Wacker Siltronic AG Semicon 2002 / Ehmann / 17.04.2002 1 Determination of Organic Contaminants on Silicon Wafer Surfaces Determination of Organic Contaminants on Silicon Wafer Surfaces Th. Ehmann , L. Fabry, L. Kotz, S. Pahlke, C. Mantler Wacker Siltronic AG, Research and Development International POB 1140 84479 Burghausen, Germany [email protected]
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Wacker Siltronic AG
Semicon 2002 / Ehmann / 17.04.20021
Determination of Organic Contaminants
on Silicon Wafer Surfaces
Determination of Organic Contaminants
on Silicon Wafer Surfaces
Th. Ehmann, L. Fabry, L. Kotz, S. Pahlke, C. Mantler
Wacker Siltronic AG, Research and Development InternationalPOB 1140 84479 Burghausen, Germany
Assumed Binding of OxalateAssumed Binding of Oxalate
Si Si Si Si Si Si
OH OH OH OH OHOC
O COOHSO4
2- Cl-aqueous film
native oxide
silicon substrate
Wacker Siltronic AG
Semicon 2002 / Ehmann / 17.04.200212
Adsorption of Dicarboxylic Acid and subsequent Chemical Reaction on Si SurfaceAdsorption of Dicarboxylic Acid and subsequent Chemical Reaction on Si Surface
M. Mitsuya, N. Sugita, Chemisorption of Dicarboxylic Acids on an Si(111) Surface and Subsequent Chemical Reactions at the Surface of Adsorbed Molecular Layers. Langmuir 1997, 13, 7075 - 7079.