ECSEL Symposium 2018 Lèquepey… · markets for the European industry: automotive, medical imaging, scientific instrumentation, high-volume consumers and robotics. The project also

ECSEL Symposium 2018 | LEQUEPEYS Jean-René | June 20th, 2018

ECSEL JU SYMPOSIUM, 19/20 JUNE, 2018

| 2ECSEL Symposium 2018 | LEQUEPEYS Jean-René | June 20th, 2018

• LETI’S SHORT INTODUCTION

• WHY LETI’s INVOLVEMENT IS SO STRONG IN ENIAC/ECSEL PROJECTS ?

• WHAT KIND OF SOLUTIONS DID WE DEVELOP IN ECSEL PROJECTS?

WHAT KIND OF STRATEGIES DO WE WANT TO DEVELOP?

WHAT ARE THE BENEFITS FOR MY ORGANISATION AND FOR EUROPE ?

• Example of the success of SOI technology

• Example on Imagers

• CONCLUSION

AGENDA

| 3

Since 1967

64 startups

315 total budget (M€)

2,763 Patents

8,500 m² clean-room space

200-300 mm

1,800 people

350 Industrial Partners

125 European projects

LETI IN NUMBERS :

A RTO FULLY INTEGRATED IN CEA (FRENCH ATOMIC AGENCY)

| 4

Biochemistry

Micro and Nanoelectronics

MEMS (200 & 300mm) NanocharacterizationEmbedded systems

Integration

Photonics(200 & 300mm)

Clinatec

IC Design Center

LETI : WORD-CLASS INFRASTRUCTURES AND PLATFORMS

The LETI is a Laboratory of CEA

(French Atomic Agency)

| 5

CEA, THE MOST INNOVATIVE PUBLIC

RESEARCH ORGANIZATION IN EUROPE

TOP INSTITUTIONS, 2017 International ranking

1Health & Human Services

Laboratories

USA

2Alternative Energies and

Atomic Energy Commission

France

3 Fraunhofer SocietyGermany

4Japan Science & Technology

Agency

Japan

5

National Institute of Advanced

Industrial Science &

Technology

Japan


| 6

PIONEERING TECHNOLOGY

FOR INDUSTRY

Committed to innovation,

Leti’s teams create differentiating

solutions in miniaturization

and energy-efficient technologies

for its industrial partners.




• WHY LETI’s INVOLVEMENT IS SO STRONG IN ENIAC/ECSEL PROJECTS ?




• Example of the success of SOI technology*


• CONCLUSION

AGENDA

| 8

ECSEL PROJECT ARE FULLY IN LINE WITH CEA-LETI MAIN MISSION

LETI IS A RTO WORKING FOR INDUSTRY

LETI IS FILLING THE GAP BETWEEN BASIC

RESEARCH AND INDUSTRYAN EUROPEAN INITIATIVE TO PASS THE

KETS « VALLEY OF DEATH »

A PERFECT MATCH BETWEEN LETI AND ECSEL


LETI : A STRONG INVOLVEMENT IN ENIAC/ECSEL PROJECTS

ENIAC CALL 2012-2

5 PILOT LINE PROJECTS ACCEPTED.

LETI WAS PARTNER OF ALL OF THEM

A CONTINUOUS PARTICIPATION OF LETI

17 PROJECTS ACCEPTED SINCE 2014


IMPACT FOR LETI : A STRONG FINANCIAL SUPPORT

JU ECSEL (Eniac-Artemis)

2009-2017 : TOTAL FUNDING OF 156 M€

(without industrial funding for confidential reasons)

PA LOCAL AUTHORITIES (NANO2017)JU

ECSEL

Main Technical topics :

• Substrates

• FDSOI

• Memory

• 3D

• RF SOI

+ VALUE CHAIN THANKS

TO IC DESIGN



• WHY LETI’S INVOLVEMENT IS SO STRONG IN ENIAC/ECSEL PROJECTS ?




• Example of the success of SOI technology


• CONCLUSION

AGENDA


Modules

Materials

Small Circuits

Devices Complex Soc

Industrial class

Applications

Full integration Ecosystems

Roadmaps

Courtesy of Dominique Thomas (STMicroelectronics)

WHAT DOES IT TAKE TO ENABLE A SEMICONDUCTOR TECHNOLOGY?


SOI : 27 YEARS OF HISTORY WITH A CONTINUOUS SUPPORT OF PA AND EUROPE

Supported by Public Authorities and JU ECSEL

| 14

SEQUENCING OF FUNDING PROJECTS LEADING TO FDSOI 12NM TECHNOLOGYFDSOI IN EUROPE

2012 2013 2014 2015 2016 2017 2018 2019 2020 2021 2022 2023


Design Platform for 28FD,14FD and 22FDX

28FD Platform and 14FDSOI

PLACES2BE

14FDSOI and 14FD+

Substrate and Platform

14 FD Platform +

28FDSOI Enhancement

14 FD Prototyping

Readiness

Substrate, Techno FDSOI, Design platform

MCU 40nm and PCM/28FDMCU 40nm and memories for 28FD

Embeded memories and 22FDXPRIMEEmbedded

Memory for

Micro Controller

ECOSYSTEM FDSOI

22FDX and 12FDX

RFSOI and 12FDX

Substrats SOI for RF / 22FDX

Enhancement to RF

capabilities


SOI ecosystem

• Soitec was created in 1992 by 2

researchers fromLeti.

• They pioneered to the development of

PD- and FD-SOI CMOS within a full

ecosystem

RF SOI is a reality

FDSOI is an enabling platform for low-

power and low-cost applications

Through European and National funding,

SOI roadmap will continue to move

ahead !- Places2be

- WayToGoFast

- Ocean12

- Reference

SOI: ECOSYSTEM AND VISIONARY INNOVATION PARTNERSHIPSFDSOI IN EUROPE

| 16

ENIAC THINGS2DO : APPLICATION DOMAINS AND DEMONSTRATORS

X

X

NEWNEW

Courtesy of Patrick Blouet (STMicroelectronics)


FDSOI, THANKS TO ECSEL, IS BRIDGING THE GAP BETWEEN R&D AND PRODUCTS

2013 2014 2015 2016 2017 2018 2019

BRIDGING THE DEATH VALLEY

PL

AC

ES

2B

E

R&D 2005-2012

ECOSYTEM

MARKETS

technologies

products


RFSOI: CREATION OF A WORLWIDE INDUSTRIAL STANDARD

High Resistive Base

Trap Rich LayerThin Buried Oxide

Mono-crystal Top Silicon

2009 2010 20112008

R&D

First RFSOI product

Front End

Module

2012 20222020 2021………..

~24mm2 RFSOI in 100% of Front-end

module of Smartphones


RFSOI: KEEPING THE EUROPEAN LEADERSHIP THANKS TO ECSEL

High Resistive Base

Trap Rich LayerThin Buried Oxide

Mono-crystal Top Silicon

2009 2010 20112008

R&D

Front End

Module

2012 20222020 2021………..

PERFORMANCE: next Gen RFSOIMaterial research, higher frequencies

SCALING: smaller nodes & 300mmTechnology tool box, a

PROTOTYPING: time–to-market reductionNew RF FEM design concepts,

Anticipating of the complexity evolution

and market gowth of RFSOI for

First RFSOI product

RFSOI ECOSYTEM


ECSEL POLIS CONSORTIUM

POLIS Consortium gathers 21 partners from 7 countries:

- 17 industrial partners,

- 4 institutes or universities.

POLIS is application-driven with end-users in strategic

markets for the European industry: automotive,

medical imaging, scientific instrumentation, high-

volume consumers and robotics.

The project also involves partners along the whole

value chain: material providers, equipment

manufacturers, integrated device manufacturers and

end-users are integrated in the project.


WHICH APPLICATIONS?

Tera Thermal IR Near Infrared Visible Ultraviolet X-Ray Gamma

Security

Medical

Consumer

Security

Automotive

Industrial

Consumer

Medical

Medical MedicalSecurity

Home appliance

Medical

Automotive

Consumer

Industrial

WP2 WP4 WP5WP3 displays

WP3: 3D-Stacking to cover a wide wavelenght sensitivity

Total cost of the project : ~100M€


• ENIAC / ECSEL PROGRAM IS A STRATEGIC FRAMEWORK FOR CEA – LETI

• Fully in line with our basic mission : working for Industry and preparing key enabling technologies

• ECSEL IS ALSO THINKING BIG WITH THE POSSIBILITY OF LAUNCHING PROJECT

HAVING A LARGE SIZE (IN TERM OF BUDGET AND NUMBER OF PARTNERS)

• Critical mass in term of manpower to ensure good results and to reach high level of TRL

• Creating coherent and global ecosystems

• Adequate tool to push first R&D results towards industry, with products and job creation

• STRONG INVESTMENT OF PUBLIC AUTHORITIES, EU FUNDING AND PRIVATE FUNDING

BY INDUSTRIAL COMPANIES

• 1€ of EU Budget, 2.9€ of public and private money

• PILOT LINE CONCEPT IS ALSO KEY TO ENSURE THAT FUTURE PRODUCTION WILL BE

MADE IN EUROPE

CONCLUSION

| 23

MICROELECTRONICSEMPOWERING TECHNOLOGICAL REVOLUTIONS

& NOVEL USE-CASES

Conference & Exhibition, July 4-5th, 2018

www.leti-innovation-days.com

GrenobleMaison Minatec

Save the date!

Leti, technology research institute

Commissariat à l’énergie atomique et aux énergies alternatives

Minatec Campus | 17 rue des Martyrs | 38054 Grenoble Cedex | France

www.leti.fr



CEA LETI: SUPPORTING EUROPEAN INDUSTRIAL ROADMAPS

Boosters

solutions

Technologies

tool box

Digital / FDSOI

FDSOI roadmap Courtesy of SOITEC

New material

investigations

Front End Modules -

RFSOI

FEM roadmap Courtesy of SOITEC

ECSEL Symposium 2018 Lèquepey… · markets for the European industry: automotive, medical imaging, scientific instrumentation, high-volume consumers and robotics. The project also

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