EDS with Microcalorimeters Usage of Microcalorimeters on Scanning Electron Microscopes (SEM) for determination of elemental constitution of samples C. Hollerith 1 , M. Bühler³, F. v. Feilitzsch 1 ,T.Hertrich³, J. Höhne³, M. Huber 1 ,J. Jochum 1 , K. Phelan 3 , B. Simmnacher², R. Weiland², D. Wernicke 1,3 , 1:Physik-Department E15, TU München, James-Franck-Straße, 85747 Garching 2: Infineon Technologies AG, Otto-Hahn-Ring 6, 81739 München 3: VeriCold Technologies GmbH, Bahnhofstr. 21, 85757 Ismaning
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EDS with Microcalorimeters
Usage of Microcalorimeters on ScanningElectron Microscopes (SEM) for
determination of elemental constitution of samples
C. Hollerith1, M. Bühler³, F. v. Feilitzsch1,T.Hertrich³, J. Höhne³, M. Huber1,J. Jochum1, K. Phelan3, B. Simmnacher², R. Weiland², D. Wernicke1,3, 1:Physik-Department E15, TU München, James-Franck-Straße, 85747 Garching2: Infineon Technologies AG, Otto-Hahn-Ring 6, 81739 München3: VeriCold Technologies GmbH, Bahnhofstr. 21, 85757 Ismaning
What´s EDS ?
• Measurement of Energy of characteristic X-rayradiation excited by an electron beam in a Scanning Electron Microscope (SEM) givesinformation on elemental constitution of samplein SEM
• In the SEM an Image and an EDS spectrum canbe measured at the same time
⇒ Elemental analysis of small structures
David Joy, Monte Carlo Modeling for Electron Microscopy and Microanalysis, Oxford University Press, 1995
Electron beam
Surface
X-Ray Excitation Volumes with 2 keV and 5 keV Electron Energies
Excitation region of X-raysExcitation point of secondaryelectrons that are measuredfor SEM-Image (Information of few nm beneath surface)
Separation of X-ray lines at low energies requiresdifferent analysis method or different detector technology
⇒⇒⇒⇒Low temperature detectors
Motivation
3 keV10 keV
?
Si(Li)-detector: spectrum of TiN @ Vacc= 3keV⇒⇒⇒⇒ Overlap of X-ray lines at low energies