Top Banner
Rapid optimisation techniques for thin-film materials and devices Robert Treharne Functional Thin Films 16 th October, Coventry @robtreharne slideshare.net/RobertTreharne
22

for thin-film materials and devices - vacuum-uk.org · AJA Phase II-J Multi-source RF sputtering system ... SnO2 TiO2 SiO2 Al2O3 Ta2O5 Nb2O5 V2O5 V2O3 ZrO2 ZnS CdTe ZnTe CdSe ZnSe

Mar 18, 2019

Download

Documents

dangphuc
Welcome message from author
This document is posted to help you gain knowledge. Please leave a comment to let me know what you think about it! Share it to your friends and learn new things together.
Transcript
Page 1: for thin-film materials and devices - vacuum-uk.org · AJA Phase II-J Multi-source RF sputtering system ... SnO2 TiO2 SiO2 Al2O3 Ta2O5 Nb2O5 V2O5 V2O3 ZrO2 ZnS CdTe ZnTe CdSe ZnSe

Rapid optimisation techniquesfor thin-film materials and devices

Robert TreharneFunctional Thin Films16th October, Coventry

@robtreharne

slideshare.net/RobertTreharne

Page 2: for thin-film materials and devices - vacuum-uk.org · AJA Phase II-J Multi-source RF sputtering system ... SnO2 TiO2 SiO2 Al2O3 Ta2O5 Nb2O5 V2O5 V2O3 ZrO2 ZnS CdTe ZnTe CdSe ZnSe

Rapid optimisation techniquesfor thin-film materials and devices

Robert TreharneFunctional Thin Films16th October, Coventry

@robtreharne

slideshare.net/RobertTreharne

Page 3: for thin-film materials and devices - vacuum-uk.org · AJA Phase II-J Multi-source RF sputtering system ... SnO2 TiO2 SiO2 Al2O3 Ta2O5 Nb2O5 V2O5 V2O3 ZrO2 ZnS CdTe ZnTe CdSe ZnSe

Rapid optimisation techniquesfor thin-film materials and devices

Robert TreharneFunctional Thin Films16th October, Coventry

@robtreharne

slideshare.net/RobertTreharne

Page 5: for thin-film materials and devices - vacuum-uk.org · AJA Phase II-J Multi-source RF sputtering system ... SnO2 TiO2 SiO2 Al2O3 Ta2O5 Nb2O5 V2O5 V2O3 ZrO2 ZnS CdTe ZnTe CdSe ZnSe

Outline

1) Capabilities

2) What I mean by “Combinatorial”

3) Case Study: Transparent Conductors

4) Other Applications

5) Other cool stuff

Page 6: for thin-film materials and devices - vacuum-uk.org · AJA Phase II-J Multi-source RF sputtering system ... SnO2 TiO2 SiO2 Al2O3 Ta2O5 Nb2O5 V2O5 V2O3 ZrO2 ZnS CdTe ZnTe CdSe ZnSe

AJA Phase II-JMulti-source RF sputtering systemZnOSnO2TiO2SiO2Al2O3

Ta2O5Nb2O5V2O5V2O3ZrO2

ZnSCdTeZnTeCdSeZnSe

CdSSb2Te3As2Te3

GeZnNbTeSn

AgTiAlCuBi

MgO

Page 7: for thin-film materials and devices - vacuum-uk.org · AJA Phase II-J Multi-source RF sputtering system ... SnO2 TiO2 SiO2 Al2O3 Ta2O5 Nb2O5 V2O5 V2O3 ZrO2 ZnS CdTe ZnTe CdSe ZnSe

Optical Characterisation● UV-VIS-IR (250 – 2000 nm): Shimadzu

● Variable Angle Ellipsometry: Woollam

● Both units have scanning capabilities

Page 8: for thin-film materials and devices - vacuum-uk.org · AJA Phase II-J Multi-source RF sputtering system ... SnO2 TiO2 SiO2 Al2O3 Ta2O5 Nb2O5 V2O5 V2O3 ZrO2 ZnS CdTe ZnTe CdSe ZnSe

Electrical Characterisation● Hall Effect – carrier conc & mobility

● 4PP – Sheet resistance – Scanning!

Page 9: for thin-film materials and devices - vacuum-uk.org · AJA Phase II-J Multi-source RF sputtering system ... SnO2 TiO2 SiO2 Al2O3 Ta2O5 Nb2O5 V2O5 V2O3 ZrO2 ZnS CdTe ZnTe CdSe ZnSe

Shhh! Don't say the C-word“Combinatorial” is sometimes a code term used to describe uncontrolled non-uniform deposition.

Page 10: for thin-film materials and devices - vacuum-uk.org · AJA Phase II-J Multi-source RF sputtering system ... SnO2 TiO2 SiO2 Al2O3 Ta2O5 Nb2O5 V2O5 V2O3 ZrO2 ZnS CdTe ZnTe CdSe ZnSe

Controlled Non-Uniformity● Profile from each gun described by 2D gaussian● Excellent control over deposition parameters● High run-to-run reproducibility● Can predict multi-gun profiles

Page 11: for thin-film materials and devices - vacuum-uk.org · AJA Phase II-J Multi-source RF sputtering system ... SnO2 TiO2 SiO2 Al2O3 Ta2O5 Nb2O5 V2O5 V2O3 ZrO2 ZnS CdTe ZnTe CdSe ZnSe

Case Study: Transparent Conductors● Essential materials for PV and consumer electronics● Combinatorial doping study: Si doped ZnO● Sample hundreds of compositions in a single sample● Mapping opto-electronic properties vs dopant composition● Extrapolation!

Page 12: for thin-film materials and devices - vacuum-uk.org · AJA Phase II-J Multi-source RF sputtering system ... SnO2 TiO2 SiO2 Al2O3 Ta2O5 Nb2O5 V2O5 V2O3 ZrO2 ZnS CdTe ZnTe CdSe ZnSe

Can do this in 1 day(that's a big deal)

Can also extract some fundamental physics

Page 13: for thin-film materials and devices - vacuum-uk.org · AJA Phase II-J Multi-source RF sputtering system ... SnO2 TiO2 SiO2 Al2O3 Ta2O5 Nb2O5 V2O5 V2O3 ZrO2 ZnS CdTe ZnTe CdSe ZnSe

Going deep!● Effective Mass – dependent on dopant conc.● Transport mechanisms: Scattering – new physical models!● Electronic structure: Shape of conduction band● ALL WITH ONE CONSISTENT SAMPLE!

Page 14: for thin-film materials and devices - vacuum-uk.org · AJA Phase II-J Multi-source RF sputtering system ... SnO2 TiO2 SiO2 Al2O3 Ta2O5 Nb2O5 V2O5 V2O3 ZrO2 ZnS CdTe ZnTe CdSe ZnSe

Further ApplicationsOptimising Thin-Film PV CdTe, CZTS, perovskites

Transparent Electronics ZnO TFTs

Page 15: for thin-film materials and devices - vacuum-uk.org · AJA Phase II-J Multi-source RF sputtering system ... SnO2 TiO2 SiO2 Al2O3 Ta2O5 Nb2O5 V2O5 V2O3 ZrO2 ZnS CdTe ZnTe CdSe ZnSe

Example: Cd(1-x)ZnxS layers for CdTe TFPV● Can investigate x = 0.1 – 0.7 in one device● Mapping performance with respect to x● Optimum x~0.6 identified● Improvement in Voc identified● Highly consistent data sets

Page 16: for thin-film materials and devices - vacuum-uk.org · AJA Phase II-J Multi-source RF sputtering system ... SnO2 TiO2 SiO2 Al2O3 Ta2O5 Nb2O5 V2O5 V2O3 ZrO2 ZnS CdTe ZnTe CdSe ZnSe
Page 18: for thin-film materials and devices - vacuum-uk.org · AJA Phase II-J Multi-source RF sputtering system ... SnO2 TiO2 SiO2 Al2O3 Ta2O5 Nb2O5 V2O5 V2O3 ZrO2 ZnS CdTe ZnTe CdSe ZnSe

Other StuffFilm S.T.A.R Thin-film optical database Multi-layer modelling Currently developing public webapp

Page 19: for thin-film materials and devices - vacuum-uk.org · AJA Phase II-J Multi-source RF sputtering system ... SnO2 TiO2 SiO2 Al2O3 Ta2O5 Nb2O5 V2O5 V2O3 ZrO2 ZnS CdTe ZnTe CdSe ZnSe

Perovskite!● Ellipsometry of perovskite film● n and k extracted● Multi-layer model to determine

optimum thickness for device

Page 21: for thin-film materials and devices - vacuum-uk.org · AJA Phase II-J Multi-source RF sputtering system ... SnO2 TiO2 SiO2 Al2O3 Ta2O5 Nb2O5 V2O5 V2O3 ZrO2 ZnS CdTe ZnTe CdSe ZnSe

EPSRC CDT in PhotovoltaicsStarts in November! 8m investment£ 7 University partners 65 PhD students Publically available resources

Page 22: for thin-film materials and devices - vacuum-uk.org · AJA Phase II-J Multi-source RF sputtering system ... SnO2 TiO2 SiO2 Al2O3 Ta2O5 Nb2O5 V2O5 V2O3 ZrO2 ZnS CdTe ZnTe CdSe ZnSe

Rapid optimisation techniquesfor thin-film materials and devices

Robert TreharneFunctional Thin Films16th October, Coventry

@robtreharne

slideshare.net/RobertTreharne