H ardware setup

Probestation 1: 6“ (200mm * 300mm + 360° rotation + 15mm Z) QTC

Instruments: HP4274A (LCR), K6517 (electrometer) , HP6614C (voltage supply), K595 (quasistatic CVmeter)

Status: Operational (used to measure Hamamatsu)

Software (user friendly and some error protections)

Probestation 2: 6“ (200mm * 100mm + 15mm Z) IQC

Instruments: LCR, electrometer, voltage supply

Status: Operational

Misc: Homemade relay system (17 channels each)

Optical Inspction: Zeiss CMM (500*500*500) Res.: 1m (Z~5m)

Hardware setup

Chuck

Probestation

Error estimation1000 measurement runs on one strip (ST teststructure)

Parameter Mean Min Max

Rpoly (M) 1,064 0,00137 1.0605 1.0687

Leakage current (pA)

62,1 2,2 59,0 64,0

Coupling capacitance (pF)

108,3 0,78 106,13 108,57

Software – Front panel

Testing

time ~ 2h

Probing marks

Hamamatsu

Karlsruhe

Pick up tool

Packaging (Hamamatsu)

Sensor Teststructures

Sandwich packaging in

envelope

• Bad to handle

• Optical inspection HANDLING

against specification

• Takes time

• Air cusion effect while placing gliding

Packaging 2 (ST)

• Optical inspection very good

• Easy to take out

• All 4 TS available

Optical survey and dimensional measurements

optical inspection

D1 D2 D3 D4 D5 D6 D7 D8 average stand dev scratch pad comments

CMS-W6B-SSSD-49191 28 20 25 28 28 18 30 26 25,2 4 ok seveal 20m deep notches at cut-line ,4

CMS-W6B-SSD 49185 38 26 30 30 22 13 28 18 25,6 7,3 ok cut-line variations bout 5-10m6 34 27 29 31 24 15 30 10 25 7,8 ok cut-line variations bout 5-10m7 34 26 28 30 24 15 32 9 24,8 8,1 ok cut-line variations bout 5-10m

Thickness at corners: 414,3+-2.2mThickness at center: 463,8+-2.2m

Length nominal (mm) actual (mm) (mm)L 2 97,5 97,208+-0,007 0,292L 1 86,1 86,197+-0,007 -0,097L side 99,164 99,195+-0007 0,031

Check Sheet:

QTC-KA Optical inspection sheet Date: 11.4.2001 Sensor Type: CMS W6B SSD 4919 Tester……..: Blüm Sensor ID…: 00001 Thickness (opt.): Flatness…(opt.):

Short Long

28

26

20

25

28 30

18 28

Cutline..............S1) ok ......S2) ok quality ......S3) some 20m deep chips ......S4) some 20m deep chips

Corner ...........E1) ok ...........E2) ok quality...........E3) ok ...........E4) ok

E2 E1

11

E3 E4

S2 S4

S1

S3

Broken: Broken cutline:

OK:

Pictures

25m

More picturesScratchpad used

Rpoly

Add DC pad

3 AC pads

Electrical characterization of sensors

Rpoly with 10V Rpoly with 2V

Changes in measurement with respect to specs

Electrical characterization of sensors Summary

sensor I@300V (nA) I@450V V_break>550 V_depletion C_TOT <Rpoly> mean CC <Ileakage> #faults Rpoly faults4919-1 168,49 210,79 ok 2125 1,7 521,9 0,03 0 554919-2 121,19 136,69 ok 2125 1,71 522,51 0,02 0 144818-4 164,88 171,06 ok 2174 1,45 532,48 0,02 0 295 Rpoly at 10V4918-5 166,06 171,94 ok 2171 1,76 535,1 0,02 0 1044918-7 121,08 132,66 ok 2175 1,75 534,02 0,03 0 113

Electrical characterization of sensors CV & IV

Electrical characterization of sensors Rpoly

Electrical characterization of sensors coupling capacitance

Electrical characterization of sensors leakage current

Comparison of our test results with industry results (based on 5 sensor of 8 )

• IV even lower than company measurement

• CV perfect agreement

• Some Rpoly higher than company measurement (but company only measured 1 per batch or even TS only)

• No single strip fault (agreement) (neglect Rpoly)

Relevant problems• Nothing Serious• Vdepletion not calculated

Improvements:• Automatic web publishing

(ready 50%)

• Implement Pattern recognition

Optical survey of ST prototype

Pinhole or

bad coupling capacity

No strange electrical behavior

Optical survey of ST prototype 2

Z (m)

Bowl shape!

Asymmetric cut!Global size OK!

QTC-KA Optical inspection sheet Date: 3.4.2001 Sensor Type: CMS ST OB2 Tester……..: Hartmann Sensor ID…: Thickness (opt.): Flatness…(opt.):

Short Long

51

82

51

74

80 83

120 118

E2 E1

11

E3 E4

S2 S4

S1

S3

720 677 670 683 720678 685668 640 640 667

615672 633 636 667689 679716 679 667 680 717

Tisch 232

Pads

Electrical Survey

• Very high total leakage current

• Depletion voltage fine

• One region (7 strip) with a very high leakage current

• Some coupling capacitors out of specs