Gen-1 Nanoprobes for Ephysneurotech.caltech.edu/PROBES/Gen1.pdf · Caltech-LETI Ephys nanoprobes / Gen-1 (2014-2015) © 2014-2015 California Institute of Technology 2 2. FINAL STEPPER

© 2014-2015 California Institute of Technology

Caltech / CEA-LETI

Gen-1 Nanoprobes for Ephys

( Details of 2014-2015 Run )

© 2014-2015 California Institute of Technology

Caltech-LETI Ephys nanoprobes / Gen-1 (2014-2015)

© 2014-2015 California Institute of Technology 1

A. General images.

1. INITIAL LAYOUTS (with new probe-architecture identifier)

N.B. – Above, “N.A.” denotes a pattern that was not used for the Gen-1 run.

G1-P01

N.A.

G1-P10 N.A. G1-P03 G1-P08

G1-P11 G1-P06 G1-P07 G1-P09



2. FINAL STEPPER FIELD EMPLOYED

Reticle size = 21.7 mm × 21.7 mm

G1-P01

G1-P08

G1-P10

G1

-P0

6

G1-P09

G1

-P0

7

G1

-P1

1

G1

-P0

3



3. PROBE HEAD / 256-CONTACT-PAD ARRAY

256 contacts in a 16 × 16 array; total size of field = 3.1mm × 3.1mm

4. MAGNIFIED VIEW / CONTACT PAD ARRAY

contact pad diameter = 100μm; array pitch = 200μm



3. MISCELLANEOUS IMAGES

Magnified views:

Shank tip detail:



B. Electrode Details.

6μm × 14μm; ovoid.



C. Probe Layouts. G1-P01 (Original ID: Probe_LETI_001) Single shank; shank length = 6.5mm; single line of edge electrodes ~5.5μm from

edge; electrodes distributed over 5.126mm of shank length;

electrode dimensions = 6μm × 14μm; 256 electrodes; electrode pitch = 20μm



G1-P03 (Original ID: Probe_LETI_003) 4-shank array; shank length = 6mm; inter-shank separation = 1.0mm

Each shank: single line of edge electrodes – 5.0μm from edge; over 3.2mm length;

electrode dimensions = 6μm × 14μm; electrode pitch = 50μm



G1-P06 (Original ID: Probe_LETI_006) 4-shank array; shank length = 5mm; inter-shank spacing = 500μm

Each shank: single line of edge electrodes – 5.0μm from edge; over 3.2mm length;

electrode dimensions = 6μm × 14μm; electrode pitch = 30.5μm



G1-P07 (Original ID: Probe_LETI_007) 4-shank array; shank length = 5mm; shank pitch = 250μm Each shank: 64 electrodes as an interleaved double column of edge electrodes;

5.0μm and 21μm from edge; spanning 782μm length; electrode dimensions = 6μm ×

14μm; electrode pitch = 24.0μm in column, 16μm between columns.



G1-P07, cont’d (Original ID: Probe_LETI_007)



G1-P08 (Original ID: Probe_LETI_008) 8-shank array; shank length = 5mm; shank pitch = 500μm Each shank: single line of edge electrodes – 5.0μm from edge; over 1.567mm length;

32 electrodes/shank; electrode dimensions = 6μm × 14μm; electrode pitch = 50μm



G1-P09 (Original ID: Probe_LETI_009) 8-shank array; shank length = 5mm; shank pitch = 250μm Each shank: 32 electrodes as an interleaved double column of edge electrodes;

5.0μm and 21μm from edge; spanning 376μm length; electrode dimensions = 6μm ×

14μm; electrode pitch = 24.0μm in column, 16μm between column; staggered.



G1-P10 (Original ID: Probe_LETI_010) 4-shank array; shank length = 5mm; shank pitch = 500μm. Each shank: Alternating electrode patterns on each shank. Specifically, from the tip:

a) a single line of 10 edge electrodes ~5.0μm from edge on a 96μm pitch; distributed

over an 864μm length; followed by a 82μm gap between the next pattern.

b) Pattern “a” (above) is then followed by a pair of offset electrode columns, each with

22 electrodes that are distributed over a 504μm length with a 24μm pitch.

The electrode pattern for “b” above has the following layout:



c) After pattern “b” above, there is a 90.5μm gap to next pattern “d”, shown below.

d) Pattern “b” above is followed by a single line of 10 edge electrodes ~5.0μm from edge on a 96μm pitch; distributed over an 878μm length.

e) A detailed view of the third and final electrode pattern.



G1-P11 (Original ID: Probe_LETI_011) 4-shank array; shank length = 6mm; shank pitch = 500μm Each shank: single line of 64 edge electrodes – 5.0μm from edge; over 4.109mm

length; electrode dimensions = 6μm × 14μm; electrode pitch = 65μm

Gen-1 Nanoprobes for Ephysneurotech.caltech.edu/PROBES/Gen1.pdf · Caltech-LETI Ephys nanoprobes / Gen-1 (2014-2015) © 2014-2015 California Institute of Technology 2 2. FINAL STEPPER

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