

4

130F 140F 150F 160F

Etch Temperature

Und

ercu

t Rat

ios


Average - 2.62

St. Dev. - 0.10

Copper Undercut Ratios

2.18

2.782.60

2.102.26

2.38

2.862.86

3.18

2.60 2.502.70

0

0.5

1

1.5

2

2.5

3

3.5

4

130F 140F 150F 160F

Etch Temperature

Und

ercu

t Rat

ios


Average - 2.60

St. Dev. - 0.08

FindingsEtch rate increases with temperature increaseSteel alloys – 34.0% to 36.0%

~ 0.1-mil for each 10º FCopper alloys – 32.0% to 35.0%

~ 0.2-mil for each 10º FNo appreciable effect on undercut ratioSteel alloys – 2.3 averageCopper alloys – 2.6 average

Discussion

Footprint – EqualThroughput – 30% to 40% morePerformance – Equal to PVC equipmentCost – More than PVC equipmentLife expectancy – Could be less

High Temperature Ferric Chloride Etching

An Evaluation of the Process

Randy MarkleChemcut

High Temperature Ferric Chloride Etching Temperature Ferric Chloride Etching An Evaluation of the Process Randy Markle. Chemcut

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