© 2000 Swagelok Company DP Series DP Series Springless Diaphragm Valves Springless Diaphragm Valves
DP Series Springless Diaphragm Valves
Jan 11, 2016
DP Series Springless Diaphragm Valves. Why develop a new valve?. Semiconductor industry driving for lower costs Availability of new technology Swagelok’s drive to help customers win. Provide a 1/4 inch UHP valve for low and high-pressure applications Provide a high-performance seat - PowerPoint PPT Presentation
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© 2000 Swagelok Company
DP Series DP Series Springless Diaphragm ValvesSpringless Diaphragm Valves
© 2000 Swagelok Company
Why develop a new valve?Why develop a new valve?
• Semiconductor industry driving for lower costs
• Availability of new technology
• Swagelok’s drive to help customers win
© 2000 Swagelok Company
DP Series ObjectivesDP Series Objectives
• Provide a 1/4 inch UHP valve for low and high-pressure applications
• Provide a high-performance seat
• Improve flow capabilities
• Provide integral locking handle
• Drop in replacement
• Provide a competitively priced valve
© 2000 Swagelok Company
Topics to be DiscussedTopics to be Discussed
• Technology Design tools Seat performance
• Valve overview DP specifications DP components
• Valve highlights
© 2000 Swagelok Company
DP Series DP Series Computer Modeling TechnologyComputer Modeling Technology
© 2000 Swagelok Company
Valve Valve inletinlet
Valve Valve outletoutlet
DiaphragmsDiaphragms
CFDCFD AnalysisAnalysis
Fully Swept Flow PathFully Swept Flow Path
© 2000 Swagelok Company
Featured Featured areaarea
Finite Element AnalysisFinite Element Analysis
© 2000 Swagelok Company
FEA FEA AnalysisAnalysis
Repeatable Shutoff PerformanceRepeatable Shutoff Performance
© 2000 Swagelok Company
Featured Featured areaarea
Finite Element AnalysisFinite Element Analysis
© 2000 Swagelok Company
FEA FEA AnalysisAnalysis
Actuator Actuator buttonbutton
Bonnet Bonnet nut nut
Diaphragms Diaphragms
Diaphragm Cycle LifeDiaphragm Cycle Life
© 2000 Swagelok Company
DP Series Valve Seat TechnologyDP Series Valve Seat Technology
© 2000 Swagelok Company
0 60 120 180 240 300 360
Time in Time in secondsseconds
*15*Minimum required by SEMI F1-96
1x10-10 _
1x10-9 _
1x10-8 _
1x10-7 _
(std cm(std cm33/s)/s)
Inboard helium leak Inboard helium leak testing of the seat testing of the seat with 145 psig inlet with 145 psig inlet
pressurepressure
Helium Leak Test PerformanceHelium Leak Test Performance
© 2000 Swagelok Company
¼ in. DP Series Technical Issues¼ in. DP Series Technical Issues
• Pressure Rating: 145 psi / 10 bar:145 psi / 10 bar:
Low PressureLow Pressure
3045 psi / 210 bar:3045 psi / 210 bar:High PressureHigh Pressure
• Cv: 0.27: Low Pressure0.27: Low Pressure
0.20: High Pressure0.20: High Pressure
• Dimensions: Same O.A.L.Same O.A.L.
• HLT: 1 x 10-9 std cm3/s1 x 10-9 std cm3/s
• Surface Finish: 5 5 in Rain Ra
© 2000 Swagelok Company
Low Pressure Internal ComponentsLow Pressure Internal Components
© 2000 Swagelok Company
Common Common body, body, diaphragms diaphragms and seatand seat
Low-pressure air Low-pressure air actuatoractuator
Low- and high- Low- and high- pressure “T” pressure “T”
handlehandle
Low- and high- Low- and high- pressure pressure
locking handlelocking handle
High-pressure High-pressure air actuatorair actuator
Actuator OptionsActuator Options
© 2000 Swagelok Company
Locking HandleLocking Handle
© 2000 Swagelok Company
DP Series Valve HighlightsDP Series Valve Highlights
• Both high- and low-pressure options
• Improved seat performance
• Improved flow capabilities
• Standard locking handle option for safety
• Drop in replacement
• Competitively priced
© 2000 Swagelok Company
DP Series DP Series Springless Diaphragm ValvesSpringless Diaphragm Valves
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