FULLY AUTOMATIC PROBER UF190B / UF200A - …ictest8.com/a/equipment/probe/2014/08/UF190B-200A maintenance... · FULLY AUTOMATIC PROBER. For ensure safe use of this equipment, make

FT12000-X001-E1

2003/04/09

MAINTENANCE MANUAL

TOKYO SEIMITSU CO., LTDTOKYO, JAPAN

UF190B / UF200AFULLY AUTOMATIC PROBER

For ensure safe use of this equipment, make sure to comply with the following matters

DANGER

• Hazardous voltage can cause severe injury or death.- Only those engineers that have received the maintenance training for the

machine can remove external covers of the main body and the display unitand access internal electrical units.

- Before checking or replacing fuses, shut down the power supply by turning offthe main breaker, which is provided on the loader rear panel.

WARNINGS1. Chuck moving during probing can cause injury.- Make sure Chuck stops before servicing.

2 Chuck coming forward with Chuck head plate and access door open cancause injury.

- Make sure to turn the power off before working with Chuck.

3 Head plate, if dropped, can cause injury between the cover when closing.- Keep hands off beneath the head plate.

4 Moving arms for the wafer transfer can cause injury.- Make sure to turn off power switch before working the wafer transfer.

5 Wafer carrier can cause injury by catching hand during the arm isoperating.

- Make sure to close the loader cover before starting the equipment.

6 Releasing hand while opening or closing cassette cover can cause injury ordamage of the cover.

- Make sure not to release hands from the cover and open /close the coversecurely.

7 Releasing swing switch during test head going down, can cause test head flip upand dangerous (Optional HF jig specification)Make sure to place hand on the handle.

.8 When working with test head set up to right angle, it can fall down forward.

Make sure that the test head stopper is tightly set.9 Chuck can cause burn when wafer is put or taken out from Chuck with the head

plate and access door open.Do not touch Hot Chuck when handling wafers by hand or at service.Hot chuck temperature is kept on after the power supply is turned on.Make sure the Hot Chuck is well cooled down before touching.

CAUTION

1. Loader cover can break by loading heavy item or give strength.- Make sure not to load heavy items or give strength to the Loader cover.

2 Luminescent lamp for the microscope can cause burn.Make sure to replace the luminescent lamp after cooling down the ambient surfacetemperature by turning off the lamp

3. Power cables and compressed air/vacuum tubes are running from the machinerear.

- Be careful not to trip on to the cables or tubes.

3 Caution at cleaning Chuck top surface- Use a piece of gauze containing an appropriate amount of alcohol and wipe off the

contaminated Chuck top surface from its center to the outer edge moving in a spiralmotion by taking care for not to cause any damage.Alcohol is noxious; avoid touching directly barehanded or inhaling its vapor.Put on a pair of rubber gloves to keep the hands free from getting wet by alcohol.When working with a Hot Chuck, make sure that the hot chuck temperature haslowered to the room temperature.

HEAD OFFICE9-7-1,Shimoranjaku, Mitaka-ShiTokyo 181-8515, JapanPhone # 011-81-422-48-1019Fax # 011-81-422-49-7315

HACHIOJI PLANT2968-2, Ishikawa-Cho,Hachioji-shiTokyo 192-0032, JapanPhone # 011-81-426-42-0381Fax # 011-81-426-42-0386

TSUCHIURA PLANT4, Higashi-Nakanuki -choTsuchiura-shi, Ibaraki 300-0006JapanPhone # 011-81-298-31-1234Fax # 011-81-298-31-4453

San Jose HEAD OFFICE& Technology Center

2520 Junction Avenue,San Jose CA 95134, U.S.APhone # 1-408-952-7900Fax # 1-408-952-7901

Portland Office8916 NE Alderwood Drive,Portland OR 97220, U.S.APhone # 1-503-282-0003Fax # 1-503-282-0004

Phoenix OfficeWestmount Tech Center,9831, South 51st St., Suite D-132,Phoenix AZ 85044, U.S.APhone # 1-480-496-0070Fax # 1-480-598-9005

Austin Head Office100 Michael Angel Way,SuiteD400,Austin, TX 78728, U.S.APhone # 1-512-246-4500Fax # 1-480-246-4501

Dallas Office1810 North Glenville, Suite 124,Richardson, TX 75081, U.S.APhone # 1-972-735-0880Fax # 1-972-735-0890

Boise Office800 E. Citation Court, Suite A,Boise , ID 83716, U.S.APhone # 1-208-429-6500Fax # 1-208-429-6555

Oakland Head Office48 Spruce Street,Oakland, NJ 07436, U.S.APhone # 1-201-337-3731Fax # 1-201-337-5292

Fremont Office45395 Northport Loop,Fremont, CA 94538, U.S.APhone # 1-510-770-8008Fax # 1-510-770-8007

Portland Office8916 NE Alderwood Drive,Portland OR 97220, U.S.APhone # 1-503-282-0003Fax # 1-503-282-0004

Wafer Manufacturing Sector

Corporate HEAD OFFICE2600, Telegraph Rd., Suite 180,Bloomfield Hills MI 48302, U.S.APhone # 1-248-332-0100Fax # 1-248-332-0700

ACCRETECH USA, Inc.

Test & Assembly SectorSemiconductorEquipment Sector

Head OfficeLandsberger Str. 396,D-81241 Munich GermanyPhone # 49-89-546788-0Fax # 49-89-546788-10

TOKYO SEIMITSU EUROPE GMBH

TOKYO SEIMITSU CO., LTD.

Detroit Head Office39205 Country Club Dr. SuiteC-26,Farmington Hills MI 48331, U.S.APhone # 1-248-489-5500Fax # 1-248-489-5503

Metrology Equipment Sector

Oakland Office48 Spruce Street,Oakland, NJ 07436, U.S.APhone # 1-201-337-3731Fax # 1-201-337-5292

TOKYO SEIMITSU OFFICE ADDRESSES

L-1

LIST OF CAUTION / WARNING / DANGER LABELS

L-2

LIST OF CAUTION / WARNING / DANGER LABELS

L-3

2 Elevator Type

LCD Cover (Rear)

L-4

Contents-1/2

CONTENTS

List of CAUTION/ WARNING DANGER LABELS.........................................................L-1

1 External View ................................................................................................................1-1/3

1.1 Appearance ..................................................................................................................................1-1/3

1.2 Main Components .......................................................................................................................1-3/3

2 Pre-Operation Check .....................................................................................................2-1/2

2.1 Preparations ................................................................................................................................2-1/2

2.2 Checking Items............................................................................................................................2-1/2

2.3 Main Circuit Breaker Specifications ..........................................................................................2-2/2

3 Parts Replacement Procedure ......................................................................................3-1/3

3.1 Replacement of Fan Motor..........................................................................................................3-1/3

3.1.1 Replacement of Control Rack Fan Motor............................................................................3-2/3

3.1.2 Replacement of Prober Main Body Fan Motor ...................................................................3-3/3

4 Adjustment...................................................................................................................4-1/22

4.1 Adjustment of Servo Driver ......................................................................................................4-1/22

4.2 Adjustment of Displacement Sensor ......................................................................................4-15/22

4.3 Adjustment of Wafer Sensor ...................................................................................................4-17/22

4.4 Adjustment of Overhang Sensor.............................................................................................4-18/22

4.5 Adjustment of Wafer Center Sensors .....................................................................................4-20/23

4.6 Adjustment of LCD display condition ....................................................................................4-22/22

5 Electrical Units............................................................................................................................5-1/24

5.1 Electrical Units Location ..........................................................................................................5-1/24

5.2 Machine Rear ............................................................................................................................5-2/24

5.3 Location Inside the Control Rack .............................................................................................5-3/24

5.4 Loader Electrical Components..................................................................................................5-4/24

5.4.1 Loader Board / Motor Drivers............................................................................................5-4/24

5.4.2 5AX DRV (FA0138B)SW1..................................................................................................5-5/24

5.5 VME RACK Board Location......................................................................................................5-6/24

5.6 Power Supply.............................................................................................................................5-7/24

5.7 Fuses ..........................................................................................................................................5-9/24

5.8 Display Unit.............................................................................................................................5-10/24

Contents-2/2

5.9 Specifications of LCD Display.................................................................................................5-11/24

5.10 CCD CAMERA.......................................................................................................................5-13/24

5.11 FDD, HDD and MOD ............................................................................................................5-14/24

5.12 Thermal Printer ....................................................................................................................5-15/24

5.13 Heat-Up Unit.........................................................................................................................5-19/24

5.14 Temperature Controller ........................................................................................................5-22/24

6 Safety Measures.............................................................................................................6-1/6

6.1 EMO ( EMERGENCY POWER OFF ) ........................................................................................6-1/6

6.2 Interlock Configuration...............................................................................................................6-4/6

6.3 Lockout Device Setting (Lock out Configuration)......................................................................6-6/6

7 Maintenance Parts List.................................................................................................7-1/6

7.1 Rank A Parts ...............................................................................................................................7-1/6

7.2 Rank B Parts ...............................................................................................................................7-2/6

7.3 Rank C Parts ...............................................................................................................................7-3/6

7.4 Rank C Parts – Boards................................................................................................................7-5/6

7.5 Rank C Parts – Option Boards ...................................................................................................7-6/6

8 Troubleshooting ...........................................................................................................8-1/25

9 Troubleshooting Flowchart ...........................................................................................9-1/3

10 Circuit Diagrams ..................................................................................................... 10-1/35

Maintenance Manual

1-1/3

１　Appearance

１．１　Appearance

Maintenance Manual

1-2/3

Maintenance Manual

1-3/3

1.2　Main Components

No Name１ Prober Main body2 Elevator3 Loader4 Indicator5 Keyboards6 Alignment Microscope7 Inspection Tray8 Head Stage9 Printer10 FDD11 MOD12 Emergency OFF Switch13 POWER ON/OFF14 Alarm Pole Lamp

Maintenance Manual

2-1/2

2 PRE-OPERATION CHECK

2.1 Preparations

Before turning on power, prepare the utilities and check the environment as follows.

(1) Compressed Air Open the valve of supply source

(2) Vacuum Open the valve of supply source

(3) Power Supply Confirm that the AC voltage stated on the nameplate at

main body rear is same as the supplying voltage.

2.2 Checking Items

Check Item Method

Air Is the supply pressure over 0.4Mpa at the

regulator?

(The sensor setting point :0.33 Mpa )

See the air pressure sensor

near the air intake

Vacuum Is the supply pressure – 53kPa?

(The sensor setting point –46.3757kPa)

See the vacuum sensor near

the vacuum intake.

Electricity Power Supply Voltage

Make sure the AC voltage is within ±10%

of which stated on the nameplate.

If the supply voltage is different, consult to

our Service Section.

Measure the supply voltage

using a voltmeter.

Maintenance Manual

2-2/2

VacuumPressure Sensor

Air Pressure Sensor

Pressure Display Mode Select Switch

RUN

SET

cmHg

Setting the Pressure

(1) Set the Mode Select Switch to SET mode.

(2) Set the pressure by rotating the Pressure Set Volume Control.

(3) Set the Mode Select Switch to RUN mode.

(Notice) Set value can change if Pressure Set Volume Control is turned at RUN mode.

2.3 Main Circuit Breaker Specification

The main circuit breaker has different specifications depending on the AC supply

voltage.

Item Supply Voltage Main Body

Breaker

ETM

Breaker

AC100–120V 15A 20ARated

Current AC200 – 240V 10A 10A

Breaking Current 10KA 10KA

The electricity sources for Prober main body and ETM must have the supply capacity

ability more than the circuit breaker rated currents listed as above.

(ETM: Electrically Assisting Testhead Manipulator)

Pressure Set Volume Control

Maintenance Manual

3-1/3

3 Parts Replacement Procedure

3.1 Replacement of Fan Motor

Fan Motors are provided at the lower section of the Control Rack and at rear side.

Prober Fan Motor

Two 92 square fan motor BSD92A7

Control Rack Fan Motor

Three 120 square fan motors STD12A7HRPN

Maintenance Manual

3-2/3

3.1.1 Replacement of Control Rack Fan Motor

The fan motors of this machine type provides DC brush-less type fan motor with sensor.

The Control rack has 3 fan motors attached, the power goes OFF when 2 of left side fan

motors had stopped. It will be warned by an alarm, when the fan motor at right end has

stopped

Replace the defective fan motor in the following instructions.

(1) Pull out the Control Rack forward.

(2) Fan motors are provided below the VME rack. Check whether which fan motor

had stopped.

(3) Turn OFF the power supply (Turn OFF Main circuit breaker)

(4) Replace the defective fan motor.

Every fan motors are connected with 4 joints. Remove the joints and loosen the

screw that the fan motor is attached at the bottom.

Set the fan motor to be downflowed (wind blowing downwards)

120 Square Fan Motor 4 Fastening Screws

DANGER:Always turn main circuit breaker OFF whenreplacing. Move main breaker lever to theOFF position (downwards) and lock handle.(Lock Out Specification)

Maintenance Manual

3-3/3

3.1.2 Replacement of Prober Fan Motor

Two DC brush less type fan motor is provided at Prober rear. When any of the fan

motor had stopped, it will be warned by alarm.

Replace the defective motor in the following instructions.

(1) Check which fan motor at Prober rear had stopped.

(2) Turn the Power supply OFF ( Turn OFF main circuit breaker)

(3) Replace the defective fan motor.

Set the fan motor to allow blowoff.

DANGER:Always turn main circuit breaker OFF whenreplacing. Move main breaker lever to theOFF position (downwards) and lock handle.(Lock Out Specification)

Maintenance Manual

4-1/22

4 Adjustment

4.1 Adjustment of Servo Driver

UF200A ( X axis:TA8110N2121E915 Y axis:TA8110N2121E916 )

UF190B ( X axis:TA8110N2121E804 Yaxis:TA8110N2121E805 )

(1)Front Panel

T

V

G

L11CN3

X axis CN-20

Y axis CN-22Curl Plate

X axis CN-21

Y axis CN-23Curl Place

DATA SAVE

SEL

L31

L1

L2

L3

P+

B

U

V

W

P-

CN1

CN2

Figure - 1

Maintenance Manual

4-2/22

(2) Connection of Terminal Block

NC

AC100V Wiring Terminal

Motor Wiring terminal

NC

L1

L2

L3

P+

B

U

V

W

P-

Figure - 2

Maintenance Manual

4-3/22

(3) Displays

1) The driver control status is indicated on 4 digit 7-segment display on the panel.

T

V

G

Control

Seq. No. Alarm No./ Servo ON, OFF

Input

signal

condition

Monitoring

terminals

1

2

3

4

5

6

7

8

1 Servo ON2 Alarm Reset

3 CCW-LMT

4CW-LMT5 INHBIT6 C-RST7 AUX1

8 AUX2

InputSignalCondition

Alarm No.

SV-ON/OFF1

00- FF;Hexa-decimal No.

1 In-position

Control

Seq. No.

0-F; Hexa-

decimal No.

DATA SAVE

SEL

DOWN

SEL

DATA

SAVE

Figure – 3

When buttons are not pressed, LED at left end shows Control Mode No., 2 middle

LED show the Alarm No. and the right end LED shows the Input State.

And second D.P of LED from right lights when INPOSITION signal is ON at

positioning.

When “SEL” button is pressed, shows the parameter No.

When “DATA” button is pressed, shows the data of parameter that was indicated when

“SEL” button had pressed.

Maintenance Manual

4-4/22

2) Detection error at alarm warning

Situation of the driver is shown at 2 LED located in the center of 4 LEDs.

LED Condition Causes Recovery Step

Servo OFF condition

Servo ON; correct

control going on

Detected just by

Power Supply is ON

Driver power error

Driver control circuit error

Replace the driver

Motor wiring has short Replace the motor

Check motor cable

Detected when

Servo-ON

Driver power amplifier

error

Replace the driver

Detected when

motor start or

reducing speed

Driver adjustment error Replace the driver

Detected after some

control operation

has performed

Heating inside the driver Replace the driver

Detect when SV-ON

Motor shaft vibrates

Adjustment Error Re-adjust gain

Detect at increase or

reduce speed

Too much load inertia Check load inertia

Motor shaft are locked Check the load torqueDetect while

rotating Brake is not released Release the brake

Detect at SV-ON Motor Circuit breakdown Check motor cable

Detect at motor start

or reduce speed

Step response is

overshooting

Re-adjust the gain

Check the inertia

Error Code

Maintenance Manual

4-5/22

LED Condition Causes Recovery Step

CCW-LMT,CW-LMT

signal is not inputted

Input LMT signalPulse command

error when inputted

SV-ON signal is not

inputted

Input SV-ON signal

Increase/

reduce speed error

Too much load inertial Check inertia

Pulse command

error

F-PULSE,R-PULSE was

inputted at one time.

Check wiring

Check controller

pulse outlet circuit

Power ON Encoder signal

breakdown

Check wiring

Detect while

rotating

SIN,COS signal

adjustment error

Re-adjust

External encoder signal

is not inputted

Check typed detail

External encoder

resolution set error

Set properly

Lights after rotating

some while.

Energized current low to

photo coupler of external

encoder signal

Check input voltage

Detect when

reducing speed

Over-voltage at power

supply board

Replace the driver

Detect when

SV-ON

Low voltage at Input

power supply

Momentary stop (over

60msec)has occurred

Check input power

supply

Table - 1

Maintenance Manual

4-6/22

3) Monitor Signals

Output from the monitor terminals “T”and“V”

T: In-position signal (Fixed)

V: Speed monitor (the contents selectable with Parameter No.13)

Monitor No. Content Scaling

230 Speed command 7FFF/4800 rpm

232 Speed Feedback 7FFF/4800 rpm

233 Differential counter 7FFF/32767 pulse

238 Current command 7FFF/ 7.1 Arms(N2121)

7FFF/14.1 Arms(N2121)

Monitor

Gain

Output voltage

level

0 5V/7FFF

1 5V/3FFF

2 5V/FFF

3 5V/7FF

4 5V/3FF

5 5V/FF

6 5V/3F

7 5V/1F

Maintenance Manual

4-7/22

(4)Parameter Setting

Parameter can be set up with the 6 push-buttons provided on the driver.

The list below shows the available parameters.

No. Symbol Purpose

0000 Control mode

0001 KP1 Position loop gain1

0002 KV1 Speed loop gain 1

0003 KI1 Speed loop integrated gain1

0004 KF ( For manufactures use)

0005 VLMT Speed limit

0006 TLMT Current limit

0007 In-position range

0008 τF Filter constant

0009 KP2 Position loop gain 2

000A KV2 Speed loop gain 2

000B KI2 Speed loop integrated gain 2

000C VALM Speed alarm

000D Gain1,2 cross-over point

000E Cycle division/multiplication setting

000F Control sequence change switch

0010 Monitor 1 address setting (Do not

change setting value)

0011 Overload alarm level

0012 External encoder resolution

0013 Monitor 2 address setting

Values of Parameter 9,A and B will take effect when the differential counter value

becomes lower than the setting on Parameter”000D”. Until then, values of Parameter

1,2 and 3 are used.

Those parameters marked by ” ” must not be changed; if changed, the correct

operation may not be possible or the motor performance may become worse.

Table – 2

*

*

*

*

*

*

*

*

*

*

*

*

*

*

Maintenance Manual

4-8/22

(5) Parameter setting procedure

1) While holding “SEL” button down, push “UP” or “DOWN” to call required parameter

No. for its setting change.

(“SEL+UP” or like will be used to mean , holding “SEL” button and push “UP” etc.

hereafter.

2) Push “DATA” button; the current parameter value will appear.

3) Push “DATA” +”UP” or “DATA” +”DOWN” to change the value. For shifting the

digits of the value, push “DATA+CTRL”

4) To change the next parameter, repeat the step 1) to 3).

5) At the end of all of the parameter has changed, save the set value to the driver

Save in a Servo Lock OFF condition, select the target parameter No. doing

“SEL”+”UP” or “SEL” +”DOWN”.

Then “DATA”+”SAVE” for saving the value. The correct switch operation makes the

display blinking. When the blinking has change to light up condition, saving is

completed.

Repeat this step by the number of saving parameters.

(Caution) Once the driver power supply has been turned off midway of the setting

change, the parameter values return to those before the change. It is

recommended to save the new value of each parameter just after the

change.

Example for changing procedure:

Changing Parameter 2, KVI , from 30 → 20

1) Select Parameter 2 with “SEL” +”UP”, “DOWN” : display to show “0002”

2) Push “DATA” switch and confirm the current value is “0030”.

Then push “DATA”+”CTRL” to select the target digit to the third; decimal point at

lower left side of “3” lights up.

With “DATA +DOWN”, change “3” to “2”; now the display shows as “0020”

Maintenance Manual

4-9/22

3) For the data saving, perform the Servo lock off.

At I/O port access, output FFFF0409@1B( X axis) and FFFF0419@1B( Y axis); the

Servo lock off is established.

Push “SEL” switch to confirm the currently selected parameter is 0002.

Then push “DATA” switch to see the value is “0020”.

Push “DATA+”SAVE” switch and save the parameter value.

Now the parameter setting change is complete.

The list below shows the relationship between push button combinations and its

processing.

Push Button Processing

“SEL” Calls up a parameter number

“SEL”+”CTRL” Shifts target digit for the parameter No. change

“SEL”+”UP” Increments the value by +1 of the selected parameter

number digit( hold down for the continuous increase)

“SEL”+”DOWN” Decrements the value by –1 of the selected parameter

number digit( hold down for the continuous decrease)

“DATA” Calls up the preset value of the current parameter No.

“DATA”+”CTRL” Shifts the target digit of parameter value

“DATA”+”UP” Increments the value by +1 of the selected parameter

value (hold down for the continuous increase)

“DATA”+”DOWN” Decrements the value by –1 of the selected parameter

value (hold down for the continuous decrease)

“DATA”+”SAVE” Saves the currently indicated parameter value to

EEPROM at Servo OFF. (Data are to be kept through

power-down).

Maintenance Manual

4-10/22

(6) Troubleshooting and recovery

If a Servo Motor does not work correctly, check the display 7 segment LED indication of

the Servo driver.

1) Indication of control sequence No. (on the leftmost digit).

It must be “2”. As for UF190B it must be “0”.

(Remarks) Sequence No. can be changed only at Servo lock OFF.

Switching to the Encoder Mode

Change following listed parameters when using Encoder Mode for purpose such as

trouble shooting.

(Same method for both X and Y axis)

Parameter Linear Scale Mode Encoder Mode

000E 80 82

000F 2 0

The leftmost LED changes as 2 →0 at Encoder Mode.

2) Indication Condition Display

This rightmost LED shows the condition of the input signals. Confirm if the input

signal is correct referring to the table below. See Figure – 3 for the relationship

between the input signals and LED segment.

Segment Condition Possible Cause Action

Segment 1) not lit up SV-ON signal not input Check the signal cable

Segment 2)lit up ALARM-RESET signal turned ON Turn it OFF

Segment 3)not lit up CCW-LIMIT signal 信号 turned OFF Turn it ON

Segment 4) not lit up CW-LIMIT signal turned OFF Turn it ON

Segment 5) lit up INHIBIT signal turned ON Turn it OFF

Segment 6) lit up COUNTER-RESET signal is turned ON Turn it OFF

Table – 3

Maintenance Manual

4-11/22

3) Indication of Alarm Numbers

Note the alarm No. indicated on the central two digits for further troubleshootingLED Lighting Condition Possible Cause Actions20 Lit-up at SV-ON with

motor shaftingIncorrect adjustment Readjust the gain

Lit-up at the motor drive. The motor shaft is clamped Isn’t there the clamp jigremaining?Or isn’t the shaft held byany substances?

Lits-up at SV-ON Incorrect wiring in themotor circuit drive

Check the wiring

41 Appears at the pulsecommand input

No input of CCW-LIMITand CW-LIMITDisconnection of the motordrive wires.

Input CW/CCW-LIMIT signals.Check the wiring

42 Appears at the pulsecommand input

Simultaneous input ofCW-PULSE andCCW-PULSE

Check the wiring

50 Appears at power-up Defective driver controlcircuit

Replace the driver

Appears at SV-ON Shorting of motor drivewires

Check the wiring orreplace the motor

Defective driver powerAmp.

Replace the driver

Appears at the motorstartup or deceleration

Incorrect driveradjustment

Replace the driver

Appear after the controlsequence going on for awhile.

Over-heating inside thedriver

Cooling improvement

62 Appearing after rotatinga little withSV-ON at power-up

Encoder U,V&W phasewires disconnection orwrong connection

Check the wiring

Defective encoder signal Replace the motor63 Appears after rotating for

short timeExternal encoder signalwire disconnection

Check the wiring

Loose coupling Fasten the couplingExternal encoderresolution incorrectsetting

Check the setting andcorrect , if necessary.

72 Appears at SV-ON Power supply voltagetoo low

Check the supplyvoltage

90 Appears at power-up EERPOM faulty Replace the driver= Appears at power-up Defective Driver control

circuitReplace the driver

Appears at the operation Malfunction due to thenoise

Noise protection

Table – 4

Maintenance Manual

4-12/22

(7) Servo driver adjustment procedure

a)Adjustment procedure

The adjusting conditions are:

Axis Acceleration Indexing

amount

Settling time

X 0.2G 10mm Standard 10ms

Y 0.2G 10mm Standard 15ms

① In the axis initialization, observe whether X or Y axis is vibrating or hunting.

If so, adjust KP1 and/or KV1 to stop the condition.

② After completion of the initialization, apply the indexing drive; observe the

Servo speed monitor waveform to check whether it does show a trapezoid or not

and whether the In-position signal is deformed or not.

③ If the In-position signal is deformed too much, adjust KP1, KV1 and KI1 of the

gain 1 to make it correct.

④ For a small deformation of the In-position signal, adjust KP2 and KI2 of the gain

2 to eliminate it. Making KP2 and KI2 lower than the values at the delivery can

prevent occurrence of the deformation in the In-position signal. However, a KI2

larger than KI1 may make the control system more stable depending on the

machine.

⑤ By adjusting KP2 and KV2, make the settling time to approx. 50 ms. A little

increase of KV2 will make the settling time shorter without affecting the

stability.

b) Points of the adjustmentKP1, KV1: Increase of the position loop gain tends to cause oscillation; its

decrease will make the settling time longer.KV1, KV2: Increase of the speed loop gain can make the trapezoidal waveform

better, but too much increase will make the settling time longer.KI1, KI2: Different value setting with these integrating parameters will made

the settling time longer.

Each parameter is set up optimally at the shipment from the factory, majorchange is not necessary.

Maintenance Manual

4-13/22

4)Example of waveforms after the adjustment for the settling time

X Acceleration 0.2G Indexing = 10mm

Y Acceleration 0.2G Indexing = 10mm

Speed monitor

In-position signal

0

Settling time

0

Figure – 4

Maintenance Manual

4-14/22

(8) Servo driver replacementSince a Servo driver and its motor are adjusted in pair, once a Servo driver hasbeen replaced, check the encoder signals. Float the GND terminal of oscilloscope.Adjusting terminals are shown below as Fig. 5.

TP1TP2

TP3

VR1 VR2

① Connect the probe GND lead to TP3, CH1 probe to TP1, and CH2 probe to TP2.

Set up the oscilloscope for observing the X/Y Lissajous waveform.

② Turn on the driver power supply.

Turn the driver to Servo OFF, and manually rotate the motor shaft at a light

touch.

An elliptic waveform will appear on the scope.

Turning VR1 will change the ellipse axis angle; align the ellipse longer axis to X or

Y axis on the scope.

③ Adjust VR2 until the elliptic waveform becomes almost circular.

Now the adjustment is complete.

Be sure to apply the above adjustment procedure once the combination of Servo

driver and motor has been changed.

Figure - 5

Maintenance Manual

4-15/22

4.2 Adjustment of Displacement Sensor

Displacement sensor is used to measure the wafer thickness and Chuck top profile.It is composed of a sensor and signal control board.The control board is contained in the VME rack.

FA0111 A type:

Mode Switch

1)AC Auto-compo(not provided for FA0111A type)2)OP

Operation Mode3) SETUP

Used at calibration

Probe input connector

Control board front panel

ACAD

PROBE

ZERO

GAIN

LIN

LEVE

SET

OP

GND

OUT

PUT

C-V

OUT

Maintenance Manual

4-16/22

Adjusting procedure

At adjusting sensor position, take the following steps.

(1) Activate Maintenance/Adjustment mode.

(2) Open [Equipment Position Adjustment ] menu.

(3) Select < Profile Sensor Position Adjustment>

The display will show the screen as below:

(When a fine adjustment is only required, push <Auto Compo> button and confirm that

the indicated voltage has become within ±0.3V)

(4) Push <Out of Cap. Area> button to evacuate the Chuck away from the sensor.

Turn Mode switch to either side for applying Auto Compo (to compensate the

temp. drift).

Connect a digital voltmeter (having the range of DC-10V - 10 V) to the control

board with OUTPUT and GND terminals.

(5) Push <Back to Cap. Area> button to bring back Chuck under the sensor.

If a groove of Chuck has come below the sensor, move Chuck using Joy Stick

to a flat position of the chuck.

(6)While observing the voltmeter indication, adjust the sensor height until the

indication becomes 0V

[Displacement sensor specifications]

Measuring range : 1.0 to 2.0 mm (1.5 ± 0.5mm)

(Full Scale)

Output voltage: +10 to -10 V

Sensitivity : 20 mV/μm

AUTOCOMPO

CANCEL ENTBACK TO

CAP.AREA

OUT OFCAP.AREA

**Capacity Sensor**

VOLTAGE V[WITHIN 0.3V]

Display

Sensor Chuck Groove

Alignment Camera

Chuck positioning below the sensor

Maintenance Manual

4-17/22

4.3 Adjustment of Wafer Sensor

Pass-through type opto-electrical sensors are used for detecting a presence of

wafer and slots of cassette with wafers inside.

Adjusting procedure:

(1) After power-up, align the optical paths of the receiver and transmitter.

After the mechanical initialization of Elevator, lower it and adjust the heights

of the receiver and transmitter so that their optical paths become identical.

When the optical paths are aligned, the output indication lamp of the receiver

turns on red.

(2) Rotate the sensitivity adjustment potentiometer gradually from the Max.

sens. position counter-clockwise until the operating condition lamp goes off at

the angle A.

(3) Set the sensitivity adjustment potentiometer to the mid-position between the

angle A and Max. sens. position.

Shut off the optical path to confirm that the output indication lamp goes off.

Maintenance Manual

4-18/22

4.4 Adjustment of overhang sensor

Three types of wafer overhang sensor are provided for the safe stop when any wafer in

the cassette has got over the elevator area

Sensor Position

Upper reflection type

Pass-thru type (lower)

Lower reflection type

Adjusting Procedure

Reflection Type Sensor (upper side)

(1) Confirm the operation mode L is set to ON

(2) Set Sensitivity adjuster VR to react at 25mm ,using a mirror wafer.( Although as for

No.2 Elevator Spec., set the front side as 40mm)

Observe that the green lamp lights up in the normal condition and both of the green

and red lamps turns on when a hand comes about 20mm above the sensor.

Panel of the amplifier

Stable Ope. lamp(green) Beam-inlamp(red)

Sensitivity Volume Indicator

8-turn sensitivity volume

Response adjuster

MODE select switch Timer Switch

ON : Timer working

OFF: Timer not working

1 8SENS

MIN MAX

MIN MAX

ON

OFF

SETTIMER

ON

D-ON

+ －

E3X-H11

5 1

Maintenance Manual

4-19/22

Pass-thru type sensor( lower side)

Set the amplifier as:

･Power Mode : Ultla

･APC:ON

･Logics : d-on

After sensor optics has aligned, move elevator up/down to confirm the minimum

value of the current rate( luminous intensity). Set the 70 percent of the minimum rate

as threshold value

Change the setting of threshold value using the swing switch.

Reflect type sensor (lower side)

Modified them to the KEYENCE made sensor.

Set the amplifier as:

･Power Mode : Ultla

･APC:ON

･Logics: L-on

(Leave the default value for others)

Change the setting of threshold value using swing switch.

Set the threshold value as 180

(Reference)

Push the Manual Button to set the threshold value. Push the left arrow at the Manual

Button: the set value goes down. Push the right arrow: set value goes up.

Mode setting

1) Press the MODE button more than 3 seconds.

2) It changes to the ACCESS mode , then select “FULL” using Manual Button.

3) Push MODE button once , display change to power mode setting; select “Ultl”

4) Push MODE button 3 times select “APC”(auto power control ) to “ON”, using Manual

button. Setting completes after pressing MODE button more than 3 seconds.

Manually Tuning Method

100 50

MODE button

SET button Set valueOutput switching button

Manual Button

Maintenance Manual

4-20/22

4.5 Adjustment of Wafer Center Sensors

4 pass-thru type optical sensors are used to watch the wafer center position at

taking-out or inserting each wafer from or into the cassette.

If an error occurs at taking-out or inserting a wafer with the transfer arm, the

adjustment is necessary; possible Error No. is ERR314, 315, or 316, ERR314

announcing a wafer overhang from the cassette, though.

Check whether a sensor has turned on its LED or not even with its light pass not

interrupted by a wafer.

(1) Sensor locations

A set of the sensors is provided for each elevator; the sensor emitter and receiver

are attached face-to-face.

Maintenance Manual

4-21/22

(2) Sensor status indication (on the emitter side)

The sensor emitter has a monitoring LED as below.

(3) Adjustment

• Find out a sensor working wrong. The monitoring LEDs can be seen from

below after removing the Loader side cover. An LED lit up without

interruption by a wafer or flickering unstably shows the wrong condition.

• Remove the sensor cover (shown on the figure of the preceding page).

• Loosen the setscrews of the sensor receiver facing to the wrong working

LED emitter then adjust its light-receiving position so that the monitoring

LED can surely turn off at no interruption by a wafer.

• Try to shut off the light pass by a hand and see the monitoring LED can

work stably.

Maintenance Manual

4-22/22

4.6 Adjustment of LCD display condition

If the LCD display has shifted to right or left, or flickering or blotted, apply the

following procedure.

Adjusting procedure

1. Shifting of the screen to the right or left

Use switch (1) for rough adjustment of left/right position, use (2) for fine adjustment.

Use switch(5) to adjust up/down position.

2.Adjustment when display flickers

Use switch (3) for rough adjustment of the sampling block, use switch(4) for fine

adjustment until the flickering has disappeared for sharp indication of characters.

(1) (2)

(3) (4) (5)

Holes provided on the display rear

panel are covered by circular sticker

Maintenance Manual

5-1/24

5 Electrical Units

５． 1 Electrical Units Location

No Name１ Control Rack2 VME Rack3 Motor Driver, Power Supply4 Prober Driver Board5 Loader Driver ,Sensor Board6 Loader Motor Driver7 Heat Up Unit8 Printer9 Control Rack Fan Motor10 Servo Driver11 HDD , FDD, MOD

Maintenance Manual

5-2/24

5.2 Machine Rear

(1)

(2)

(3)

(4)

(7) (5) (6)

Name Remarks

(1) Chuck Vacuum Sensor

(2) Vacuum pressure sensor

(3) Air pressure sensor

(4) Air Regulator

(5) Main Breaker 15A (100Vsystem), 10A (200V System)

(6) Short circuit Breaker 30mA

(7) Ground terminal Apply when it cannot get ground from power supply

cable or when ground connecting with tester

Maintenance Manual

5-3/24

5.3 Location Inside the Control Rack

FA0313

Control Rack Drawing

Z axis driver

X axis Servo

Y axis Servo

Transformer

+ 24V

Power SupplyFuses

5V

Power

Supply

+ 24V

Power

Supply +12

V

VME rack

Maintenance Manual

5-4/24

5.4 Loader Electrical Components

5.4.1 Loader Boards / Motor Drivers

No. Component name Remark

(1) Loader Driver board LD DRV (FA0062A)

(2) Loader Sensor board LD SENS (FA0061)

(3) Elevator 1 motor driver 5AX DRV (FA0138B)

(4) Sub-chuck rotation motor driver “

(5) Turntable motor driver “

(6) Transfer arm 1 motor driver “

(7) Transfer arm 2 motor driver “

(8) Elevator 2 motor driver CSD 5814N (for two-elevator Loader only)

swl

(8)FA0138BBoard

(3) (4) (5) (6) (7)

Maintenance Manual

5-5/24

5.4.2 5AX DRV (FA0138A) SW1

Default setting:

5.4.2 5AX DRV(FA0138B) SW1

Default Setting

3 4 5 6 7 8 9 101 2

OFF

3 4 5 1 2 3 4 51 2

SW1

CU UP

CU NOR AUTO CD

Seg. ON OFF Default

1 CH1 motor current to the rated current CH1 motor current to x1.2 of the rated current ON





6 CH1 Auto-current Down ON CH1 Auto-current Down OFF OFF

7 CH2 Auto-current Down ON CH2 Auto-current Down OFF ON




Maintenance Manual

5-6/24

5.5 VME Rack Board Location

Slot Board Name Board No. Remark1 MASTER CPU ADVME7507234 VGAC(2) FA0132B/D,FA031256 ITV COGNEX-430078 PIO FA0143C +FA0144A9 X/Y COORDINATER FA0022C (OPTION)

10 TTL/GP-IB FA0146 +FA0037C11 5 CH PGEN/ centronic FA0139B121314 CAP SENSOR FA0111A1516 SLAVE CPU AVME-115B17 LD. I/O-1 FA0134A18 LD. PGEN-1 FA0135D19

*; option board

MA

ST

ER

CP

U

VG

AC

ITV

PIO

X-Y

/CO

OR

DIN

AT

ER

TT

L/G

P-I

B

5CH

PG

EN

/CE

NT

RO

CA

P S

EN

SO

R

SL

AV

E C

PU

LD

.PG

EN

-1

LD

.IO

-1

1 2 3 4 5 6 7 8 9 1 1 1 1 1 1 1 1 1 10 1 2 3 4 5 6 7 8 9

F

D

D

M

O

D

Maintenance Manual

5-7/24

5.6 Power Supply

In principle the power supply to this prober must be as per the rated voltage

shown on the name plate of the main body rear panel. It can be changed to one

of those listed below by resetting the tap on the transformer in the control rack;

however, this change is limited within the 100 V or 200 V system only. For

switching from 100 V to 200 V system or vice versa, consult our Service Section.

100 V system 200 V system

(1) 100 VAC (5) 200 VAC

(2) 110 VAC (6) 220 VAC

(3) 115 VAC (7) 230 VAC

(4) 120 VAC (8) 240 VAC

Procedure:

(1) Make sure to turn off the power supply with the main circuit breaker

switched off.

DANGER:Before starting the work, be sure to turn off themain circuit breaker.Turn down the lever of the main circuit breaker tothe OFF position. (Lock the lever setting with apadlock when the Lockout device is provided.)

(2) Pull out the control rack forward, and take out its cover.

(3) Change the connection for the input voltage to the terminal of necessary

voltage.

(4) Replace the control rack cover and return the rack inside the body.

Control rack top view

Maintenance Manual

5-8/24

Remarks:1) When using the Heat-up unit, change the supply voltage setting of its transformer,

as well.2) The service sockets provides the same voltage of the power source.3) The switching power supply units (+5 V, +12 V, –12 V, +24 V, and +48 V) can be

used on the AC supply voltage range of 85 ~ 265 V; no need of their resetting.

Maintenance Manual

5-9/24

5.7 Fuses

For the safety purpose, fuses are provided in the control rack.If a fuse has blown, turn off the circuit breaker at first, and after confirming thecurrent capacity insert a new fuse.

TypeRating/capacity100 V System

Rating/capacity200V System

F1 Time-lag fuse 250 V 1.0 A 250 V 0.5 AF2 “ 125 V, 10 A 250 V, 5 AF3 “ 250 V, 5 A 250 V, 3 AF4 “ 125 V, 10 A 250 V, 5 AF7 “ 125 V, 10 A 250 V, 0 A

Be careful that the fuse F1 is in the current flow even at power-down with the power OFF

lamp turned on.

DANGER:Before starting the replacement, be sure to turn offthe main circuit breaker.Turn down the lever of the main circuit breaker tothe OFF position. (Lock the lever setting with apadlock when the Lockout device is provided.)

Main power supply

Control power supply

Stepping motor drivers

Heat-up power supply

X/Y Servo (transformer primary)

F1

F2F3

F4

F7

Maintenance Manual

5-10/24

5.8 Display Unit

The display is composed as illustrated below.

(1) Touch panel

8 x 8 resistance matrix type transparent touch switches.

Two-layer consists by film and glass.

(2) LCD display

Indicates images and characters.

Images are black and white, while characters can take 128 colors.

Touch panel cleaning:

If the touch panel has been smeared, wipe the surface with a piece of damp soft

cloth: soaked into water containing a small amount of neutral detergent and

squeeze tight without water drops.

Do not apply alcohol or other chemicals.

Maintenance Manual

5-11/24

5.9 Specifications of LCD Display

The LCD display is color TFT LCD panel.

Specifications of the color TFT LCD are:

LCD panel LQ104V1DG21

Effective screen size 10.4 inch (diagonal)

211.2 (H) x 158.4 (V) mm

Input signals R.G.B. 6 bit each, digital signals

Connector DF98A-31P-IV (Hirose)

Horizontal synchronizing signal 31.78 Khz

Vertical synchronizing signal 525 lines

Dot clock 25.18 Mhz

Pixel calibration 640 x (RGB) x 480 pixels

(1 pixel = R+G+B dots)

Pixel pitch 0.33 (H) x 0.33 (V)

White level 350 cd/m2

Back-light unit

Inverter CXA-M112-JV (TDK)

Back-light Unit LQ0DDB5367 (Sharp)

CAUTIONS:

1) A high voltage is applied to the back-light unit; do not touch the unit by hand

during its operation.

2) The life of the back-light unit is typically 50,000 hours at the continuous

lighting.

Maintenance Manual

5-12/24

The brightness of color TFT LCD can be adjusted with a potentiometer on KEY CONT

board VR2.

KEY CONT board

Turning KEY CONT board VR2 to clockwise makes the screen brighter, counter clock

wise to get darker.

[Adjusting the alarm sound level]

SW 10 on KEY CONT board can adjust the alarm sound level.

CW rotation larger sound

CCW rotation smaller sound

Maintenance Manual

5-13/24

5.10 CCD Camera

CCD camera for the wafer alignment are:

XC - 75 or XC-ES50 ( SONY)

Setting of the camera is stated as below

(1) For XC-75 type

SW setting

Turn off the slide switches S2 and S3 on SG199 board.

Keep the other switches to the default settings.

Gain = FIX

Gamma = OFF

HD/VD = EXT IN

Shutter = OFF

Restart = OFF

Charging = FRAME

SG199 Board

(2) For XC-ES50 type

75Ω = OFF

HD/VD = EXT

DIP switch = ALL OFF

Maintenance Manual

5-14/24

5.11 FDD , HDD and MOD

Floppy Disk Drive

Model FD-05HGS-750

Maker TEAC

Disk type 2HD

Specs. Capacity: 2 MB/1.6 MB/ 1MB

Interface: SCSI

ID address: 1

Hard Disk Drive

Model ST34520W

Maker Seagete

Specs. Formatted data capacity: 4.5GB

Interface: SCSI

ID address: 3

MO Drive

Model MCM3064SS

Maker Fujitsu

Specs. Capacity: 128MB/230MB/540MB

Interface: SCSI

ID address: 5

Maintenance Manual

5-15/24

5.12 Thermal Printer

A thermal printer is mounted to the Loader unit.

The thermal printer consists of an interface board and a printing mechanism.

(1) Printing specifications

Printing Thermal-sensitive line-dot type

Dot configuration 640 dot/line

Dot pitch 0.165 ±0.05 x 0.165 ±0.03

Effective printing width 105.6 mm

Characters Alpha-numeric and Japanese

characters

(2) Paper specifications

Normal paper type FTP-040P0020(Fujitsu)

Clean paper OPGY-900 114 x 25 x 13 (TSK)

Width Approx. 114 mm

Length/roll Approx. 30 m

Approx. 25 m (Clean paper)

Maintenance Manual

5-16/24

Maintenance Manual

5-17/24

Interface Board

Stepping motor drive cable connector (CN5)

Paper stock detecting connector (CN2)

Head-up detecting connector (CN1)

Power supply connector (CN3)

Part mounting side

24V power supply fuse

125V 0.5A

Thermal head driving power

supply connector(CN4)

Maintenance Manual

5-18/24

To the paper stock detecting connector, connect the paper front feed detecting cable.

Do not connect to the rear feed detecting connector.

If the printer does not print out correctly let the printer operate on the self-testing

program. Just after Prober power-up press the FEED switch about 5 seconds. When

the printer is not defective, the test printing will begin.

If the test printing does not start, check on the following points:

(1) Hasn’t the fuse blown at the printer interface board?

(2) Are all the cables connected correctly?

(3) Is the head-up lever set up correctly?

(4) Is the paper set up correctly?

Maintenance Manual

5-19/24

5.13 Heat-up Unit

Heat up unit is built-in under the Loader.

Protection Fuse Rack

Power Supply Transformer

Temperature controller

Heat-Up Unit

The AC supply voltage to the Heat-up unit is as same as the main supply voltage stated

on name plate at the main body rear panel. This could be changed to one of those listed

below by resetting the tap of the transformer; however, this change is limited within

the 100 V or 200 V system only. For switching from 100 V to 200 V system or vice versa,

consult our Service Section.

100 V system 200 V system

(1) 100 VAC (5) 200 VAC

(2) 110 VAC (6) 220 VAC

(3) 115 VAC (7) 230 VAC

(4) 120 VAC (8) 240 VAC

(1) AC100V (5) AC200V

(2) AC110V (6) AC220V

(3) AC115V 100V system (7) AC230V 200V system

(4) AC120V (8) AC240V

Maintenance Manual

5-20/24

Procedure:

(1) Make sure to turn off the power supply with the main circuit breaker

switched off.

DANGER:Before starting the work, be sure to turn off themain circuit breaker.Turn down the lever of the main circuit breaker tothe OFF position. (Lock the lever setting with apadlock when the Lockout device is provided.)

(2) Pull out the Heat-up unit forward, and take out its cover.

(3) Change the connection for the input voltage to the terminal of necessary

voltage on the transformer.

(4) Replace the Heat-up unit cover and return the unit inside the body.

Maintenance Manual

5-21/24

The protection fuses are mounted on the fuse rack as below.

F1

F2

F3

F4

F5

F6

Type Rating/ Capacity

F1 Time rag fuse 0.3A 250V

F2 “ 0.2A 250V

F3 “ 0.2A 250V

F4 “ 1A 250V

F5 “ 6A 250V

F6 “ 0.3A 250V

Maintenance Manual

5-22/24

5.14 Temperature Controller

Temperature controller in the Heat-up unit is connected with RS-232C Interface

for the external control.

Control panel:

A RUN-STOP For RUN/STOP control in the manual operation.* To put the unit under the control of Host CPU, set this to“STOP”.

B SET For changing the setting temperature in the manualoperation.* The current digit of the setting temperature will startflickering.

C SHIFT For shifting the digit of the setting temperature in themanual operation (SET).

D TEMP. SET– For decrementing the current digit value of the settingtemp. at SET.

E TEMP. SET+ For incrementing the current digit value of the settingtemp. at SET.

Maintenance Manual

5-23/24

5.15 TTL Interface Board DIP Switch Setting

SW1 of the TTL interface board and SW1 - 3 on its SUB-board are used for the

logic setting of the TTL tester interface.

Maintenance Manual

5-24/24

－　

　＋

SW1

5.16 XY COORDINATOR/ CATEGORY Board DIP Switch Setting

DIP SW1 on XY COORDINATOR/CATEGORY board is used for setting the logics of the

coordinate data and category data.

bit Signal

1 XY0 - 9, Y0 - 9 OUT

SW1 2 SELECT( X or Y) IN

3 CATEGORYO～31 IN

4 ENABLE( grant forX,Y) IN

DIP switch ON/OFF setting (side view)

ON OFF

Positive Negative

XY0 -9, Y0 –9 OFF ON

SELECT OFF ON

CATEGORY0 - 31 OFF ON

ENABLE OFF ON

Maintenance Manual

6-1/6

6. Safety Measures6.1 EMO (EMERGENCY POWER OFF

(1) Performance of EMOIn an event that the power supply to the prober must be shut off immediately,EMERGENCY switch (EMO switch) provided on the main body front side canbe pushed. Once this switch has been pressed, it shuts off all the power supplyof the units except for the EMO circuit power supply hardware-wise. In order torecover from this condition, confirm that there are no troubles to each sectionand rotate EMO switch CW to release them, and then turn the switch ON.

(2) EMO hardware compositionThe EMO circuit is composed as shown next page.Once the EMO switch has been pressed makes every relating relay latched to

turns OFF, shutting off all of the power supply the units except for the EMO circuitpower supply.

(Notice): When ETM (Electrically assisted Testhead Manipulator) isoptionally installed, and once the EMOSW at the Prober is pressed it alsoshuts off the power supply of the ETM immediately. The recovery of ETM canbe accomplished by power-up using the front Power switch again.

Maintenance Manual

6-2/6

RELAY

RELAY

RELAY

RELAY

MAINBREAKER(ELB)

EMOPOWERSUPPLY

POWERCONTROLBOARD

CONTROLPOWER SUPPLY

DRIVINGPOWER SUPPLY

SERVODRIVERS

HEAT-UPCONTROLLER

MAINBREAKER(ELB)

ACSUPPLY

RELAY

EMOSWITCH

ACSUPPLY

MOTOR DRIVER

ETM

(3) Location of EMO SWThe standard EMO switch is located above the Power switched.Additional EMO switches may be attached for options as shown above.

Maintenance Manual

6-3/6

EMO Switch Location

Optional EMOswitch

Optional EMOswitch

EMO switch

Maintenance Manual

6-4/6

6.2 Interlock Configuration

(1) Performance of the interlocks

Under the interlocks, once any of the following sensors has turned on, moving

Chuck or Elevator stops immediately.

Chuck access door open sensor

Head stage open sensor Chuck stop

(or Ring-open sensor)

Loader cover open sensor Elevator stop

When this interlock has worked, the prober will error-stop; restart-up is

possible with Reset switch.

Loader cover sensor Chuck access door open sensor

Location of sensors

Head stage open sensor

Loader cover sensor Chuck access door open sensor

Maintenance Manual

6-5/6

(2) Hardware configuration of the interlocks

Shown as drawing below.

Chuck:

Chuck accessdoor opensensor

Head stage

open sensor

Ring opensensor PIO board

open

open

open

Pulse Generates

close

5CH PGENBoard

latch circuit

To motor driver

Pulse Generates

open

open

open close

To motor driver

latch circuit

LD PGENBoard

Loadercover opensensor

Maintenance Manual

6-6/6

6.3 Lockout Device Setting (Lockout Configuration)

The lockout configuration is for locking the main breaker lever on the rear of main

body with the provided lock cover.

For power-down, turn downward the breaker lever; for power-up turn it upward.

Before starting the maintenance works for the inside of the main body, attach the

lock cover to the main breaker with its lever turned down to OFF and apply a

padlock as shown below.

Remark: For a prober with ETM

Electricity is supplied to the prober and ETM separately and they have own

main breakers. At the maintenance of the inside of the main body or ETM,

make sure to turn off and lock both of the main breakers before starting the

work.

1 CAUT IONRisk o f e lec t r i c shock .D isconnec t a l l 2 sou rceso f supp ly p r io r se rv i c ing .

Maintenance Manual

7- 1/6

7. MAINTENANCE PARTS LIST

For maintenance, do not use any parts other than TOKYO SEIMITSU will provideas maintenance parts.

7.1 Rank A Parts

No. Name Spec. Maker Remark

1 Mini-ring fluorescent lamp 80A-DL Dentsu Ind. for visual microscope

2 Halogen lamp JCR/M12V20WH20-2 Philips E5 illumination

3 Demnum grease L-200 Daikin for θ-axis leadscrew, 50 g

4 Grease (ISOFLEX) NBU15 NOK for Z axis guide max./ F axis

leadscrews/LM guides

5 Clean grease LGU NSK for X,Y axis leadscrews

6 Clean grease AFF THK for X,Y axis /LM guides

7 Clean-type printing paper KPT230 “ 114×25×13

8 Chuck GND Cable FE02000-G005 ACCRETECH

9

10

11

12

13

14

15

16

17

18

19

20

Maintenance Manual

7- 2/6

7.2 Rank B Parts


1 Fan motor STD12A7HRPN Royal

2 Fan motor STD92A7RN Toyo

3 Sensor EE-SX670 Omron

4 “ EE-SX671 “

5 “ EE-SX672 “

6 “ PQ-02 Keyence Centering Sensor

7 “ PZ-51L Keyence Centering Sensor

8 Backlight Unit LQ0DDB5367 Sharp for LCD104V1DG21

9 Time rag fuse FST0034.5245 SCHURTER Standard accessory(10A)

10 “ FST0034.5239 “ Standard accessory(5A)

11 “ FST0034.5225 “ Standard accessory(1A)

12 Sensor E32-D12-8 Omron Upper overhang sensor

13 Amplifier E3X-H11 Omron Upper overhang sensor

14 Sensor FU-77 Keyence Lower overhang sensor

Pass-through

15 Amplifier FS-V21R Keyence Lower overhang sensor

Pass-through

16 Sensor FU-4FZ Keyence Lower overhang sensor

Reflection

17 Amplifier FS-V22R Keyence Lower overhang sensor

Reflection

18 Joystick TK-1008-JS-2 ACCRETECH

19 Flexible FA0079+80 ACCRETECH

20 Flexible FA0081+82 ACCRETECH

21 Flexible for drives FE01100-F153 ACCRETECH

22 Flexible for drives FE01100-F154 ACCRETECH

23

24

25

26

27

28

29

30

Maintenance Manual

7- 3/6

7.3 Rank C PartsNo. Name Spec. Maker Remark

1 Timing belt 258-3GT-6 Unitta Z axis

2 “ 1743GT-6 “ F axis

3 “ 73294X6 “ Transfer arm

4 “ 300-5M-9 “ Elevator

5 Pin cylinder CJPB6-5 SMC Chuck top pin driving

6 Cable bear 09.30-028-35-830P Captain Ind. Stage lead

7 Vacuum sensor E8CC-CN0C2B Omron Main body/Loader vacuum

8 Pressure sensor E8CC-10C Omron Main body air, PS10

9 Air cylinder BDA10X10 Koganei For Inner ring

10 Gas spring 30F1 Takachiho For Head stage

11 Solenoid valve PCS241-NB-D24SP-N1 Kuroda For Inner ring/Loader

12 Solenoid valve PCL241-NB-D24SP-N1 Kuroda For Chuck top pin/Loader

13 Rotary joint TLR4-M5 Koganei For Sub-chuck

14 Air cylinder CJ2B10-45-XB9 SMC For cassette lock

15 Air cylinder CY1B15H-220 SMC For Elevator 2

16 AC Servo motor 100 W TS4503N1841E100 Tamagawa Seiki X axis(UF200A/UF190B)

17 AC Servo motor 100 W TS4503N1842E100 “ Y axis(UF200A/UF190B)

18 Stepping motor PK545-A-C3 Oriental motor Z axis

19 “ CSD544-NA-A15 “ F axis

20 “ C7350-9015 “ θ-axis

21 “ C7350-9015 “ Transfer arm 1/2

22 “ C7351-9015 “ Sub-chuck rotation

23 “ PX244-02A “ Sub-chuck up/down

24 “ PH544HG2-NB-A10 “ Turn-table

25 “ A5115-9215M “ Elevator 1/2

26 AC Servo driver 100 W TA8110N212E915 Tamagawa Seiki X axis(UF200A)

27 AC Servo driver 100 W TA8110N212E916 Tamagawa Seiki Y axis(UF200A)

28 AC Servo driver 100 W TA8110N212E804 “ Y axis(UF190B)

29 AC Servo driver 100 W TA8110N212E805 Z axis(UF190B)

30 Stepping motor driver TD-5TM13T Tohan Denshi Z axis

31 Stepping motor driver CSD5814N Oriental (for Elevator2)

32 Stepping motor driver CSD58074N Oriental F / θ axis

33 TFT LCD module LQ104V1DG21 Sharp

34 Inverter CXA-M112-VJ TDK

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31 Switching power supply PAA300F-5XTSK Cosel

32 “ JWS10012/TSK Densei

33 “ JWS50-24/TSK “

34 “ EWS15-12 “

35 PAA300F-24-XTSK Cosel

36 FDD FD-05HGS-750 TEAC

37 HDD ST34520W SEAGATE

38 Fluorescent lamp starter T-HF2430 ACCRETECH For Alignment Camera Spec

39 MOD MCM3064SS Fujitsu

40 Vacuum pincette1 FM12011-0003 ACCRETECH

41 Vacuum pincette2 FM12011-0004 ACCRETECH

42 Touch Panel TK-02 ACCRETECH

43

44

45

46

47

48

49

50

Maintenance Manual

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7.4 Rank C Parts - Boards


1 CPU ADVME7507 Advanet

2 ITV COGNEX4300 Cognex

3 VGAC FA0132B/D/FA0312 ACCRETECH

4 PIO FA0143C + FA0144A “

5 TTL/GP-IB FA0146 + FA0037C “

6 5CH PGEN/Centronics FA0139B “

7 CAP SENSOR FA0111A “

8 68000 MPU AVME-115B TSK

9 LD.IO-1 FA0134A “

10 LD.PGEN FA0135B “

11 KB.CONT FA0142D “

12 KEYBOARD KEYBOARD-2 “

13 VIDEO I/F FA0067B “

14 RELAY-2 FA0131A(FE02003-F201-12 “

15 M.DRV FA0015E “

16 POWER CONT FA0348 “

17 VME POWER FA0313 “

18 FTRNS13 FA0105 “

19 FTRNS22 FA0043B “

20 FTRNS22 FA0043B “

21 LD.DRV FA0062A “

22 LD.SENS FA0061B “

23 PA.LED FA0024 “

24 PA.SENS FA0025A “

25 LD.SW FA0147A “

26 VGA I/F NL-RA01 SHARP

27 CN CONV FA0149A ACCHRETECH

28 5AX DRV FA0138A “

29

30

Maintenance Manual

7- 6/6

7.5 Rank C Parts - Option Boards


1 X/Y Coordinator FA0022C ACCRETECH

2 HEAT UP FA0065A ACCRETECH

3 ETM FA0133A ACCRETECH

4 PI-I/O AVME-340 Aval Data (for APC Spec.)

5 MPC DRV FA0228B ACCRETECH (for MPC Spec)

6

7

8

9

10

11

12

13

14

15

16

17

18

19

20

21

22

23

24

25

26

27

28

Maintenance Manual

8-1/25

8. TROUBLESHOOTING

Condition Possible cause ActionPower supply does not turnon. (The OFF switch lampdoes not light.)

• Electricity is not supplied. •Check the electricity supply.

• The main circuit breaker hastripped.

•Check the AC supply lines andinvestigate on the occurrence ofover-current or current leakage.

• The leakage breaker has worked •Check for leak of electricity.• F1 fuse has blown. •Replace the fuse.• The power-up circuit is defective. •Replace the circuit.• The circuit protection breaker on

POWER CONT board is OFF.•Check on the occurrence of over-

current and turn on the breaker.• POWER CONT board (FA0028B)

defective.•Replace POWER CONT board.

(OFF switch lamp lights up.) • POWER CONT board (FA0348)defective.

•Replace POWER CONT board.

• PIO board (FA0143C+FA0144A)defective.

•Replace PIO board.

• F2 fuse has blown. •Replace the fuse.• Power relay RL1 defective. •Replace Power relay RL1.

Maintenance Manual

8-2/25

Condition Possible cause ActionThe display does not show at • F3 fuse has blown. •Replace the fuse.all. (RUN lamp of MVME162 CPU board lights up.)

• 24 V power supply unit defective.(24 V is used for turning on theback-light.)

•Replace 24 V power supply unit.

• Switching power supply defective. •Replace Switching power supply.• Inverter defective. •Replace DC/AC inverter.• To the board in 4th slot of Control

rack, the video signal connector isnot connected.

• Connector CN62 on the side of themain body is not connected.

•Connect the video signalconnector.

• Color LCD unit defective. •Replace the color LCD.• KEY CONT board defective.

(Controlling the LCD I/F board)•Replace KEY CONT board.

•Rotate VR2 clockwise.

Maintenance Manual

8-3/25

Condition Possible cause ActionERR80INTERNAL PRINTER • The built-in printer faulty. •Replace the printer.

• The interface cable is notconnected.

•Connect the interface cable.

ERR81PAPER RUN OUT(INTERNAL PRINTER) !!

• Printing paper used up.• Wrong paper insertion. •Reset the paper roll correctly.

(Insert the paper end from thefront paper insert.)

ERR82INTERNAL PRINTER NOTREADY !!

ERR84PRINT TIMEOUT ERROR!!

ERR87EXTERNAL PRINTER NOTREADY

Maintenance Manual

8-4/25

Condition Possible cause ActionERR90VACUUM SUPPLYPRESSURE ERROR

• The vacuum supply tube is notconnected.

•Joint the vacuum supply tube.

ERR93AIR SUPPLY PRESSUREERROR

• The air supply tube is notconnected.

•Joint the compressed air supplytube.

ERR95VME RACK FAN SENSORERROR !!

ERR96MAIN FAN SENSORERROR

• A fan motor in the rear hasstopped.

•Replace the fan motor.

ERR97CONTROL RACK FANSENSOR ERROR

• A fan motor attached under thecontrol rack has stopped.

•Replace the fan motor.

Maintenance Manual

8-5/25

Condition Possible cause ActionERR100X AXIS OUT OF CONTROLERROR !!

• The Lissajous figure of the Moirescale is distorted, or its center isnot stable.

•Check the Moire scale (observethe Lissajous figure of X axis).Wipe clean the SUS scale.

•Correct the Lissajous figure.ERR101X AXIS RECOVERY ERROR • Servo driver defective. • Adjust the Servo driver; replace

it if necessary.ERR102X AXIS HARDWAREERROR (STOP TIME OUT)

• Servo driver defective. • Adjust the Servo driver; replaceit if necessary.

ERR103X AXIS HARDWAREERROR (LIMIT SENSORNOT SENSED)

• X axis limit sensor can not turnon.

• Replace the sensor.• Replace PC8 PIO board.

ERR104X AXIS HARDWAREERROR (ORIGIN NOTFOUND)

• Z phase of X Servo motor can notbe detected.

• Replace X Servo motor.• Replace PC11 PGEN board.

ERR105X AXIS HARDWAREERROR (UNABLE TO BEOUT FROM LIMIT)

• X axis limit sensor can not turnoff.

• Replace the limit sensor.• Replace PC8 PIO board.

ERR106X AXIS HARDWAREERROR (LIMIT SENSORMALFUNCTION)ERR107X AXIS HARDWAREERROR (DRIVE SYSTEM)

Maintenance Manual

8-6/25

Condition Possible cause ActionERR118X, Y AXIS HARDWAREERROR (STOP TIME OUT)

• In-position LED of the Servodriver has gone off.

• Position offset adjustment of theServo driver.

• The Servo driver faulty. ・ Adjust the Servo driver.・ Replace the Servo driver.

Maintenance Manual

8-7/25

Condition Possible cause ActionERR120Y AXIS OUT OF CONTROLERROR !!

• The Lissajous figure of the Moirescale is distorted, or its center isnot stable.

•Check the Moire scale (observethe Lissajous figure of Y axis).Wipe out the stain of SUS scale.

•Correct the Lissajous figure.ERR121Y AXIS RECOVERY ERROR • Servo driver defective. • Adjust the Servo driver; replace

it if necessary.ERR122Y AXIS HARDWAREERROR (STOP TIME OUT)

• Servo driver defective. • Adjust the Servo driver; replaceit if necessary.

ERR123Y AXIS HARDWAREERROR (LIMIT SENSORNOT SENSED)

• Y axis limit sensor can not turnon.


ERR124Y AXIS HARDWAREERROR (ORIGIN NOTFOUND)

• Z phase of Y Servo motor can notbe detected.

• Replace Y Servo motor.• Replace PC11 PGEN board.

ERR125Y AXIS HARDWAREERROR (UNABLE TO BEOUT FROM LIMIT)

• Y axis limit sensor can not turnoff.


ERR126Y AXIS HARDWAREERROR (LIMIT SENSORMALFUNCTION)ERR127Y AXIS HARDWAREERROR (DRIVE SYSTEM)

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8-8/25

Condition Possible cause ActionERR140Z AXIS OUT OF CONTROLERROR !!

• Z motor can not work.• Z motor encoder can not be read

correctly.

•Replace the motor.•Replace the Z motor driver.

ERR141Z AXIS OUT OF CONTROLRECOVERY ERROR

• PC 11 PGEN board faulty. • Replace PC 11 PGEN board.

ERR142Z AXIS HARDWAREERROR (STOP TIME OUT)


ERR143Z AXIS HARDWAREERROR (LIMIT SENSORNOT SENSED)

• Z axis limit sensor can not turnon.


ERR144Z AXIS HARDWAREERROR (ORIGIN NOTFOUND)

• Z phase of Z stepping motor cannot be detected.

• Replace Z stepping motor.• Replace PC 11 PGEN board.

ERR145Z AXIS HARDWAREERROR (UNABLE TO BEOUT FROM LIMIT)

• Z axis limit sensor can not turnoff.


ERR146Z AXIS HARDWAREERROR (LIMIT SENSORMALFUNCTION)ERR147Z AXIS HARDWAREERROR (DRIVE SYSTEM)

Maintenance Manual

8-9/25

Condition Possible cause ActionERR160THETA AXIS OUT OFCONTROL ERROR !!

• θ motor can not work. •Replace the motor.•Replace the θ motor driver.

ERR161THETA AXIS OUT OFCONTROL RECOVERYERROR(Timeout Stop)


ERR163THETA AXIS HARDWAREERROR (LIMIT SENSORNOT SENSED)

• θ axis limit sensor can not turnon.


ERR165THETA AXIS HARDWAREERROR (UNABLE TO BEOUT FROM LIMIT)

• θ axis limit sensor can not turnoff.


ERR166THETA AXIS HARDWAREERROR (LIMIT SENSORMALFUNCTION)ERR167THETA AXIS HARDWAREERROR (DRIVE SYSTEM)

Maintenance Manual

8-10/25

Condition Possible cause ActionERR180F AXIS OUT OF CONTROLERROR !!

• F motor can not work.• F motor encoder can not be read

correctly.

•Replace the motor.•Replace the F motor driver.

ERR181F AXIS OUT OF CONTROLRECOVERY ERROR

• PC 11 PGEN board faulty.• Chuck top pin up solenoid is not

operative.

• Replace PC 11 PGEN board.• Replace Chuck top pin up

solenoid.ERR182F AXIS HARDWAREERROR (STOP TIME OUT)


ERR183F AXIS HARDWAREERROR (LIMIT SENSORNOT SENSED)

• F axis limit sensor can not turnon.


ERR184F AXIS HARDWAREERROR (ORIGIN NOTFOUND)

• Z phase of F stepping motor cannot be detected.

• Replace F stepping motor.• Replace PC 11 PGEN board.

ERR185F AXIS HARDWAREERROR (UNABLE TO BEOUT FROM LIMIT)

• F axis limit sensor can not turnoff.


ERR186F AXIS HARDWAREERROR (LIMIT SENSORMALFUNCTION)ERR187F AXIS HARDWAREERROR (DRIVE SYSTEM)

Maintenance Manual

8-11/25

Condition Possible cause ActionERR201COMMAND FORMAT ERROR(COMMAND LENGTH) !!

• Undefined command data hascome to Loader.

• Re-install System program toHDD.

• Replace the main CPUboard.

• Replace PC 17 LD IO board.ERR202COMMAND FORMAT ERROR(UNDEFINED DATA)

• Ditto • Ditto

ERR203COMMAND NOT ACCEPTED(INIT. INFO. NOT RECEIVED) !!

• Without setting the initial infor-mation to Loader, an axis drivedemand has come.

• Does not occur in the normalsequence.

ERR204COMMAND NOT ACCEPTED(ARM 1 NOT INITIALIZED) !!

• The above is applicable to thosethrough ERR209.

ERR205COMMAND NOT ACCEPTED(ARM 2 NOT INITIALIZED) !!ERR206COMMAND NOT ACCEPTED(ELEVATOR 1 NOTINITIALIZED) !!ERR207COMMAND NOT ACCEPTED(ELEVATOR 2 NOTINITIALIZED) !!ERR208COMMAND NOT ACCEPTED(TURN TABLE NOTINITIALIZED)!!ERR209COMMAND NOT ACCEPTED(SUB-CHUCK NOTINITIALIZED) !!

Maintenance Manual

8-12/25

Condition Possible cause ActionERR220WAFER SENSE ERROR(WAFER THICKNESS) !!

• The determined wafer thicknessis over the limit.

• Readjust the alignment of thewafer sensor.

ERR221WAFER SENSE ERROR(DUPLICATED) !!

• From a slot to the next slot thelight path of the wafer sensor isinterrupted continuously.

• Check whether a slot doescontain 2 or more wafers.

• Readjust the wafer sensor.ERR222WAFER SENSE ERROR(PITCH) !!

• The slot inserting condition of awafer is not correct.

• A wafer is placed slantwise.

• Check the wafer insertingcondition of the cassette.

ERR223WAFER LOAD ERROR(LOAD POSITION) !!ERR224WAFER LOAD ERROR(CENTER NOTDETECTED)

• The wafer center can not bedetermined.

• Readjust the wafer centeringsensors.

ERR225WAFER LOAD ERROR(VACUUM) !!

• Transfer arm 1 can not pick upwafer.

• Check the performance of thesuction valve and the vacuumsensor of the arm.

Maintenance Manual

8-13/25

Condition Possible cause ActionERR226WAFER LOAD ERROR (NOWAFER IN SLOT) !!

• No wafers in the cassette. • Feed wafers to the cassette.

ERR227

ERR228WAFER LOAD ERROR (NOWAFER ON TRANSFERARM) !!

• Transfer arm can not take outwafer.

• The arm vacuum sensor can notdetect the wafer presence.

• Readjust the arm vacuumsensor.

ERR229WAFER LOAD ERROR(WAFER ON TRANSFERARM) !!

• Arm 1 vacuum sensor remains toON.


ERR230WAFER LOAD ERROR (NOWAFER ON SUBCHUCK) !!

• A wafer is not put on Sub-chuck.• Sub-chuck cannot hold wafer.

• Check Sub-chuck suction valveand the vacuum sensor.

ERR231WAFER LOAD ERROR(WAFER ON SUBCHUCK) !!

• Sub-chuck vacuum sensorremains to ON.


Maintenance Manual

8-14/25

Condition Possible cause ActionERR233WAFER UNLOAD ERROR(UNLOAD) !!

• At unloading, a wafer can not beinserted to a slot.

ERR235WAFER UNLOAD ERROR(WAFER IN SLOT) !!

• A wafer already exists in thetarget slot.

• Remove the wafer in the slot.

ERR236WAFER UNLOAD ERROR(NO WAFER ONTRANSFER ARM) !!ERR237WAFER UNLOAD ERROR(WAFER ON TRANSFERARM) !!ERR238WAFER UNLOAD ERROR(NO WAFER ONSUBCHUCK) !!

• The wafer exchange has failed.

ERR239WAFER UNLOAD ERROR(WAFER ON SUBCHUCK) !!

Maintenance Manual

8-15/25

Condition Possible cause ActionERR240PREALIGNMENT ERROR!! • Wrong setting on the wafer size. • Correct the data of the size.

• Prealignment sensor faulty. • Replace the prealignment sensor.ERR241TRANSFER ARM 1MOTOR!! (OUT OFCONTROL)

• Transfer arm 1 motor notworking.

• Replace the Arm1 motor.• Replace the motor driver.• Replace PC 18 LD. PGEN board.• Replace LD. DRV board.

ERR242TRANSFER ARM 1MOTOR!! (WAFER SAFESENSOR)

• A wafer has overhung from thecassette.

• Put back the wafer into thecassette.

ERR243TRANSFER ARM 1MOTOR!! (ZERO POINT)

• Transfer arm 1 has entered intothe origin sensor position.

• Positioning of the stepping motorhas deviated.

• Check the origin sensor status; ifit was incorrect, replace thesensor.

ERR244TRANSFER ARM 1MOTOR!! (CENTER NOTDETECTED)

• A wafer has overhung from thecassette so the prealignment isimpossible.

• Put back the wafer into thecassette.

Maintenance Manual

8-16/25

Condition Possible cause ActionERR246TRANSFER ARM 2MOTOR!!

• Transfer arm 2 motor faulty.• The driver defective

• Replace Transfer arm 2 motor.• Replace the motor driver.

(OUT OF CONTROL) • PC 18 LD. PGEN board faulty.• Circuit protector on LD. DRV has

tripped.

• Replace PC 18 LD. PGEN board.• Check whether an over-current

has flown with the motor.ERR247

ERR248TRANSFER ARM 2MOTOR!! (INSPECTIONTRAY OUT) • Inspection tray is pulled out. • Push in the tray.ERR249TRANSFER ARM 2MOTOR!! (ZERO POINT)

• Transfer arm 2 has entered intothe origin sensor position.

• The stepping motor position hasdeviated.

• Check the performance of theorigin sensor; if erroneous,replace the sensor.

Maintenance Manual

8-17/25

Condition Possible cause ActionERR251ELEVATOR 1 !! • Elevator 1 motor faulty.

• The motor driver defective.• Replace Elevator 1 motor.• Replace the motor driver.

(OUT OF CONTROL) • PC 18 LD. PGEN board faulty.• LD. DRV board defective.

• Replace PC 18 LD. PGEN board.• Replace LD. DRV board.

ERR254ELEVATOR 1 !!(ZERO POINT)

• Elevator 1 has entered into theorigin sensor.

• Check the performance of theorigin sensor; if erroneous,replace the sensor.

Maintenance Manual

8-18/25

Condition Possible cause ActionERR261TURN TABLE (OUT OFCONTROL) !!

• Turn table motor faulty.• The motor driver defective.• PC 18 LD. PGEN board faulty.• LD. DRV board defective.

• Replace the turn table motor.• Replace the motor driver.• Replace PC 18 LD. PGEN board.• Replace LD. DRV board.

ERR262TURN TABLE (ZEROPOINT) !!

• Turn table has entered into theorigin sensor.


• Check the performance of theorigin sensor; if erroneous,replace it.

ERR264SUBCHUCK UP/DOWN(OUT OF CONTROL) !!

• Sub-chuck up/down motor faulty.• PC 18 LD. PGEN board defective.• LD. DRV board defective.

• Replace the sub chuck motor.• Replace PC 18 LD. PGEN board.• Replace LD. DRV board.

ERR265SUBCHUCK UP/DOWN(ZERO POINT) !!

• Sub-chuck Up/down has enteredinto the origin sensor.


• Check the performance of theorigin sensor; if incorrect,replace it.

ERR267SUBCHUCK ROTATION(OUT OF CONTROL) !!

• Sub-chuck rotation motor faulty.• The motor driver defective.• PC 18 LD. PGEN board faulty.• LD. DRV board defective.

• Replace the rotation motor.• Replace the motor driver.• Replace PC 18 LD. PGEN board.• Replace LD. DRV board.

Maintenance Manual

8-19/25

Condition Possible cause ActionERR273ELEVATOR 1 LOCK ERROR • Elevator 1 cassette lock has been

released.• Re-mount the cassette on

Elevator 1.ERR275ELEVATOR 2 LOCK ERROR • Elevator 2 cassette lock has been

released.•Re-mount the cassette on

Elevator 2.

Maintenance Manual

8-20/25

Condition Possible cause ActionERR283TRANSFER ARM 1 FUSE(BLOWN OUT) !!

• Transfer arm 1 driving motorprotection circuit breaker hastripped.

• Check the occurrence of an over-current with the motor; at noproblem, turn on the circuitprotector CB5 on LD. DRVboard.

ERR285TRANSFER ARM 2 FUSE(BLOWN OUT) !!

• Transfer arm 2 driving motorprotection circuit breaker hastripped.

• Check the occurrence of an over-current with the motor; at noproblem, turn on the ciruitprotector CB3 on LD. DRVboard.

ERR287ELEVATOR 1 FUSE(BLOWN OUT) !!

• Elevator 1 driving motor protec-tion circuit breaker has tripped.


ERR289ELEVATOR 2 FUSE(BLOWN OUT) !!

• Elevator 2 driving motor protec-tion circuit breaker has tripped.


Maintenance Manual

8-21/25

Condition Possible cause ActionERR291TURNTABLE FUSE(BLOWN OUT) !!

• Turntable driving motor protec-tion circuit breaker has tripped.


ERR293SUBCHUCK UP/DOWNFUSE (BLOWN OUT) !!

• Sub-chuck up/down driving motorprotection circuit breaker hastripped.


ERR295SUBCHUCK ROTATIONFUSE (BLOWN OUT) !!

• Sub-chuck rotation motor protec-tion circuit breaker has tripped.


ERR298WAFER SIZE ERROR !! • The measured wafer size does not

correspond to the device data.• Correct the wafer size in the

device data.ERR299LOADER COMMANDRESPONSE CODE ERROR

Maintenance Manual

8-22/25

Condition Possible cause ActionERR300INITIALIZATION ERROR !!ERR301CHUCK VACUUM ERROR!! • Chuck vacuum pressure is too

low.• Check the pressure on the

vacuum sensor.Investigate some vacuumleakage.

ERR302ARM 1 VACUUM ERROR !! • Arm 1 vacuum pressure is too low. • Check the pressure on the


ERR303ARM 2 VACUUM ERROR !! • Arm 2 vacuum pressure is too low. • Check the pressure on the


ERR304LOADER EMERGENCYSTOP !!ERR305AIR SUPPLY PRESSUREERROR !!ERR306FRONT UNLOAD ERROR !!ERR307COMMAND NOTACCEPTED !!ERR308WAFER UNLOAD ERROR !!(VACUUM)ERR314DANGER!! WAFER OUT OFCASSETTE. PUSH INWAFER INNER PART OFCASSETTE

• At insertion of a wafer, its fulllength may have not entered.

• Malfunction of a wafer centersensor.

• Push in the wafer completely.Confirm that the wafer handlingis perfect at every point.Observe the performance of thewafer centering sensor.

• Adjust the wafer center sensor.

Maintenance Manual

8-23/25

Condition Possible cause ActionERR315WAFER LOAD/UNLOADERROR RECOVER ERROR(IMPOSSIBLE RECOVER) !!


•Adjust the wafer center sensor.

ERR316WAFER LOAD/UNLOADERROR RECOVER ERROR(VACUUM ERROR) !!


•Adjust the wafer center sensor.

ERR317TRANSFER ARM 2 MOTOR(CENTER NOTDETECTED)!!

• At insertion of a wafer, its fulllength may have not entered inthe cassette or tray.

• Push in the wafer completely.Confirm that the wafer handlingis perfect at every point.Observe the performance of thewafer centering sensor.

Maintenance Manual

8-24/25

Condition Possible cause ActionERR550REFERENCE CHUCKHEIGHT NOT FOUND !!

• Displacement sensor defective. • Replace Displacement sensor.

ERR553CHUCK EDGE NOTFOUND !!

• Displacement sensor defective. • Replace Displacement sensor.

ERR560LIGHT INTENSITY NOTSET WHILE CHUCKCENTER DETECTION !!

• The illumination brightness is notsuitable.

• The lamp has burned out.

• Adjust the brightness setting.

• Replace the lamp.ERR561CHUCK EDGE NOTDETECTED !!ERR562AUTO FOCUS ERROR !!ERR563REGISTERED MODEL NOTFOUND (MODEL IMAGEUNSUITABLE) !!

• The alignment model image isinappropriate.

• Retry the model registration.

ERR564SIMILAR MODELFOUND !!

• The alignment model image isinappropriate.

• Retry the model registration.

ERR565INSUFFICIENTCONTRAST OF IMAGEDATA

Maintenance Manual

8-25/25

Condition Possible cause ActionERR580CHUCK ACCESS DOOROPEN !!

• Chuck access door is open. • Close Chuck access door.

ERR581HEAD STAGE OPEN !! • Head stage is open. • Close Head stage.ERR582RING OPEN !! • Inner head stage ring is not

locked.• Lock Inner head stage ring.

ERR583EDGE SENSOR ON !!

Maintenance Manual

9-1/3

9. TROUBLESHOOTING FLOWCHART

[Power supply does not turn on]

When the power supply has been turned off with EMERGENCY switch, set the

main circuit breaker to OFF once and wait for about 10 seconds. Then reset it to

ON.

Maintenance Manual

9-2/3

[Display shows nothing]

ADVME7507LED

ReplaceADVME7507 board

Maintenance Manual

9-3/3

[X/Y Servo driver alarm]

Maintenance Manual

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10. CIRCUIT DIAGRAMS

The following circuit diagrams are attached.

• Main body block diagram

• FDD/HDD connection cables

• Main body motor driver connections

• Main body sensor flexible cable connections

• Main body motor flexible cable connections

• Main body solenoid/sensor connections

• Main body power supply unit connections

• Main body power supply diagram

• Tester interface

• VME mother-board

• Key board periphery block diagram

• Alignment circuit diagram

• Loader unit block diagram

• Loader power supply diagram

• Loader control diagram

• Loader sensor connections

• Loader solenoid connections

• Loader switch connections

• Elevator 1 sensor connections

• Elevator 1 motor connections

• Elevator 2 sensor connections

• Elevator 2 motor connections

• Operation unit connections

FULLY AUTOMATIC PROBER UF190B / UF200A - …ictest8.com/a/equipment/probe/2014/08/UF190B-200A maintenance... · FULLY AUTOMATIC PROBER. For ensure safe use of this equipment, make

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