FRAUNHOFER INSTITUTE FOR SOLAR ENERGY SYSTEMS ISE AUTOMATED WAFER INSPECTION AND QUALITY CONTROL In order to fabricate solar cells cost- effectively, it is important to produce high- efficiency cells with the utmost process stability and minimum process variation. Not only the fabrication process is key here, the electrical and mechanical excellence of the wafers used is equally important. The quality of multicrystalline wafer materials is particularly susceptible to variation. Poor quality wafers should be identified and discarded at an early stage in the process to avoid unnecessary costs. Fraunhofer ISE uses modern, automated inline metrology to collect and analyze quality data for each wafer. We can test, sort and assess the quality of wafers at any stage of production (as-cut, diffused, passivated, etc.) automatically and with high throughput rates. We offer the following services to wafer, cell and measuring instrument manufacturers: n materials assessment as standard service n customization of wafer rating models to match client-specific cell processes n transfer of wafer rating models to client PL measurement systems Automated Inspection System An efficient tool from Hennecke Systems is the core of Fraunhofer ISE’s Automated Wafer Inspection System (AWIS). It com- prises an extensive metrology portfolio for characterizing the geometric, optical, and electrical properties of wafers, and allows quality data to be collected for individual samples in large wafer batches. At the core of our measurement system is a photolu- minescence imaging module, which allows optimization potential to be identified in partially processed wafers. 1 Automated Wafer Inspection System at Fraunhofer ISE. 2 The system is capable of sorting wafers using predefined algorithms or measurement results. Fraunhofer Institute for Solar Energy Systems ISE Heidenhofstr. 2 79110 Freiburg Germany Silicon Photovoltaics – Metrology and Production Control Dr Stefan Rein Phone +49 761 4588-5271 Wafer Analysis Dr Jonas Haunschild Phone +49 761 4588-5563 [email protected]www.ise.fraunhofer.de 09-750-16 1 2
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Flyer: Automated Wafer Inspection and Quality Control · FRAUNHOFER INSTITUTE FOR SOlAR ENERgy SySTEmS ISE AUTOMATED WAFER INSPECTION AND QUALITY CONTROL In order to fabricate solar
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F R A U N H O F E R I N S T I T U T E F O R S O l A R E N E R g y S y S T E m S I S E