•'«;,„>,? • TRANSDUCERS'05 SEOUL, KOREA The 13fh International Conference on Solid-State Sensors, Actuators and Microsystems Digest of Technical Papers Volume 1 Papers 1P1.1-2E4.161, PP. 1-1102 Sponsored Dy Korean Sensors Society Technical Co-sponsors IEEE Electron Devices Society IEEE Robotics and Auromation Society IEE of Japan, Sensors and Micromachines Society International Federation of Automatic Control Institute of Control, Automation and Systems Engineers Institute of Electronics Engineers of Korea Korean Institute of Electrical Engineers Korean Society of Mechanical Engineers Korean Society of Precision Engineering TIB/UB Hannover 89 Korea Robotics Society IEEE Catalog Number.- 05TH8791 ISBN: 0-7800-8994-8
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Digest of Technical Papers - gbv.de · Direct and Reverse Rotation Control Bernard Legrand, Lionel Buchaillot, and Dominique Collard ... Electrowetting-Actuated Droplet Sweeping ...
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•'«;,„>,? •
TRANSDUCERS'05SEOUL, KOREA
The 13fh International Conference on
Solid-State Sensors, Actuators and Microsystems
Digest ofTechnical Papers
Volume 1Papers 1P1.1-2E4.161, PP. 1-1102
Sponsored DyKorean Sensors Society
Technical Co-sponsorsIEEE Electron Devices SocietyIEEE Robotics and Auromation SocietyIEE of Japan, Sensors and Micromachines SocietyInternational Federation of Automatic ControlInstitute of Control, Automation and Systems EngineersInstitute of Electronics Engineers of KoreaKorean Institute of Electrical EngineersKorean Society of Mechanical EngineersKorean Society of Precision Engineering TIB/UB Hannover 89Korea Robotics Society
MEMS in RF-Filter Applications:Thin FilmBulk-Acoustic-Wave TechnologyRobert AignerInfineon Technologies AC,, GERMANY
Fusion of Biomedical Microcapsule Endoscope andMicrosystem TechnologyTae Song Kim , Byungkyu Kim ,
Dongil "Dan" Cho", Si Young Song ,
Paolo Dario , and Metin SittiKorean Institute of Science & Technolog}\ KOREA.
'Seoul National University, KOREA,
Yonsei University. KOREA,
Scnola Superiore Sant'Anna, ITALY,
' Carnegie Mellon University. USA,
Intelligent Microsystem Center, KOREA
• 3D Fabrication
13:30-14:45 Monday, June 6
1A3.1 Three-Dimensional Nanosprings for
Electromechanical SensorsD. J. Bell1, Y. Sun2, L. Zhang3, LX. Dong1,B. J. Nelson, and D. Gruzmacher''Swiss Federal Institute of Technology, SHTTZERL-iND.
' University of Toronto, CANADA,
'Paul Seheirer Institute, SMTZER1AND 15
1A3.2 3D-Self-Assembling of SU-8 Microstructures onSilicon by Plasma Induced Compressive StressJean-Baptiste Bureau', Bernard Legrand1,
Dominique Collard \ and Lionel BuchaillotInstitut d'Electronique. de Microelectroniqiie et de
Nanotechnologie, FRA NCE,
''University of Tokyo, JAPAN
1A3.3 Alkali Metal-Wax Micropackets for Chip-ScaleAtomic ClocksShankar Radhakrishnan and Amit LaiCornell University, USA • 23
1A3.4 Fabrication of 3D Nanowire Frames byConventional Micromachining TechnologyE. Sarajlic, E. Berenschot, G. Krijnen, andM. ElwenspoekUniversity of Twente, The NETHERLANDS
1A3.5 The 2D Feedback Conveyance withCiliary Actuator ArraysManabu Ataka', Bernard Legrand2, Lionel Buchaillot",
Dominique Collard1, and Hiroyuki Fujita1
'University of Tokyo. JAPAN.
'Institut d'Electronique de Microelectroniqiie et de
Nanotechnologie, FRANCE
• Pressure Sensors
- 3 1
1B3.1
1B3.2
13:30-14:45 Monday, June 6
Next Generation Pressure Sensors in Surface
Micromachining TechnologyG. Lammel, S. Armbruster, C. Schelling,H. Benzel, J. Brasas, M. tiling, R. Gampp,V. Senz, F. Schaer, and S. FinkbeinerRobert Bosch Gmhll. GERMANY 35
Fully CMOS Compatible On-LSI CapacitivePressure Sensor Fabricated using StandardBack-End-of-line ProcessesT. Fujimori, Y. Hanaoka, K. Fujisaki,
N. Yokoyama, and H. FukudaHitachi Ltd. JAPAN
1B3.3 A CMOS-Based Architecture for a DistributedSensor Matrix in Underwater EnvironmentL. Magagni1. M. Sergio', M. Nicolini1,
D. Gennaretti', R. Canegallo2, and R. Guerrieri'University of Bologna. ITALY.
'STMicroelectronics. ITALY
1B3.4 Multifunctional Smart Tactile-Image Sensor withIntegrated Arrays of Strain and TemperatureSensors on Single Air-PressurizedSilicon Diaphragm
Hidekuni Takao, Kazuaki Sawada,
and Makoto IshidaToyohashi Universit}' of Technology. JAPAN
• 37
•41
• 4 5
1B3.5 A Capacitve Pressure Sensor with a NovelMulti-Layered Composite Membrane StrucutreFabricated by a Three-Mask ProcessMin-Xin Zhou, Qing-An Huang, and Ming QinSoutheast University. CHINA 49
• Electrostatic Actuators
13:30-14:45 Monday. June 6
1C3.1 High Performance Bidirectional Electrostatic
lnchworm Motor Fabricated by Trench IsolationTechnologyE. Sarajlic , E. Berenschot , N. Tas , H. Fujita",
G. Krijnen , and M. Elwenspoek'University of Twente. The NETHERLANDS,
'University of Tokyo, JAPAN 53
VI
1C3.2 Stiction Drive Operation of Micromotors:Direct and Reverse Rotation ControlBernard Legrand, Lionel Buchaillot,and Dominique CollardInstitut d'Electronique. de Microelectroniqiie et de
Nanotechnologie, FR.4NCE 57
1C3.3 Long Travel Parallel Plate ElectrostaticActuatorViacheslav Krylov1 and Yacov Bernstaiir'Tel Aviv University, ISRAEL, 'Tearop Ltd., ISRAEL 61
1C3.4 Design and Fabrication of a Pure-RotationMicroscanner with Self-Aligned ElectrostaticVertical Combdrives in Double SOI WaferY. Mizoguchi' and M. Esashi2
'CANON Inc.. JAPAN, "Tohoku University JAPAN 65
1C3.5 Micro XY-Stages With Spider-Leg Actuatorsfor 2-Dimensional Optical ScanningHo Nam Kwon'~, Jong-Hyun Lee1, Kazuhiro'Jonnie' Takahashi", and Hiroshi Toshiyoshi"Gwangjn Institute oj Science and Technology. KOREA.
'University of Tokyo. JAPAN 69
• Microdroplets and Micro Bead Technology
13:30-14:45 Monday. June 6
1D3.1 Beads Actuation with Kinesin on a IVIicrotubuleImmobilized in a Nano Fluidic ChannelRyuji Yokokawa, Yumi Yoshida,
Shoji Takeuchi, Takahide Kon,
Kazuo Sutoh, and Hiroyuki FujitaThe University of Tokyo. JAPAN 73
1D3.2 Two Dimensional Magnetic Manipulation ofMicrodroplets on a Chip
U. Lehmann, S. Hadjidj, V.K. Parashar,A. Rida, and M.A.M. GijsEcole Polytechnique Federale de Lausanne,
SWITZERLAND • 77
1D3.3 Magnetic Force-Based Immunoassay usingSuperparamagnetic Nanoparticles inMicrofluidic ChannelKyu Sung Kim and Je-Kyun ParkKorea Advanced Institute of Science and
Technology. KOREA
ID3.4 Trapping and Manipulation of Particles andDroplets using Micro-Toroidal ConvectionCurrentsAmar S. Basu and Yogesh B. GianchandaniUniversity of Michigan, USA - 85
1D3.5 EWOD Actuation with Electrode-FreeCover PlateUi-Chong Yi and Chang-Jin "Cl" KimUniversity of California at Los Angeles, USA • - 89
• Carbon Nanotube Processes
15:15-16:15 Monday. June 6
1A4.1 Localized and CMOS Compatible Growth ofCarbon Nanotubes on a 3x3 urn2
Microheater Spot
Alain Jungen, Christoph Stampfer, Marc Tonteling,
Sebastien Schiesser, Debajyoti Sarangi, and
Christofer HieroldETH Zurich. SWITZERLAND 93
1A4.2 Non-Catalyst and Low Temperature Growth ofVertically Aligned Carbon Nanotubes forNanosensor ArraysH.T.M. Pham1", C.R. de Boer1, and P.M. Sarro''Delft Universin- of Technology, the NETHERLANDS.'Vietnamese Academy (if Science and Technology,
VIETNAM 97
1A4.3 Selective Bridging of Single-Walled CarbonNanotubes Controlled with Electric Field Appliedto Silicon StructuresYusuke Takei, Kazunori Hoshino,
Kiyoshi Matsumoto, and Isao ShimoyamaThe University of Tokyo, JAPAN 101
1A4.4 Novel Process Flow for the Integration of CarbonNanotubes into MEMS
and Thomas W. KennyStanford University USA. 'California Ear Institute, USA,
'Palo Alto Veterans Administration, USA 109
1B4.2 A MEMS Hybrid Inertial Sensor Based onConvection Heat TransferRong Zhu1, Yan Su", and Henggao Ding1
Tsinghua University, CHINA,
'Southeast University, CHINA 1 13
1B4.3 A Micromachined Gyroscope withPiezoresistance for both High PerformanceCoriolis-Effect Detection andTorsional Vibration MonitoringXuemeng Chen, Xinxin Li, Zhaohui Song,Shusen Huang, Yuelin Wang, Jiwei Jiao,Heng Yang, and Ying ZhangChinese Academy of Sciences. CHINA 117
and Guoying Wu j'Peking University, CHINA, I'Chinese Academy of Sciences, CHINA 121 j
• Surface Tension & Electrowetting Liquid j
Actuators I
15:15-16:15 Monday. June 6 j
1C4.1 A Distributed Actuation Method Based on j
Young-Laplace Forces \
Ruba T. Borno and Michel M. Maharbiz jThe University of Michigan, USA 125 ;
1C4.2 A Micro Particle Sampler usingElectrowetting-Actuated Droplet Sweeping •
Yuejun Zhao and Sung Kwon Cho jUniversity of Pittsburgh, USA 129 ;
1C4.3 Liquid Loading of Silicon-Based Cantileversusing Electrowetting Actuation forMicrospotting Applications
T. Leichle', D. Saya', P. Belaubre',
JB. Pourciel', F. Mathieu1, J?. Laur1,
L. Nicu1, and C. Bergaud2
'LAAS-CNRS, FRANCE,:LIMMS-CNRS, JAPAN 135
1C4.4 Using EWOD (Electrowetting-On-Dielectric)Actuation in a Micro Conveyor SystemIlju Moon and Joonwon KimP o h a n g University of S c i e n c e a n d Technology, K O R E A •••• 1 3 9
• Biochip
15:15-16:15 Monday, June 6
1D4.1 Invited Speaker
Flat Fluidics: Acoustically Driven PlanarMicrofluidic Devices for Biological andChemical ApplicationsAchim WixforthUniversity of Augsburg, German) 143
1D4.2 Single Potential Electrophoresis on-Chip usingPressure Pulse Injection
Frederic Lacharme and Martin A. M. GijsEeole Polytechnique Fedeale de Lausanne,
SWITZERLAND 147
1D4.3 Elcrochemical Bio-Lithography for in-situImmobilization of Proteins and Cells withinMicrochannelsMatsuhiko Nishizawa, Hirokazu Kaji,
Kazuto Tsukidate, Masahiko Hashimoto,
and Takashi Abe
Tohoku University, JAPAN 151
• AFM/Probe Fabrication16:30-17:30 Monday, June 6
1A5.1 A New Design of Knife Edged-AFM Probe forChromosome Precision ManipulatingMasato Saito', Kazuhisa Nakagawa ,
Keiichiro Yamanaka', Yuzuru Takamura',
Gen Hashiguchi", and Eiichi TamiyaJapan Advanced Institute of Science and Technology,
JAPAN, 'Kagawa University, JAPAN 155
1A5.2 Multifunctional Tool for Expanding AFM-BasedApplicationsS. Deladi, N.R. Tas, G.J.M. Krijnen,and M.C. ElwenspoekUniversity of Twente. The NETHERLANDS 159
1A5.3 Scanning Probe Parallel Nanolithography using Multi-Probes Cantilever Array for Silicon NanodevicesHensy Gandjar, Yuki Takagi, and Yoshitada IsonoRitsumeikan University, JAPAN 163
1A5.4 Fabrication of Silicon Nanostructures withVarious Sidewall Profiles and Sharp TipsChang-Hwan Choi and Chang-Jin "CJ" KimUniversity of California at Los Angeles, USA 168
• Inertial Microsystems II16:30-17:30 Monday. June 6
Christophe Yamahata, Frederic Lacharme,Jan Matter, Silvan Schnydrig, Yves Burri,and Martin A. M. GijsEcole Polytechnique Frede'rale de Lausanne.
SWITZERLAND
188
192
1C5.3
1C5.4
An Electrohydrodynamically DrivenMicrofabricated Actuator for the Stud)' ofMiniature Ion Propulsion Engine andElectric Wind DevicesB. L. Chua, Logeeswaran VJ, M. L. Chan,
H. K. Park, D. A. Horsley, and N. C. TienUniversity of California at Davis, USA
A Polymeric Paraffin Micropump withActive Valves for High-Pressure MicrofluidicsR. Boden, M. Lehto, U. Simu, G. Thornell,
K. Hjort, and J.-A SchweitzUppsala University. SWEDEN
197
•201
• Bio-tool
16:30-17:30 Monday. June 6
1D5.1 MEMS-Based Sonoporation Devices for
Intratumoral Gene TherapyT. Siu, D. M. Trivedi, M. Chiao,and R. RohlingUniversity of British Columbia, CANADA 205
1D5.2 Microdevice Components for a CellularMkrosurgeiy SuiteWesley C. Chang1, Christopher G. Keller2,Elizabeth A. Hawkes1, and David W. Sretavan1
University- of California at San Francisco, USA,
"MEMS Precision Instruments, USA •209
1D5.3 Reliable in-vivo Penetration and TransdermalInjection using Ultra-Sharp Hollow MicroneedlesNiclas Roxhed, Patrick Griss, and Goran StemmeRoyal Institute of Technology, SWEDEN 213
1D5.4 A Novel Fabrication of Ionic Polymer-MetalComposites (IPMQ Actuator with SilverNano-PowdersC. K. Chung', Y. Z. Hong1, P. K. Fung',M. S. Ju', C. C. K. Lin', and T. C. Wu2
'National Cheng Kttng University, TAIWAN,
'Industrial Technology Research Institute, TAIWAN 217
Information Society & Media Directorate, BELGIUM 221
2A1.2 Integrating Wireless ECG Monitoring in TextilesJ. Coosemans, B. Hermans, and R. PuersKatholieke Universiteit Leuven, BELGIUM 228
2A1.3 An Autonomous Microsystem for Environmentaland Biological Data GatheringDavid F. Lemmerhirt, David A. Fick, and
Kensall D. WiseThe University of Michigan, USA 233
2A1.4 CMOS-Based Tactile Sensor for Coronary ArteryIdentification
Tomi Salo, Kay-Uwe Kirstein, Tobias Vanura, and
Henry BaltesETH Zurich, SWITZERLAND 239
• Resonator-type Sensors
09:00-10:15 Tuesday. June 7
2B1.1 Invited Speaker
Vibrating RF MEMS Technology: Fuel for anIntegrated Micromechanical Circuit Revolution?Clark T.-C. NguyenDARPA. USA 243
2B1.2 Quartz-Crystal Canuievered Resonator forNanometric SensingYu-Ching Lin, Takahito Ono, and Masayoshi EsashiTohoku University. JAPAN 247
2B1.3 Feedback Control of High-Intensity SiliconUltrasonic Surgical Actuator11-Seok Son' and Amit Lai2
University of Wisconsin at Madison. USA,
''Cornell University. USA 252
2B1.4 Capacitive Resonant Mass Sensor with LCResonant Circuit for use in AtmosphereSang-Jin Kim, Takahito Ono, and Masayoshi EsashiTohoku University, JAPAN 256
• Nano-electrical Characterization
09:00-10:15 Tuesday. June 7
2C1.1 Invited Speaker
Semiconductor Nanostructure Devices:Recent Advances and Their Potentials for
IX
Transducers ApplicationsHiroyuki SakakiUniversity of Tokyo. JAPAN •
2C1.4 Semiconductivity of Pyrolyzed Polymer forMEMS Application
S. Konishi, H. Nagae, T. Sagawa,K. Naka, and K. YoshiokaRitsumeikan University, JAPAN 271
Biosensors and Cells
09:00-10:15 Tuesday, June 7
2D1.1 Invited Speaker
Micromachined Endovascularly-ImplantableWireless Aneuiysm Pressure Sensors:from Concept to ClinicMark G. Allen
Georgia Institute of Technolog\\ USA 275
2D1.2 Smart Microfuluidic Electrochemical DNASensors Integrated Signal Processing CircuitsKazuaki Sawada, Chigusa Oda,Hidekuni Takao, and Makoto IshidaToyohashi University of Technology, JAPAN .... 279
2D1.3 Monitoring of Yeast Cell Concentrationusing a Micromachined Impedance SensorE. E. Krommenhoek1, J. G. E. Gardeniers1,J. G. Bomer', A. Van den Berg', X. Li2,M. Ottens", L. A. M. van der Wielen',G. W. K. van Dedem", M. Van Leeuwen",W. M. van Gulik", and J. J. Heijnen"'University of Twente. The NETHERLANDS,
'Delft University of Technology,
The NETHERLANDS • 283
2D1.4 A Microfabricated Narrow Gap Biofuel Cellwith Membraneless Design Flexibility
Naga S. Korivi and Jin-Woo ChoiLouisiana State University, USA
2A2.1
10:45-12:00 Tuesday, June 7
Thermoelectric MEMS Generators as a Power
Supply for a Body Area NetworkV. Leonov', P. Fiorini1, S. Sedky",
T. Torts', and C. Van Hoof1
Intenmiversity Microelectronics Center, BELGIUM,
'The American University in Cairo, EGYPT • 291
2A2.2 Novel MEMS Power Generator withIntegrated Thermoelectric andVibrational DevicesNorio Sato', Hiromu Ishii', Masami Urano',Tomomi Sakata', Jun Terada'. Hiroki Morimura1,Satoshi Shigematsu , Kazuhisa Kudou",Toshikazu Kamef, and Katsuyuki Machida
'NTT Corporation, JAPAN,
'NTT Advanced Technology Corporation. JAPAN — • 295
2A2.3
2A2.4
Design and Implementation of an IntegratedFloating-Gate Electrostatic Power Micro-GeneratorWei Ma1, Libor Rufer", Yitshak Zohar, and Man Wong1
Hong Kong University of Science and Technology.
HONG KONG. 'TIMA Laboratory. FRANCE,
University of Arizona USA 299
A Micro Direct Methanol Fuel Cell using PDMSAssembly TechnologyYingqi Jiang. Xiaohong Wang, Kewen Xie,
Xinping Qiu, Lingyan Zhong, and Litian LiuTsinghua University, CHINA • 3(0
• Physical Sensors I
2B2.1
2B2.2
10:45-12:00 Tuesday, June 7
Pyroelectric Infrared Sensors with Fast Response
Time and High Sensitivity using Epitaxial
Pb(Zr,Ti)O, Films on Epitaxial y-AhOj/Si
Substrates
Daisuke Akai , Keisuke Hirabayashi ,Mikako Yokawa', Kazuaki Sawada',Yoshiharu Taniguchi", Shinnichi Murashige",Naoto Nakayama2, Tetsuya Yamada".Kensuke Murakami", and Makoto IshidaToyohashi University of Technology. JAPAN,
"Nippon Ceramic Co., Ltd.. JAPAN 307
An Ultra-Low-Power Physics Package for aChip-Scale Atomic Clock
Mark J. Mescher', Robert Lutwakg", andMathew Varghese'Charles Stark Draper Laboratoiy. USA
'Symmetricom Inc., USA
2B2.3
• 287
First Fully CMOS-Integrated 3D Hall ProbeP. Kejik , E. Schurig , F. Bergsma", and
R. S. Popovic'Ecole I'olytechnique Federate de Lausanne,
SWITZERLAND, 'European Organization for
NuclearResearch, SWITZERLAND • 3 1 7
2B2.4 Novel Highly Miniaturized Multi-Stress SensorField Effect Transistor with Eight Source/DrainTerminalsM. Doelle, J. Bartholomeyczik, P. Ruther,
and O. PaulUniversity of Freiburg, GERMANY 321
2B2.5 2-D and 3-D Tactile Pin Display using SMAMicro-coil Actuator and Magnetic LatchT. Matsunaga', W. Makishi1, K. Totsu2,
M. Esashi", and Y. Haga'Tohoku University Biomedical Engineering Research
Organization. JAPAN. ''Tohoku University. JAPAN 325
• Pneumatic and Hydraulic Actuators
10:45-12:00 Tuesday, June 7
2C2.1 Small Footprint Knife Gate Microvalves forLarge How ControlStefan Braun, Sjoerd HaasI, Samir Sadoon,
Anthony S. Ridgevvay, Wouter van
der Wijngaart, and Goran StemmeRoyal Institute of Technology. SWEDEN 329
2C2.2 Comparison of Two Seal Technologies forHydraulic MicroactuatorsMichael De Voider', Jan Peirs1,
Dominiek Reynaerts1. Johan Coosemans',
Robert Puers , Olivier Smal~.
and Benoit Raucent"Katholieke Universiteit Leuven, BELGIUM,
" Universiteit Catholique de Louvain, BELGIUM 333
2C2.3 Fuel and Air Supply System forCombustion Based Power SourcesDaisuke Satoh, Shuji Tanaka, andMasayoshi EsashiTohoku University, JAPAN 337
2C2.4 Charaterization and Modeling of a Liquid-VaporPhase Change Membrane Actuator with anIntegrated SU-8 Micro CapillaryWicking StructureS. A. Whalen1, S.Y. Won2, R. F. Richards2,
D. F. Bahr2, and C. D. Richards"Sandia National Laboratories, USA,
"Washington State University, USA 342
2C2.5 A Lobster-Sniffing Inspired Actuator forManipulation of Micro-Objects viaControlling Local FluidChia-Fang Chiang, Cheng-Hsiang Liu,
Chieh Chang, and Cheng-Hsien Liu
Ying-Chih Wang, Jianping Fu, Pan Mao,
and Jongyoon HanMassachusetts Institute of Technology, USA •••• 3 5 2
National Tsing-Hua University, TAIWAN 348
• Microfiuidics
10:45-12:00 Tuesday. June 7
2D2.1 Nanofluidic Molecular Filtere for Efficient ProteinSeparation and Preconcentration
2D2.2 Nanoliter Liquid Handling on a Low CostDisposable with Embedded Fluid ActuatorsBjorn Samel, Volker Nock, Aman Russom,Patrick Griss and Goran StemmeRoyal Institute of Technology. SWEDEN 356
2D2.3 Microfluidic Device for Immobilization of Bio-Vesicles Towards Controlled on-chip ElectrofusionD. Ziegler, Ph. Coquet, A. Tixier-Mita,
G. Tresset, H. Fujita, S. TakeuchiThe University of Tokyo. JAPAN 360
2D2.4 An on-chip Autonomous Microfluidic CoolingSystemAbhishek K. Agarwal, Sudheer S. Sridharamurthy,David J. Beebe and Hongrui JiangUniversity of Wisconsin-Madison, USA 364
2D2.5 A Planar 2-Stage MicromixerB. Stoeber, D. Liepmann, and S. J. MullerUniversity of California at Berkeley, USA 368
• Microlens/Laser Applications
13:30-14:45 Tuesday, June 7
2A3.1 Novel Fabrication Method of Self Positioned andFocal Length Tuned MicrolensSei-Hwan Jung1, Kook-Nyung Lee",Yun-Ho Jang', and Yong-Kweon Kim'Samsung SDI Co.. Ltd.. KOREA.
2A3.3 Application of Flowing Thermal Lens to FlowSensors for Microchemical ChipsYoshikuni Kikutani12, Keisuke Morishima1'2,
Manabu Tokeshi ", Jun Yamaguchi', Takashi
Fukuzawa3, Akihiko Hattori'1, Yoshikazu Yoshida',
Mitsuo Kitaoka1, and Takehiko Kitamori'"'4
The Research Association of Micro Chemical Process
Technology. JAPAN. 'Kanagawa Academy of Science
and Technology. JAPAN. Nippon Sheet Glass
Co., Ltd.. JAPAN. 4The University of Tokyo. JAPAN 380
2A3.4 High Aspect Ratio Nano-Structures (HAMS) forPhotonic MEMS Based on Vertical DBRArchitectureFrederic Marty', Bassam Saadany1, Tarik
Bourouina', Yoshio Mita , and Tadashi Shibata1'' ESIEE-ESYCOM, FRANCE.
'The University of Tokyo, JAPAN ••• 3 8 4
xi
2A3.5 MEMS Injection-Locked LaserX. M. Zhang, A. Q. Liu, H. Cai, C. Lu, and
D. Y. TangNanyang Technological University, SINGAPORE 388
• Physical Sensors II
13:30-14:45 Tuesday, June 7
2B3.1 Effects of Stress on the Temperature Coefficientof Frequency in Double Clamped Resonators
Renata Melamud, Matt Hopcroft, Chandra Jha,Bongsang Kim, Saurabh Chandorkar,and Rob Candler, Thomas W. KennyStanford University, USA
2B3.2 Novel Integrated Shock Protection for MEMSSang Won Yoon, Navid Yazdi,
Noel C. Perkins, and Khalil NajafiUniversity of Michigan, USA
• 392
- 396
2B3.3 A New Self-Test and Self-Calibration Conceptfor Micro-Machined GyroscopesT. Link1, 1. Simon', M. Trachtler',
A. Gaisser , M. Braxmaier , Y. Manoli '",and H. Sandmaier'HSG-1MIT, GERMANY, ''1MTEK, GERMANY,' Tsinghua University of Beijing, CHINA,
"University of Stuttgart, GERMANY 401
2B3.4 Design of a Micromachined CMOS CompassN. Dumas, L. Latorre, and P. NouetUniversity Montpellier, FRANCE 405
2B3.5 A Hard-Disk Drive Tracking ServoMicroactuator Driven by PZT with StrokeAmplification MechanismToshiki Hirano and Henry YangHitachi Global Storage Technologies, Inc., USA 409
• Packaging of Microsystems
13:30-14:45 Tuesday. June 7
2C3.1 Fabrication of Miniaturized Electron Beam SystemHak Kim', Changho Han1, Hyeon Cheol Kim1,Soondon Choi", and Kukjin Chun'Seoul National University:, KOREA,
'Yeung Nam University:, KOREA 413
2C3.2 Monolithic Integration of High Voltage DriverCircuits and MEMS Actuators by ASIC-LikePostprocessK. Takahashi1, H. N. Kwonu , M. Mita\
H. Fujita', H. Toshiyoshi1, K. Suzuki4,
and H. FunakiUniversity of Tokyo, JAPAN, 'Gwangju Institute of
Science and Technology, KOREA, Japan Aerospace
Exploration Agency, JAPAN, ^TOSHIBA Corp.. JAPAN 417
2C3.3 Microlens Array and Micro Clampers for HighPerformance Optoelectronic Devices Packaging
and Masayoshi Esashi'Tohoku University, JAPAN, 2Ajou University-, KOREA 427
2C3.5 H2/Air Self-Breathing Micro PEM Fuel CellStacks with MEMS Fabrication TechnologyCong Chen', Tao Wang', Peitao Dong',
Xigui Zhang1, Jufeng Li', Dan Zheng",
Baojia Xia', and Xinxin Li1
Chinese Academy of Sciences, CHINA,
Shanghai Institute of Technology, CHINA 433
• Bio-cells
13:30-14:45 Tuesday, June 7
2D3.1 InvitetLSpeaker
Disposable Polymer "Smart" Lab-on-a-chip forPoint-of-care Testing (POCT) in ClinicalDiagnosticsChong H. AhnUniversity of Cincinnati, USA 437
2D3.2 Design and Operation of a MicromachinedBubble-Jet Cell Sorter
Chung-Chu Chen1, Jen-Shiang Wang2,
Stefan Zappe', Xiaojing Zhang , and Olav Solgaard"Wayne State University. USA, 'Stanford University,
USA, Massachusetts Institute of Technology, USA 441
2D3.3 Multi Particles and Biomolecules Sorting System usingThermoreversible Gelation Controlled by DMD
Shota Watabe , Masayasu Tatsuoka ,
Tomohiro Shimomae1, Yoshitaka Shirasaki',
Jun Mizuno2, Takashi Funatsu', and Shuichi Shoji1
'Tokyo University, JAPAN, "Waseda University, JAPAN 445
2D3.4 Dispensing of Cells for Highly Parallel Productionof Living Cell MkroarraysOliver Gutmann, Markus K. Wintermantel,
Remigius Niekrawietz, Bas de Heij,
Roland Zengerle, and Martina DaubUniversity of Freiburg, GERMANY 449
• Sensing Systems/Networks
Poster Session 14:45-17:30 Tuesday. June 7
2E4.1 RF Smart-Sensor for Venous Ulcer TreatmentMirco Meiners1, Martin Sultenguth1,Wjatscheslaw Missal', Timo Schary',Wolfgang Benecke1, Walter Lang1, andMarkus Stilcker"University Bremen, GERMANY.
"St. Josef Hospital, GERMANY 453
XII
2E4.2 "Chip-Size" Antennas for Implantable Sensorsand Smart DustP. Basset'-', F. Alfaro', D. Novosel2,
A. de la Plaza2, D. Stancil1, and G. K. Fedder'Carnegie Mellon University, USA,
'Novocell Semiconductor, USA,
'ESYCOM-ESIEE, FRANCE 457
2E4.3 Simplified Circuit Modeling and Fabrication ofIntrabody Communication DevicesKeisuke Hachisuka', Yusuke Terauchi1,
Yoshinori Kishi', Terunao Hirota1,
Ken Sasaki , Hiroshi Hosaka , and
Koichi Ito"The University of Tokyo, JAPAN,
"Chiba University, JAPAN 461
2E4.4 A Portable Multi-Sensor Datalogger for HeartRate Variability (HRV) Study DuringSkydiver's Free Fall
B. Hermans, B. Verheyden, F. Beckers,A. Aubert, and R. PuersK.U.Leuven, BELGIUM 465
2E4.5 SiC Pressure Sensor for Detection of CombustorThemio-Acoustic InstabilitesRobert S. Okojie, John C. DeLaat, andJoseph R. SausNASA Glenn Research Center, USA 470
2E4.6 Multipole Marker and Correlation Image Sensorfor Position and Pose Estimation inSensor NetworksYohei Nagai, Takaaki Shimizu, Toru Kurihara,
Nobutaka Ono, Takaaki Nara, and
Shigeru AndoThe University of Tokyo, JAPAN 474
2E4.7 A Locally Autocompensating Image SensorNils Friedrich and Markus BoehmUniversity of Siegen, GERMANY 479
• Pressure SensorsPoster Session 14:45-17:30 Tuesday. June 7
2E4.8 A Micromachined Polyurethane/Stainless-Steel
Capacitive Pressure Sensor without Cavity and
Diaphragm
Kenichi Takahata and Yogesh B. GianchandaniUniversity of Michigan, USA 483
2E4.9 Diaphragm-Type Miniature Optical Fiber PressureSensor with a Sleeve
T. Watanabe, Y. Kaneko, M. Shimada, andK. TakahashiSaitama University. JAPAN 487
2E4.10 Liquid-Core, Piezoresistive, Fully Polymer-BasedPressure SensorJan Lichtenberg and Andreas HierlemannETH Zurich. SWITZERLAND 491
2E4.11 Proposal of a New Magneto-Transistor with aRecombination Region in the Base of theBipolar TransistorMitsuteru Kimura and Sin TakahashiTohoku-Gakuin University. JAPAN
2E4.12 A Thin Film Strip for Aerodynamic BodyPressure Profile MonitoringM. Zagnoni, A. Rossetti, P. Proli,
A. Golfarelli, S. Callegari, A. Talamelli,
E. Sangiorgi, and M. Tartagni
495
University of Bologna. ITALY- •499
2E4.13 Sapphire-based Capacitance Diaphragm Gaugefor High Temperature ApplicationsT. Ishihara1, M. Sekine', Y. Ishikura1,S. Kimura , H. Harada , M. Nagata , andT. Masuda"'Yamatake Corporation, JAPAN,
'Gunma Industrial Technology Center, JAPAN 503
• Accelerometers and Gyroscopes
Poster Session 14:45-17:30 Tuesday, June 7
2E4.14 Two-Chip Implemented, Wafer-Level HermeticPackaged Accelerometer for Tactical and InertialApplications
Hyoungho Ko , Sangjun Park , Byoung-doo Choi ,
Yonghwa Park', Geunwon Lim1, Seung-Joon Paik',
Ahra Lee", Kwangho Yoo", Sangmin Lee",
Jaesang Lim", Sang Chul Lee', Min Ha Park ,
Flyun-Su Jang, Jeongpyo Lee ,
Yong Kyu Roh . and Dong-il "Dan" Cho1"'Seoul National University, KOREA,:SML Electronics, Inc., KOREA,
'Hyundai MOBIS. KOREA 507
2E4.15 SOI Micromachined 5-Axis Motion Sensor usingResonant Electrostatic Drive and Non-ResonantCapacitive Detection Mode
Yoshiyuki Watanabe1, Toshiaki Mitsui1, Takashi
Mineta", Yoshiyuki Matsu', and Kazuhiro OkadaYamagata Research Institute of Technology. JAPAN.
"Hirosaki University. JAPAN.
'Wacoh Corporation. JAPAN 51 I
2E4.16 Sub-Micro-Gravity Capacitive SOIMicroaccelerometersB. Vakili Amini, R. Abdolvand and F. AyaziGeorgia Institute of Technology, USA 515
2E4.17 A Novel Thermal-Bubble-Based MicromachinedAccelerometerKe-Min Liao1, Rongshun Chen1, and
Bruce C. S. Chou"National Tsing Una University, TAIWAN,
''LighTuning Technology Inc.. TAIWAN 519
2E4.18 Fabrication of Nano-Gap Accelerometer using?hoto-Assisted Electrochemical Etching
XIII
Hyeon Cheol Kim, Dae Hyun Kim,Jinwoo Jeong, and Kukjin ChunSeoul National University, KOREA
2E4.19 Poly-silicon Packaging and a New AnchoringTechnology for Thick SOI MEMS - DynamicResponse Model and Application toOver-Damped Inertial Sensors
B. Diem , J. C. Barbee , F. de Creecy ,
S. Giroud1, D. Renaud1, H. Grange1,
J. Hammond", J. Vandemeer', R. Roop", and
B. Gogoi"'CEA-LET1, FRANCE, '"Freescale Semiconductor, USA,
'AKUSTICA INC., USA
2E4.20 Vacuum Packaged Single Crystal SiliconGyroscope with Sub mdeg/s/VHz ResolutionJune-Young Lee , Seung-Hoon Jeon ,
Hyoung-Kyoon Jung , Hyun-Kee Chang",
and Yong-Kweon Kim'Seoul National University, KOREA,
'Intellimicrons Co.. LTD.. KOREA
• 527
• 5 3 1
2E4.21 A Digitally Controlled MEMS Gyroscope with3.2 deg/hr Stability
H. Rodjegard', D. Sandstrom1, P. Pelin1, N.Hedenstiema', D. Eckerbert , and G. I. Andersson'imego AB, SWEDEN. "SensoNor AS. NORWAY 535
2E4.22 Two-Mass System with Wide Bandwidth forSiOG (Silicon on Glass) Vibratory GyroscopesSeung-Hoon Jeon , June-Young Lee",
Hyoung-Kyoon Jung", Hyun-Kee Chang',
and Yong-Kweon Kim"Hyundai Motor Company and Kia Motors Corporation.
KOREA, "Seoul National University, KOREA,
'inteHimicrons Co. Ltd.. KOREA • 539
• Physical Sensors
Poster Session 14:45-/7:30 Tuesday. June 7
2E4.23 Technology and Integration of Poly-CrystallineDiamond Piezoresistive Position Sensor forCochlear Implant ProbeYuxing Tang1, Dean M. Aslam', Jianbai Wang",and Kensall D. Wise2
Michigan State University, USA,
'University of Michigan. USA 543
2E4.24 A Dynamic Millinewton Thrust VectorMeasurement System in SiliconAnders B. Eriksson, Robert Lindegren,and Johan Kohler'Uppsala University-, SWEDEN 547
2E4.25 Micro Force Sensor with PiezoresistiveAmorphous Carbon Strain GaugeE. Peiner', A. Tibrewala1, R. Bandorf2, S. Biehl2,
H. Luhje", and L. DoeringTechnical University Braunschweig, GERMANY,
2E4.26 Multidirectional Force and Torque Sensor forInsect Flight ResearchMansoor Nasir1, Michael Dickinson",
and Dorian LiepmannUniversity of California at Berkeley. USA.
'California Institute of Technology, USA 555
2E4.27 A New Capacitive Displacement Sensor withHigh Accuracy and Long RangeMoojin Kim', Wonkyu Moon1, Euisung Yoon",
and Kwang-ryeol Lee"Pohang University of Science and Technology. KOREA,
'Korea Institute of Science & Technology, KOREA 559
2E4.28 Thin Film NiTi Fluidic-Thermostat ArrayDaniel D. Shin, Dong-Gun Lee, Kotekar P.
Mohanchandra, and Gregory P. CarmanUniversity- of California at Los Angeles, USA 563
2E4.29 Characteristics of Improved Thin-FilmMultijunction Thermal ConvertersY. H. Lee1, S. W. Kwon2, K. J. Kim2,K. C. Lee2, S. I. Park2, and Y. E. lhm'Cluing Nam National University, KOREA,
'Korea Research Institute of Standards and
Science, KOREA 567
2E4.30 Micromachined Thermal Conductivity Sensorfor the Liquid PhaseJ. Kuntner', F. Kohl2, and B. Jakoby1
Vienna University of Technology. AUSTRIA,
'Austrian Academy of Sciences. AUSTRIA 571
2E4.31 A High-Temperature Thermopile FabricationProcess for Thermal Flow SensorsRainer Buchner, Klaus Rohloff,
Wolfgang Benecke, and Walter LangUniversity of Bremen, GERMANY 575
2E4.32 Thermal Flexible Foil-FingerprintsensorPatrick Schippers, Michael P. Dobmeier,
Ruben Kuehlewein, Burkhard Biistgens,
and Gerald UrbanAlbert-Ludwigs-Universitat. GERMANY 579
2E4.33 Highly Sensitive Electron-Emission-Type InfraredSensor using a Single Crystalline LiNbOjDaisuke Takamuro, Hidekuni Takao,
Kazuaki Sawada. and Makoto IshidaToyohashi University of Technology, JAPAN 581
2E4.34 A Floated Absorbing Structure for UncooledMicrobolometerM. S. Ahn12, Y. H. Han', H. J. Shin1,
K. T. Kim', S. H. Lee', S. Moon1,
and M. H. Oh2
Korea Institute of Science and Technology, KOREA,2Dankook University-, KOREA 585
XIV
2E4.35 Development of a Moems Sun Sensor forSpace ApplicationsTobias Bohnke and Lars Stenmark "'Uppsala University, SWEDEN, :ACR, SWEDEN 589
2E4.36 Novel High Q-Factor Resonant MicrosensorPlatform for Chemical and BiologicalApplicationsJae Hyeong Seo and Oliver BrandGeorgia Institute of Technology, USA 593
2E4.37 Impact of Slot Location on ThermoelasticDissipation in Micromechanical ResonatorsRob N. Candler', Matt Hopcroft',Carrie W. Low", Saurabh Chandorkar,Bongsang Kim', Mathew Varghese3,Amy Duwel3, and Thomas W. Kenny1
Stanford University, USA, ' University of California,
USA, Charles Stark Draper Laboratory, USA 597
2E4.38 A New Height-Adjustable Aeromems SurfaceFence Probe Fabricated in SOI Technology forHigh Resolution Wall Shear Stress Measurementin Turbulent RowsM. Schiffer, E. Obermeier, F. Grewe,A. Ebner, and H. H. FernholzTechnical University of Berlin, GERMANY' 601
2E4.39 Particle Cytometer Utilizing Rotating FlexuralPlate Modes and Capacitive SensingAbhijit Sathaye and Amit LaiUniversity of Wisconsin-Madison, USA,
'Cornell University USA
2E4.40 An Injection Quantity Sensor forAutomotive ApplicationsU. Schmid and H. SeidelSaarland University, GERMANY
2E4.41 Degradation Level Monitoring Sensor forInsulating Oil of Power Transformer usingCapacitive High Aspect Ratio of ElectrodesSunghyun Kim, Yiseok Kim, Jooran Yang,Sangjin Kwon, and Sekwang ParkKvungpook National University, KOREA
•605
609
• 613
2E4.42 Fabrication and Characteristics of the SuppressedSidewall Injection Magnetotransistor using aCMOS ProcessYoun-Gui Song, Ji-Goo Ryu, Young-Shig Choi,
and Nam-Ho KimPukyong National University, KOREA 617
2E4.44 Optimization of the Piezoresistive AFMCantilever Design for use at CryogenicTemperatures
Seung Seoup Lee1, Yutaka Miyatake2,
Ichiro Shiraki , Toshihiko Nagamura",
Kazushi Miki', Takahito Ono1,
and Masayoshi Esashi1
1 Tohoku University, JAPAN, ''UN1SOKU Co.. LTD.,JAPAN. 'National Research Institute for
Materials Science. JAPAN •625
2E4.45 Frequency and Transient Analysis ofMicromachined U-Shaped Cantilever Devicesfor Magnetic Field MeasurementFranz Keplinger, Roman Beigelbeck", Franz Kohl".
Samuel Kvasnica , Artur Jachimowicz ,
and Bernhard Jakoby'Vienna University of Technology. AUSTRIA.
'Austrian Academy of Sciences. AUSTRIA
2E4.46 Enhanced Functionality of Cantilever BasedMass Sensois using Higher Modes andFunctionalized Particles
Soren Dohn, Rasmus Sandberg,
Winnie Svendsen, and Anja BoisenTechnical University of Denmark. DENMARK
2E4.47 Fully Integrated CMOS Resonant CantileverSensor for Biochemical Detection in LiquidEnvironments
Cyril Vancura', Yue Li', Kay-Uwe Kirstein1,
Fabien Josse", Andreas Hierlemann , and
Jan Lichtenberg'ETH Zurich, SWITZERLAND,
' Marquette University, USA
2E4.48 A Piezoelectric Micro-Cantilever Bio-Sensor usingthe Mass-Microbalancing Technique withSelf-ExcitationYeolho Lee, Geunbae Lim, and Wonkyu MoonPohang University of Science and Technology-,
KOREA
• 6 3 0
• 6 3 6
.... 540
• 6 4 4
2E4.49 First Step Towards a Fully Automated TrimControl for Liquid Deposition Device at theMicroscale using Piezoresistive Cantilevers Row
'LAAS-CNRS FRANCE.'University of Tokyo. JAPAN • 648
• Micro/Nano Cantilever Sensors
Poster Session 14:45-17:30 Tuesday, June 7
2E4.43 The AFM Tweezere: Integration of a TweezersFunction With an AFM ProbeTetsuya Takekawa, Kazuhisa Nakagawa,
and Gen HashiguchiKagawa University', JAPAN 621
• Fluid Handling Actuators
Poster Session 14:45-17:30 Tuesday. June 7
2E4.50 Micro Valves Using Nanoparticle-Based GiantElectrorheological FluidXize NIU, Weijia WEN, and Yi-Kuen LEEThe Hong Kong University of Science and Technology.
HONG KONG 652
XV
2E4.51 Buekeld-Type Valves Integrated byPaiylene Micro-TubesJiun-Min Wang , Kuan-Chun Liu ,
Kai-Chung Ko', Lung-Jieh Yang1, and
Wen-Pin Shih2
Tamkang University, TAIWAN,
'National Taiwan University, TAIWAN 656
2E4.52 A Capillary System with Thermal-Bubble-Actuated lxN Micro Flow Switch viaTime-Sequence Power Ontrol forContinuous Liquid HandlingChin-Ming Cheng and Cheng-Hsien LiuNational Tsing Hua University, TAIWAN 660
2E4.53 Thermopneumatic-Actuated PDMS Microvalveand Micropump Integrated with the SameFabrication Process
Jong-Chul Yoo. Min-Chul Moon, C. J. Kang,
and Yong-Sang KimMyong/i University, KOREA 664
2E4.54 A Micro Diaphragm Air Pump for Air Supply ofMicro Fuel CellXing Yang, Zhaoying Zhou, and Xiongying YeTsinghua University, CHINA 668
2E4.55 A Low Temperature Co-Fired Ceramic SolidPropellant Microthruster for MicropropulsionApplications
Kaili Zhang , Siaw Kiang Chou ,
and Simon S Ang"National University of Singapore. SINGAPORE.
Dong Lin, and Guibing DuTsinghua University, CHINA 676
• Microactuators
Poster Session 14:45-17:30 Tuesday. June 7
2E4.57 Foxtail ActuatorsMakoto Mita , Kuniyuki Kakushima",
Manabu Ataka , Hiroshi Toshiyoshi ,
and Hiroyuki FujitaThe Japan Aerospace Exploration Agency, JAPAN,
'Tokyo Institute of Technology, JAPAN.
'The University of Tokyo, JAPAN 680
2E4.58 Out of Plane Motion of AssembledMicrostructures using a SinglemaskSOI ProcessM. Last, V. Subramaniam, and K.S.J. PisterUC Berkeley, USA 684
2E4.59 Resonant Drive for Stabilizing Parallel-PlateActuators Beyond the Pull-in Point
•688
2E4.60
2E4.61
2E4.62
2E4.63
2E4.64
Electrostatic Fringe-Field Actuation forLiquid-Metal DropletsProsenjit Sen and Chang-Jin "CJ" KimUniversity of California at Los Angeles, USA
High Power Electrostatic Motor withMicropattemed Electret on Shrouded TurbineTakashi Genda, Shuji Tanaka,
and Masayoshi EsashiTohoku University. JAPAN
2E4.65
2E4.66
2E4.67
• 693
Baris Cagdaser and Bernhard E. BoserUniversity (if California at Berkeley. USA
A Microball-Bearing-Supported LinearElectrostatic Micromotor with BenzocyclobutenePolymer Insulating LayersAlireza Modafe1, Nima Ghalichechian ,
Alex Frey , Jeffrey H. Lang",
and Reza GhodssiUniversity of Maryland, USA,
'Massachusetts Institute of Technology, USA
2-D Scanning Mirror using Plastically DeformedAngular Vertical Comb Drive ActuatorJongbaeg Kim, Dane Christensen, and Liwei LinUniversity of California at Berkeley. USA 697
High-Speed Characterization and MechanicalModeling of Microscale, Axial-Flux,Permanent-Magnet Generators
David P. Arnold1, Yeun-Ho Joung",
luliea Zana', Jin- Woo Park',
Sauparna Das', Jeffrey H. Lang ,
David Veazie", and Mark G. AllenGeorgia Institute of Technology. USA.
"Clark Atlanta University, USA,
'Massachusetts Institute of Technology, USA • 701
• 7 0 5
• 709
A Piezoelectric Micro-Actuator with ThreeDimensional Structure and its Micro-FabricationPeng Gao', Kui Yao", Xiaosong Tang".
Xujiang He", Santiranjan Shannigrahi",
Yaolong Lou1, Jian Zhang", and Kanzo Okada'Sony Electronics fS) Pte Ltd, SINGAPORE, institute
of Materials Research and Engineering. SINGAPORE 713
Development of Monolithic PZT Microstagefor the Application of Ultra High-DensityData StorageH.G. Xu1, K. Okamoto2, D.Y. Zhang", T. Ono1,
and M. Esashi1 Tohoku University. JAPAN, "NEC Tokin Corporation,
JAPAN. 'Beihang University. CHINA 717
A Cylindrical Micro Ultrasonic Motor usingMicro-Machined Piezoelectric VibratorTakefumi Kanda, Akira Makino,
Yoshitaka Omori, and Koichi SuzumoriOkavama University JAPAN 721
XVI
2E4.68 A Self-limited Large-Displacement-RatioMicromechanical AmplifierJ. Li12, Z. S. Liu3, C. Lu\ Q. X. Zhang2,and A. Q. Liu1
Nanvang Technological University, SINGAPORE,
'"Institute of Microelectronics, SINGAPORE,
' Institute of High Performance Computing,
SINGAPORE
2E4.69 Shape Memory Thin Film Actuator forHolding a Fine Blood VesselTakashi Sugawara1, Ken-ichi Hirota', MasaruWatanabe1, Takashi Mineta1, Eiji Makino',Satoshi Toh , and Takayuki Shibata"Hirosaki University-, JAPAN,
"Toyohashi University, JAPAN
2E4.70
2E4.71
2E4.72
2E4.73
Ti-Ni SMA Film Actuated Si Cantilever Beamsfor MEMS Probe CardTakahiro Namazu, Shozo Inoue, Youichi Tashiro,
Yuuta Okamura, and Keiji KoterazawaUniversity of Ilyogo, JAPAN
Design and Fabrication of MuIti-Degrees-of-reedom Single Crystal Silicon MoveablePlatforms on SOI WaferHuai-Yuan Chu, Shih-Wei Lee,and Weileun FangNational Tsing Hua University-, TAIWAN
Fabrication and Testing of Three-DimensionalStages Providing Displacement of up to 8 umYasuhisa AndoNational Institute of Advanced Industrial Science and
Technology, JAPAN
Development of Intelligent Mckibben Actuatorwith Built-in Soft Conductive Rubber SensorShuichi Wakimoto, Koichi Suzumori,and Takefumi KandaOkayama University. JAPAN
A Reversible Thermo-Sensitive Hydrogel Clamperof Locomotive Mechanism in Gastrointestinal TractJinseok Kim1'2, Byungkyu Kim2, Soohyun Kim",Hyeon Cheol Kim', and Kukjin Chun''Seoul National University, KOREA,
'Korea Institute of Science and Technology. KOREA
2E4.75 A Membrane Actuator Based onPiezo-Polymer-Composite TechnologyElmar Just, David Pustan, and Peter WoiasAlbert-Ludwigs-University Freiburg, GERMANY
2E4.76 Magnetic Planar Micro GeneratorHynek Raisigel, Orphee Cugat,Jerome Delamare, Olivier Wiss,and Herve RostaingLaboratoire d"Electrotechnique de Grenoble, FRANCE •
2E4.77 A Unique Reliability Data Point: The Start-Stop
2E4.74
I Operation of a Polysilicon Micromotor at theEight Year Mark
I Alain Izad, Srihari Rajgopal,
: and Mehran MehreganyCase Western Reserve University, USA 762
725 • MEMS Design & Analysis
Poster Session 14:45-17:30 Tuesday, June 7
2E4.78 Analysis and Modeling of Curvature inCopper-Based MEMS Structures Fabricated usingCMOS Interconnect TechnologyMaric-Ange Eyoum , Nils Hoivik",
Christopher Jahnes", John Cotte".
• 729 : and Xiao-Hu Liu2
University of California at Berkeley. USA.
'IBM T.J. Watson Research Center. USA 764
2E4.79 Nonlinear Dynamics of Micro Impact Oscillatorsin High Frequency MEMS Switch Application
733 Weibin Zhang, Wenhua Zhang,
: and Kimberly L. TurnerUniversity of California at Santa Barbara. USA 768
2E4.80 Air Damping of Microbeam Rsonators in aLow VacuumWenjing Ye and Same Hutcherson"
• 737 ' Georgia Institute of Technology, USA,"Timken Corporation, USA 772
2E4.81 Parametric Model Extraction for MEMS Basedon Variational Finite Element TechniquesJan E. Mehner , Alexey Schaporin".
• 741 Vladimir Kolchuzhin", Wolfram Doetzel",and Thomas Gessner
: 'Fraunhofer Institute for Reliability and
Microintegration. GERMANY,
"Chemnitz University of Technology, GERMANY 776
745 2E4.82 Design and Performance of a MicroelectromagneticVibrationpowered GeneratorS. P. Becby1, M. J. Tudor1, E. Koukharenko',
N. M. White', T. O'Donnell2, C. Saha2,
S. Kulkarni", and S. Roy"University of Southampton, UK.
:Tyndall National Institute. IRELAND 780
2E4.83 Scavenging Energy from Human Body:Design of a Piezoelectric TransducerM. Renaud'", T. Sterken'2, P.Fiorini',R. Puers2, K. Baert', and C. van Hoof12
2E4.84 Closed form Analysis of Piezoelectric MultilayerBending Actuators using Constituent EquationsRiidiger G. Ballas1, Helmut F. Schlaak',
••• 757 and Andreas J. Schmid2
! Darmstadt University of Technology, GERMANY,
; "'Piezoproducts. Argillon GmbH GERMANY 788
749
XVII
2E4.85 Directivity Steering Principle for BiomimiciySilicon MicrophoneN. Ono, T. Arita, Y. Senjo, and S. AndoThe University of Tokyo, JAPAN • • 792
in LPCVD S13N4 Film with Ion ImplantationWendian Shi, Haixia Zhang, Shasha Wang,Guobing Zhang, and Zhihong LiPeking University, CHINA • 824
2E4.86 Analysis and Design of DifferentialElectromagnetic Transducer for ImplantableMiddle ear using Finite Element Method
Min-Kyu Kim1, Young-Ho Yoon',
Hyung-Gyu Lim1, Byung-Seop Song",
Il-Yong Park1, and Jin-Ho Cho1
Kyungpook National University, KOREA,:Daegu University, KOREA 796
2E4.87 Improvement of Thermal Response inTemperature Controlled Precise Three-AxisAccelerometer with Stabilized Characteristicsover a Wide Temperature RangeKyung 11 Lee , Hidekuni Takao , Kazuaki
Sawada', Hee Don Seo2, and Makoto Ishida'Toyohashi University of Technology, JAPAN,
' Yeungnam University, Korea 800
2E4.88 MEMS littman Tunable Laser usingCurve-Shaped Blazed GratingX. M. Zhang', H. Cai1, A. Q. Liu', J. Z. Hao2.D. Y. Tang', and C. Lu1
'Nanyang Technological University-, SINGAPORE,
'Institute for Infocomm Research, SINGAPORE • 804
2E4.89 The Frequency Design Nozzles Layout of thePiezoelectrically Actuated Micro Droplet GeneratorBased on a Fluid-Solid Interaction Modal Analysis
2E4.96 An in-situ Technique for Measuring Young'sModulus and Residual Stress of Each Layerfor Multi-layer FilmMeng Nie, Qing-An Huang, Weihua Li,
and Hua RongSoutheast University. CHINA 836
2E4.97 Reliability of Non-Released Microstruetures:Failure Analysis and Innovative Solution ProcessO. Millet', P. Muller2, O. Blanrue',B. Legrand2, D. Collard3, and L. Buchaillot2
Delfmems. FRANCE, 'Institute of Electronic,
Microelectronic and Nanotechnologies, FRANCE.
'University of Tokyo, JAPAN 840
2E4.98 Anisotropic Fracture Behavior of NotchedTensile Single Ciystal Silicon Thin FilmSpecimens on MicroscaleXueping Li, Takashi Kasai, Taeko Ando,Mitsuhiro Shikida, and Kazuo SatoNagova University. JAPAN 843
2E4.99 Effect of Gas Flow Ratio in PE-CVD onElastic Properties of Sub-Micron ThickSilicon Nitride Films for MEMSYoshitada Isono , Takahiro Namazu",Yoshihiro Saito , Akira Yamaguchi ,and Naoyuki Fukushima'Ritsumeikan University, JAPAN,
'University of Hyogo, JAPAN.
'Sumitomo Electric Industries. Ltd, JAPAN 847
2E4.100 Low Stress Atomic Layer Deposited Alumina forNano Electro Mechanical SystemsMarie K. Tripp', Christoph Stampfer",
Cari F. Herrmann', Christofer Hierold2,
Steven George', and Victor M. Bright'University of Colorado, USA,
'ETH Zurich, SWITZERLAND ••• 8 5 1
2E4.93 Modifying Residual Stress and Stress Gradient
2E4.101 Fabrication and Mechanical Characterization ofLCVD-Deposited Carbon Micro-SpringsK.L. Williams, J. Koler, and M. BomanUppsala University, SWEDEN • 855
XVIII
• Functional and New Materials
Poster Session 14:45-17:30 Tuesday, June 7
2E4.102 Fabrication of Polysilicon Gated-Nanowires andTheir Application for pA Precision CurrentMeasurementsSerge Ecoffey, Vincent Pott, Didier Bouvet,
Yusuf Leblebici, Michel Declercq,
and Adrian Mihai lonescuSwiss Federal Institute of Technology Lausanne.
SWITZERLAND 859
2E4.103 Concrete the Aligned CNT-FilmsHuai-Yuan Chu, Tso-Chi Chang,
Wen-Kuang Hsu, and Weileun FangNational Tsing Hua University, TAIWAN 863
2E4.104 Real Time Observation of Micromachined FieldEmission Tips using Transmission ElectronMicroscopeKuniyuki Kakushima1, Gen Hashiguchi",
Manabu Ataka , Hiroshi Toshiyoshi ,
and Hiroyuki Fujita'The University of Tokyo, JAPAN,
'Kagawa University. JAPAN 867
2E4.105 Performance and Reliability Study of Si ( l l l )CMOS Subjected to High Mechanical Stressfor Smart Sensor Application
Radhakrishna Vatedka, Yoshiko Kato,Hidekuni Takao, Kazuaki Sawada,and Makoto IshidaToyohashi University of Technology, JAPAN 871
2E4.106 High-Q Mechanical Tuning of MEMSResonators using a Metal Deposition-AnnealingTechniqueChristophe G. Courcimault and Mark G. AllenGeorgia Institute of Technology. USA 875
2E4.107 Piezoelectric Properties of Sputtered AFX onSilicon SubstrateK. Kano', K. Arakawa', Y. Takeuchi',M. Akiyama", N. Ueno", and N. KawaharaDenso Corporation, JAPAN,
Soneda , Satoshi Ueda", and Ippei Sawaki'Fujitsu Laboratories Ltd., JAPAN,
''Fujitsu Ltd., JAPAN 980
2E4.133 A Discrete Positioning Microactuaton LinearityModeling and VOA ApplicationMan Geun Kim and Jong Hyun LeeGnangju Institute of Science and Technology, KOREA 984
2E4.134 An Electrothermal SCS Micromirror forLarge Bi-Directional 2-D ScanningAnkur Jain and Huikai XieUniversity of Florida, USA 988
Chang-Wook Baek", and Yong-Kweon KimSeoul National University; KOREA,
'Chung-Ang University, KOREA
2E4.160 A Lateral Field-Emission RF MEMS DeviceKiyotaka Yamashita, Winston Sun,
Kuniyuki Kakushima, Hiroyuki Fujita,
and Hiroshi ToshiyoshiUniversity of Tokyo, JAPAN
2E4.161 5Ghz Low-Phase-Noise Oscillator Based onFBAR with Low TCFHao Zhang, Jongjin Kim, Wei Pang,Hongyu Yu, and Eun Sok KimUniversity of Southern California. USA
1084
•••• 1 0 8 8
1092
1096
1100
Author Index A-01Keyword Index A-132007 Announcement A-29