Determining the Elastic Modulus and Hardness of an Ultrathin Film on a Substrate Using Nanoindentation Citation Li, Han, and Joost J. Vlassak. 2009. Determining the elastic modulus and hardness of an ultrathin film on a substrate using nanoindentation. Journal of Materials Research 24(3): 1114-1126. Published Version doi:10.1557/JMR.2009.0144 Permanent link http://nrs.harvard.edu/urn-3:HUL.InstRepos:4262334 Terms of Use This article was downloaded from Harvard University’s DASH repository, and is made available under the terms and conditions applicable to Open Access Policy Articles, as set forth at http:// nrs.harvard.edu/urn-3:HUL.InstRepos:dash.current.terms-of-use#OAP Share Your Story The Harvard community has made this article openly available. Please share how this access benefits you. Submit a story . Accessibility
Determining the Elastic Modulus and Hardness of an Ultrathin Film on a Substrate Using Nanoindentation
Jun 21, 2023
Welcome message from author
This document is posted to help you gain knowledge. Please leave a comment to let me know what you think about it! Share it to your friends and learn new things together.
Related Documents
