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Embedded Package Technologies Austin CTEA May 2017 Mark Gerber Director, Engineering/Tech PromotionFlip Chip/Adv. Interconnect CT Chiu aEASI ChienFan Chen SESUB ASE Global Inc. May 2017
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Embedded Package Technologies Austin CTEA May … Package Technologies Austin CTEA May 2017 Mark Gerber ... Interconnect Evolution ... Packaging interconnect technology has evolved

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Page 1: Embedded Package Technologies Austin CTEA May … Package Technologies Austin CTEA May 2017 Mark Gerber ... Interconnect Evolution ... Packaging interconnect technology has evolved

Embedded Package TechnologiesAustin CTEA May 2017 Mark Gerber

Director, Engineering/Tech Promotion‐Flip Chip/Adv. Interconnect

CT Chiu ‐ aEASIChien‐Fan Chen ‐ SESUB

ASE Global Inc.May  2017

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© 2015 ASE Group. All rights reserved. 1ASE Global Confidential ProprietaryCTEA/SMTA/IMAPS Austin May 2017CTEA/SMTA/IMAPS Austin May 2017

Contents

1

Interconnect Evolution & ApplicationsEmbedded Packaging Application and OptionsAdvantages of Embedded PackagingSESUB – OverviewaEASI – OverviewSummary

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© 2015 ASE Group. All rights reserved. 2ASE Global Confidential ProprietaryCTEA/SMTA/IMAPS Austin May 2017CTEA/SMTA/IMAPS Austin May 2017 2

Package Interconnect Evolution

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© 2015 ASE Group. All rights reserved. 3ASE Global Confidential ProprietaryCTEA/SMTA/IMAPS Austin May 2017CTEA/SMTA/IMAPS Austin May 2017

Die Embedding Applications & Options

Embedded Packaging

Power/Analog Devices

SiP Module

SolutionsBluetooth/Wifi

Modules

Substrate Based Embedding‐ Driver‐ Size/Performance

Hybrid Substrate/Lead‐frame Embedding ‐ Driver ‐ Power/Thermal/Performance

Fan Out Based Embedding (Chip First/Last)‐ Driver‐ Die Size/Performance

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© 2015 ASE Group. All rights reserved. 4ASE Global Confidential ProprietaryCTEA/SMTA/IMAPS Austin May 2017CTEA/SMTA/IMAPS Austin May 2017

uPower Module

IPM &SMPS

IGBT HousingModule

Embedded Inductor & Capacitors(<40V, <10A)

(e. g. Step-Down, Buck-Boost, LED Drivers & Battery Chargers)

Multichip as IGBT + Diode + HVIC + LVIC(<600V, <30A)

for AC/DC converter in white goods,Industrial motors Etc.

BGA / LGA Module

High Reliability / High Power Module(600V~1200V / 1200V~3500V, Upto 100Kw)

DC/DC Converter / DC-AC Inverter in automotive, (H)EV, Power Train etc.

IPM : Intelligent Power ModuleSMPS : Switching Mode Power Supply

Housing Module

DIP (Dual In-line PKG) IPM

4

Power Packaging Examples

Multichip modules(<220V, <20A)

for AC/DC converter in white goods,Industrial motors Etc.

Mid-Power Modules with Cu-clip & Al wedge bond

ChipChip

Mid-Power Module

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© 2015 ASE Group. All rights reserved. 5ASE Global Confidential ProprietaryCTEA/SMTA/IMAPS Austin May 2017CTEA/SMTA/IMAPS Austin May 2017 5

Benefits of Embedded Packaging

Miniaturization & Design Flexibility‐ Embedded chip enables more space for other components or shrinks overall solution‐ Design flexibility now shifts from 2D to 3D

Improved Thermal & Electrical Thermal Performance‐ Shorter interconnections reduce parasitics ‐minimizes distortion and power loss‐ Lower electrical & thermal resistivity in package improves power performance

Improved Reliability and mechanical stability‐ High mechanical system stability due to stable Cu interconnections.

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© 2015 ASE Group. All rights reserved. 6ASE Global Confidential ProprietaryCTEA/SMTA/IMAPS Austin May 2017CTEA/SMTA/IMAPS Austin May 2017

Electrical Considerations of Embedding

6

PIERS Proceedings, Moscow, Russia, August 2009

QFN Package Parasitic ExampleCircuit Parasitic Example

IEEE Power Electronics Magazine, 2015 Dec

Embedded Packaging Reduces Parasitics Through:‐ Shorter Connections (Example ‐ Wire Bond Elimination)‐ Shorter Distance Between Components‐ Passives closer to Chip Pads‐ Fewer Capacitance Areas

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© 2015 ASE Group. All rights reserved. 7ASE Global Confidential ProprietaryCTEA/SMTA/IMAPS Austin May 2017CTEA/SMTA/IMAPS Austin May 2017

Understanding Ohms Law for Packaging Ohm’s Law ‐ Power Loss = Current Squared x Resistance(Double the Current give you 4x the Power Loss)

Physical Explanation – The voltage difference along a wiredepends on the current – More current flowing withresistance mean more voltage (pressure of electricity ifyou like) is built up.

Practical Explanation – Power measuredin watts is equal to I x R along the path ofcircuit. If you keep resistance small, youminimize power loss as HEAT!!

**Physics Forum 2008

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© 2015 ASE Group. All rights reserved. 8ASE Global Confidential ProprietaryCTEA/SMTA/IMAPS Austin May 2017CTEA/SMTA/IMAPS Austin May 2017

Overview‐Embedded Package Solutions

SESUB‐ Semiconductor Embedded In Substrate

aEASI –Advanced Embedded Active System Integration

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© 2015 ASE Group. All rights reserved. 9ASE Global Confidential ProprietaryCTEA/SMTA/IMAPS Austin May 2017CTEA/SMTA/IMAPS Austin May 2017

SESUB – Semiconductor Embedded in Substrate

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© 2015 ASE Group. All rights reserved. 10ASE Global Confidential ProprietaryCTEA/SMTA/IMAPS Austin May 2017CTEA/SMTA/IMAPS Austin May 2017

What’s SESUB ?SESUB = Semiconductor Embedded in SUBstrate

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© 2015 ASE Group. All rights reserved. 11ASE Global Confidential ProprietaryCTEA/SMTA/IMAPS Austin May 2017CTEA/SMTA/IMAPS Austin May 2017

Product Portfolio Examples 

SESUB (Semiconductor Embedded in SUBstrate)

S‐SESUB (Simplified Semiconductor Embedded in SUBstrate)

4 Metal layers

Total thickness : 300 um typically

Core thickness : 115 um typically

Die thickness : 50um min.

IC ratio (die/substrate) : 15 ~70%

Production: Available

(Max 12x12 mm2 size experienced)

2 Metal layers / Cavity Core

Total thickness : 250um typically

Core thickness : 160 um typically

Die thickness : 100um Typically

IC ratio (die/substrate) : 30% max.

Production: Available

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© 2015 ASE Group. All rights reserved. 12ASE Global Confidential ProprietaryCTEA/SMTA/IMAPS Austin May 2017CTEA/SMTA/IMAPS Austin May 2017

SESUB Key Features

Die

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© 2015 ASE Group. All rights reserved. 13ASE Global Confidential ProprietaryCTEA/SMTA/IMAPS Austin May 2017CTEA/SMTA/IMAPS Austin May 2017 13

Application Space for SESUB – Some Examples

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© 2015 ASE Group. All rights reserved. 14ASE Global Confidential ProprietaryCTEA/SMTA/IMAPS Austin May 2017CTEA/SMTA/IMAPS Austin May 2017

aEASI – Power Embedding

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© 2015 ASE Group. All rights reserved. 15ASE Global Confidential ProprietaryCTEA/SMTA/IMAPS Austin May 2017CTEA/SMTA/IMAPS Austin May 2017

What’s a‐EASI ?

Leverages a Mature Organic Substrate Process Flow Modified to Meet High Power Applications Good Current Capability‐ ~60A (Integrated Power Stage Example), ~ 1.9W/mm2  300um thick Copper Heat Spreader/Electrical Pad (Back of Die) Copper Lines ~ 32um Thick for Low Resistivity Deep Full Filled Vias to Die ~ 130um Diam Ultra Low Resistivity Die Attach Interface

aEASI = Advanced Embedded Active System Integration

P1 Example‐Prod Start in 2014Thermal HS/

EMI Shield

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© 2015 ASE Group. All rights reserved. 16ASE Global Confidential ProprietaryCTEA/SMTA/IMAPS Austin May 2017

aEASI Product Examples

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© 2015 ASE Group. All rights reserved. 17ASE Global Confidential ProprietaryCTEA/SMTA/IMAPS Austin May 2017

aEASI Package Portfolio

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© 2015 ASE Group. All rights reserved. 18ASE Global Confidential ProprietaryCTEA/SMTA/IMAPS Austin May 2017

Deep Via (aspect ration ~1.1)Via on Die pad

(50um min in Via bottom)Thin Die (~50um)

Thick Cu (32um)Small via (Diameter = 70um)

A‐EASI Example Cross Section – Integrated Power Stage 

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© 2015 ASE Group. All rights reserved. 19ASE Global Confidential ProprietaryCTEA/SMTA/IMAPS Austin May 2017

aEASI Package to Die Interconnect Highlights

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© 2015 ASE Group. All rights reserved. 20ASE Global Confidential ProprietaryCTEA/SMTA/IMAPS Austin May 2017

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© 2015 ASE Group. All rights reserved. 21ASE Global Confidential ProprietaryCTEA/SMTA/IMAPS Austin May 2017CTEA/SMTA/IMAPS Austin May 2017

aEASI P2

Bottom ViewAg SinteringPassives

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© 2015 ASE Group. All rights reserved. 22ASE Global Confidential ProprietaryCTEA/SMTA/IMAPS Austin May 2017CTEA/SMTA/IMAPS Austin May 2017

P2 BGA Reliability Summary  4.

0 m

m

4.0 mm

Bottom

Side View

22

Top

Key information   :  Size : 4.0X 4.0 +/‐ 0.1 mm , TH = 0.35 +/‐ 0.040 mm  Ball  count : 24 ( pitch: 0.5 mm) Blind Via : 0.085 mm T/S : 60/60  Cavity lead frame 

Test Description  Abbr Conditon  Readout  Result

PrecondioningAEC‐Q100 PC*

MSL3MSL Moisture soaking330℃/60%RH

Bake 125°C 24HrsMoisture Soak 168 Hrs3x Reflow (265°C+(0/‐5))

Pass 

100hrs  Pass 200hrs  Pass 500 Cycles Pass 1000 Cycles  Pass1500 Cycles  Pass1700 cycles Pass2000Cycles  Pass500 hrs Pass1000hrs  Pass1500hrs Pass2000hrs Pass

HTSTHTSTAEC‐Q100 Grade 0 150℃

"‐65~150℃

HAST AEC‐Q100

HAST 130℃/85%RH 33.3PSIA

TemperatureCyclingAEC‐Q100 Grade 0

TCT

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© 2015 ASE Group. All rights reserved. 23ASE Global Confidential ProprietaryCTEA/SMTA/IMAPS Austin May 2017CTEA/SMTA/IMAPS Austin May 2017

P2 QFN 5.

0 m

m

5.0 mm

Bottom

Side ViewTop

Key information   :  Size : 5.0X 5.0 +/‐ 0.1 mm , TH = 0.305 +/‐ 0.040 mm  Lead  count : 20 Pin (Lead pitch: 0.735/ 0.8mm) Blind Via : 0.06 mm T/S : 40/40  Laser marking on SM  Cavity lead frame  Passive/Active integrate on top is possible

Test Description  Abbr Conditon  Readout  ResultPrecondioning J‐A113/J‐020 PC*

MSL3 MSL Moisture soaking3 30℃/60%RH

Bake 125°C 24HrsMoisture Soak 168 Hrs3x Reflow (265°C+(0/‐5))

Pass 

100hrs  Pass 200hrs  Pass 500 Cycles Pass 1000 Cycles  Pass1500 Cycles  Pass1700 cycles Pass2000Cycles  Pass500 hrs Pass1000hrs  Pass

Temperature Cycling JESD22‐A104

TCT "‐65~150℃

HTST JESD22‐A103‐B

HTST 150℃

HAST J‐ESDD22‐A118

HAST 130℃/85%RH 33.3PSIA

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© 2015 ASE Group. All rights reserved. 24ASE Global Confidential ProprietaryCTEA/SMTA/IMAPS Austin May 2017CTEA/SMTA/IMAPS Austin May 2017 24

Electrical Performance Comparison

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© 2015 ASE Group. All rights reserved. 25ASE Global Confidential ProprietaryCTEA/SMTA/IMAPS Austin May 2017

Thermal Performance

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© 2015 ASE Group. All rights reserved. 26ASE Global Confidential ProprietaryCTEA/SMTA/IMAPS Austin May 2017CTEA/SMTA/IMAPS Austin May 2017

Summary Packaging interconnect technology has evolved and for the next level of minaturization

and performance enhancement, embedded packaging will be a key enabler.

Bluetooth/Wifi modules, Power Analog Devices and new SiP Modules are leveraging thistechnology to enable better size, electrical and thermal performance.

Embedding Package solutions such as SESUB and aEASI are available embedding solutionsthat have proven benefits for low and high power analog, digital and RF products.

ASE is the leader in System in Package/System in Module packaging and embedding package technology is a key tool to further enable the next generation of high performance products.

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© 2015 ASE Group. All rights reserved. 27ASE Global Confidential ProprietaryCTEA/SMTA/IMAPS Austin May 2017CTEA/SMTA/IMAPS Austin May 2017