H-1 Digital Scale and DRO Systems INDEX Digimatic Scale Units SD ABSOLUTE Digimatic Scale Units H-2,3 ABSOLUTE Digimatic Scale Units H-4,5 Quill Kit with Absolute Encoder H-6 Linear Scales H-7 KA Counter H-8 KLD200 Counter H-8 Linear Scales Linear Scale Counter H-9 Digital Readout/ DRO packages 2-Axis/3-Axis Travels H-10 Linear Scales ABS AT715 H-11 Linear Scales AT103 H-12 Linear Scales AT116 H-13 Linear Scales AT113 H-14 Linear Scales AT112-F H-15 Linear Scales AT181 H-16 Linear Scales AT402E H-17 Linear Scales AT203 H-18 Linear Scales AT216-T / AT216-TL H-19 AT211-A (Multipoint mounting), AT211-B (Double-end mounting)" H-20 Linear Scales ABS AT300 H-21 Linear Scales ABS AT500 H-22 MICSYS H-23 Fiber Scale ST-F11 H-24,25 Linear Scales ST36 H-26 Linear Scales ST24 H-27 Linear Scales ST422 H-28 Linear Scales ST46-EZA H-29 Linear Scales ABS ST700 H-30 Pulse signal interface unit PSU-200 H-31 Serial signal interface unit PSU-200 H-31 Quick Guide to Precision Measuring Instruments Linear Scales H-32,33 2D Image Correlation Encoder Digimatic Scale Units Linear Scales ABS AT500-S ABS AT500-H ABS ST700 MICSYS-SA1 H ST-F11 Fiber Scale
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H Digital Scale and DRO Systems Digimatic INDEX Scale ... · ABSOLUTE Digimatic Scale Units H-4,5 ... ABSOLUTE Digimatic Scale Units ... 572-465 SD-60E 0-600mm 0.05mm 572-466 SD-80E
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H-1
Digital Scale and DRO Systems
INDEXDigimatic Scale UnitsSD ABSOLUTE Digimatic Scale Units H-2,3ABSOLUTE Digimatic Scale Units H-4,5Quill Kit with Absolute Encoder H-6Linear Scales H-7KA Counter H-8KLD200 Counter H-8Linear Scales Linear Scale Counter H-9Digital Readout/ DRO packages 2-Axis/3-Axis Travels
available for SD-G, SD-D, SDV-D)•Doublereadingfunction(AvailableonlyforSD-F or
SDV-F)•Directionswitchfunction NotavailableforSD-G, SD-D, SDV-D, SD-F, SDV-F)•Holdfunction*•Measurementvaluecompositionerroralarm•Lowbatteryalarm•Outputfunction*ToactivatetheholdfunctionwhenusingSD-D or
SDV-D, an optional hold unit is required. Simultaneous activation with the output function is not available.
SD-G are also available to special order.*Theseunitsuse1.5Vsilveroxidecellsforthepower
supply. Therefore, when the units are directly fixed to the frame of a machine tool that requires a high voltage, malfunction such as display digit fluctuations and errors may occur. The countermeasure examples are described in the user manuals provided.
Please contact Mitutoyo for other special orders.
Detector head mechanism
Special applications
Horizontal single-function type572-202-20 SD-20DX
Horizontal single-function type (Water-proof type)572-602 SD-20G
Horizontal multi-function type572-461 SD-15E
Verticalmulti-functiontype572-561 SDV-15E
Verticalsingle-functiontype572-303-10 SDV-30D
As a measurement jig for outdoor use (SD-G)
H-3
[Scale units] [Display units]
System Diagram
Single-function type with high dust/water resistance
Single-function type
Multi-function type
Multi-function type
SD-D (Horizontal)
SDV-D (Vertical)
SD-G EC Counter*3
No.542-007A
SD-E (Horizontal)
SDV-E (Vertical)
SD-F (Horizontal)
SDV-F (Vertical)
Digimatic mini-processorDP-1VRNo.264-504-5A
MultiplexerMIG-4USBNo.64AAB387
Input Tool (USB keyboard signal conversion model)
IT-012UNo.264-012-10
Tolerance judgment output*1
RS-232C/USB output
USB keyboard signal conversion
* 1: Select the tolerance judgment output or digimatic output when setting the parameters.* 2: Connecting cable with the water-proof type output switch can be used only for SD-G or Water-proof Digital Caliper CD-15/20/30PM equipped with external output function.* 3: Connecting of SD series and DP-1VR/MIG-UUSB/IT-012U is also available without passing through the EC counter. In this case, connect these units and SD series with the cables used for the connection with the EC counter.
* Connection to an RS-232C conversion type (IT-007R) or a PS/2 keyboard signal conversion type (IT-005D) input tool is also available.
Connecting cable with the water-proof type output switch*2 40”/ 1m : No.05CZA624 80”/ 2m : No.05CZA625
Connecting cable with the output switch 1m : No.959149 2m : No.959150
SPECIFICATIONS Order No. Description053906B Digimatic Quill Kit complete with brackets
& scale for Bridgeport Type machines.
Quill Kit with AbSoLUtE EncoderEasy Installation Fits Most Vertical Knee Mills
FEATURES• EasytoreadLCDwithresolutionof .0005”/0.01mm. 0 -5" Travel inch/mm• Pushbuttoncontrolsforinch/mm, Zero-Set and On/Off.• PoweredbyasingleSR-44Batterywhich lasts about 1 year with normal use.• SPCOutputfordatatransmissiontoData Processors or a Remote Display.
The Mitutoyo Quill Kit mounted on a vertical mill.
Optional Accessories09CAB217 RS-232C Code out unit 12AAA882 RS-232CCONNECTINGCABLE64AAB336 RS-232C Footswitch (use w/09CAB217) 06ACF941 EXTERNALCABLE 965004 RS-232C EXT .LOAD FOOT SWITCH (use w/ 06ACF941)936553 External Zero Box (use w/ 06ACF941)937328 External Load Box (use w/ 06ACF941)264-504-5ADP-1VR,120VAC09EAA094 RS-232CCONNECTINGCABLETODP-1VR06ACB391 Adapter cable for connecting AT211, AT202, AT212 06ACB392 Adapter cable for connecting exposed linear scales such as ST46EZA, etc .06ACB393 Adapter cable for connecting Linear Gages with origin point (542 series) 06ACB913 Adapter cable for connecting Linear Gages without origin point (542 series)
174-173AKA-12
174-147AKLD-214
KA CounterSERIES 174 — Standard Type
KLD200 CounterSERIES 174 — Special Purpose Type with Limit Signal Output •Counterdesignedtosignalwhena
linear scale displacement value and a preset limit value coincide.
•Twotypesoflimitsettingsareavailable:2-step (KLD-212) and 4-step (KLD-214).
Diameter display Available AvailableMemorization/Reproduction of the scale reference point*1 Available Available
1/2 calculation Available Available
ABS/INCcoordinateselection Available —
Bolt-hole circle machining Available*2 —
Pitch machining Available —
Zero approach machining Available —
2-axis arithmetic addition display Available*3 —
Linear error compensation Available Available
Smoothing Available Available
Memory backup Available Available
Expansion/contraction coefficient setting — Available
Lower digit blanking out Available Available
External zero-setting l*4 Available
RS-232C output l Available
Limit signal output — Available
Error messages and remedies Available Available
Available (Provided as standard) l:Option*1:AvailableonlywhenAT100seriesisconnected*2:Notavailablewhendisplaying1axis.*3:Availableonlyforthe3-axiscounter(KA-13)*4:AvailablebyusingtheRS232Ccodeoutunit(09CAB217)
09AAA207
09AAA198
Adapter Cross Reference(for adapting old Linear Scales to new counters, or new Linear Scales to old counters)
Linear Scale Series No’s. Adapter No. CountersOld Linear Scales
with 6 pin round connectors
FOR AT2-N,AT2,AT-11N,
AT11,AT12N(529 Series)09AAA207
All KA, KS, KC, UDR Series Counters with 15 pin connectors. (All 174 Series)
NewLinearScalesw/15 pin
D-Sub connectors
FOR AT102, AT103, AT111, AT112, AT113, AT115,
AT116, AT181
09AAA181For all .0001” resolution counters with seven pin round connectors
Order No. Description64PKA065 MILL pkg, 3-axis, ABS Scales, 12” x 30” x 6”, w/3 axis KA Counter (174-175A)64PKA066 MILL pkg, 3-axis, ABS Scales, 12” x 36” x 6”, w/3 axis KA Counter (174-175A)64PKA067 MILL pkg, 3-axis, ABS Scales, 16” x 36” x 6”, w/3 axis KA Counter (174-175A)
2 Axis, KA Counter Milling SystemPackage Includes:•KACounter•AT715Electro-MagneticAbsoluteLinearScales
•A wide variety of measuring ranges are available in this standard type scale unit.
•Connectable to the KA counter, KLD counter, or PSU-200.
Linear Scales AT103SERIES 539 — Standard Type
SPECIFICATIONSModel AT103Effective range 4" to 240" / 100 to 6000mm (42 models) Resolution .001" to .000005" / 0.01 to 0.0001mm
Accuracy (20°C) Effective range 100to3000: (5+5L0/1000)μm Effectiverange3250to6000:(5+8L0/1000)μm
Output signal Two 90° phase-shifted sinusoidal signalsMaximum response speed 120m/min (50m/min when the effective measuring length is 3250 to 6000mm)Signal output pitch 20μmScale reference point Output in 50mm pitchProtection Level IP53Operating temperature 0 to 45°C
* High precision model AT103F (JIS Class 0, (3+3L0/1000)μm) is also available to special order for the effective range of 100 to 2000mm.
* Ultrahigh precision model AT103S (2+2L0/1000)μm is also available to special order for the effective range of 100 to 500mm.* The indication accuracy does not include quantizing error. L0:Effectiverange(mm)
FEATURES•Suitableformillingmachines,XYtables,jigs,etc.•DimensionallycompatiblewithAT113 linear
scale units.•Connectable to the KA counter, KLD counter, or
PSU-200.
Linear Scales AT116SERIES 539 — Economy and Slim Spar Type
SPECIFICATIONSModel AT116Effective range 4" to 60" / 100 to 1500mm (20 models)Resolution 0.01 to 0.0001mm (.001" to .000005")Accuracy (20°C) (5+5L0/1000)μmOutput signal Two 90° phase-shifted sinusoidal signalsMaximum response speed 50m/minSignal output pitch 20μmScale reference point Output in 50mm pitchProtection Level IP53Operating temperature 0 to 45°C
•Slimspartypewithunitsectionaldimensions of 22×35mm.
•ConnectabletotheKA counter, KLD counter, or PSU-200.
•DimensionallycompatiblewithAT116 linear scale units.
SPECIFICATIONSModel AT113Effective range 4" to 6" / 100 to 1500mm (20 models)Resolution .001" to .000005" / 0.01 to 0.0001mm Accuracy (20°C) Standard:(5+5L0/1000)μm,HighAccuracy:(3+3Lo/1000)Output signal Two 90° phase-shifted sinusoidal signalsMaximum response speed 120m/minSignal output pitch 20μmScale reference point Output in 50mm pitchProtection Level IP53Operating temperature 0 to 45°C
*HighprecisionmodelAT113F (JIS Class 0, 3+3L0/1000)μm is also available to special order.*UltrahighprecisionmodelAT113S (2+2L0/1000)μm is also available to special order for the effective range 100 to 500mm.*Theindicationaccuracydoesnotincludequantizingerror.L0:Effectiverange(mm)
AT113 Effective rangeL0 inch / mm
Signal cable length(m)OrderNo.(standard) Model OrderNo.(Highaccuracy) Model
Linear Scales AT112-FSERIES 539 — Super Slim Spar Type
•Superslimspartypewithunitsectionaldimensions of 15.4×30mm.
•ConnectabletotheKA counter, KLD counter, or PSU-200.
SPECIFICATIONSModel AT112-F (High Accuracy)Effective range 1.5" x 40" / 50 to 1020mm (19 models)Resolution .001 to .000005" / 0.01mm to 0.0001mmAccuracy (20°C) (3+3L0/1000)μmOutput signal Two 90° phase-shifted sinusoidal signalsMaximum response speed 50m/minSignal output pitch 20μmScale reference point Outputin50mmpitch*1
Protection Level IP53Operating temperature 0 to 45°C
*Ultra-highprecisionmodelAT112S (2+2L0/1000)μm is also available to special order for the effective range 50 to 320mm.*Theindicationaccuracydoesnotincludequantizingerror.L0:Effectiverange(mm)*1:Modelswhoseeffectiverangeis50mmor70mm:CenterpointModelswhoseeffectiverangeis120mmormore:50mmpitchstartingatapoint35mmfromthe" " mark on the left seen
SPECIFICATIONSModel AT181Effective range 4" to 24" / 100 to 600mm (11 models)Resolution .001" to .000005" / 0.01 to 0.0001mm Accuracy (20°C) (5+5L0/1000)μmOutput signal Two 90° phase-shifted sinusoidal signalsMaximum response speed 50m/minSignal output pitch 20μmScale reference point Output in 50mm pitchProtection Level IP54Operating temperature 0 to 45°C*Theindicationaccuracydoesnotincludequantizingerror.L0:Effectiverange(mm)
Output signal Two 90° phase-shifted square wave signalsMaximum response speed 120m/min (50m/min when the effective range is 3250 to 6000mm)Resolution 0.1/0.5/1μm (Switchable by the DIP switches)Scale reference point Output in 50mm pitchProtection Level IP53Operating temperature 0°C to 45°C*Theindicationaccuracydoesnotincludequantizingerror.L0:Effectiverange(mm)
Linear Scales AT216-T / AT216-TL SERIES 529 — Slim Sealed type
SPECIFICATIONSModel AT216-T AT216-TLEffective range 4 to 60" / 100 to 1500mm (20 models)Resolution 5μm 1μmAccuracy (20°C) (5+5L0/1000)μmOutput signal Two 90° phase-shifted Square wave signalMaximum response speed 48m/min 50m/minSignal output pitch 20μmScale reference point Output in 50mm pitchProtection Level IP53Operating temperature 0 to 45°C
(2+2L0/1000)μm (L0≤500mm)Output signal Two 90° phase-shifted square wave signalsMaximumresponsespeed* 5.4 to 120m/min (varies depending on the resolution or minimum edge interval)Resolution* 0.1/ 0.2/ 0.5/ 1.0/ 2.5/ 5.0μmScalereferencepoint* 50mm/ Center point/ Left edge point/ Right edge pointProtection Level IP53Operating temperature 0 to 45°C*Desiredspecificationisselectable.
FEATURES•High-resolution,high-accuracysealed
type linear scales. Most ideal for feedback control in positioning a semiconductor manufacturing system, CNCmachinetool,etc.
•Twotypesofmodelsareavailable:theAT211-A, the multiple-point installation type designed for improved resistance against vibration and shock, and the AT211-B, which attaches to a machine at both ends. The AT211-B is compatible with the AT111 slim type in size.
H-21
•ABSOLUTElinearencoderincorporatesboth our unique electrostatic capacity and photoelectric technology.
*RefertopageH-32"QuickGuidetoPrecisionMeasuring Instruments" for details of the principle of the absolute linear scale.
•Drasticallyreducedpowerconsumptionsince there are no backup batteries.
•Easyoperationbecausenorecalibrationisrequired at startup or after a power failure.
Mitsubishi Electric CorporationMITSUBISHICNCseries
Mitsubishi Electric CorporationMR-J3 AmplifierssupportingMitutoyoENSISinterface
Resolution 0.05μmMaximum response speed 120m/minEffective range 4 to 120" / 100 to 3000mmAccuracy(20°C)* (3+3L0/1000)μm, (5+5L0/1000)μm when the effective range is 1600mm or moreProtection Level IP53
•ThehighrigidityABS AT500-S series has vibration resistance, shock resistance and temperature control, the ABS AT500-H series offers excellent temperature control and high accuracy.
•ScalealarmdisplayLEDallowsforeasymaintenance.
•Supportstheinterfacesofvariousmanufacturers allowing a variety of system configurations.
ABS AT500-S
ABS AT500-H
Linear Scales ABS AT500SERIES 539 — Slim Spar Type
ABS AT5Resolution/Applicablesystem
Transmission methodNothing: Full duplex communicationA: Half-duplex communication
*1: Please contact each manufacturer for details.
Effective range
Reference point of expansion on the scale unit influenced by temperature fluctuation*C: Center of the effective rangeL: "+" side of the absolute valueR: "–" side of the absolute value* "L" or "R" is marked only for the high accuracy type.
Type of the scale unitS: High rigidity typeH: High accuracy typeNote:"Reference point of expansion" The scale unit expands or contracts influenced by the temperature fluctuation. The mechanical reference point of expansion is defined as the reference point.
*ABS AT5
SPECIFICATIONSHigh rigidity type High accuracy type
Model ABS AT500-SC ABS AT500-HC ABS AT500-HL/HRResolution 0.005μm*1/0.05μmMaximum response speed 150m/min (72m/min for the H series whose resolution is 0.005μm)Effective range 100 to 2200mm 100 to 1000mm 100 to 350mmAccuracy(20°C)*2 (3+3L0/1000)μm (2+2L0/1000)μmReference point of expansion influenced by the temperature fluctuation
Center of the effective measuring lengthEdge of the effective measuring length
Model Resolution Applicable systemABS AT553 0.05μm FANUCLtd.
NCControlunitABS AT555 0.005μmABS AT543 0.05μm Mitsubishi Electric Corporation
MITSUBISHICNCseriesABS AT545 0.005μmABS AT543A 0.05μm Mitsubishi Electric Corporation
MELSERVOseriesABS AT545A 0.005μm
ABS AT573A 0.05μm Panasonic Corporation, Motor Business UnitMINASseries*1
ABS AT5030.05μm AmplifierssupportingMitutoyoENSIS
interface*1
(NikkiDensoCo.,Ltd.,Servolandcorporation, PMAC Japan Co., Ltd.)
ABS AT503AABS AT505
0.005μmABS AT505A
53
23
15.7
*Mounting mating surface
1.5±0
.2(G
ap be
twee
n dete
ctor h
ead
and a
luminu
m fra
me)1±0.1
(Step between detector head and aluminum frame)
*Adju
sted w
ith sp
ecial
jig
AIR
Q
0.1 P
*Aluminum frame surface
R*Longitudinal direction
S
Air purge M5×5(Both)
*Vertical direction
*Vertical direction*Longitudinal direction
44.530
.222
11.6
24
S0.1 P
*Mounting mating surface
Air purge M5×5(Both)
*Vertical direction
Step between detector head and aluminum frame
1.6±0.127
.8(6
.7)
36.8
(62)
*Vertical direction*Longitudinal direction
2224
11.6
*Vertical direction
Step between detector head and aluminum frame *Mounting mating surface
P0.1S
Air purge M5×5(Both)
*Vertical direction*Longitudinal direction
(6.7
)36
.827
.8
(62)
1.6±0.1
2224
11.6Air purge M5×5(Both)
Step between detector head and aluminum frame
*Vertical direction
*Mounting mating surface
*Vertical direction*Longitudinal direction
P0.1S
(6.7
)36
.827.8
(62)
1.6±0.1
SC Type
HC Type
HR Type
HL Type
H-23
SPECIFICATIONSOrderNo. 549-701Model MICSYS-SA1Detection method Laser speckle image correlationEffective range ±100μm (2D)Resolution 1 nmAccuracy (20°C) ±100 nmData update period 20Hz
1. Evaluation of stages used in manufacturing equipment and inspection systems
2. Highly accurate positioning of workpieces
3. Measurement of minute displacement
a) Evaluation of position repeatability b) Evaluation of standstill stability and drift
Measure displacement caused by temperature, humidity, voltage fluctuation or other factors
Actuator
Setting and removal
Actuator
Measure displacement caused by temperature or humidity fluctuations or other factors and displacement caused during a material attachment process, etc.
a) Measurement of minute displacement of a structure b) Measurement of minute displacement of a workpiece
indicate which direction to adjust the Detector Head when mounting
Model ST- F11B ST- F11CDetection method Diffraction interference , reflection type linear encoderGrating pitch for the main scale 4 μmSignal output pitch 2 μm
Output signal 2-phase-shifted square wave (+ reset input)
2-phase-shifted square wave 2-phase-shifted sine wave
Main scale grating pitch 8μmSignal output pitch 4μmEffective range 10 to 3000mmResolution 0.01, 0.02, 0.05, 0.1μmAccuracy(20°C)*1 ±0.5μm, ±1μm, ±2μm(/m)Maximumresponsespeed*2 1200mm/s
Scale reference point Center point (10 to 80mm) 50mm pitch (100 to 3000mm)
Power supply voltage DC5V±5%Operating temperature/ humidity range 0 to 40°C/ 20 to 80% (no condensation)Storage temperature/ humidity range –20to60°C/20to80%(nocondensation)Head cable length 1m (high-flex connecting cable)
*1: Effective range Accuracy300mm or less ±0.5μm500mm or less ±1μm
1000mm or less ±2μm3000mm or less ±2μm/m
*2: Maximum response speed when the sinusoidal signals are output
R4
4-R4
R4
スケール取付部 推粧図(Scale=2/1)
蹟着宰塗布部シリコン系_KE441にぉろ弾勢エポキシ系_EP001む使 p゚ゆみcモ。
2
1.5
1.5
71
8.5
0.4
ModelPart No.
Mitutoyo Corporation
MADE IN
JAPAN
ST24/ST4406ACA179
B00001No.C
2×M3, depth 6
G: Machine guideway
Scale reference point signal output position (Stroke center point)
* The above code numbers are for recommended items marked with / symbols. If recommended specifications meet your requirements, use these code numbers to order.* The and symbolsinthetablesabovehavethefollowingmeanings: →A(2-phasesinusoidalsignals): →1 →B (2-phasesquarewavesignals+resetinput): →2 →C (2-phase sinusoidal signals + 2-phase squarewavesignals): →3 →D(1Vp-pdifferential) : →4
*1: Effective range Accuracy300mm or less ±1μm500mm or less ±2μm
1000mm or less ±3μm3000mm or less ±3μm/m
•Outputs2-phasesquareandsinusoidalwave signals at 10μm pitch.
•Hasathinnerdetectorhead(thickness11mm).
Linear Scales ST24SERIES 579 — Standard type
SPECIFICATIONSModel ST24Detection method Reflective photoelectlic linear encoder
Output signal ST24B:2-phasesquarewavesignals,AlarmresetinputST24C:2-phasesquarewavesignals,2-phasesinusoidalsignals
Main scale grating pitch 20μmSignal output pitch 10μmEffective range 10 to 3000mmResolution 0.01, 0.02, 0.05, 0.1μmAccuracy(20°C)*1 ±1μm, ±2μm, ±3μm(/m)Maximumresponsespeed*2 1200mm/s
Scale reference point Center point (10 to 80mm) 50mm pitch (100 to 3000mm)
Power supply voltage DC5V±5%Operating temperature/ humidity range 0 to 40°C/ 20 to 80% (no condensation)Storage temperature/ humidity range –20to60°C/ 20 to 80% (no condensation)Head cable length 1m (high-flex connecting cable)
SPECIFICATIONSModel ST422Detection method Reflective photoelectlic linear encoderOutput signal 2-phase sinusoidal signals, 2-phase square wave signalsMain scale grating pitch 40μmSignal output pitch 40μmEffective range 10 to 3000mmAccuracy(20°C)*1 ±1μm, ±2μm, ±3μm(/m)Resolution 0.2μm/ 0.5μm/ 1μm/ 5μm (Selectable with internal switch)Scale reference point Center point (10 to 75mm)/ 50mm pitch (100mm or more)Maximum response speed 5000mm/s (varies depending on the setting)Minimum edge-to-edge interval 125ns/ 250ns/ 500ns/ 1μs (selectable with internal switch)Operating temperature/ humidity range 0 to 40°C, RH 20 to 80% (no condensation)Storage temperature/ humidity range –20to60°C,RH20to80%(nocondensation)Head cable length 1m
*1: Effective range Accuracy300mm or less ±1μm500mm or less ±2μm
1000mm or less ±3μm3000mm or less ±3μm/m
Direction to insert cable
B
2×M2.5, through holeScale reference point
50mm pitch
A
3.5x6, slot
ø3.5
Cable clamp
Retaining spring A
Retaining spring B
Cable clamp
Exposed portion of cable and cable clampAlways ground to the machine using the cable clamp.
13.
5(2
4.8)
6
4.8(1.2)7.5
13.5±0.2
Overall length L2
Effective range L1(L2-L1) /2
4.7
10(2
)5
20
5.5
2530
4.6 4.6
2212
+0.5
0
0.410
616
L3L3
Exposed portion of cable and cable clampAlways ground to the machine using the cable clamp.
Cable clamp
Cable clamp
60001
No.09AAB211A
No.SERIAL
MADE IN JAPAN
Direction to insert cable
ø3.5
3.5x6, slot
2×M2.5, through hole
A
Scale reference point50mm pitch*2
Overall length L2Effective range L1(L2-L1)/2
10±1*1
13.
5(2
4.8)
4.7
10
4.6 4.6
120.
7
(2)
5
20
3025
5.5
1.8(1.2)7.5
10.5±0.2
166
10 0.4
// A0.05// G0.05
// A0.05
0.02BG: Machine guideway
Unit:mm•ST422-10to350(Adhesivefixingtype)*3 •ST422-400to3000ST422 Scale unit mounting dimensions
*1 When stroke is 100mm or longer*2 One center point when stroke is 10 to 75mm*3 For information on fixing methods for adhesive fixing type, see "Handling
only 7.5 mm. The metal tape scale type has a mounting surface area of 12.5 by 9.325 mm, allowing use in applications where a space-saving design is important.
Linear Scales ST46-EZASERIES 579 — Compact Type
SPECIFICATIONS
Glass Scale Type
Metal Tape Scale Type
•Double-endfixingdesign
•Double-sidedtapefixingdesign
Model ST46-EZADetection method Reflective photoelectlic linear encoderScale type Glass Metal tapeMain scale grating pitch 20μm
Output signal Type B:2-phasesquarewavesignals,referencepointpulse,externalresetinput.Type C:2-phasesquarewavesignals,referencepointpulse,2-phasesinusoidalsignals.
Effective range 10 to 3000mmResolution 0.05μm to 5 μm
Effectiverange10to1000mm:±5μmEffectiverange1100to3000mm:±5μm/m(The above accuracy applies to individual scales. For double-end fixing designs, perform point-to-point correction after ensuring the metal tape is tensioned correctly.)
Maximum response speed 2.6m/s (With sinusoidal signal amplitude of -3dB)Scale reference point 50mmpitch,10to80mm:CenterpointPower supply voltage 5VDC±5%Operating temperature/ humidity range 0 to 40°C, RH 20 to 80% (no condensation)Storage temperature/ humidity range –20to60°C,RH20to80%(nocondensation)
Signal strength checking and parameter setup can be performed on a PC (PC to be prepared by customer)
Connector control unit has setup indicator
Adjustment SW / CAL display / Reference point display
NC side
H-30
•Absolutemeasurementwithexposedscales
•Non-contactdetectionisoptimalforhigh speed and high acceleration devices such as linear motors.
•Electromagneticinductionprinciplemeans scales are unaffected by water and oil contamination
a range of companies (high-speed serial interfaces)
•Signaladjustmentatinstallationisautomatically performed with dedicated software.
Linear Scales ABS ST700SERIES 579 — General-purpose Type
Absolute type
Series nameSeparate Type ABSOLUTE Linear ScaleABS ST700 Compact-type series (Effective range ≤ 3m)ABS ST700 Compact-type series (3.2m ≤ Effective range ≤ 6m)
Interface specification*1
0:SupportsMitutoyoENSIShigh-speedinterface ABS ST708A, ST708AL4:Supports Mitsubishi Electric Corporation high-speed serial interface ABS ST748, ST748AL, ABS ST748, ST748L5:SupportsFANUCLtd.high-speedserialinterface ABS ST758, ST758L7:Supports Panasonic Corporation, Motor Business Unit high-speed serial interface ABS ST778A, ST778AL8:SupportsYASKAWAElectricCorporationhigh-speedserialinterface ABS ST788A, ST788AL
ABS ST7 0 8 A L - 100 A - R
Effective range:100mmto6000mm
A:ScalebasetypeC:Glassscaletype
Head cable outlet directionR :RightsideL :LeftsideU :UppersideD :LowersideNothing:100mmto3000mm
Detection head form and resolution8:Form:50mm(W)×28mm(D)×11mm(H)Resolution:0.1μm9:0.05μmresolution(tospecialorders)
Meaning of Model No.
Scale base type
Glass scale type
SPECIFICATIONSModel ABS ST700Scale type Scale base type Glass scale typeResolution 0.1μm (0.05μm to special order)Detection method Electromagnetic induction ABS linear encoderMax. effective range 6000mm 1100mmAccuracy (20°C) 5+(5L/1000)μmL:Effectiverange(mm) 3+(3L/1000)μmL:Effectiverange(mm)Maximum response speed 5m/s
Linear expansion coefficient(12.0±1.5)×10-6/ ºC
(When the material of the mounting components is steel or equivalent)
(8±1.0)×10-6/ ºC
Power supply voltage 5V±10%(atthedetectionhead)(Ripple+spikenoisecomponentshouldbelessthan100mV.)
Operating temperature/ humidity range 0 to 50°C, RH 20 to 80%Storage temperature/ humidity range –20to70°C,RH20to80%Protection Level IP65
Available Interfaces*1
FANUCLtd.FS-iSeries,PowerMateiSeriesMitsubishiElectricCorporationMELSERVOMR-J4/MR-J3SeriesMitsubishiElectricCorporationCNCSeries,MDS-D/MDS-DHSeriesYASKAWA Electric Corporation Σ-V,Σ-III Series PanasonicCorporation,MotorBusinessUnitMINAS-A5,A5L,A5N,A5NL,MINAS-A4,A4P,A4N,A4NLSeriesMitutoyoENSIS*2
NikkiDensoCo.,Ltd.VCII/VC/VPSseriesServolandCorporationSVFSeries PMAC Japan Co. Ltd. UMAC-Turbo PMAC2
•ThePSU-200 splits the sinusoidal signal output by Mitutoyo linear scales into a minimum of four and a maximum of 200 divisions, and converts the signal to a square
wavesignalsothatNCfeedbacksystems,measurement control devices, etc., can be used with linear scales in order to achieve highly accurate positioning.
Serial signal interface unit PSU-200SERIES 539
•PSU251 series is a serial signal interface unit for incremental linear scales.
•Theinterfaceoutputsserialdataequivalent to 400 divisions from the signal (sinusoidal).
•ThePSU-251canbeconnectedtoMitsubishi Electric Corporation's MR-J4/MR-J3 series servo amplifier.
•ThePSU-252canbeconnectedtoPanasonic Corporation, Motor business unit'sMINASseriesservoamplifier.
•Sincethisunitisconnectedtoincremental linear scales, the reference point should be passed through to determine the absolute position.
Numberofsplits 4, 8, 10, 20, 40, 80, 100, 200 (Selectable with the switch)
Function
Setting the number of slits, setting the minimum edge interval, and maximum response speed.Detection of broken wires or short circuits and abnormalities (alarm), detection of signal errors (alarm).Power supply voltage low alarm (warning light only), switching between high-impedance mode and alarm signal output mode. Reference position detection light, hysteresis width settings (directly linkedtoNo.ofdivisions),externalalarmresetinput(photocoupler),switchingdirections
Power supply voltage 5VDC±5%Current consumption 200mAStorage temperature range –20°Cto70°COperating temperature range 0°C to 40°CDimensions 160(W)×100(D)×28(H)mmMass Approx. 620g
Input 2-phase sinusoidal signals and standard voltage, reference signal, scale alarm signal.Maximuminputfrequency:500kHz
OutputMitsubishi Electric Corporation
MR-J4/MR-J3 seriesHigh-speedserialdata*
Panasonic Corporation Motor Business UnitMINAS-A5,A5L,A5N,A5NLSeries*MINAS-A4,A4P,A4N,A4NLSeries*
Numberofsplits 400 splits
FunctionAlarmdetection:Brokenwires,shortcircuitsinthescaleandabnormalities.Alarmoutput:StatusdataisoutputthroughserialcommunicationandthePWRlightblinks.Also, the PWR light turns on.
Power supply voltage
Powersupplyfromtheservoamplifier:5VDC±5%Externalpowersupply:5VDC±5%Powersupplyisselectedwiththeshortinglinkfortheterminalblock used to supply external power. To choose a servo amplifier or external power supply, please refer to the servo amplifier power specifications (in particular, the maximum supplied current) and the power supply specifications of the scale that is used.
Current consumption 150mA (not including the scale)Operating temperature range 0°C to 40°CStorage temperature range –20°Cto70°CDimension 110(W)×60(D)×27.5(H)Mass Approx. 315g*Pleasecontacteachmanufacturerfordetailsoftheapplicablesystems.
H-32
Linear ScalesQuick Guide to Precision Measuring Instruments
■ Absolute systemA measurement mode in which every point measurement is made relative to a fixed origin point.
■ Incremental systemA measurement mode in which every point measurement is made relative to a certain stored reference point.
■ Origin offsetA function that enables the origin point of a coordinate system to betranslated to another point offset from the fixed origin point. For this function to work, a system needs a permanently stored origin point.
■ Restoring the origin pointA function that stops each axis of a machine accurately in position specific to the machine while slowing it with the aid of integrated limit switches.
■ Sequence controlA type of control that sequentially performs control steps according to a prescribed order.
■ Numerical controlA way of controlling the movements of a machine by encoded commandscreatedandimplementedwiththeaidofacomputer(CNC).A sequence of commands typically forms a ‘part program’ that instructs a machine to perform a complete operation on a workpiece.
■ Binary outputRefers to output of data in binary form (ones and zeros) that represent numbers as integer powers of 2.
■ RS-232CAn interface standard that uses an asynchronous method of serial transmission of data over an unbalanced transmission line for data exchange between transmitters located relatively close to each other. It is a means of communication mainly used for connecting a personal computer with peripherals.
■ Line driver outputThis output features fast operating speeds of several tens to several hundreds of nanoseconds and a relatively long transmission distance of several hundreds of meters. A differential-voltmeter line driver (RS422A compatible)isusedasanI/FtotheNCcontrollerinthelinearscalesystem.
■ BCDA notation of expressing the numerals 0 through 9 for each digit of a decimal number by means of four-bit binary sequence. Data transmission is one-way output by means of TTL or open collector.
■ RS-422An interface standard that uses serial transmission of bits in differential form over a balanced transmission line. RS-422 is superior in its data transmission characteristics and in its capability of operating with only a singlepowersupplyof+5V.
■ AccuracyThe accuracy specification of a scale is given in terms of the maximum error to be expected between the indicated and true positions at any point, within the range of that scale, at a temperature of 20ºC. Since there is no international standard defined for scale units, each manufacturer has a specific way of specifying accuracy. The accuracy specifications given in our catalog have been determined using laser interferometry.
■ Narrow range accuracyScale gratings on a scale unit normally adopt 20μm pitch though it varies according to the kind of scale. The narrow range accuracy refers to the accuracy determined by measuring one pitch of each grating at the limit of resolution (1μm for example).
Glossary
Tests for Evaluating Linear Scales1. Testing within the service temperature rangeConfirms that there is no performance abnormality of a unit within the service temperature range and that data output is according to the standard.
2. Temperature cycle (dynamic characteristics) testConfirms that there is no performance abnormality of a unit during temperature cycling while operating and that data output is according to the standard.
3. Vibration test (Sweep test)Confirms that there is no performance abnormality of a unit while subject to vibrations of a frequency ranging from 30Hz to 300Hz with a maximum acceleration of 29.42m/s2.
4. Vibration test (Acceleration test)Confirms that there is no performance abnormality of a unit subject to vibrations at a specific, non-resonant frequency. (Approx. 98.07m/s2)
6. Package drop test This test conforms to JIS Z 0200 (Heavy duty material drop test)
H-33
Upon supply of power to a linear scale, position readings from threecapacitance-typesub-scales(COArse,MEDiumandFINe)and one from a photoelectric sub-scale (OPTical) are taken. These sub-scales use such a combination of pitches, and are so positioned relative to each other, that the readings at any one position form a unique set and allow a microprocessor to calculate the position of the read head on the scale to a resolution of 0.05μm (0.005μm).
■ Principle of the Absolute Linear Scale (Example: ABS AT300, 500-S/H)
MADE IN JAPANAT500
3768mm
OPT
COA
MED
FIN
Elect
rosta
tic ca
pacit
ance
type
Phot
o-ele
ctro
nic t
ype
3768mm
58.88mm
0.92mm
20µm
(512)
(512)
(400) (4096)
0.05µm0.005µm
7.36mm
0.115mm
(512) Approx. 1.8µm
ResolutionSignal cycle (interpolation)
Computer Digital counterLaser length measuring machine counter
Laser sourceInterferometer Optical axis of
laser beam
Cube corner
Fixture
Scale unit
Movable table
The accuracy of the scale at each point is defined in terms of an error valuethatiscalculatedusingthefollowingformula:
Error = Value indicated by laser inspection system − Corresponding value indicated by the linear scale
A graph in which the error at each point in the effective positioning range is plotted is called an accuracy diagram.There are two methods used to specify the accuracy of a scale, unbalanced or balanced, described below.
Positional Indication accuracyThe accuracy of a linear scale is determined by comparing the positional value indicated by the linear scale with the corresponding value from a laser length measuring machine at regular intervals using the accuracy inspection system as shown in the figure below. As the temperature of the inspection environment is 20˚C, the accuracy of the scale applies only in an environment at this temperature. Other inspection temperatures may be used to comply with internal standards.
(1) Unbalanced accuracy specification - maximum minus minimum error
This method simply specifies the maximum error minus the minimum errorfromtheaccuracygraph,asshownbelow.Itisoftheform:E=(α+ βL)μm. L is the effective range (mm), and α and β are factors specified for each model. For example, if a particular type of scale has an accuracy specification of (3 + 3L———1000 )μm and an effective range of 1000mm, E is 6μm.
Scale error at any point in range relative to start of range
0
Error
Effective range X Measuring point
Maximum difference in scale error: E(µm)
(2) Balanced accuracy specification - plus and minus about the mean error
This method specifies the maximum error relative to the mean error from theaccuracygraph.Itisoftheform:e= E ± — 2
(μm). This is mainly used in separate-type (retrofit) scale unit specifications.
0Error
Effective range X Measuring point
Maximum error about mean error E : ±— (µm) 2
Mean error
A linear scale detects displacement based on graduations of constant pitch. Two-phase sinusoidal signals with the same pitch as the graduations are obtained by detecting the graduations. Interpolating these signals in the electrical circuit makes it possible to read a value smaller than the graduations by generating pulse signals that correspond to the desired resolution. For example, if the graduation pitch is 20μm, interpolated values can generate a resolution of 1μm. The accuracy of this processing is not error-free and is called interpolation accuracy. The linear scale's overall positional accuracy specification depends both on the pitch error of the graduations and interpolation accuracy.
■ Specifying Linear Scale Accuracy
Overview of Accuracy Inspection System
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