A comprehensive study of different gases in inductively coupled plasma torch operating at one atmosphere Sangeeta B. Punjabi, N. K. Joshi, H. A. Mangalvedekar, B. K. Lande, A. K. Das et al. Citation: Phys. Plasmas 19, 012108 (2012); doi: 10.1063/1.3676598 View online: http://dx.doi.org/10.1063/1.3676598 View Table of Contents: http://pop.aip.org/resource/1/PHPAEN/v19/i1 Published by the American Institute of Physics. Related Articles On the dynamics of the space-charge layer inside the nozzle of a cutting torch and its relation with the “non- destructive” double-arcing phenomenon J. Appl. Phys. 110, 083302 (2011) Plasma-enhanced gasification of low-grade coals for compact power plants Phys. Plasmas 18, 104505 (2011) Reactive hydroxyl radical-driven oral bacterial inactivation by radio frequency atmospheric plasma Appl. Phys. Lett. 98, 143702 (2011) Microwave N2–Ar plasma torch. I. Modeling J. Appl. Phys. 109, 023301 (2011) Pressure and arc voltage coupling in dc plasma torches: Identification and extraction of oscillation modes J. Appl. Phys. 108, 043304 (2010) Additional information on Phys. Plasmas Journal Homepage: http://pop.aip.org/ Journal Information: http://pop.aip.org/about/about_the_journal Top downloads: http://pop.aip.org/features/most_downloaded Information for Authors: http://pop.aip.org/authors
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Effect of Ambient Pressure on the Axial Behavior of $ \hbox{Ar}{-}\hbox{H}_{2}$ Transferred Thermal Arc-Plasma Column
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A comprehensive study of different gases in inductively coupled plasmatorch operating at one atmosphereSangeeta B. Punjabi, N. K. Joshi, H. A. Mangalvedekar, B. K. Lande, A. K. Das et al. Citation: Phys. Plasmas 19, 012108 (2012); doi: 10.1063/1.3676598 View online: http://dx.doi.org/10.1063/1.3676598 View Table of Contents: http://pop.aip.org/resource/1/PHPAEN/v19/i1 Published by the American Institute of Physics. Related ArticlesOn the dynamics of the space-charge layer inside the nozzle of a cutting torch and its relation with the “non-destructive” double-arcing phenomenon J. Appl. Phys. 110, 083302 (2011) Plasma-enhanced gasification of low-grade coals for compact power plants Phys. Plasmas 18, 104505 (2011) Reactive hydroxyl radical-driven oral bacterial inactivation by radio frequency atmospheric plasma Appl. Phys. Lett. 98, 143702 (2011) Microwave N2–Ar plasma torch. I. Modeling J. Appl. Phys. 109, 023301 (2011) Pressure and arc voltage coupling in dc plasma torches: Identification and extraction of oscillation modes J. Appl. Phys. 108, 043304 (2010) Additional information on Phys. PlasmasJournal Homepage: http://pop.aip.org/ Journal Information: http://pop.aip.org/about/about_the_journal Top downloads: http://pop.aip.org/features/most_downloaded Information for Authors: http://pop.aip.org/authors
A comprehensive study of different gases in inductively coupled plasmatorch operating at one atmosphere
Sangeeta B. Punjabi,1,2,a) N. K. Joshi,3 H. A. Mangalvedekar,1 B. K. Lande,1 A. K. Das,4
and D. C. Kothari21Electrical Engineering Department, V. J.T.I, Matunga, Mumbai 400019, India2Department of Physics, University of Mumbai, Kalina, Santacruz(E) 400098, India3Faculty of Engineering and technology, MITS, lakshmangarh, (Sikar), Rajasthan 332311, India4Laser and Plasma Technology Division, BARC, Mumbai 400085, India
(Received 17 May 2011; accepted 17 November 2011; published online 19 January 2012)
A numerical study is done to understand the possible operating regimes of RF-ICP torch (3 MHz,
50 kW) using different gases for plasma formation at atmospheric pressure. A two dimensional
numerical simulation of RF-ICP torch using argon, nitrogen, oxygen, and air as plasma gas has been
investigated using computational fluid dynamic (CFD) software FLUENTVC
. The operating parameters
varied here are central gas flow, sheath gas flow, RF-power dissipated in plasma, and plasma gas.
The temperature contours, flow field, axial, and radial velocity profiles were investigated under
different operating conditions. The plasma resistance, inductance of the torch, and the heat
distribution for various plasma gases have also been investigated. The plasma impedance of ICP
torch varies with different operating parameters and plays an important role for RF oscillator design
and power coupling. These studies will be useful to decide the design criteria for ICP torches required
for different material processing applications. VC 2012 American Institute of Physics.
decreases. Therefore, the combined effect of both the fac-
tors leads to increase in plasma resistance. For oxygen
plasma, the effect of temperature is more so plasma resist-
ance decreases as power is increased.
As the power increases, plasma volume increases due to
which the cross-sectional area of induced current
increases, and hence, there is less flux leakage between the
plasma and the coil. Therefore, inductance of the plasma
decreases, and therefore, inductance of the torch for argon,
air, and nitrogen decreases. For oxygen, the plasma vol-
ume slightly decreases with power and hence the torch in-
ductance (Ltorch) increases from 6.02 micro H to 6.04
micro H. This should be verified with experimental result.
� When central and sheath gas is varied keeping plasma gas
flow constant, it was seen that the plasma volume radially
shrinks due to convective cooling. The maximum tempera-
ture at the axis shows that for argon and nitrogen plasma, it
does not change noticeably. However, in oxygen and air
plasma, the axial temperature shows noticeable variation
with central and sheath gas variation. The radial temperature
variation shows that for 5 lpm as central gas, the argon, air,
and oxygen plasma retract from the axis of the torch. This
result could be useful for reactant injection probe located at
the centre of the torch as the temperature is less than 600 K.
Similarly, when central gas flow rate is 3 lpm, air and oxygen
plasma gas can be used for reactant injection. This could be
an important criteria for material processing.FIG. 33. (Color online) Radial temperature for air plasma at different flow
rates.
FIG. 32. (Color online) Radial temperature for oxygen plasma at different
flow rates.
012108-11 Study of different gases in inductively coupled plasma torch Phys. Plasmas 19, 012108 (2012)
ACKNOWLEDGMENT
The authors are thankful to Dr. L. M. Gantayet, Director,
Beam Technology Development Group, for his support during
the course of this work. This work was made possible through
continuing research grants from BRNS. The fellowship given
by B.R.N.S. to S.B.P. during the course of this work is grate-
fully acknowledged.
1T. B. Reed, J. Appl. Phys. 32, 821 (1961).2H. U. Eckert, High Temp. Sci. 6, 99 (1974).3D. Bernadi, V. Colombo, E. Ghedini, and A. Mentrelli, Pure App. Chem.
77, 359 (2005).4F. B. Vurzel and L. S. Polak, Khim.Vys. Energ. 1, 268 (1967).5M. I. Boulos, High Temp. Mat. Process. 1, 17 (1997).6T. G. Owano and C. H. Kruger, Plasma Chem. Plasma Process. 13, 433
(1993)7M. Shigeta, T. Sato, Hideya, and H. Nishiyama, Thin Solid Films 435, 5
(2003).8H. Nishiyama, J. Machine Sci. 44, 193 (1992).9M. I. Boulos, Pure Appl. Chem. 57, 1321 (1985).
10M. I. Boulos, IEEE Trans. Plama Sci. 4, 28 (1976).11J. Mostaghimi and M. I. Boulos, Inductively Coupled Plasma in Analytical
Spectrometry, edited by A. Montaser and D. W. Golightly (VCH, New
York, 1992), p. 949.12D. Bernardi, V. Colombo, E. Ghedini, A. Mentrelli, and T. Trombetti, Eur.
Phys. J. D 28, 423 (2004)13J. Tae Kim, “Numerical investigation of the performance characteristics of
the inductively coupled plasma generators,” Thesis M.A.Sc., University of
Toronto, 1997.14J. Mostaghimi, P. Proulx, and M. Boulos, Plasma Chem. Plasma Process.
4, 199 (1984).15R. M. Barnes and R. G. Schleicher, Spectrochim. Acta, Part B 30, 109
(1975).16R. M. Barnes and R. G. Schleicher, Spectrochem. Acta, Part B 36, 81
(1981).17R. C. Miller and R. J.Ayen, J. Appl. Phys. 40, 5260 (1969).
18R. M. Barnes and S. Nikdel, J. Appl. Phys. 47, 3929 (1976).19R. M. Barnes and S. Nikdel, Appl. Spectr. 30, 310 (1976).20H. Nishiyama, Y. Muro, and S. Kamiyama, J. Phys. D: Appl. Phys. 29,
2634 (1996).21D. Tsuenwani, N. S. Subramanian, J. V. R. Heberlein, and E. Pfender,
IEEE Trans. Plasma Sci. 25, 1034 (1997).22J. Fouladgar and A. Chentouf, IEEE Trans. Magn. 29, 2479 (1993).23J. Kim, J. Mostaghimi, and R. Iravani, IEEE Trans. Plasma Sci. 25, 1023
(1997).24A. Merkhouf and M. I. Boulos, Plasma Sources Sci. Technol. 7, 599
(1998).25A. Merkhouf and M I. Boulos, J. PhyD: Appl. Phys. 33, 1581 (2000).26J. Mostaghimi and M. I. Boulos, Plasma Chem. Plasma Process. 9, 25
(1989).27D. Bernadi, V. Colombo, E. Ghedini, and A. Mentrelli, Euro. Phys.J. D.
27, 55 (2003).28G. A. Korn and T. M. Korn, Mathematical Handbook for Scientists and
Engineers (McGraw-Hill, New York, 1968), p. 1033.29C. D. Allemand and R. M. Barnes, Spectrochem. Acta. 33B, 513
(1978).30A. V. Eastman, Fundamentals of Vacuum Tubes, 3rd ed. (McGraw-Hill
Inc., New York, 1949), Chaps. 9–10.31S. B. Punajbi, T. K. Das, N. K. Joshi, H. A. Mangalvedekar,
B. K. Lande, and A. K. Das, J. Phys.: Conference Series, 23rd National
Symposium on Plasma Science & Technology (PLASMA-2008),
208-012048, (2010).32F. W. Grover, Inductance Calculations (Van Nostrand, New York,
1946).33J. H. Ferziger and M. Peric, Computational Methods for Fluid Dynamics
(Springer, Berlin, 1999).34S. V. Patankar, Numerical Heat Transfer and Fluid Flow (McGraw-Hill,
New York, 1980).35A. B. Murphy and C. J. Arundell, Plasma Chem. Plasma Process. 14, 451
(1994).36T. K. Thyagarajan, Laser and Plasma Technology Division, BARC,
personal communication, Plppy version 1.0 (Transport and thermody-
namic properties).37R. U. Krey and J. C. Morris, Phys. Fluids 13, 1483 (1970).
012108-12 Punjabi et al. Phys. Plasmas 19, 012108 (2012)