ELECTRICAL POROUS SILICON MICROARRAY ELECTRICAL POROUS SILICON MICROARRAY FOR FOR DNA HYBRIDIZATION DETECTION DNA HYBRIDIZATION DETECTION M. Archer*, D. Persaud**, K. D Hirschman**, M. M. Archer*, D. Persaud**, K. D Hirschman**, M. Christophersen* Christophersen* and P. M Fauchet* and P. M Fauchet* *Center for Future Health and Departments of Biomedical *Center for Future Health and Departments of Biomedical Engineering and Electrical and Computer Engineering, Engineering and Electrical and Computer Engineering, University of Rochester, Rochester, NY University of Rochester, Rochester, NY **Departments of Microelectronic Engineering and Materials **Departments of Microelectronic Engineering and Materials Science & Engineering, Rochester Institute of Technology, Science & Engineering, Rochester Institute of Technology, Rochester, NY Rochester, NY Acknowledged support by the Infotonics Technology Center Acknowledged support by the Infotonics Technology Center (ITC) (ITC)
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ELECTRICAL POROUS SILICON MICROARRAY FOR DNA HYBRIDIZATION DETECTION M. Archer*, D. Persaud**, K. D Hirschman**, M. Christophersen* and P. M Fauchet* *Center.
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ELECTRICAL POROUS SILICON ELECTRICAL POROUS SILICON MICROARRAY FOR MICROARRAY FOR
DNA HYBRIDIZATION DETECTIONDNA HYBRIDIZATION DETECTION
M. Archer*, D. Persaud**, K. D Hirschman**, M. Christophersen*M. Archer*, D. Persaud**, K. D Hirschman**, M. Christophersen*and P. M Fauchet*and P. M Fauchet*
*Center for Future Health and Departments of Biomedical Engineering *Center for Future Health and Departments of Biomedical Engineering and Electrical and Computer Engineering, University of Rochester, and Electrical and Computer Engineering, University of Rochester,
Rochester, NYRochester, NY
**Departments of Microelectronic Engineering and Materials Science & **Departments of Microelectronic Engineering and Materials Science & Engineering, Rochester Institute of Technology, Rochester, NYEngineering, Rochester Institute of Technology, Rochester, NY
Acknowledged support by the Infotonics Technology Center (ITC)Acknowledged support by the Infotonics Technology Center (ITC)
OUTLINEOUTLINE
Motivation Background Sensing Element Device Integration Electrical Characteristics Conclusions
Porous Silicon (PSi) is an excellent sensor material Large surface area to volume ratio Electrical properties sensitive to surface charge Effective medium host
PSi-based sensors Sensitive to chemical infiltration Label-free detection of DNA hybridization in real time Reduction to micro-scale dimensions
Electrically addressable PSi biosensor microarrays Compatible with silicon process technology Potential integration with microelectronics &
microfluidics
POROUS SILICONPOROUS SILICON
Chemical oxidation:H2O2 treatment for 24hrs • hydrophylic internal surface• electrical isolation of pores