Early Detection Solution Improved Profitability Across Global Test Operations

P# 1OptimalTest/ETS 2009

Early Detection SolutionImproved Profitability AcrossGlobal Test Operations

Debbora AhlgrenVP Sales & MarketingOptimalTest26-May-2009

P# 2OptimalTest/ETS 2009

Business Model Transitions

90nm (2003) 65nm (2006) 45nm (2008) 32nm (2010) 22nm (2012)

Process Node (Year)

TI

WindowOf

Opportunity

With the move to 300mm-diameter wafers, the price tag for anadvanced production fab has becomeout of reach for all but the largest IDMs…*

Source: Gartner, 2008

Source: Gartner, 2008

Window ofOpportunity

P# 3OptimalTest/ETS 2009

Yield Loss at 65nm and Beyond

Systematic variations are contributing to >60% yield loss at the 65nm as Compared to <5% at the 350nm node.

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P# 4OptimalTest/ETS 2009

Integrating the DistributedManufacturing Model

Fo

un

dry S

ervices

P# 5OptimalTest/ETS 2009

Cost of Test – ITRS Focus

Goal is to Optimize Product CostBalance of cost/value ofDesign, Manufacture, Yield Learning & Test

P# 6OptimalTest/ETS 2009

ITRS TWG 2009 Plans

• DFT alignment with design TWG• Socket performance vs. frequency• Expansion of specialty devices• Adaptive Test• SiP & 3D silicon Test

Suggest that the ITRS is cutting short the potential. The real potential is to work for transparency and interoperability across

the integrated fabless manufacturing model.

P# 7OptimalTest/ETS 2009

Early Detection Solution

Robust IT InfrastructurePromotes transparency across distributed value & supply chain

Provides for the implementation of rules (through expert rules engine) that transcends lots, device families and enterprise boundaries

Integrates Yield Learning, Quality and Reliability functions

NPI

Outlier Detection

Advanced Adaptive Test for Yield, Quality and TTR

P# 8OptimalTest/ETS 2009

OptimalTest delivers solutions for optimized test operations through 4 levels of software capabilities:

1. Real-Time Control – of Test Cell Execution Station Controller (OT-Box) applicationTest Cell control in real-time: Yield Learning & Reclamation, Test Operations Efficiency (TTR, Test Cell degradation) Product Quality (outlier detection), and Quality

2. Real-Time Monitoring – of a fleet of Test Cells for Optimized EfficiencyControl Room applicationReal-time fleet monitoring: Yield degradation prevention, Operational Efficiency & Immediate Quality Attention

3. Near-Time Detection – of Product & Test Operational IssuesEarly Detection Solution & OT-DashboardProduct quality & performance monitoring & fleet monitoring in near-time: Yield degradation prevention & Yield Reclamation, Operational Efficiency and Quality

4. Off-Line Analysis & simulation – of Test Operations: Products, Fleet, ProcessesReporting, Analysis & Simulation applications and OT-Dashboard Product performance analysis & off-line simulation: Yield, Efficiency (TTR), and Quality (Outlier Detection)

OptimalTest Value Propositions

P# 9OptimalTest/ETS 2009

What is the value of Early Detection?

Test results are situation specificSpecific device and specific test cell

“Bad” and “Good” are not absolute measures

Near Real-Time (or “Near-Time”) Post Processing using robust “expert” rules improves operational efficiency for test

Re-evaluate specific device results vs other devices (historical and across multiple test cells)

Such Operational Efficiency requires the establishment of a Baseline of Fleet, Product and Processes

This requires a database and an expert rules engine – OT-Rules

Only Early Detection supports the “Near-Time” evaluation & comparison of results across an entire fleet of testers

Across multiple enterprises (SATs and distributed test floors)

Across lots from multiple foundries

P# 10OptimalTest/ETS 2009

OUTLIER MANAGEMENT CAPABILITIESTHROUGH STATE-OF-THE-ART ADAPTIVE TESTING

Outlier Detection for Product Reliability

P# 11OptimalTest/ETS 2009

Location of Baseline Dieselected according to various algorithms:

1.Next to E-test structures (for maximized correlation between test sockets)

2.Spread-out equally in each of the 3 ring areas (for maximized area coverage)

3. In areas of different yield signatures

4. In most of the lithography exposure locations

5. In areas corresponding with Fab defect sampled areas

Advanced Adaptive Test for TTR,Quality Control & Yield Learning

P# 12OptimalTest/ETS 2009

Early Detection Solution - Implementation

Data logs from any origin & any format are transferred to the OT database at the end of each Run / Pass / Execution

An OptimalTest Station Controller (OT-Box) connected to any test cell; or

A Proxy (OT-Proxy) on any tester; orOT-Proxy is a light piece of SW (a “deamon”) installed on a tester that communicates directly to the OT-Database

Any data log format from any family / model of tester (i.e STDF - heavy or light, comprehensive or summary)

Re-evaluation of the data logs is executed against 2 types of expert rules

Product level rule: Executed whenever new datalog files enter the data base

Cross-Entity rule: Executed on a defined periodic time basisOnce per shift, once per day, etc.

Once an issue is detected based on the defined rulesAn eMail is sent to the responsible personnel with a description of the problem and a link to a specific report (OT-Reports/OT-Dashboard) illustrating the issue; and

An alert is sent to the responsible personnel; and

A disposition action can be executed

P# 13OptimalTest/ETS 2009

Design House or IDMSAT or Test Site

Other Formats

GDF

7C7

STDF

OptimalTestDatabase

FileDrop

BulkInsert

OptimalTestParsing Server

Customer FTP

Without Optimal Test at the SAT

Parsing of non-OTDF is more processor-intensive

P# 14OptimalTest/ETS 2009

Design House or IDMSAT or Test Site

OptimalTestDatabase

OTDF FileDrop

BulkInsert

OptimalTestParsing Server

OptimalTestDatabase

(SAT)

Customer FTP

With OT Boxes and Using OTDF

Each OT customer has their own OT Database

P# 15OptimalTest/ETS 2009

Design House or IDMSAT or Test Site

OptimalTestDatabase

OTDF FileDrop

BulkInsert

OptimalTestParsing Server

OptimalTestDatabase

(SAT)

FTP Server

With OT Proxy and Using OTDF

Each OT customer has their own OT Database

P# 16OptimalTest/ETS 2009

Early Detection Solution -- Architecture

Customer Defined Rules

OptimalTest DB

Rule FeedbackScheduled Analysis

Any Other Testers

eMail Notification

Any Logs (STDF or Other)

Product Rule

(End of Wafer or Lot)

Cross- Entity

Rule(Customer-

Defined Period)

OT- DispoAutomatic Disposition(e.g. hold/release lot)

OTDF (++)

With attached report

Proxy OTDF

Feed

back

OT-Dashboard

P# 17OptimalTest/ETS 2009

Data Integrity

Without OT OT-Proxy OT-Proxy2 OT-Box

Full control of the test cell – tester, prober/handler - - -

Automated and validated data entry(Load-Board; Sockets; Probe Cards etc) - - -

Datalogs, wafer maps and summary files always match - - -

Capture of adaptive testing rules impact - -

Post process validation of correctness of data -

Robust file transfer infrastructure to ensure the data log reaches the database and other systems -

OT-Proxy A small, non-intrusive software component installed only on the tester that monitors the testing process and streams data to a backend server

OT-Box A powerful station controller that takes complete control of the tester and prober/handler and implements OptimalTest’s full capabilities

OTDFA new, XML based, compact datalog format with extensions for adaptive testing rule data. It is generated by the OptimalTest server and used primarily to transfer testing results to other systems in a “lighter” & efficient manner

QCT/OT Confidential

P# 18OptimalTest/ETS 2009

OT-Rules Generated eMail AlertEquipment Outlier Alert – Product exhibiting different yield on specific tester in a fleet or across enterprises

“Manufacturer A”

M220 SAT1_33

P# 19OptimalTest/ETS 2009

OT-Rules Generated eMail Alert (Example #2)

(A rule alerting for a site yield degradation issue (>5%)

P# 20OptimalTest/ETS 2009

OT-Reports – Illustrating the Problem in the eMail Alert

(A rule alerting for a site degradation issue (>5%)

P# 21OptimalTest/ETS 2009

OT-Dashboard Examples – Product Engineer's View

Multiple layouts accessible via tabs

Wide variety of "widgets" with all

relevant KPI's

Highlight outliers

P# 22OptimalTest/ETS 2009

OT-Dashboard Examples – Throughput Focus

Rule Efficiency

Magnify yield fluctuations

Outlier Equipment

Alarms

P# 23OptimalTest/ETS 2009

Legend 1 – Device A Final Yield2 –Device A 1st Pass Yield3 – Device A Total Units4 – Device B SC2X 1st Pass Yield6 – Device B Total Units7 –Device B Retest Rate (Facility 1 – with OT-Boxes -- isn’t crossing 5% threshold)8 – Device B Final Yield by Tester (Facility 1 “fleet” is stable)

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3

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5

4

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7

6

Legend 1 – Device A Final Yield2 – Device A 1st Pass Yield3 – Device A Total Units4 –Device B Final Yield5 – Device B 1st Pass Yield6 – Device B Total Units7 – Device B Retest Rate (Facility 1 – OT-Boxes enabled) isn’t crossing 5% threshold)8 – Device B Final Yield by Tester (Facility 1 “fleet” is stable)

OT-Dashboard Early Detection Solution – Case Study Example

P# 24OptimalTest/ETS 2009

Thank You!

P# 25OptimalTest/ETS 2009

Benefits of Early Detection Solution

Results Re-Evaluation control, quality & health of all test operationsIdentify issues in: Yield, Efficiency, Productivity, Quality & Data-Integrity

Detection of Outlier Equipment all test assets (ATE, peripherals, consumables)Proactive detection of trending and marginal equipment before they become outliers & before equipment failure (Fleet baseline)

Detection of Product & Quality issues improved product quality and reduced field returnsProactive detection of Test Program instabilities & marginalities, Bin switching, Recoverability, Re-Tests, 1 st pass yields, QA, Correlation / Golden-units pass rate, run-rate & performance issues

Detection of Data Integrity issues consistent results and reliable decision making Proactive detection of Wafer Map orientation issues, Holes, STDF vs wafer maps vs Summary files vs shipping maps etc

Detection of Operational Issues improved overall operational efficiency (OEE)Proactive detection of failure to follow operational processes and procedures. Pauses, Set-ups, Re-tests

End-of-Line gate-keeping improved overall operational efficiency (OEE) Proactive verification that material was processed based upon the intended criteria (Flow, Disposition actions, yield, Retest etc)

OT-Post Engine offers: Device Outlier Detection PAT, S-PAT, D-PAT, ULPY, NNR and other advanced outlier detection techniques

Bin Re-Classification Better categorization of devices for device parameters including Speed, Voltage Parameter “matching” for optimized Multi-Chip-Package or System-in-Package performance