Fluid Components for Small, Smart, Sampling Systems Kevin Mracek.

Fluid Components for Small, Fluid Components for Small, Smart, Sampling Systems Smart, Sampling Systems

Kevin Mracek

AgendaAgenda• Requirements for Fluid Components used in

Small, Smart Systems• Components Currently Available

· Diaphragm Valves· T2 Series· Face Seal Fitting· Weld Fittings· Regulators· Integrated Gas Components

Requirements for Fluid Components Requirements for Fluid Components used in Small, Smart Systemsused in Small, Smart Systems

• Smaller/More Compact

• Cleaner (Accuracy)

• More Reliable

• Easily Automated

• Modular

Diaphragm Diaphragm ValvesValves

Features/Benefits• Small Surface Area

• High Reliability

• No Packing to Contaminate System Fluid

• Low Internal Volume

T2 SERIEST2 SERIESPNEUMATICALLY ACTUATED VALVESPNEUMATICALLY ACTUATED VALVES

CommonBleed / ventCommon

Bleed / vent

CommonOutlet

CommonOutlet

InletInletInletInletInletInletCommon

OutletCommon

Outlet

Open ClosedRR

T2B1T2B1Three Module NetworkThree Module Network

Features/Benefits

• No Cross Contamination

• Reliable Valve Function

• No Dead Volume

• Compact Design

• Low Internal Volume

• Ease of Installation

VCRVCR®®

Features/Benefits

• All-metal seals

• Eliminate crevices around tubing

• Low Dead Volume

• Zero Clearance Component Removal

• Optional Ultra-High-Purity

Features/Benefits• Boreline Seal: Reduces

entrapment zones

• Anti-Twist Design

• All the features of the standard VCR ®

““S” Type VCRS” Type VCR®®

MICRO-FITMICRO-FIT®®

Features/Benefits• Compact Design

· Allows Close Component Spacing for tubing systems

• Automatic Tube Welding

• Smooth Surface Transitions

• Eliminates Crevices Around Tubing

L-15

HF RegulatorHF RegulatorFeatures/Benefits• Half the Size of

Conventional Regulators

• Low Supply-Pressure Effect

• Low Droop

• High Purity Design

Manifold layer

Substrate layer

Surface mount layer

Bridge Block

igcigc-I -I Components: Simple Components: Simple System IntegrationSystem Integration

Features/Benefits• Modular Design

• Easy Replacement of Valves

• Smaller Footprint

• All Metal Seals to Atmosphere

• Variety of Surface-Mount Components Available

• Ultra High Purity

igcigc -II -II