Materials and Earth Sciences Department Institute of Materials Science Advanced Thin Film Technology Deposition and modelling of lead zirconate titanate thin films on stainless steel for MEMS applications Wachstum und Modellierung von Blei-Zirkonat-Titanat Dünnschichten auf Edelstahl für MEMS-Anwendungen Zur Erlangung des akademischen Grades Doktor-Ingenieur (Dr.-Ing.) Genehmigte Dissertation von Juliette Marie Alice Cardoletti aus Chamonix Mont-Blanc, Frankreich Tag der Einreichung: June 2, 2021, Tag der Prüfung: September 7, 2021 1. Gutachten: Prof. Dr. Lambert Alff 2. Gutachten: Prof. Dr. Mario Kupnik Darmstadt – D 17
Deposition and modelling of lead zirconate titanate thin films on stainless steel for MEMS applications
Jun 26, 2023
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