G Section US 1002

G-1

Sensor Systems

INDEXSensor SystemsLinear GageLinear Gage / Display Selection Guide G-2,3Linear Gage LGB G-4Linear Gage LGK G-5Linear Gage LGF G-6Linear Gage LGF-Z G-7Linear Gage LGD G-8Linear Gage LGS G-9Laser Hologage LGH G-10Linear Gage LGB G-10Laser Hologage G-11Long Stroke Linear Gage LG/LGM G-12EC Counter G-13EB Counter G-14EG Counter G-15EH Counter G-16EV Counter G-17D-EV Display Unit G-18SENSORPAK G-18Litematic and Litematic Head G-19,20Laser Scan MicrometerLaser Scan Micrometer Selection Guide G-21,22Laser Scan Micrometer LSM-9506 G-23Laser Scan Micrometer LSM-902 / 6900 G-24Laser Scan Micrometer LSM-500S G-25Laser Scan Micrometer LSM-501S G-26Laser Scan Micrometer LSM-503S G-27Laser Scan Micrometer LSM-506S G-28Laser Scan Micrometer LSM-512S G-29Laser Scan Micrometer LSM-516S G-30LSM-5200 Display Unit G-31Optional Accessories for LSM G-32Laser Scan Micrometer Application Example G-33

Linear Gages

Laser Scan Micrometers

Linear Gage LGK

Laser Scan Micrometer LSM-500S

G

US-1002

G-2

Linear Gage / Display Selection Guide

LGF® 5μmLGF-525L-B

0.005mmNo/Nut

Page G-6 Page G-6

0.0005mm

LGF® 0.5μmLGF-0510ZL-B LGF-0525ZL-B

Origin Mark

Page G-6 Page G-6 Page G-6

0.001mm

LGF® 1μm LGF-110ZL-B LGF-125ZL-B

Origin Mark


0.01mm

LGD-1010L-B LGD-1025L-B

LGD® Digimatic


LGS-1012P

LGS Digimatic

Page G-9 Page G-9

Liner GageResolution 5mm 10mm 25mm

0.00001mmLGH 0.01μmLaser Hologage

LGH-110

Page G-11 LGH-110C Page G-10

0.0001mm

LGB®2（（（ Page G-4 LGB2-0105L LGK-0110 Page G-5 LGF-0125L-B

LGK Page G-5 LGF-0110L-B

LGF® 0.1μm Page G-6Page G-4

Page G-6 Page G-6

LGH 0.1μmLaser Hologage

LGH-1010

Page G-10 LGH-1010CC Page G-10

Motor Drive

Page G-12

0.0005mmLGK Page G-5 LGF-0510L-B Page G-6 LGF-0525L-B

LGF® 0.5μm Page G-6 LGK-0510

Page G-5 Page G-6

0.001mm

LGK Page G-5 LGK-110 Page G-5 LGF-125L-BLGF® 1μm LGF-110L-B


LGB® LGB-105L LGB-110 LGB-110S

φ8mm P399LGB-110H（ LGB-110A（ Page G-4

Page G-4 Page G-4 LGB-110-1（ LGB-110AR（ Motor Drive

Page G-12

LGB

No/Nut Page G-4

LGB2-105LPage G-4

LGB2-110LGB2-110H（LGB2-110-1（LGB2-110S（LGB2-110AR（ Page G-4

US-1002

G-3

LGF-550L-B

EG-101Z

Page G-6

LGF-0550ZL-B EH-11ZR EV-16ZPage G-15

Page G-6

LGF-150ZL-B EB-11Z Page G-16 Page G-17

Page G-6 Page G-14

LGD-1050L-B EC-101D EH-102D EV-16D

Page G-13（

EG-101D

Page G-8

Page G-15

EB-11D


Linear Gage Display50mm 100mm Single Display Double Display Multigage System

EH-120S

Page G-11

EG-101P EH-102PLG-01100LG-01100C

LGM-01100LGM-01100C EH-101P

Page G-15Page G-12

Page G-16

Page G-12 Page G-16

LGF-0550L-B EG-101P EH-102P EV-16P

Page G-6

LGF-150L-B

Page G-6 Page G-15 Page G-16 Page G-17

LG-1100NLG-1100C

EB-11P

Page G-12

LGM-1100NPage G-12 Page G-14

EH-101P

Page G-16

US-1002

G-4

(HIROSE)RM12BPG-6P

Connecting cable (2m)


30

82.7

20.4

ø9 18

ø9

ø14 ø9.5 75

6.3

15.9

25

.1

4.9

(thre

ad)

No.200365 Clamping nut

L

L=11.5 to 13.0

ø9

542-204MASS: 145g

542-244MASS: 160g 542-222, 542-222H

MASS: 140g542-262, 542-262H

MASS: 150g

542-230MASS: 165g

542-270MASS: 170g

18

ø9

ø8

9 24

.6

75

0 - 0.009

0 - 0.009

7.3

ø9.5

ø4.2

ø7.9

Knurl

ø12

ø14

113 20

.2

15.9

34

.9

4.9

(thre

ad)

No.200365

L

L=11.5 to 13.0

113

15.4

34

.9

ø8

7.3 60

.1

50.3

113 4.

5 15

.9

L

29.3

ø9.5

Applicable air hose (ID ø2.5)

(No.200365)

L=11.5 to 13.0

60.1

(3

9.3)

102 21

.2

15.4

23

.9

10.5

ø8

Stro

ke 1

0.5m

m

or lo

nger

Stro

ke 1

0.5m

m

or lo

nger

9.6

5

Air inlet (Applicable air hose: ID ø2.5)

542-230

4.9 9.2

0 - 0.009

0 - 0.009

Clamping nut

0 - 0.009

Clamping nut

Knurl

0 - 0.009

20.4 30

47

Dsub 15-pin

100

Linear Gage LGBSERIES 542 — 0.001mm Reading

542-204, 542-204H 542-222, 542-222H,542-224, 542-401

542-244542-262, 542-262H,542-264, 542-421

FEATURES•Extremelycompactdesign.Availablewithanoutsidediameterassmallas8mm.•Thesmallphotoelectriclinearencoderassureshighprecisionovertheentirestrokerange.

•Theballbearingsusedinthespindleunitensuresuperbdurability.

542-270

542-230, 542-223

DIMENSIONS AND MASS Unit: mm

Technical DataAccuracy: RefertothelistofspecificationsResolution: 1µmInchResolution:RefertotheapplicablecountersLengthstandard:PhotoelectriclinearencoderMax.responsespeed:900mm/sContactpoint: ø3mmcarbideStem: ø8mmorø9.5mmBearingtype: StrokeballbearingMeasuringforce:RefertothelistofspecificationsOutputsignal: 90°phasedifference,differentialsquare

wave(RS-422Aequivalent) (Sign-waveoutput:542-401, 542-424)

Signalpitch: 4µmCablelength: 80”/2mDust/Waterprotectionlevel:IP54

Optional Accessories238773: Rubberbootfor5mmLGB(spare)238772: Rubberbootfor10mmLGB(spare)902434: Extensioncable(5m)902433: Extensioncable(10m)902432: Extensioncable(20m)

Applicable CountersEHcounter(542-060A, 542-062A)EBcounter(542-092-2)EGcounter(542-015)EVcounter(542-063)

SPECIFICATIONSRange Order No. Resolution Accuracy Measuring force* Stemdia. Remarks5mm(.2”) 542-204 0.001mm 2µm 0.65N/0.6N/0.55N 8mm —5mm(.2”) 542-204H 0.001mm 1µm 0.65N/0.6N/0.55N 8mm —10mm(.4”) 542-222 0.001mm 2µm 0.8N/0.75N/0.7N 8mm —10mm(.4”) 542-222H 0.001mm 1µm 0.8N/0.75N/0.7N 8mm —10mm(.4”) 542-401 0.001mm 2µm 0.8N/0.75N/0.7N 8mm Sine-waveoutput10mm(.4”) 542-224 0.001mm 2µm 0.6N/0.55N/0.5N 8mm —10mm(.4”) 542-230 0.001mm 2µm 0.8N/0.75N/0.7N 8mm w/pneumaticcylinder10mm(.4”) 542-223 0.001mm 2µm 0.8N/0.75N/0.7N 8mm w/pneumaticcylinder5mm(.2”) 542-244 0.001mm 2µm 0.65N/0.6N/0.55N 9.5mm Lowmeasuringforce10mm(.4”) 542-262 0.001mm 2µm 0.8N/0.75N/0.7N 9.5mm —10mm(.4”) 542-262H 0.001mm 1µm 0.8N/0.75N/0.7N 9.5mm —10mm(.4”) 542-421 0.001mm 2µm 0.8N/0.75N/0.7N 9.5mm Sine-waveoutput10mm(.4”) 542-264 0.001mm 2µm 0.6N/0.55N/0.5N 9.5mm Lowmeasuringforce10mm(.4”) 542-270 0.001mm 2µm 0.8N/0.75N/0.7N 9.5mm w/pneumaticcylinder*Postureofgage:Upward()/Horizontal()/Downward()

US-1002

G-5

Technical DataAccuracy: Refertothelistofspecifications

(excludingquantizingerror)Resolution: 1µm,0.5µmor0.1µmInchResolution: RefertotheapplicablecountersLengthstandard:PhotoelectriclinearencoderMax.responsespeed:1500mm/s,400mm/s(542-158)Contactpoint: ø3mmcarbideStem: ø8mmBearingtype: StrokeballbearingMeasuringforce:RefertothelistofspecificationsOutputsignal: 90°phasedifference,differentialsquare

wave(RS-422Aequivalent)Signalpitch: 0.4µm(542-158),2µm(542-157),4µm

(542-156)Cablelength: 80”/2mDust/Waterprotectionlevel:IP66

Optional Accessories238772: Rubberboot(10mm)902434: Extensioncable(5m)902433: Extensioncable(10m)902432: Extensioncable(20m)02ADE230: Airdriveunit02ADB680: Thruststemset02ADB682: Clamping nut02ADB683: Wrench

Applicable CountersEHcounter(542-060A, 542-062A)EGcounter(542-015)EBcounter(542-092-2)*EVcounter(542-063)**Onlyapplicableforresolution0.0005mmand0.001mmLGK

Clamping nut for thrust stemM9.5X0.5

10.6

or

long

er (s

trok

e)

ø8-0.0090

146.

573

.1

ø12

125.

5

82.7

30 20.4

Connecting cable(2m)

(HIROSE)RM12BPE-6PH


MASS: 250g

Linear Gage LGKSERIES 542 — 0.1µm, 0.5µm or 1µm Reading

SPECIFICATIONSRange Order No. Resolution Accuracy* Measuring force** Stemdia. Remarks10mm(.4”) 542-156 0.001mm (1.5+L/50)µm 0.65N/0.6N/0.55N 8mm —10mm(.4”) 542-157 0.0005mm (1.5+L/50)µm 0.65N/0.6N/0.55N 8mm —10mm(.4”) 542-158 0.0001mm (0.8+L/50)µm 0.65N/0.6N/0.55N 8mm —*L=Measuredlength(mm)**Postureofgage:Upward()/Horizontal()/Downward()

542-158 542-157 542-156

FEATURES•Compactdesignwitha8mmstem

diameter•Excellentprotectionagainstdustandwatersplash(IP-66)inharshshop-floorenvironments.•Maximumpermissibleaccelerationvaluesforshockandimpact,11ms(IEC68-2-27)•Outputdifferentialsquarewavesignalsforawiderangeofapplications.

•Employslinearstrokebearingsonthespindlemovementfordurability•ThrustStemwithaclampingnutisoptional.•Interchangeablecontactpointsfordialindicatorscanbeused.

US-1002

G-6

Linear Gage LGFSERIES 542 — 0.1µm, 0.5µm or 1µm Reading

SPECIFICATIONSRange Order No. Resolution Accuracy* Measuring force** Stemdia. Remarks10mm(.4”) 542-181 0.0001mm (0.8+L/50)µm 1.2N/1.1N/1.0N 8mm —10mm(.4”) 542-171 0.0005mm (1.5+L/50)µm 1.2N/1.1N/1.0N 8mm —10mm(.4”) 542-161 0.001mm (1.5+L/50)µm 1.2N/1.1N/1.0N 8mm —25mm(1”) 542-182 0.0001mm (0.8+L/50)µm 4.6N/4.3N/4.0N 15mm —25mm(1”) 542-172 0.0005mm (1.5+L/50)µm 4.6N/4.3N/4.0N 15mm —25mm(1”) 542-162 0.001mm (1.5+L/50)µm 4.6N/4.3N/4.0N 15mm —25mm(1”) 542-612 0.005mm (7.5+L/50)µm 4.6N/4.3N/4.0N 15mm50mm(2”) 542-173 0.0005mm (1.5+L/50)µm 5.7N/5.3N/4.9N 15mm —50mm(2”) 542-163 0.001mm (1.5+L/50)µm 5.7N/5.3N/4.9N 15mm —50mm(2”) 542-613 0.005mm (7.5+L/50)µm 5.7N/5.3N/4.9N 15mm*L=Measuredlength(mm)**Postureofgage:Upward()/Horizontal()/Downward()

542-161

DIMENSIONS AND MASS

Unit: mm

Optional Accessories238772: Rubberboot(10mm)962504: Rubberboot(25mm)962505: Rubberboot(50mm)902434: Extensioncable(5m*)902433: Extensioncable(10m*)902432: Extensioncable(20m*)02ADB680: Thruststemset(for10mmrangemodels)02ADB690: Thruststemset(for25,50mmrangemodels)02ADE230: Airliftingunits(10mmrange)02ADE250: Airliftingunits(25mmrange)02ADE270: Airliftingunits(50mmrange)*notavailablefor542-181 and 542-182

Technical DataAccuracy: RefertothelistofspecificationsResolution: 1µm,0.5µmor0.1µmInchResolution: RefertotheapplicablecountersLengthstandard:PhotoelectriclinearencoderMax.responsespeed:1500mm/s,(400mm/s:542-181,

542-182)Contactpoint: ø3mmcarbideStem: ø8mm or ø15mmBearingtype: StrokeballbearingMeasuringforce:RefertothelistofspecificationsOutputsignal: 90°phasedifference,differentialsquare

wave(RS-422Aequivalent)Signalpitch: 4µm(542-161, 542-162, 542-163),

2µm(542-171, 542-172, 542-173)or 0.4µm(542-181, 542-182)

Cablelength: 80”/2mDust/Waterprotectionlevel:IP66

Applicable CountersEHcounter(542-075A, 542-071A)EGcounter(542-015)EBcounter(542-092-2)EVcounter(542-063)

542-162 542-163

542-613

542-172542-173

542-171

M9.5×0.5

M9.5×0.5

02ADB682

02ADB681

12

（13.8）

φ9.5-0.015 0

414.5

9.5

6

17.3

φ8 -0.009 0

12.3

10.6

34

（12

9.5）

15.4 61.5

46.9

φ18

41

14.80.6

75.7

14

6.95

45.9

LGF-110L-B_03.ai

THRUST STEM

NUT

W /

THRU

ST S

TEM

STRO

KE

CABLE LENGTH=2m

M14×0.5

M18×1

02ADN371

02ADB692

21

（24.2）

φ18-0.018 0

5918.5

φ18

41

20.6

30.7

61.7

φ15 -0.015 0

13.8

26

（20

8.3）

34

8.6

93.6

114.

76.

522

200.6

4.5

84.1

LGF-125L-B_03.ai

THRUST STEM

NUT

CABLE LENGTH=2m

W/ T

HRUS

T ST

EM

STRO

KE

LGF-150L-B_03.ai

M18×1

02ADN371

02ADB692 M14×0.5

142

34

13.8

（31

6）

0.6

φ15-0.015 0

61.720.6

56.1

8.6

41

φ18

18.5

9 5

φ18-0.018 0

（24.2）

21

4.5

124.

9

174

629

.6

20

THRUST STEM

NUT

CABLE LENGTH=2m

W/ T

HRUS

T ST

EM

STRO

KE51

.5

542-181542-171542-161

542-182542-172542-162542-612

542-173542-163542-613

US-1002

G-7

Linear Gage LGF-Z with Origin Point MarkSERIES 542 — 0.5µm or 1µm Reading

SPECIFICATIONSRange Order No. Resolution Accuracy* Measuring force** Stemdia. Remarks10mm(.4”) 542-174 0.0005mm (1.5+L/50)µm 1.2N/1.1N/1.0N 8mm w/originpointmark10mm(.4”) 542-164 0.001mm (1.5+L/50)µm 1.2N/1.1N/1.0N 8mm w/originpointmark25mm(1”) 542-175 0.0005mm (1.5+L/50)µm 4.6N/4.3N/4.0N 15mm w/originpointmark25mm(1”) 542-165 0.001mm (1.5+L/50)µm 4.6N/4.3N/4.0N 15mm w/originpointmark50mm(2”) 542-176 0.0005mm (1.5+L/50)µm 5.7N/5.3N/4.9N 15mm w/originpointmark50mm(2”) 542-166 0.001mm (1.5+L/50)µm 5.7N/5.3N/4.9N 15mm w/originpointmark*L=Measuredlength(mm)**Postureofgage:Upward()/Horizontal()/Downward()

542-174 542-175 542-176

542-165 542-166


Optional Accessories238772: Rubberboot(10mm)962504: Rubberboot(25mm)962505: Rubberboot(50mm)02ADB680: Thruststemset(for10mmrangemodels)02ADB690: Thruststemset(for25,50mmrangemodels)02ADE230: Airliftingunits(10mmrange)02ADE250: Airliftingunits(25mmrange)02ADE270: Airliftingunits(50mmrange)

Technical DataAccuracy: RefertothelistofspecificationsResolution: 1µmor0.5µmInchResolution: RefertotheapplicablecountersLengthstandard:PhotoelectriclinearencoderMax.responsespeed:1500mm/sContactpoint: ø3mmcarbideStem: ø8mm or ø15mmBearingtype: StrokeballbearingMeasuringforce:RefertothelistofspecificationsOutputsignal: 90°phasedifference,differentialsquare

wave(RS-422Aequivalent)Signalpitch: 4µm(542-164, 542-165, 542-166)or

2µm(542-174, 542-175, 542-176)Cablelength: 80”/2mDust/Waterprotectionlevel:IP66

Applicable CountersEHcounter(542-073A)EBcounter(542-094-2)EGcounter(542-017)EVcounter(542-067)

542-164

542-174542-164

CABLE LENGTH＝2m

M9.5×0.5

M9.5×0.5

02ADB682

02ADB681

6

17.3

φ8-0.009 0

12.310.6

34

（12

9.5）

61.5

46.9

15.4

φ16.7

34

12

（13.8）

φ9.5-0.015 0

414.5

9.5

14.80.6

75.7

14

6.95

45.9

LGF-110ZL-B_03.ai

THRUST STEM

W/ T

HRUS

T ST

EM

NUT

STRO

KE M14×0.5

02ADB692

02ADN371

M18×1

18.5

9 5

φ18-0.018 0

（24.2）

21

34

φ16.7

93.6

8.6

34

（20

8.3）

26

13.8

φ15-0.015 0

61.7

30.7

20.6

4.5

84.1

200.6

114.

76.

522

LGF-125ZL-B_03.ai

THRUST STEM

NUT

W/ T

HRUS

T ST

EM

CABLELENGTH=2m

STRO

KE

LGF-150ZL-B_03.ai

M14×0.5

M18×1

02ADN371

02ADN371

18.5

9 5

φ18-0.018 0

（24.2）

21

34

φ16.7

142

34

13.8

（31

6）

0.6

φ15-0.015 0

61.720.6

56.1

8.6

4.5

124.

9

174

629

.6

20

THRUST STEM

NUT

W/ T

HRUS

T ST

EM

STRO

KE 5

1.5

CABLELENGTH=2m

542-175542-165

542-176542-166

US-1002

G-8

Linear Gage LGD SERIES 575 — .0005” / 0.01mm Reading

575-326

575-328

575-327

TheLGDisanultra-compactABSLinearGagedesignedtofitintoverytightspaces.Itkeepstrackofitsoriginpointonceset.

FEATURES•Theuseofanabsolutescale* inthesensormakesitpossibletomaintaintheoriginsettingevenwhenthepowerisswitchedoff.

•Speciallinearballbearingsareusedforthespindleguidetoensurealongservicelife.

•OptionalthruststemandtighteningnutfacilitatesetupoftheLGDlineargageinholesofaplateorfixture.

DIMENSIONS AND MASS

Unit: mm

Technical DataAccuracy: RefertothelistofspecificationsResolution: 1µmor.0005”Lengthstandard:Capacitance-typeABSOLUTElinearencoderMax.responsespeed:UnlimitedContactpoint: ø3mmcarbideStem: ø8mm or ø15mmBearingtype: StrokeballbearingMeasuringforce:RefertothelistofspecificationsOutput signal: Digimatic outputExternalinput: Origin-settingsignal(Absoluteoriginposition

canbechangedexternally.)Cablelength: 80”/2mm

Optional Accessories238772: 10mmrubberboot(spare)962504: 25mmrubberboot(spare)962505: 50mmrubberboot(spare)02ADC730: ø9.5mmThruststemset(for10mmmodel)02ADC740: ø18mmThruststemset(for 25mm/50mm model)965275*: DigimaticPowerSupplyUnit02ADE230: Airliftingunits(10mmrange)02ADE250: Airliftingunits(25mmrange)02ADE270: Airliftingunits(50mmrange)* TodenoteyourAClinevoltageaddthefollowingsuffixestotheorderNo.(e.g.:965275A): A for UL/CSA, D for CEE, E for BS, F for SAA, DCforChina,K for EK, No suffixisrequiredforJIS/100V

Applicable CountersECcounter(542-007A)EBcounter(542-093-2)EGcounter(542-016)EVcounter(542-064)SPECIFICATIONS

Metric

Range Order No. Resolution Accuracy Measuring force* Stemdia. Remarks10mm 575-326 0.01mm 20µm 1.2N/1.1N/1.0N 8mm —25mm 575-327 0.01mm 20µm 4.6N/4.3N/4.0N 15mm —50mm 575-328 0.01mm 30µm 5.7N/5.3N/4.9N 15mm —

Inch

Range Order No. Resolution Accuracy Measuring force* Stemdia. Remarks.4” 575-336 .0005” .001” 1.2N/1.1N/1.0N 8mm —1” 575-337 .0005” .001” 4.6N/4.3N/4.0N 15mm —2” 575-338 .0005” .0012” 5.7N/5.3N/4.9N 15mm —

LGD

LGD

575-326575-336

02ADB681

02ADB682

M9.5×0.5

M9.5×0.5

46.9

61.515.4

（12

9.5）

34

10.6

12.3

φ8-0.009 0

17.3

20

37

8.6

6

9.5

14.5

4

φ9.5-0.015 0

（13.8）

12

545

.9

75.7

14

6.9

14.80.6

LGD-1010L-B_03.ai

THRUST STEM

W/ T

HRUS

T ST

EM

STRO

KE

CABLELENGTH=2m

NUT

M14×0.5

02ADB692

02ADN371

M18×1

18.5

9 5

φ18 -0.018 0

（24.2）

21

93.6

8.6

34

（20

8.3）

26

13.8

φ15 -0.015 0

20

37

8.6

61.7

30.7

20.6

4.5

84.1

200.6

114.

76.

522

LGD-1025L-B_03.ai

THRUST STEM

NUT

W/ T

HRUS

T ST

EM

STRO

KE

CABLELENGTH=2m

M14×0.5

M18×1

02ADN371

02ADB692

18.5

9 5

φ18 -0.018 0

（24.2）

21

142

34

13.8

51.5

（31

6）

0.6

φ15-0.015 0

37

208.6

61.720.6

56.1

8.6

4.5

124.

9

174

629

.6

20

LGD-1050L-B_03.ai

THRUST STEM

NUT

W/ T

HRUS

T ST

EM

STRO

KE

CABLELENGTH=2m

575-327575-337

575-328575-338

US-1002

G-9

37.3

17

5.9

65.9

25.9

146.

1

35 17.4

ø10.5

6.8

24.2

20 8.6

37

Linear Gage LGSSERIES 575 — .0005” / 0.01mm Reading

SPECIFICATIONSMetric

Range Order No. Resolution Accuracy Measuring force* Stemdia. Remarks12.7mm 575-303 0.01mm 0.015mm 2.0N/1.8N/1.6N 8mm —

575-303

Technical DataAccuracy: RefertothelistofspecificationsResolution: 0.01mmor.0005”Lengthstandard:Capacitance-typeABSOLUTElinearencoderMax.responsespeed:UnlimitedContactpoint: ø3mmcarbide(ø3mmsteel:575-313)Stem: ø8mmor3/8”DIABearingtype: Slide-bearingMeasuringforce:RefertothelistofspecificationsOutput signal: Digimatic outputCablelength: 80”/2mDust/Waterprotectionlevel:IP66

Optional Accessories238774: Sparerubberboot903594: AirDriveUnit(metric)903598 AirDriveUnit(inch)02ADF640: SPCcableextensionadapter02ADD950: Extensioncable(0.5m)936937: Extensioncable(1m)965014: Extensioncable(2m)––––––: EC Counter

Inch

Range Order No. Resolution Accuracy Measuring force* Stemdia. Remarks.5” 575-313 .0005” .0006” 2.0N/1.8N/1.6N 3/8 DIA —*Postureofgage:Upward()/Horizontal()/Downward()

TheLGSiscompactLinearGagedesignedtofitintotightspaces.


Applicable CountersECcounter(542-007A)EBcounter(542-093-2)EGcounter(542-016)EVcounter(542-064)

MASS: 190g

US-1002

G-10


30

82.7

20.4

ø9

18

ø9

ø14ø9.5 0

- 0.00975

6.3

15.9

25.1

4.9

(thre

ad)

(HIROSE)RM12BPG-6P

Clamping nut (No.200365)

L

L=11.5~13.0

5 (Measuring range)

45.4

0.1m type with R1.5 carbide point

Connector for lifting cable

Stem dia

85

148.

3 (0

.1m

type

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25

10 (M

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1020

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18

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315

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4.9

(thre

ad)

Clamping nut (No.200365)

L

L=11.5~13.0

5 (Measuring range)


30

82.7

20.4

(HIROSE)RM12BPG-6P

Laser Hologage LGHSERIES 542 — 0.1µm Reading

Linear Gage LGBSERIES 542 — 0.1µm Reading

SPECIFICATIONSRange Order No. Resolution Accuracy Measuring force* Stemdia. Remarks10mm(.4”) 542-711-1 0.1µm 0.2µm 0.55N/0.45N/0.35N 15mm —10mm(.4”) 542-712-1 0.1µm 0.2µm 0.1N/—/— 15mm Lowmeasuringforce*Postureofgage:Upward()/Horizontal()/Downward()

542-711-1

542-246

Technical DataAccuracy: RefertothelistofspecificationsResolution: 0.1µmInchResolution:RefertotheapplicablecountersLengthstandard:Laser-hologrammeasurementsensorMax.responsespeed:250mm/sContactpoint: R1.5mmcarbideStem: ø15mmBearingtype: HighprecisionlinearballbearingMeasuringforce:RefertothelistofspecificationsOutputsignal: 90°phasedifference,differentialsquare

wave(RS-422Aequivalent)Signalpitch: 0.25µmCablelength: 80”/2m

Optional Accessories 902434: Extensioncable(5m)902433: Extensioncable(10m)902432: Extensioncable(20m)238773: Rubberboot

SPECIFICATIONSRange Order No. Resolution Accuracy Measuring force* Stemdia. Remarks5mm(.2”) 542-246 0.1µm 0.8µm 0.65N/0.60N/0.55N 9.5mm —*Postureofgage:Upward()/Horizontal()/Downward()

Theseareextra-highaccuracygagingheadsprovidedwithresolutionupto0.0001mm.Thecompactdimensionsalloweasyinstallationtoverytightspaces.TheLaserHologageemploysauniqueholographyscaleasthelengthstandard,ensuring excellent measuring accuracy and repeatability.Thededicateddisplayunit(EHCounter)isoptional.

FEATURES•Alinearballbearinginthespindleguideprovidesexcellentdurabilityforanextendedservicelife.•The0.0001mmreadingtypeLGBlineargage(542-246)comeswithaclampingnutonthestem.



Technical DataAccuracy: RefertothelistofspecificationsResolution: 0.1µmInchResolution:RefertotheapplicablecountersLengthstandard:PhotoelectriclinearencoderMax.responsespeed:380mm/sContactpoint: R1.5mmcarbideStem: ø9.5mmBearingtype: LinearballbearingMeasuringforce:RefertothelistofspecificationsOutputsignal: 90°phasedifference,differentialsquare

wave(RS-422Aequivalent)Signalpitch: 0.4µmCablelength: 80”/2mDust/Waterprotectionlevel:IP54

Optional Accessories238773: Rubberboot971751: Stemfixtureforfixingtotopsurface971752: Stemfixtureforfixingtobottomsurface971753: Spindleliftingcable971750: Laser Hologage stand

Applicable CountersEHcounter(542-075A, 542-071A)EGcounter(542-015)

Applicable CountersEHcounter(542-075A, 542-071A)EGcounter(542-015)

MASS: 200g

MASS: 160g

US-1002

G-11

Laser HologageSERIES 542 — 0.01µm / 1µin Reading

SPECIFICATIONSRange Order No. Resolution Accuracy Measuring force* Stemdia. Remarks10mm(.4”) 542-925A 0.01µm/1µinch 0.1µm 0.55N/0.45N/0.35N 15mm —10mm(.4”) 542-926A 0.01µm/1µinch 0.1µm 0.1N/—/— 15mm Lowmeasuringforce*Postureofgage:Upward()/Horizontal()/Downward()

Gage headEH-120S

Technical DataAccuracy: RefertothelistofspecificationsResolution: 0.01µmLengthstandard:Laser-hologrammeasurementsensorMax.responsespeed:250mm/sContactpoint: R5mmcarbideStem: ø15mmBearingtype: HighprecisionlinearballbearingMeasuringforce:RefertothelistofspecificationsOutputsignal: 90°phasedifference,two-phasesinewaveSignalpitch: 0.25µmCableLength: 80”/2m

Optional Accessories971751: Stemfixtureforfixingtotopsurface971752: Stemfixtureforfixingtobottomsurface971753: Spindleliftingcable971750: Laser Hologage stand

TheMitutoyoLaserHologageisahigh-enddigitalgagingsystemthatemploysdiffractedlaserbeaminterferencetomakehighlyaccurateandrepeatablemeasurements.Itfeaturesultra-finediffractiongratingswhichareholographicallyrecordedonthescale.TheLaserHologageissuitableformeasuringultra-highprecisionparts,especiallythoseinsemiconductorandrelatedindustries.

FEATURES•Highlyaccuratemeasurementduetoanultra-highresolutionof0.00001mm(0.01µm),whichisclosetotheperformanceoflaserinterferometers.•Excellentmeasuringstability—thedesignisalsohighlyresistanttounfavorableenvironmentalconditionssuchasairmovementandatmosphericpressurechanges.•High-precisionlinearballbearingsareusedintheguideforextremelysmoothmovementandexceptionaldurability.•Adisplayunitisprovided.

DIMENSIONS AND MASS

Unit: mm

68

72

27 5.1

68

Dimensions of opening (panel mounting)

Panel thickness: 1 to 3.2 mm

Rubber foot (provided)

138

Showing the AC adapter connection

11.2

10

+1+0.5

+0.

7+

0.3

Stand (provided)

(3.1

)

156.7

148.2144

137

138

137

45.4

85

146

(0.0

1m t

ype)

25

10 (M

easu

ring

rang

e)

1020

ø15h6

1840

0-0.011

100

107

235

8

5 13

Display Unit

Connector for lifting cable

(Stem dia.)

0.01mm type with R5 carbide point

MASS: 200g

MASS: 900g

US-1002

G-12

RM12

BPG

-6P

(HIR

OSE

)

Cab

le le

ngth

(2m

)

2-ø4

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9 de

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33

34

1720

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49

50

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429

Stro

ke 1

02 o

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191.

56

736

243.

568

34

49 33

17

55

36 7

20

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ke 1

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ger

Rubb

er b

oot

67

236

243.

5

473.

5

6RM

12BP

G-6

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(A c

ount

er v

arie

s de

pend

ing

on th

e ga

ge)

Con

nect

ing

cabl

e (2

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9 de

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Out

put c

able

leng

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Driv

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HR1

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Long Stroke Linear Gage LG/LGMSERIES 542 — 0.1 / 1µm Reading

DIMENSIONS AND MASS

542-312

Motor drive unit

542-313

Technical DataAccuracy: RefertothelistofspecificationsResolution: 1µmor0.1µmInchResolution:RefertotheapplicablecountersLengthstandard:PhotoelectriclinearencoderMax.responsespeed:400mm/s(800mm/s:motor-driventype)Contactpoint: ø3mmcarbideStem: ø20mmBearing type: Bearing guideMeasuringforce:RefertothelistofspecificationsOutputsignal: 90°phasedifference,differentialsquare

wave(RS-422Aequivalent)Cablelength: 80”/2mDust/Waterprotectionlevel:IP54

FEATURES•Therearethreetypesincludingthestandardmodel,lowmeasuringforcemodel,andrubberbootmodel(made-to-order)available.

Standard/Low measuring force type Rubber boot type Standard type (motor-driven type) Rubber boot type (motor-driven type)Unit: mm

Applicable CountersEHcounter(542-075A, 542-071A)EGcounter(542-015)EBcounter(542-092-2)*EVcounter(542-063)** Resolution 1µm LGM only

MASS: 750g MASS: 940g

MASS: 780g MASS: 970g

SPECIFICATIONSRange Order No. Resolution Accuracy* Measuring force** Stemdia. Remarks100mm(4”) 542-312 0.1µm (2+L/100)µm≤ 2.5µm 8.0N/6.5N/5.0N 20mm Standard100mm(4”) 542-316 0.1µm (2+L/100)µm≤ 2.5µm 3.0N/—/— 20mm Lowmeasuringforce100mm(4”) 542-314 0.1µm (2+L/100)µm≤ 2.5µm 8.0N/6.5N/5.0N 20mm w/rubberboot100mm(4”) 542-332 1µm (2.5+L/100)µm≤ 3µm 8.0N/6.5N/5.0N 20mm Standard100mm(4”) 542-336 1µm (2.5+L/100)µm≤ 3µm 3.0N/—/— 20mm Lowmeasuringforce100mm(4”) 542-334 1µm (2.5+L/100)µm≤ 3µm 8.0N/6.5N/5.0N 20mm w/rubberboot*L=Measuredlength(mm)**Postureofgage:Upward/Horizontal/Downward

Range Order No. Resolution Accuracy* Measuring force** Stemdia. Remarks100mm(4”) 542-313 0.1µm (2+L/100)µm≤ 2.5µm 3.0N/6.5N/9.5N 20mm Motor-drivenType100mm(4”) 542-315 0.1µm (2+L/100)µm≤ 2.5µm 4.5N/—/6.0N 20mm Motor-drivenType100mm(4”) 542-333 1µm (2.5+L/100)µm≤ 3µm 3.0N/6.5N/9.5N 20mm Motor-drivenType100mm(4”) 542-335 1µm (2.5+L/100)µm≤ 3µm 4.5N/—/6.0N 20mm Motor-drivenType*L=Measuredlength(mm)**Postureofgage:Upward()/Horizontal()/Downward()Withrubberboot:542-315, 542-335

US-1002

G-13

48

96 6.6 67 (8)

44.

4

91.4

44.

4

EC CounterSERIES 542 — Assembly Type Display Unit for LGD and LGS

DIMENSIONS AND MASS

Unit: mm

SPECIFICATIONSModel EC-101DOrder No. 542-007AApplicableinput Digimaticcode(SPC)Applicablegage LGD,LGD-L,LGD-ML,LGSandSPCoutputgages.Numberofgageinput 1Resolution .001”,.0005”,.0001”,.00005”/0.01mm,0.001mm

(Automaticallysetdependingonthegage.)Display 6-digitandanegative[-]signLED(Amber,Green,Red)

542-007

FEATURES•EmployedtheDINsize(96X48mm)andmount-on-panelconfiguration,whichgreatlyfacilitatestheincorporationintoasystem.•PossibletoproduceeithertolerancejudgmentoutputorDigimaticoutput(SPC).

FunctionZero setPreset, GO/±NG judgment

Output (selectable)Tolerance judgment:-NG,OK,+NG(open-collector)Data:Digimaticcode(SPC)

External control signal inputPreset,datahold

Power supplyViaACadaptor06AEG302JA(Standardaccessory)

Optional Accessories936937:SPCcable(40"/1m)965014:SPCcable(80"/1m)214938:PJ-2(DCPlug)C162-155:GO/±NGjudgementcable

MASS: 500g

US-1002

G-14

91.4

44.4

154.6

48

96

6.6 137 (11)

EB CounterSERIES 542 — Assembly Type Display Unit with Multiple Limit Setting

FEATURES•Possibletoproduce3-step/5-stepX7kindsoftoleranceoutputandlimitvalueoutputindependentlyforeachof7channels.•ProvidedwithserialBCDoutputcapability,whichmakestheconnectiontoaprogrammablecontrollerorpersonalcomputer,etc.possiblewiththeminimumcablingrequirement.

•Possibletoperformdynamicmeasurementwiththesimplifiedanalogoutput.•EmployedtheDINsize(96X48mm)andmount-on-panelconfiguration,whichgreatlyfacilitatestheincorporationintoasystem.

542-092

542-094

542-093

SPECIFICATIONSModel EB-11P EB-11Z EB-11DOrder No. 542-092-2 542-094-2 542-093-2Applicableinput Differentialsquare-wave Differentialsquare-wave

w/originpointmarkDigimaticcode(SPC)

Applicablegage LGK, LGF, LGB, LGE LGFwithoriginpointmark LGD, LGSNumberofgageinput 1Resolution .0005”,.0001”,.00005”,.000005”/ .0005”,.0001”,.00005”/

0.01mm,0.005mm,0.001mm,0.0005mm 0.01mm,0.001mmTolerancejudgmentdisplay LEDdisplay(3steps:Amber,Green,Red/5steps:Amber,Amberflash,Green,Redflash,Red)

FunctionPreset,tolerancejudgmentoutput(3/5-stepX7kinds),limitvalueoutput(2kindsindependentlyforeachofthe7channels),peak(maximum,minimum,runout)measurement,diversedataoutput(serialBCD,simplifiedanalog)

OutputTolerance judgment: L1 to L5, open-collectorControl:Normaloperationsignal(NORMAL),open-collector

External control signal inputPreset,displayhold,peakvalueclear,tolerancejudgmentBANKswitch,open-collectororno-voltagecontactsignal(with/withoutcontactpoint)

InterfaceSerial BCD: Bit-serial format, open-collectorAnalog output:2.5V+CountingvalueXvoltageresolution(25mV/2.5mV):Full-scale0to5VDigimatic input/output: •Connectingtotheexternalswitchbox(No.02ADF180)makesiteasytoentertolerancelimitsandpresetvalues.Note)Thiscannotbeusedwhenthegageisconnectedtoa Mitutoyo DP-1VR Digimatic Mini-Processor

•PossibletoconnectwithaMitutoyoDP-1VRDigimaticMini-Processor.

•NumberoftolerancestepscanbeexpandedbymakingasetofEB-Dcounters.

Quantization error±1 count

Maximum input frequency1.25MHz(Theresponsespeeddependsonthegagebeingused.)Theresponsespeeddependsonthegagebeingused.(542-093)

Power supply voltageDC+12to24V

Power consumption6W(500mA)orless(Securepowersupplymorethan1Aforeachunit.)


MASS: 400g

Optional Accessories02ADB440: I/O output connector02ADF180: 10-key unit936937: SPCcable(40”/1m)965014: SPCcable(80”/2m)02ADD930: Terminalblockconnectingcable 02ADN460: AC adapter02ZAA010: Powercable

02ADB440 02ADN460 02ZAA010

US-1002

G-15

154.6

48

96 6.6 137 (11)

91.4

44.4

EG CounterSERIES 542 — Assembly Type Display Unit

542-015

542-017

542-016

FEATURES•Possibletoproduce3-step/5-stepX3kindsoftoleranceoutputandBCDoutput.•Thesmoothingfunctioncanreducethefluctuationofdisplaydigits.

SPECIFICATIONSModel EG-101P EG-101Z EG-101DOrder No. 542-015 542-017 542-016Applicableinput Differentialsquare-wave Differentialsquare-wave

w/originpointmarkDigimaticcode(SPC)

Applicablegage LGK, LGF, LGB, LGE, LGM, LGH (excludingwithoriginpoint

andsignwavetypes)

LGFwithoriginpointmark LGD, LGS

Numberofgageinput 1Resolution(Dependingonthelineargagetypeconnected)

.001”,.0005”,.0001”,.00005”,.00001”,.000005”/0.01mm,0.005mm,0.001mm,0.0005mm,0.0001mm

.001”,.0005”,.0001”,.00005”/

0.01mm,0.001mmTolerancejudgmentdisplay LEDdisplay(3steps:Amber,Green,Red/5steps:Amber,Amberflash,Green,Redflash,Red)

•EmployedtheDINsize(96X48mm)andmount-on-panelconfiguration,whichgreatlyfacilitatestheincorporationintoasystem.


MASS: 400g

FunctionPreset,directionswitch,tolerancejudgment(3/5-step,3kinds).peak(max.,min.,runout)measurement,constantnumber,smoothing,errordisplay/output,protectionoverkeys

OutputTolerance judgment:L1toL5(Switchoverbetweenopen-collectoroutputandBCDoutputbymeansoftheparameter)Control:NOM(normalsignal)open-collectorBCD:6-digit(positive/negative-truelogic)open-collector(Switchoverbetweentolerancejudgmentoutputbymeansoftheparameter)

External control signal inputPreset,displayhold,peakvalueclear,tolerancejudgmentBANKswitch

Quantization error±1 count

Maximum input frequency1.25MHz(Theresponsespeeddependsonthegagebeingused.)

Power supply voltageDC+12to24V

Power consumption6W(500mA)orless(Securepowersupplymorethan1Aforeachunit.)

Optional Accessories02ADD930:Terminalconnectingcable02ADB440: I/O output connector 02ADN460: AC adapter02ZAA010: Powercable

02ADB440 02ADN460 02ZAA010

US-1002

G-16

68

72

27 5.1

68

Dimensions of opening (panel mounting)

Panel thickness: 1 to 3.2 mm

Rubber foot (provided)

138

Showing the AC adapter connection

11.2

10

+1+0.5

+0.

7+

0.3

Stand (provided)

(3.1

)

156.7

148.2144

137

138

137

EH CounterSERIES 542 — Multi-function Display Unit

FEATURES•DINcompatiblePanel-mountingtypeandDINsize(144x72mm).Itcanbeeasilyincorporatedintoeachsysteminstrument.•Thiscountercanbeusedonadesktopbymountingitonthesuppliedstandleg.•ThestandardRS-232CinterfaceallowseasycommunicationwithanexternalPC.•TheRSLinkfunctionpermitsmultipleEHcounters(6unitsmaximum)tobe

connectedwithdaisychainanddatatobeinput/outputfromonechanneloftheterminalRS-232Cinterface.•Themaximumvalue,minimumvalue,andTIR(runout)measurementsarepossible.•The2-gageinputtypecanperform2-axisdisplayandmakeadditionorsubtractioncalculationsbetween2gages.

542-075AEH-101P

FunctionZeroset,preset,limitsetting(3or5-step),GO/±NGjudgement,GO/±NGsignaloutput,MAX/MIN/TIR(runout)measurement,countingdirectionswitching,doublereading,mm/inchswitching,sum/differencecalculationof2gages(542-071A,542-073A,542-074A,542-072Aonly),outputmode selection

OutputI/O:Tolerancejudgmentoutput(3/5stages),normaloperationoutputRS-232CorDigimaticcode(selectable):Various measurement data

External ControlI/O:Preset,DataholdandErrorclearRS-232C:Displayedvalueoutput,MAX/MIN/TIRswitching,Zeroset,peakvalueclear,presetvalueinput,tolerancevalueinputanderrorclear

RS LinkUptosixEHcountersmaybeconnectedviaoneRS-232Cport.(daisychain)

Error display/outputPower-supplyvoltageerror,overspeederror,overflowerror,gage error, communication error, and tolerance setting error

Power supply: Standard accessoryViaACadaptor(12-24VDC,700mA(max)

DIMENSIONS Unit: mm

Model EH-101P EH-102P EH-102Z EH-102S EH-102DOrder No. 542-075A 542-071A 542-073A 542-074A 542-072AApplicableinput 2.5MHz(Differentialsquare-wave) 1MHzDifferential

sine-waveDigimatic code SPC

Applicablegage LGK, LGF withscaleorigin point mark, LGB,LGH(0.1um)

LGFwithscaleoriginpoint mark, LGF 5um

LGH(0.01um) LGD, LGS, ID

Numberofgageinput 1(Single-display) 2(Double-display)Resolution(Dependingonthelineargagetypeconnected)

.000005”,.00005”,.0005”/ 0.0001mm,0.0005mm,0.001mm,0.005mm,0.01mm

.000001”/0.1um,0.01um

.0005”/0.01mm

Mass 760g 800g 800g 900g 800gTolerancejudgmentdisplay LEDdisplay(3step:Amber,Green,Red/5step:Amber,Amberflash,Green,Redflash,Red)

SPECIFICATIONS

542-071AEH-102P

542-073AEH-102Z

542-074AEH-102S 542-072A

EH-102D

Optional Accessories02ADB440: I/O output connector02ADF180: 10-key unit936937: SPCcable(40”/1m)965014: SPCcable(80”/2m)02ADD930: Terminalblockconnectingcable 02ADN460: AC adapter02ZAA010: Powercable

02ADB440 02ADN460 02ZAA010

US-1002

G-17

144

6.54.

5

4 4136

672

5 5161

16 16139

InterconnectingEV counters

Affixing anEV counter

44

64

Linear gage

RS-232C output

Tolerance judgment output BCD output Segment output RS-232C output

D-EV Display unit

Programmable controller

Linear gage

PC system

EV Counter EF Counter

EV CounterSERIES 542 — For Multi-gage System

542-063 542-064 542-067

FEATURES•Uptosixgagescanbeconnectedtooneunit.•Abletoconnectupto10EVcounterstoonepersonalcomputerusingtheRSlinkfunctiontofacilitatetheconfigurationof a multi-point measurement system comprisingamaximumof60gages.•Arangeofoutputmodestochoosefrom;

I/O output for tolerance judgment and

segment output, BCD data output and RS-232outputareavailable.•Peak-holdmeasurementsarepossibleformaximumvalue,minimumvalue,runout(TIR),etc.•Abletocalculateasum,average,

maximum, minimum, maximum difference, etc.,betweengagesconnectedtothesameunit.

SPECIFICATIONSModel EV-16P EV-16Z EV-16DOrder No. 542-063 542-067 542-064Applicableinput Differentialsquare-wave Digimaticcode(SPC)Applicablegage LGB(ex.0.0001mmresolution),

LGF, LGE, LGLGFwithoriginpointmark LGD, LGD-M, LGS

Numberofgageinput 6Resolution(internal)-nodisplaycapability

.000005”,.00005”,.0005”/0.0005mm,0.001mm,0.005mm,0.01mm

.00005”*,.0005”/0.001mm*,0.01mm

Mass 910g 910g 830g*:WillnotbeindicatedwhencombinedwithaLGgage.

System Diagram

DIMENSIONS Unit: mm

FunctionGO/±NGjudgment,GO/±NGsignaloutput,MAX/MIN/TIR(runout)measurement,countingdirectionswitching,mm/inchswitching,calculationofsum,average,maximum,minimumandmaximumdifferencebetweenspecifiedaxes,andoutput-modeselection

OutputI/O:NormaloperationoutputandGO/±NGsignal(threesteps),measurementdata(BCDcode),or21-stagesegmentoutput(selectable)RS-232C:Variousmeasurementdata

External ControlI/O:Axisdesignation,preset,datahold,anderrorclearRS-232:Displayedvalueoutputcommand,MAX/MIN/TIRswitchingandpeakvalueclear,zeroset,presetvalueinput,tolerancevalueinput,errorclear,andcommandtooutputcalculatedvaluebetweenspecifiedaxes

RS LinkUpto10EVcountersmaybeconnectedviaasingleRS-232port.(daisychain)EVandEHcounterscanbemixed(inwhichcaseatotalofsixcounterscanbeconnected).

Error display/outputPower-supplyvoltageerror,overspeederror,overflowerror,gageerror, communication error, and tolerance setting error

Maximum input frequency1.25MHz(differentialsquare-wave):MaxcountingSpeed:5MHz

Power supplyTerminalblock(M3screws),DC+12to+24V,700mA(max.)

Optional Accessories02ADB440: I/O output connector02ADD400:D-EV(externaldisplayunit)936937:RSlinkconnectorcable(40"/1m)965014:RSlinkconnectorcable(80"/2m)357651:ACadapter(mustorder02ADD930and02AAA010)02ADD930:Terminalconnectingcable02ADN460: AC adapter02ZAA010: Powercable

02ADB440 02ADN460 02ZAA010

US-1002

G-18

91.467 (11)6.6

44.4

96

48

D-EV Display Unit

SENSORPAK

02ADD400

FEATURES•DisplayunitfortheEVcounter.•UsingthisdisplayallowsvarioussettingsfortheEVcounterwithoutapersonalcomputerorotherequipment.•AbletodisplayeachaxismeasurementvalueandGO/NGjudgmentresult,totalGO/NG judgment result for all axes, setting details,anderrors.

+0.8 0

+0.8 0

•DINcompatiblecompactpanel-mounting-cutout dimensions 45 x 92•TherequiredpowersupplyisDC+12to+24V,200mA(357651+02AAA010)at theterminalblock(02ADD930).

Thissoftwarefacilitatestheloadingofmeasurement data from a linear gage counterwiththeRS-232Cinterfaceintouser’spersonalcomputer.

FEATURES•Maximum60channelsofmeasuringpointscanbeprocessed.•Possibletoperformarithmeticalcalculationandmaximumwidthcalculationusingthemeasurementdata.•PossibletoexportthemeasurementdataintoMS-Excel.•Diversegraphicfunctions(numericvaluedisplay,meterdisplay,bar-graphdisplay,overalljudgmentdisplay)•Frequencyofdataloading:Max.9999times(60ch)to60000times(6CH)


MASS: 150g

SPECIFICATIONSModel D-EVOrder No. 02ADD400

SPECIFICATIONSOrder No. Description54SAA622 Sensorpak

PLC

I/O cable

License key RS-Link

GO/NO-GO signal

External trigger signal

SENSORPAK

CPU: 2GH or faster OS: Windows 2000 or XP Memory: 256MB or more

RS232C cable (option)

CD-ROM

Linear gage / EH, EV counter (max. 10 pcs.)

Technical DataNumberofconnectableunits:Onedisplayunitallows external display and setting for one EV counter.Displayeddigits:Itusesasinglesignplussixdigits(EV counteroperatesoneight-digitdata internallybutdisplaysonlythelastsixdigits).LEDdisplay: Channeldisplay(alsofordisplayofjudgment result):3(three-colorLED)Measurement modedisplay(current,maximum,minimum, runout):2Statusdisplay:1(two-color)Operatingswitches:4Switchesandtheirfunctions:Channelswitching, measurementmodeswitching(current value,maximumvalue,minimumvalue andrunout),parametersetting,preset,and tolerance settingInput/output: RSLinkconnectors:1inand1out.Errordisplay: Overspeed,gageerrorandothers.Powersupply: Terminalblock(M3screws),DC+12to +24V,200mA

Optional Accessories527428A: ACadapter(mustorder02ADD930)357651: AC adapter (mustorder02ADD930and02AAA010)02ADD930: Terminalconnectingcable02ADN460: AC adapter02ZAA010: Powercable

02ADB440 02ADN460 02ZAA010

US-1002

G-19

Litematic and Litematic HeadSERIES 318 — High-resolution Measuring Unit

FEATURES•TheLitematicisdesignedformeasuringeasily-deformedworkpiecesandhigh-precisionpartssuchaspingages,thin-wallbearings,plasticparts,andsprings.•Extra-lowmeasuringforceof0.01N(1gf).•SuperLitematicemploysauniqueLaserHoloscaleasthelengthstandard,ensuringexcellent measuring accuracy and repeatability.

•Ceramicanvilisfreefromcorrosionandeasytomaintain(Litematic).•Themeasuringunitcanbemountedontofixturesoranoptionalstandtoallowgreatflexibilityofuse(LitematicHead).•IncludesSPCoutput.

SPECIFICATIONSRange Order No. Resolution Accuracy(at20°C±1°C)** Remarks

0 - 50mm

318-221A

0.01µm,0.1µm,1µm,0.5µinch,5µinch,50µinchswitchable

(0.5+L/100)µm L=Measuredlength(mm)

1 piece unitw/ø100mmgroovedceramicanvil318-222A

318-223A318-226A

Seperate Type318-227A318-228A

318-226ALitematic Head

DP-1VR Input tool

Applications

*Digimaticoutputistosixsignificantfigures.

318-221ALitematic

Technical DataAccuracy: Refertothelistofspecifications.

(excludingquantizingerror)Resolution: Refertothelistofspecifications.Repeatability: s=0.05µmDisplayunit: 8digitsand14mmcharacterheightStroke: 51.2mm(usingstandardcontactpoint)Measuring force: 0.01N:318-221A 0.15N:318-222A 1N: 318-223A 0.01N:318-226A 0.15N:318-227A 1N: 318-228ASpindle feed speed: 2mm/s, 4mm/s, 8mm/sLengthstandard:PhotoelectriclinearencoderContactpoint: ø3mmcarbideballPowersupply: 85-264VAC

Optional Accessories936937: SPCcable(1mm)965014: SPCcable(2mm)957460: 300x250mmgranitestandwithbracket

for Litematic Head101118: Contactpoint,Shell120066: Contactpoint,ø0.45mmneedle(carbide)120059: Contactpoint,ø7.0mmspherical(carbide)120060: Contactpoint,ø10.5mmspherical(carbide)937179T: Footswitch264-504-5A: Digimatic Mini-processor DP-1VR264-012-10: Inputtool(forUSBport)02ADM260-2: SENSORPAK (datacapturesoftwarew/I/Ocable)

Shownwithoptionalgranitestand

US-1002

G-20

202 300

103.2

56

Unit: mm

380

.2

Measuring table ø100Clamp screw

for Measuringtable

Contact point

Display

Operation switch

85 150

170

82.9

5

ø32

12.5

29 80 14.8

172

186.4 50.2

80.2

(11)

56

Measuring unit

Litematic Head VL-50S-B

318-2226A

318-2227A

318-2228A

Optional stand for VL-50S-B: 957460

Litematic VL-50-B

318-221A

318-222A

318-223A

Litematic VL-50AH

318-217A

Display unit Connecting cable 2m

4-M4x0.7 depth 10 1

5

80

2

70

ø50

300

48 80

56

157

Clamp

365

Column

Feed nut Base

Bracket

Hexagon socket head cap screw

(4-M4x0.7)

Litematic head

10

SR2.5

ø5

7 3

ø0.4

5

Material: CarbideFlatness: 3µm

Material: Hardened steel

Material: Carbide

10 1.7

øD

SR

ød

Measuring force 0.03N 0.06N

D ø7.5

ø10.5

d ø6.5 ø9.5

SR 7

10

Order No. 101118

Measuring force 0.02N

Order.No. 120059 120060

Order No. 120066

Measuring force 0.01N

Interchangeable contact points

(11°)

ø60

Worktable ø26

80.2

50.2

172

186.4 42 286

128.

2

202

103.2

397.

8

DIMENSIONS

Unit: mm

US-1002

G-21

Laser Scan Micrometer Selection GuideMEASURING UNITSAppearance Model Laser

ClassificationMeasuringrange

Resolution(Selectable)

LSM-902* Visible(650nm),IEC Class 2/FDA Class II

0.1-25mm(.004"-1.0")

0.01µm-10µm(.000001"-.0005")

LSM-500S Visible(650nm),IEC Class 2/FDA Class II

0.005-2mm(.0002"-.08")

0.01µm-10µm(.000001"-.0005")


0.05-10mm(.002"-.4")

0.01µm-10µm(.000001"-.0005")


0.3-30mm(.012"-1.18")

0.02µm-100µm(.000001"-.005")


1 - 60mm(.04"-2.36")

0.05µm-100µm(.000002"-.005")


1 - 120mm(.04"-4.72")

0.1µm-100µm(.000005"-.005")


1 - 160mm(.04"-6.30")

0.1µm-100µm(.000005"-.005")

Withdisplayunit

LSM-9506

Measuring unit - display unit one-piece structureforbench-top use only

Visible(650nm),IEC Class 2/FDA Class II

0.5-60mm(.02"-2.36")

0.05µm-100µm(.000002"-.005")

DISPLAY UNITSAppearance Model Type Application Interface units

equippedLSM-6200LSM-6900*

Multi-function type Bench-topuse •RS-232C•I/O•Analogoutput

LSM-5100** Compact type(Lowcost)

Assembly/bench-topuse(DINsize)

•RS-232C•I/O•Analogoutput

*LSM-902andLSM-6900arefactory-setpackage.**WhenconnectingwiththeLSM-500Sseries,thescanningspeedbecomes1600scans/sec.

US-1002

G-22

Laser Scan Micrometer

Enamelwire(Coatedwire)CableSpringwireTungstenwirePressurehose

Pins located in parallel Gap of rollers RubberrollerRollerbearingMotorshaft

Blade*Using offset function

TapeBeltBracketcable

OpticalfiberGlasstube*OnlysegmentNos.1and2canbeused.

*Using offset function

Diametermeasurement

Intervalmeasurement

Intervalmeasurement

Out of roundness(T.I.R)

Heightmeasure-ment*

Transparent partmeasurement*

Tape widthmeasurement

Linearitymeasure-ment*

Scanning

Reference edge

Reference edge

Reference edge

Dual-Unit Measurement: Byusinganoptionaldual-typeaddonunit(02AGP150),onedisplayunitcanprocessthemeasurementdatafromtwomeasuringunits.e.g.)Twomeasurementswithasingledisplayunit

e.g.)XYmeasurementwithadisplayunit[X–Yor(X+Y)/2]

e.g.)Twolaserunitsusedtomeasurelargediameterworkpieces

PROG.0(segmentNo.2isON.)andPROG.5(segmentNo.4isON.)

Dual-Program Measurement:Twomeasurementprogramswithdifferentconditionsareset,andcanbeperformedatthesametime.e.g.)Measurementoftwodimensions

US-1002

G-23

382 180 85

172 13.5

150 10100

647

2540 52.5365 100 100 82

50

22

1011 8

120

1152

8

98

180

8021

3

60

202

11

100

1060

83 97

ø3.1 (Measurement position)

Measuringregion

Cab

lesp

ace

12-M3

Laser Scan Micrometer LSM-9506SERIES 544 — Bench Top Type Non-contact Measuring System

LSM-9506

Optional Accessories02AGD170: CalibrationgagesetforLSM-950602AGD600B: Thermalprinter(w/120VACadapter)

DIMENSIONS AND MASS

SPECIFICATIONSModel LSM-9506Order No. 544-116-1AMeasuring range .02-2.36”(0.5-60mm)Measuring area .02x2.36”(5x60mm)(*1)Scanning Rate 1600/secResolution .000002to.005"(0.00005to0.1mm)[Selectable]Repeatability ±.00003"(±0.6µm)(±2σ measuringrate:0.32s)Accuracy Linearity(*2)

±.0001"(±2.5µm)Theopticalaxisdirection±.0001"(±2.5µm)Thescanningdirection±(.00008+L/10000)"[L:inch](*3)±(2.0+L/10)µm[L:mm](*3)

Laser type VisiblesemiconductorlaserWavelengths:670nmScanningspeed:8900”/s(226m/s)

Display

Measuring function

Fluorescentdisplay16-digit+11-digit,guidanceLEDsSegmentdesignation:1to7(1to3forTransparent)10Programstorage(PROG.0toPROG.9)255EdgeDesignationscanbedetectedMultiLimitGO/±NGToleranceJudgment(upto7intervals)Dual-Axis LED Display

Offset Setting and MasteringReference Value SettingAutomatic Workpiece DetectionDual-GageCalibrationInch/mmConversionAbnormalDataEliminationDual Program MeasurementStatistical ProcessingWorkpiece Position displayFoot-switchConnector

Data output standard RS-232C, I/O Analog Interface, SPCPowerSupplyPowerCordPowerSwitchOperating Environment

AC100V-240V±10%50/60Hz40VA930966Keyswitchuse32~104°F(0~40°C),35-85%RH(withoutcondensation)

(*1):Theareagivenby[measuringrangeontheopticalaxis]x [Measuringrangeinthescanningdirection].(*2):Specifiedatthecenterofthemeasurementregion.(*3):L=Deviationbetweenthecenterofworkpieceandtheopticalaxis.(Seefig.1)

Unit: mm

MASS: 13kg

US-1002

G-24

Laser Scan Micrometer LSM-902 / 6900SERIES 544 — Ultra-high Accuracy Non-contact Measuring System

LSM-902 measuring unit

LSM-6900 display unit

DIMENSIONS AND MASSUnit: mm

544-496A

SPECIFICATIONSLSM-902Measuring range .004-1.0”(0.1-25mm)Resolution .000001to.0005”(0.00001to0.01mm)[Selectable]Repeatability*1 ±.000002”(±0.05µm)*2

Linearity*1 Wholerange ±.00002”(±0.5µm)*3

Small range ±(.000012+.0001 D)”[ D:inch]*3 *4±(0.3+0.1 D)µm[ D:mm]*3 *4

Positional error*1 *5 ±.000020"(±0.5µm)Measuring region ±.6x1.0"(±1.5x25mm)*6

Numberofscans 800/secLaserwavelength 650nm[VisibleLD],1.5mW(peak)Laser scanning speed 2240"/sec(56m/sec)LSM-6900Display Fluorescentdisplay16-digit+11digit,GuidanceLEDs

Measuring function*7

Segment designation 1to7(1to3forTransparentmaterial)Edge designation 1 to 255Averagingmethod Simpleaveraging1to2048Movingaveraging:32to2048

Tolerancejudgement(GO,±NG);Multi-limitjudgement(7classes);Off-set/Zero-set;Abnormaldataelimination;Automaticworkpiecedetection;Referencevaluesetting;Dataoutputcondition; Laserpowerdeterioration;Samplemeasurement;Statistical processing;Dual-programmeasurement;Automaticmeasurementusingedgemode;Workpiecepositiondisplay;Transparentobjectmeasuring;Key-lockfunction;mm/inchchangeover; Dual-gagecalibration;Selectionofresolution;Judgementinreadystate;Displayofacommatomarkthethousandthsposition;Mastering;None-displayunnecessarydigits;Groupjudgement

Scanning signal monitor connector Providedasstandard(withtheplug)Remote interlock connector Providedasstandard(withtheplug)Powerswitch KeyswitchusedBuilt-in interface RS-232C;Footswitchconnector;I/OanaloginterfaceOptional interface DCU slot Digimaticcodeoutputunit(2-ch)

Expansionslot(1-slot) 2ndI/OanalogI/F;BCDI/F;GP-IBI/F;Powersupply AC100V-240V±10%,50/60Hz,40VA*1 Accuracyinspectionenvironment/Temperature20°C±1°C,Humidity:50%±10%.*2 Therepeatabilityisdeterminedbythevaluefor±2o-atthemeasurementintervalof1.28sec.*3 Specifiedatthecenterofthemeasurementregion.*4 D:Diameterdifferencetomastergage.*5 Anerrorduetoworkpieceshifteitherintheopticalaxisdirectionorinthescanningdirection.*6 Theareagivenby[measuringrangeontheopticalaxis]x[measuringrangeinthescanningdirection.]*7 Thecombinationoffunctionsislimited,detailsaredescribedintheuser’smanual.

Optional Accessories02AGD180: CalibrationgagesetforLSM-902/690002AGD270: Workstage02AGD280: Adjustableworkstage02AGD600B:Thermalprinter(w/120VACadapter)

LSM-902 LSM-6900MASS: 5kgMASS:6.5kg

US-1002

G-25

Optional Accessories for LSM-500S02AGD110: Calibrationgageset(ø0.1mm,ø2.0mm)02AGD200: Wire guiding pulley02AGD220: Airblowcover957608: Aircleanerforairblowcover02AGN780A: Extensionsignalcable5m02AGN780B: Extensionsignalcable10m02AGN780C: Extensionsignalcable15m

Laser Scan Micrometer LSM-500SSERIES 544 — High Accuracy Non-contact Measuring System

544-532

ø3.1 hole, depth 6(Measuring position)

42 6453

10.5

15.5

20

84

104

57.5

10

18.5 9.5

14.5

6M3 (x8)

50

22

15040

230

123 68100 max.

39

8 8

34 34

4

157 73BaseEmission

Unit

Relaycable

70 min.

Reception Unit

Measuring position

Measuring region

40

40

40.5

38.5

30

M4, depth 8 (x3)

ø3.1 hole, depth 6

ø3.1 hole, depth 6

110

M4, depth 8 (x3)

To Reception Unit(Cable length: 0.6m)

A: Bottom view(Main unit detached

from base)

Cable space

9.5

9.5

Signal cable(Cablelength: 5m)

A

A

A

70 min.Cable space

Working distance

Measuring region

LSM-500S

LSM-501S

LSM-503S

Measuring position

M4, depth 8 (x3)

ø3.1 hole, depth 6

M3, depth 6 (x4)


9029

.5

181

126

103 46

34

32

55

1111

84

32.5

25

2

15.5

40

17.5

10.5 14.5 9.5

1

Signal cable(Cable length: 5m)

A : Bottom view

ø3.1,depth 6(Referencehole)

(Reference hole)

M4, depth 8 (x3)For mounting base

Measuring region

ø3.1 (.12") hole

(Measuring position)

805.

5

18.5

10.5

15.5

9.59.5

14.5 9.5

12 11

09020

30

53 6842

57.5

70 min.

Cable space

Emission Unit

Base

Reception Unit

M4, depth 8, ø3.3 through hole (x2)For mounting side plate (Same in the back)

ø3.1, depth 6



from base)

Measuring position

50

22 6M3 (x8)

48

202 5

48

170

130350 max.

55

8108

5080

355

95.5 65.5

250

84.5 46

105

54.5

42

150 To

ReceptionUnit(Cablelength:1.4m)

M4, depth 8, ø3.3 through hole (x3)

For mounting side plate (Same in the back)

9057

41

Relaycable



SPECIFICATIONSModel LSM-500SOrder No. 544-532Applicabledisplayunit LSM-6200Laser Scanning Range inch(mm) Upto.49”(12.5mm)

(Detectingregionsarelimitedtoabout.4”(10mm)approx.)Measuring range inch(mm) .0002to.08”(0.005to2mm).004to.08”(0.1to2mm)[*1]Resolution inch(mm) .000001to.0005"(0.00001to0.01mm)[Selectable]Repeatability[*2] inch(µm) ±.0000012"(±0.03µm)[*3]Linearity[*2] inch(µm) ±.000012"(±0.3µm)[*4]Positionalerror[*2][*5] inch(µm) ±.000016"(±0.4µm)Measuring region inch(mm) .04x.08"(1x2mm)[OpticalaxisdirectionxScanningdirection]Numberofscansforaveraging

scan 16to2048[*6]

Laserclassification Class2(Max.Output:1.3mWwithascanninglaser, semiconductorlaser:wavelength650nm)

Numberoflaserscans /sec 3200Laser scanning rate inch/sec(m/sec) 2992”/sec(76m/sec)Protectionlevel IP64Operationenvironment Temperature 0˚C to 40˚C

Humidity 35%RHto85%RH[withoutcondensation]Altitude 2000m or less

Storageenvironment Temperature -15˚C to 55˚CHumidity 35%RHto85%RH[withoutcondensation]

[*1]:Measuringrangeavailablewhensetto"Noextra-finewiremeasurement”or"Edgespecification”inthebasicsetupmode.[*2]:Environmentforaccuracyvalidation:20˚C±1˚Ctemperature;50%±10%humidity.[*3]:Thevalueof±2o witha2mm-diametergagehasbeenmeasuredfortwominuteswithameasurementintervalof 0.32seconds,where isthestandarddeviation.[*4]:Thevalueofmeasurementsinthecenterofthemeasurementregion.[*5]:Errorduetothepositionalshiftoftheworkpieceintheopticalaxisdirectionorscanningdirection[*6]:Averagingscansbetween1and8timescanbemadeif"Noextra-finewiremeasurement”isspecifiedinthebasicsetupmode. Themeasuringrange,however,islimitedto0.1mmto2mminthiscase.

MASS:1.5kg

US-1002

G-26

Optional Accessories for LSM-501S02AGD120: Calibrationgageset(ø0.1mm,ø10mm)02AGD210: Wire guiding pulley02AGD400: Adjustableworkstage02AGD440: Center support*02AGD450: AdjustableV-block*02AGD230: Airblowcover957608: Aircleanerforairblowcover02AGC150A: Extensionrelaycable1m02AGN780A: Extensionsignalcable5m02AGN780B: Extensionsignalcable10m02AGN780C: Extensionsignalcable15m*Usewithanadjustableworkstage.

544-534



42 6453

10.5

15.5

20

84

104

57.5

10

18.5 9.5

14.5

6M3 (x8)

50

22

15040

230

123 68100 max.

39

8 8

34 34

4

157 73BaseEmission

Unit

Relaycable

70 min.

Reception Unit

Measuring position

Measuring region

40

40

40.5

38.5

30

M4, depth 8 (x3)

ø3.1 hole, depth 6

ø3.1 hole, depth 6

110

M4, depth 8 (x3)



from base)

Cable space

9.5

9.5


A

A

A

70 min.Cable space

Working distance

Measuring region

LSM-500S

LSM-501S

LSM-503S

Measuring position

M4, depth 8 (x3)

ø3.1 hole, depth 6

M3, depth 6 (x4)


9029

.5

181

126

103 46

34

32

55

1111

84

32.5

25

2

15.5

40

17.5

10.5 14.5 9.5

1


A : Bottom view


(Reference hole)


Measuring region

ø3.1 (.12") hole


805.

5

18.5

10.5

15.5

9.59.5

14.5 9.5

12 11

09020

30

53 6842

57.5

70 min.

Cable space

Emission Unit

Base

Reception Unit


ø3.1, depth 6



from base)

Measuring position

50

22 6M3 (x8)

48

202 5

48

170

130350 max.

55

8108

5080

355

95.5 65.5

250

84.5 46

105

54.5

42

150 To




9057

41

Relaycable



SPECIFICATIONSModel LSM-501SOrder No. 544-534Applicabledisplayunit LSM-6200Laser Scanning Range inch(mm) Upto.74”(19mm)Measuring range inch(mm) .002to.4”(0.05to10mm)Resolution inch(mm) .000001to.0005"(0.00001to0.01mm)[Selectable]Repeatability[*1] inch(µm) ±.0000016"(±0.04µm)[*2]Linearity[*1] Wholerange inch(µm) ±.00002"(±0.5µm)[*3]

Narrowmeasuring range

µm ±(0.3+0.1 D)[*3][*4]

inch ±(.000012"+.000004" D)Positionalerror[*1][*5] inch(µm) ±.00002"(±0.5µm)Measuring region inch(mm) .08×.4”(2×10mm)(Measuringregion:.002to.004”(0.05to0.1mm))

.16×.4”(4×10mm)(Measuringregion:.004to.4”(0.1to10mm))[Opticalaxisdirection×Scanningdirection]

Numberofscansforaveraging scan 1 to 2048Laserclassification Class2(Max.Output:1.3mWwithascanninglaser,

semiconductorlaser:wavelength650nm)Numberoflaserscans /sec 3200Laser scanning rate inch/sec(m/sec) 4449”/sec(113m/sec)Protectionlevel IP64Distancebetweenthelaseremission unit and reception unit

inch(mm) Standard2.68”(68mm)Max.3.93”(100mm)[*6]

Operationenvironment Temperature 0˚C to 40˚CHumidity 35%RHto85%RH[withoutcondensation]Altitude 2000m or less


[*1] Environmentforaccuracyvalidation:20°C±1°Ctemperature;50%±10%humidity.[*2] Avalueof±2witha10mm-diametergagehasbeenmeasuredfortwominuteswithameasurementintervalof0.32seconds,where isthestandarddeviation.[*3] Thevalueofmeasurementsinthecenterofthemeasurementregion.[*4] Disthedifferenceindiameteroftheworkpieceandthemastergage.[*5] Errorduetothepositionalshiftofworkpieceinopticalaxisdirectionorscanningdirection.[*6] Thedistancebetweenthelaseremissionunitandreceptionunitotherthanthestandard,mayaffecttheaccuracy.

MASS:1.9kg

US-1002

G-27


42 6453

10.5

15.5

20

84

104

57.5

10

18.5 9.5

14.5

6M3 (x8)

50

22

15040

230

123 68100 max.

39

8 8

34 34

4

157 73BaseEmission

Unit

Relaycable

70 min.

Reception Unit

Measuring position

Measuring region

40

40

40.5

38.5

30

M4, depth 8 (x3)

ø3.1 hole, depth 6

ø3.1 hole, depth 6

110

M4, depth 8 (x3)



from base)

Cable space

9.5

9.5


A

A

A

70 min.Cable space

Working distance

Measuring region

LSM-500S

LSM-501S

LSM-503S

Measuring position

M4, depth 8 (x3)

ø3.1 hole, depth 6

M3, depth 6 (x4)


9029

.5

181

126

103 46

34

32

55

1111

84

32.5

25

2

15.5

40

17.5

10.5 14.5 9.5

1


A : Bottom view


(Reference hole)


Measuring region

ø3.1 (.12") hole


805.

5

18.5

10.5

15.5

9.59.5

14.5 9.5

12 11

09020

30

53 6842

57.5

70 min.

Cable space

Emission Unit

Base

Reception Unit


ø3.1, depth 6



from base)

Measuring position

50

22 6M3 (x8)

48

202 5

48

170

130350 max.

55

8108

5080

355

95.5 65.5

250

84.5 46

105

54.5

42

150 To




9057

41

Relaycable


Optional Accessories for LSM-503S02AGD130: Calibrationgageset (ø1mm,ø30mm)02AGD490: Adjustableworkstage02AGD440: Center support*02AGD450: AdjustableV-block*02AGD240: Airblowcover957608: Aircleanerforairblowcover02AGC150A: Extensionrelaycable1m02AGC150B: Extensionrelaycable3m02AGC150C: Extensionrelaycable5m02AGN780A: Extensionsignalcable5m02AGN780B: Extensionsignalcable10m02AGN780C: Extensionsignalcable15m02AGN780D: Extensionsignalcable20m*Usewithanadjustableworkstage.


544-536

DIMENSIONS AND MASS

SPECIFICATIONSModel LSM-503SOrder No. 544-536Applicabledisplayunit LSM-6200Laser Scanning Range inch(mm) Upto1.3”(34mm)Measuring range inch(mm) .012to1.18”(0.3to30mm)Resolution inch(mm) .000001to.005"(0.00002to0.1mm)[Selectable]Repeatability[*1] inch(µm) ±.0000044"(±0.11µm)[*2]Linearity[*1] Wholerange inch(µm) ±.00004"(±1.0µm)[*3]

Narrowmeasuringrange

µm ±(0.6+0.1 D)[*3][*4]

inch ±(.000024"+.000004" D)Positionalerror[*1][*5] inch(µm) ±.00006"(±1.5µm)Measuring region inch(mm) .08×.4”(2×10mm)(Measuringregion:.002to.004”(0.05to0.1mm))

.16×.4”(4×10mm)(Measuringregion:.004to.4”(0.1to10mm))[Opticalaxisdirection×Scanningdirection]

Numberofscansforaveraging scan 1 to 2048Laserclassification Class2(Max.Output:1.3mWwithascanninglaser,

semiconductorlaser:wavelength650nm)Numberoflaserscans /sec 3200Laser scanning rate inch(m/sec) 4449”/sec(113m/sec)Protectionlevel IP64Distancebetweenthelaseremission unit and reception unit

inch(mm) Standard5.12”(130mm)Max.13”(350mm)[*6]



[*1] Environmentforaccuracyvalidation:20°C±1°Ctemperature;50%±10%humidity.[*2] Avalueof±2witha10mm-diametergagehasbeenmeasuredfortwominuteswithameasurementintervalof 0.32seconds,where isthestandarddeviation.[*3] Thevalueofmeasurementsinthecenterofthemeasurementregion.[*4] Disthedifferenceindiameteroftheworkpieceandthemastergage.[*5] Errorduetothepositionalshiftofworkpieceinopticalaxisdirectionorscanningdirection.[*6] Thedistancebetweenthelaseremissionunitandreceptionunitotherthanthestandard,mayaffecttheaccuracy.

MASS:2.7kg

US-1002

G-28

ø3.1 hole(Measuring position)

7

30

9


146

146

9

8068

18.5

48

162

3019

2

84

19 8

198

120

M4 (x8)200

100

150312

40088

150


700272 321 107

700 max.

190 1319 Measuring

region

Emission Unit 9

70 min.

Cablespace

Relaycable

96 96Base

263

462

M6, depth 12, ø5 through hole (x3)



137

238

52

Reception Unit

48


192

256

Measuring position


144

85 M6, depth 12 (x3)For mounting base

ø3.1 hole, depth 6(Reference hole)


A: Bottom view (Main unit detached

from base)

819


7

9090

Emission Unit

9.5

15.5

10.5

66

60

42

18.5

58 70

2011

0

130

12

97

14.5 9.5

9.5

Measuring region

Reception Unit

ø3.1 hole

M3 (x12)7

102258

360

185

87

Base

87

348

168.5

M5, depth 10, ø4.2 through hole (x3)M5, depth 10, ø4.2 through hole (x2)For mounting side plate (Same in the back)


115.5 71

192

42

82

20

540

273700 max.

163 110

10

50

22

Measuring position

162

174.

512

163




ø3.1, depth 6(Reference hole)



from base)

Cablespace

70 min.

Relay cable

88


3-M6, depth 12, ø5 through holeFor mounting side plate (Same in the back)


ø3.1 hole (Measuring position)

8-M4

170 110600

350 2509

200

100

880

320Cablespace

160

10

10

41

Measuringposition

8

41

ø3 hole, depth 6(Reference hole)


8

400

8.7

200

Measuringregion

200

8.7

206 87.5

360520

306107100

40

200

400

1313

688

218

M6, depth12 (x3)For mountingbase

70 min.

LSM-516S

LSM-512S

LSM-506S


from base)

25

99

224

208

160

208

249

120

100

74

20.5

378

A

A

A

Optional Accessories for LSM-506S02AGD140: Calibrationgageset(ø1mm,ø60mm)02AGD520: Adjustableworkstage02AGD580: Center support*02AGD590: AdjustableV-block*02AGD250: Airblowcover957608: Aircleanerforairblowcover02AGC150A: Extensionrelaycable1m02AGC150B: Extensionrelaycable3m02AGC150C: Extensionrelaycable5m02AGN780A: Extensionsignalcable5m02AGN780B: Extensionsignalcable10m02AGN780C: Extensionsignalcable15m02AGN780D: Extensionsignalcable20m*Usewithanadjustableworkstage.


544-538

DIMENSIONS AND MASS

Unit: mm

SPECIFICATIONSModel LSM-506SOrder No. 544-538Applicabledisplayunit LSM-6200Laser Scanning Range inch(mm) Upto2.6”(66mm)Measuring range inch(mm) .04to2.36”(1to60mm)Resolution inch(mm) .000002to.005"(0.00005to0.1mm)[Selectable]Repeatability[*1] inch(µm) ±.000014"(±0.36µm)[*2]Linearity[*1] Wholerange inch(µm) ±.00012"(±3.0µm)[*3]


µm ±(1.5+0.5 D)[*3][*4]

inch ±(.00012"+.00002" D)Positionalerror[*1][*5] inch(µm) ±.00016"(±4.0µm)Measuring region inch(mm) .8x2.36"(20x60)[Opticalaxisdirection×Scanningdirection]Numberofscansforaveraging scan 1 to 2048Laserclassification Class2(Max.Output:1.3mWwithascanninglaser,

semiconductorlaser:wavelength650nm)Numberoflaserscans /sec 3200Laser scanning rate inch/sec(m/sec) 17795”/sec(452m/sec)Protectionlevel IP64Distance between the laseremission unit and reception unit




[*1] Environmentforaccuracyvalidation:20°C±1°Ctemperature;50%±10%humidity.[*2] Avalueof±2 witha60mm-diametergagehasbeenmeasuredfortwominuteswithameasurementintervalof 0.32seconds,where isthestandarddeviation.[*3] Thevalueofmeasurementsinthecenterofthemeasurementregion.[*4] Disthedifferenceindiameteroftheworkpieceandthemastergage.[*5] Errorduetothepositionalshiftofworkpieceinopticalaxisdirectionorscanningdirection.[*6] Thedistancebetweenthelaseremissionunitandreceptionunitotherthanthestandard,mayaffecttheaccuracy.

MASS:3.5kg

US-1002

G-29

ø3.1 hole(Measuring position)

7

30

9


146

146

9

8068

18.5

48

162

3019

2

84

19 8

198

120

M4 (x8)200

100

150312

40088

150


700272 321 107

700 max.

190 1319 Measuring

region

Emission Unit 9

70 min.

Cablespace

Relaycable

96 96Base

263

462




137

238

52

Reception Unit

48


192

256

Measuring position


144

85 M6, depth 12 (x3)For mounting base




from base)

819


7

9090

Emission Unit

9.5

15.5

10.5

66

60

42

18.5

58 70

2011

0

130

12

97

14.5 9.5

9.5

Measuring region

Reception Unit

ø3.1 hole

M3 (x12)7

102258

360

185

87

Base

87

348

168.5

M5, depth 10, ø4.2 through hole (x3)M5, depth 10, ø4.2 through hole (x2)For mounting side plate (Same in the back)


115.5 71

192

42

82

20

540

273700 max.

163 110

10

50

22

Measuring position

162

174.

512

163







from base)

Cablespace

70 min.

Relay cable

88




ø3.1 hole (Measuring position)

8-M4

170 110600

350 2509

200

100

880

320Cablespace

160

10

10

41

Measuringposition

8

41

ø3 hole, depth 6(Reference hole)


8

400

8.7

200

Measuringregion

200

8.7

206 87.5

360520

306107100

40

200

400

1313

688

218

M6, depth12 (x3)For mountingbase

70 min.

LSM-516S

LSM-512S

LSM-506S


from base)

25

99

224

208

160

208

249

120

100

74

20.5

378

A

A

A


Optional Accessories for LSM-512S02AGD150: Calibrationgageset(ø20mm,ø120mm)02AGD260: Airblowcover957608: Aircleanerforairblowcover02AGC150A: Extensionrelaycable1m02AGC150B: Extensionrelaycable3m02AGC150C: Extensionrelaycable5m02AGN780A: Extensionsignalcable5m02AGN780B: Extensionsignalcable10m02AGN780C: Extensionsignalcable15m02AGN780D: Extensionsignalcable20m


544-540



µm ±(4.0+0.5 D)[*3][*4]

inch ±(.00016"+.00002" D)Positionalerror[*1][*5] inch(µm) ±.0003"(±8.0µm)Measuring region inch(mm) 1.2x4.72"(30x120)[Opticalaxisdirection×Scanningdirection]Numberofscansforaveraging scan 1 to 2048Laserclassification Class2(Max.Output:1.3mWwithascanninglaser,






MASS:6.5kg

US-1002

G-30


42 6453

10.5

15.5

20

84

104

57.5

10

18.5 9.5

14.5

6M3 (x8)

50

22

15040

230

123 68100 max.

39

8 8

34 34

4

157 73BaseEmission

Unit

Relaycable

70 min.

Reception Unit

Measuring position

Measuring region

40

40

40.5

38.5

30

M4, depth 8 (x3)

ø3.1 hole, depth 6

ø3.1 hole, depth 6

110

M4, depth 8 (x3)



from base)

Cable space

9.5

9.5


A

A

A

70 min.Cable space

Working distance

Measuring region

LSM-500S

LSM-501S

LSM-503S

Measuring position

M4, depth 8 (x3)

ø3.1 hole, depth 6

M3, depth 6 (x4)


9029

.5

181

126

103 46

34

32

55

1111

84

32.5

25

2

15.5

40

17.5

10.5 14.5 9.5

1


A : Bottom view


(Reference hole)


Measuring region

ø3.1 (.12") hole


805.

5

18.5

10.5

15.5

9.59.5

14.5 9.5

12 11

09020

30

53 6842

57.5

70 min.

Cable space

Emission Unit

Base

Reception Unit


ø3.1, depth 6



from base)

Measuring position

50

22 6M3 (x8)

48

202 5

48

170

130350 max.

55

8108

5080

355

95.5 65.5

250

84.5 46

105

54.5

42

150 To




9057

41

Relaycable


Unit: mm

DIMENSIONS AND MASS

Optional Accessories for LSM-516S002AGM300: Calibrationgageset(ø20mm,ø160mm)02AGC150A: Extensionrelaycable1m02AGC150B: Extensionrelaycable3m02AGC150C: Extensionrelaycable5m02AGN780A: Extensionsignalcable5m02AGN780B: Extensionsignalcable10m02AGN780C: Extensionsignalcable15m02AGN780D: Extensionsignalcable20m

544-542




µm ±(4.0+2.0 D)[*3][*4]

inch ±(.00016"+.000079" D)Positionalerror[*1][*5] inch(µm) ±.0003"(±8.0µm)Measuring region inch(mm) 1.57x6.3"(40x160)[Opticalaxisdirection×Scanningdirection]Numberofscansforaveraging scan 1 to 2048Laserclassification Class2(Max.Output:1.3mWwithascanninglaser,


inch(mm) Standard15.74”(400mm)Max.32.72”(800mm)[*6]




US-1002

G-31

125

134

335 80 (Cable space)

1312

1

8.2 250

App

rox.

12

276.4

LSM-6200 Display UnitSERIES 544 — Standard Display Unit for Laser Scan Micrometer

FEATURES•Withadual-displaydesignsetupvaluescanbecontinuouslymonitored.Also,twomeasurementvalueitemscanbedisplayedonthesub-displaywiththesimultaneousmeasurementfunction.•Eitherthesegmentmeasurement (7segmentsmax.)oredgemeasurement (1to255edges)canbeselected.

544-072A(Inch/Metric)

Technical DataMain display: 16-digitfluorescenttubeInterfaceunitsequipped: RS-232C, Analog I/O, FootswitchPowersupply: 100-240VAC±10%,40VA,50/60Hz

Function of Display UnitZero-setting, Presetting, GO/±NG judgment, Multi-limit judgment, Offsetvaluesetting,Sample measurement, Statistical calculation, Group judgment, Data output, Workpiecepositiondisplay,mm/inchswitching,Dual-gage calibration,Transparentobjectmeasurement,Dual-unit measurement(optional),Automatic measurement, Abnormaldata eliminating

DIMENSIONS AND MASS

QUICKTOOLQUICKTOOLisafreesoftwareprogramthatmakesprogrammingtheLSM-6200quickandeasy. PleasecontactyourMitutoyoofficeformoreinformation.

Unit: mm

MASS: 5kg

•TheRS-232CinterfaceandtheI/Oandanaloginterfaceareprovidedasstandard.•A statistical calculation function and abnormaldataeliminatingfunctionareprovided.

SPECIFICATIONSModel LSM-6200Order No. 544-072A

LSM-5200 Display UnitSERIES 544 — Compact Display Unit for Real-time Multi-channel Measurement

FEATURES•Panel-mounttype(withdimensionsconformingtoDINstandards)allowseasysystemintegration.•Capableofcalculatingmean,maximum,minimum,andrange(maximum-minimum).•Eitherthesegmentmeasurement (7segmentsmax.)oredgemeasurement(1to255edges)canbeselected.•TheRS-232CinterfaceandtheI/Oandanaloginterfaceareprovidedasstandard.

Technical DataMain display: 9-digit LEDInterfaceunitsequipped: RS-232C, Analog I/O, FootswitchPowersupply: +24VDC±10%,1A

Function of Display UnitZero-setting, presetting, GO/±NG judgment, Offset valuesetting, Sample measurement, Statistical calculation, Data output, Workpiece position display, mm/inch switching,Dual-gagecalibration,Transparentobjectmeasurement,Automatic measurement, Abnormaldataeliminating

544-047DIMENSIONS

Unit: mm

•Thearithmeticalaverageormovingaveragecanbeselected.•GO/±NGjudgmentfunction.

138 0+1

72

144

Front view

Bottom view

Side view Rear view

140.

4

Support for mounting plate

*t=Thickness of panel

68

138197.1 20.5

68+0

.7 0

Dimensions of panel mounting slot （DIN 43 700-144×76）

Thickness of panel 1.6mm ≤ t ≤ 6mm*240.3＋（t－0.6）4.4

US-1002

G-32

Optional Accessories for LSM

Appearance Order No. Description Application02AGD11002AGD12002AGD18002AGD13002AGD14002AGD15002AGM30002AGD170

CalibrationgagesetCalibrationgagesetCalibrationgagesetCalibrationgagesetCalibrationgagesetCalibrationgagesetCalibrationgagesetCalibrationgageset

LSM-500SLSM-501SLSM-902LSM-503SLSM-506SLSM-512SLSM-516SLSM-9506

02AGP150 Dual-type add-on unit LSM-6200

02AGC84002AGC88002AGC91002AGC940

Digimatic(SPC)codeoutunit2nd I/O & analog interface unitBCD interface unitGP-IB interface unit

LSM-6200/6900LSM-6200/6900LSM-6200/6900LSM-6200/6900

02AGN780A02AGN780B02AGN780C02AGN780D

Extensionsignalcable(5m)Extensionsignalcable(10m)Extensionsignalcable(15m)Extensionsignalcable(20m)

Any model of LSM*Any model of LSM*Any model of LSM*Any model of LSM*

02AGC150A02AGC150B02AGC150C

Extensionrelaycable(1m)Extensionrelaycable(3m)Extensionrelaycable(5m)

Any model of LSM**Any model of LSM**Any model of LSM**

936937 SPCcable(1m) LSM-6200/6900/9506

937179T Footswitch LSM-6200/6900/9506

02AGD27002AGD40002AGD28002AGD49002AGD52002AGD37002AGD68002AGD44002AGD58002AGD45002AGD590

Work stageAdjustableworkstageAdjustableworkstageAdjustableworkstageAdjustableworkstageAdjustableworkstageAdjustableworkstageCenter supportCenter supportAdjustableV-blockAdjustableV-block

LSM-501S/503S/902LSM-501SLSM-902LSM-503SLSM-506SLSM-9506LSM-9506LSM-501S/503S/902LSM-506S/9506LSM-501S/503S/902LSM-506S/9506

02AGD20002AGD210

Wire guiding pulleyWire guiding pulley

LSM-500SLSM-501S

02AGD22002AGD23002AGD24002AGD25002AGD260957608

AirblowcoverAirblowcoverAirblowcoverAirblowcoverAirblowcoverAir cleaner

LSM-500SLSM-501SLSM-503SLSM-506SLSM-512SAny model of LSM

02AGD600B Thermalprinter(120VAC) Any model of LSM

* Except for LSM-902 ** Except LSM-500S/902

02AGC840

Extensionsignalcable

02AGC940

Extensionrelaycable

US-1002

G-33

Laser Scan Micrometer

Application Example•Drill/Endmill(Odd-numberteeth)

outer-diameter standard function at LSM-6200 Display Unit

US-1002

G-34

US-1002

G Section US 1002

Documents

quantization

basic setup

20c 1c temperature

applicable

15mm bearing

air lifting

6n stem dia

9n stem dia