No Slide Title
Dana Lee ChurchLaser Systems, Software and Integrated Automation
SolutionsDana Lee [email protected]:
443-13-8686https://www.facebook.com/teosysengineering/#Systems
& Software:
410-989-6420https://www.facebook.com/SystemsSoftwareEtc/#
TeoSys Engineering LLC ConfidentialTeoSys Engineering LLC
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What Drives Us What we like to doFinding new and innovative ways
of applying lasers and laser solutions to resolve difficult,
customer driven applications.
Finding and developing robust solutions where others could
not.
Demonstrating lasting and persistent value of our services to
our clients and customers.
Seeking to obtain complete customer satisfaction while
maintaining a nurturing, creative and fulfilling work
environment.
Currently installed customer base.
Over 60 micromachining systems and software installed
globally!
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Custom TeoSys user interface software aids the operator in
making small marks without the knowledge of a CAD system
interface.
Capabilities Micro Marking in the Very Small
Excimer marking using line widths down to 5 microns. Spot
overlap up to 0.33m in pulse synchronized output mode. This means
that we are guaranteed a spot at every 0.33ms.
Small feature micro marking on transparent media.
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3
Custom Systems - LMS-1500, IR / Green Micromachining System
(532nm and 1,064um)
Semi-Automatic Parts HandlingHigh Speed Precision Rotary
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Applications Channel Drilling
Custom Motion Systems and FixturesChannel drilling in steel bar
stock using 532nm, frequency doubled Nd:YAG laser.
Channel widths of 25um through 500ums which spans the gamut
between micromachining and traditional mechanical machining.
(right)
Tube cutting in proprietary pattern. (below)
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Applications Channel Drilling
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Custom Laser Systems LMS 5000 12 Axis Automated 2 Part Type
Drilling System
Automated Part Loading , Drilling, Measurement and Ejection in
Laser Drilling SystemLoads and Orients up to 6 Different Part Types
Custom designed system to drill 50um (10um 200um) holes in steel
mini-cups comprised of mostly nickel.
Laser is an 1064nm Nd:YAG frequency doubled to 532nm.
Automation consists of the following: feeding mechanism;
transfer system; pick and place tool; and a main drilling rotary
index plate with 8 individual stations for part loading, drilling,
hole measurement and pass/fail ejection.
Integrated fiber sensors for part orientation positioned on 1st,
16 part rotary table
In-house designed hole diameter measurement device using 1
photodiode and 2 photodetectors
System is integrated via distributed control software with
master control program providing for a simplified human machine
interface (HMI) for non-technical operators.
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1. Automatic part loading via rung system which gathers parts
from a bin with a single orientation.
2. Parts are rotated while facing upwards and roll down a track
where they are placed onto a plate which separates each part from
the other3. Parts are picked up via vacuum tool and placed onto the
indexing plate at the loading station4. Parts put onto the index
plate in the appropriate alignment
Each part type has a different drill location
The part is rotated by the index plate to the drill station
where it is laser drilled
5. After drilling, the part rotates to the measurement station
where it is measured6. Based on the measurement, the part is then
ejected into a good or a bad binLMS-5000 Part Automation System
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Automatic generation of tool cut path programs based on user
specified parameters including the following: Part type Hole
Diameter Stage Speed Trepan - Number of Passes Laser Energy Real
time display of system status bits Real time display of drilling
operation Operational modes such as dry run and full auto drill
In-Situ Measurement of the machining features (hole
diameter)
Vertical distance between calipers, horizontal distance and
point to point distance between horizontal and vertical
intersecting lines
Bright field, dark field illumination, top and bottom
illumination
Camera switching for operator feedback of multiple automation
stations Motion system stage feedback for operator (axis
position)
Automatic calibration (in-situ) of the optical (flow)
measurement system which measures hole diameter
Automatic statistical process control display and recording to
status files
LMS-5000(Software & Control)
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Custom Systems Software LMS-5000 Integrated Automatic
Inspection
Creation of 3rd order regression curve for calibration of photo
detector with actual hole diameters to create the relationship
between diameter and application flow rates. Ability to take real
time measurements from instrument Status and feedback during
operation Diameter measurement via light extinction sensor made of
dual laser diodes / photo detector combination Measure hole
diameters with 1 micron resolution from 20um through 75um Basic
hole positional information within 25um of true position Diameter
measurement calculated within 500ms and position measurement within
1 second.
Incorporation of an Ophir Profilometer to measure beam profileIn
House Developed Measurement System (OFT)
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This is an example of the second level interconnect for the LMS
5000 12 Axis Part Drilling Laser System. It depicts the 3 major
control systems (motion systems) that make up the entire parts
automation system. Each arrow that interconnects the major nodes
denotes a digital or analog signal which I designed using the
digital and analog IO of the system motion control boards in order
to communicate the separate system states to each other node. The
system states are event driven so that no race conditions occur in
either the axis movement or the timing of the main controlling
index plate which performs the loading, drilling, measurement and
ejection of each of the parts.Each motion system node has a motion
controller board controlling 4 stages.
Systems Engineering 12 Axis Motion Control & Laser Part
Drilling System
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Systems Engineering 12 Axis Motion Control & Laser Part
Drilling SystemThis is an example of the hardware interconnect for
the LMS 5000 12 Axis Part Drilling Laser System.
It depicts the 3 major control systems (IO between motion
systems and peripherals) that make up the entire parts automation
system.
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Standard Systems LMS-2500 - Heavy Duty Excimer Laser SystemHeavy
Duty T300, 193nm Deep UV 300 Hz HighSpeed Excimer Laser with Power
Output of 14-18mJ per pulse at 100 Hz.2x4 1/4um accurate precision
stages (X, Y, Z, U)Automated Gas Handling. SystemTwo visible zoom
levels (1 co-axial w/laser beam)Integrated UV and Visible Imaging
with projected reticule for focusingFour Axis monochromatic (red)
illumination systemAutomatic programming of focus (X Axis)
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Standard Systems LMS-550 Desktop Excimer Laser System193nm Deep
UV Laser Source Fully IntegratedDesktopUser Friendly
Heavy Duty T20 Laser.193nm Deep UV 25 Hz Excimer Laser: 7 - 10mJ
per pulse at 100 Hz.2x1 1.52um accurate stages (automated X, Y /
manual Z Axis).1 5um accurate manual Z-Stage.Manual Gas
Handling.Software fully integrates motion control, laser and text
& DXF graphics data entry, scaling and translation on work
surfacePortable Version LMS-550
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Standard Systems LMS-650 Professional Excimer Laser System
193nm Deep UV 100-200 Hz Excimer Laser10 - 12mJ per pulse.2x2
1.52um accurate stages (X, Y automated Axis).1 2um accurate manual
z-stage.Manual Gas Handling.Integrated UV and Visible Imaging with
projected focusing reticule.Two Axis monochromatic illumination
system (Top and Bottom)Software interface allows automatic entry of
vector based graphics and text (auto converted to DXF vectors)
Exclusive Excimer System of Harvard Robotics Laboratory
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5 Axis Fully Automated Wire Stripping
Light Duty T20, 193nm Deep UV 30 Hz ExcimerAblation of 3-5 um of
polyimide surrounding 10um steel wireFully automated X, Y, Z, U
& F StagesABLATION - U Axis rotates fixture; F Axis rotates
spool; Y Axis advances wire simultaneously for polyimide ablation
w/o breaking wireY Axis is advanced during ablation for (10
microns) Software saves picture of ablated wireCUTTING - Z Axis
linearly refocuses 15X objective for wire cutting process (post
ablation)Fixture moves UP/DOWN by X Axis 15 microns to for wire cut
process. Wire drops in bin.X & Y steppers controlled via Galil
1822 PCI motion controller; U, Z, & F Axes controlled using All
Motion boards
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8 Axis Stepper - Automated Wire Stripping
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Generic Rapid Release Windows8 Axis Stepper - Automated Wire
Stripping
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Standard Systems Software for Graphics, Text & 2D Data
Matrix Inscription Step wise execution to guide user and avoid all
user faults Above example is for 2D Data Matrix inscription. Text
is entered in the textbox and the software automatically converts
the text to a 2D Data Matrix which can then be scaled and
translated on the work surface so as to omit mistakes The work
surface is not captured in this capture program because I am using
the hardware memory for fast display onto the PC live video window
Application includes all laser control via the rotary switches and
toggle buttons Text & graphics dimensions (in microns) are
displayed for informational purposes Motion system stage feedback
and axis positions are displayed in real time
Below is a close-up of the motion program which is
auto-generated by the application softwareThe bottom display
textbox acts as the programs console. It displays any information
that the motion control program instructs.In machine vision mode,
dimensions are displayed.
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Aerotech, 2 AS3005 amplifiersPC witch DR500 with 40V-40V split
bus, 2 AS 32020 h Aerotech PCI U500 Ultra w/PSO output and live
video frame grabber (live video integrated into Control
Software)In-situ video microscope software for in-situ measurement
(Measurement Software application allowing in-situ feature
measurement)Aerotech ATS 150-150MM lead screw stages X & Y ( 6
inch travel)Aerotech ATS 100-100 MM Z stage with brake ( 4 inches
of travel)2 BMS60-A-D25-E2000H motors with rotary add-ons for the
stages1 Z axis BMS60-A-D25-E1000H for focus1 rotary
BMS60-A-D25-E1000H motor for the spindle with built in brakeOptical
plate and base with live video camera and built-in LED
illuminationFixture base plate with slotsDIN rail for additional IO
Dual illumination system for side illumination and illumination for
the live video (needs 24VDC power supply)Swappable rotary spindle
(replacable by an off-the-shelf 100K to 200K RPM spindleMade to be
used as a micro-milling device which can machine very small parts
on the order of 100 microns4 Axis Precision Motion Controlled
Milling Machine w/Measurement Software
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Custom Systems UV Excimer Laser IntegrationCustom Systems
Retrofitted Into Existing Automation Lines
Integration of custom laser solutions into existing
manufacturing systems. Clean room class 1000 Microprocessor System
Controller with Advanced Burst Mode Power Leveling and Smart Flow
SystemAdvanced Gas Cabinet with Tank Minder FeatureUltra-Stable
Class I Enclosure
Custom Drilling System for Medical Applications
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The verification of each calibration constant was performed by
measuring a known feature size using the NIST traceable calibration
slide as displayed in the squares in the live video display
below:
The features size according to the documentation that came with
the slide is 50 microns. The vertical (50.9) and horizontal (50.3)
measurements indicate that there is up to a one (1) micron error in
the 40X objective measurement. Each of the four (4) cameras
corresponds to a different microscope objective. All must be
calibrated.Software Engineering - Offline NIST Traceable
Measurement for Job ShopThe final phase of the calibration and
measurement portion of the purchase order was to password protect
the calibration constant.
Each of the 4 calibration constants corresponds to 20X, 40X,
160X and 800X.
This calibration constant is used for the measurement for both
in-situ and offline metrology.
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The measurement tools available are the following:
Two (2) X moveable and non-destructive horizontal overlay
calipers which can be added and removed from the screen
Two (2) Y moveable and non-destructive vertical overlay calipers
which can be added and removed from the screen
Four (4) Y circular calipers which can be sized to measure the
complete diameter of a hole and provide a template from which one
can evaluation the Ovality (roundness) of the hole
A tape measure capability which allows measurement of a feature
that does not fit within the live video field of view & motion
integrated
Software Engineering - NIST Traceable Measurement for Job
Shop
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RPI Laser Deposition System using 193nm Excimer
This laser system design contains motion systems in order to
move the material to be applied and the other to move the
substrate.One X / Y stepper motor controller to move the material
which will be applied to the work surface.The other X / Y / Z
precision servo motor controller to move the actual work
surface.
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RPI Laser Deposition System using 193nm Excimer
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RPI Laser Deposition System using 193nm ExcimerThe application
running on the left of the screen controls the precision substrate
motion.The smaller application on the right controls the material
which will be applied to the work surface.Communication between the
two applications motion occurs via the primary motion controllers U
Axis which was unused. I created an state machine using position
values as a communication method between each application. Because
there was no U Axis, I disabled all fault conditions, effectively
allowing the apps to communicate via known programmable position
values. This was a creative solution to a problem not known until
installation.
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In-Situ Measurement Implementation for Catheter Drilling
This view provides 100% measurement while actually machining the
part. If the part is left in-situ, we can measure the actual exit
dimensions non-destructively.
To the right is a part that had just been drilled and what the
measurement of the exit hole would be.
This picture is be one of the deliverables as verification of
the drilling process.The next phase of the work that TeoSys took
upon itself to perform is the transition from 100% offline
measurement to 100% on-line or in-situ , measurement. All
measurement deliverables will be collected during the drilling
process itself. See below:
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In-Situ Machine Vision Implementation for Part OrientationCustom
Human Machine Interface to find out of centration features of
multiple fiducials (points of reference) on the plate of parts and
The software will autogenerate code to rotate the plate to achieve
centration before performing micro-machining.
The application displays the offset from the expected position
which indicates how much the plate is rotated at the fiducial
location.
The box on the lower right displays the actual motion code
(scripting language & IDE invented by Dana Church).
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Micro Operator: Custom Real Time Machine Vision System written
in C++Micro Inspector: Post-process Measurement and Inspection Tool
(below)Software Engineering Machine Vision ApplicationsAligns part
during process and compensates for rotation errorHalts process if
pre-programmed conditions are not met thereby reducing improperly
processed partsNotifies operator of processing statusFull video
microscope capabilityProvides saving and loading of previously
processed imagesAllows images to be non-destructively overlaid with
user supplied text such as title, date, etc.Fully integrated with
motion system for complete process inspectionMicro View C++Simple
video microscope capability
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Software Engineering Proprietary ProductsMicroMMI: Real Time
Machine Vision SystemMultiple image processing algorithms (source
code) available via proprietary vision system language (Based on
RS-274)Image processing source automatically generated via
MicroCaliper program and may be copied into MicroMMI editorFully
integrated with motion system for pre/post/in-processing
inspection, measurement and quality controlProvides full in-process
laser and system controlProvides an integrated development
environment for operator to single step, edit, and debug motion
control programs written in the vision system language
Allows operator to make measurements of features within the live
video image once the software has been calibrated to the optics and
motion system
Software Engineering Machine Vision Applications
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Software Engineering Machine Vision ApplicationsThe MicroMMI
application is a Graphical User Interface (GUI) which allows a user
to program a micromachining system using a superset of RS 274,
G-Code, motion control programming commands and view a live video
feed set up to display aspects of the micromachining process.
Proprietary machine vision commands have been added to the motion
control programming commands to allow the user to make motion-based
decisions from the output of real time image processing and
measurement.
ROI ADDROI DELETEROI HIDEFIND EDGEFIND BLOBTHRESH AUTOTHRESH
BILEVELROI TRAINFIND PATTERNIMAGE LOADIMAGE SAVEIMAGE
REDRAWBRIGHTENSHARPENDILATE ERODEOVERLAY TYPEOVERLAY
COLORDRAWINGGRAPHICS
The Machine Vision Functions Available are the following:
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In order to aid the engineers during experimentation, TeoSys has
provided an image and machine vision prototyping application, which
can be used to apply the various machine vision algorithms without
writing a single line of PRG code. This tuning program allows the
user to experiment with all of the machine vision commands before
actually using them in a PRG program. Due to the many variables
involved when using any kind of image processing, this user
interface was designed to provide a nondestructive method of
testing which image processing and measurement functions should be
used for a particular video stream. All of the functions that are
available in this prototyping interface are available via PRG
programming commands to the MicroOperator application so that they
may be used in real-time in a motion control program.
The machine vision prototyping application will automatically
generate the machine vision PRG programming syntax for each of the
commands that the user applies via the user interface. This PRG
code can then be copied and pasted into any PRG program that is
capable of running with MicroMMI. Machine Vision SystemPrototyping
Software
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1. Original Fiducial Image Used to Train Fiducial Pattern
2. Image of Defocused and Moved Fiducial The geometrical Search
tool is a very good tool to use when searching for a pattern that
moves around the master image, changes intensity, suffers from
blurring or defocusing, and for patterns that reverse their
contrast. Image number 1 was used to train a fiducial pattern. The
ROI was drawn around the fiducial so that the ROI bounding box just
enclosed the fiducial fully. After the training was complete, a new
image was loaded that was a picture of the same fiducial but its
location within the master image had changed and it was severely
defocused. The geometrical search algorithm had no problem finding
the fiducial in picture number 2.The Search tool can be used to
find a trained pattern within the master image (field of view) and
make a decision to continue based on the presence or absence of the
fiducial or on the fiducials location. All patterns must have
geometrical characteristics that can be seen such as the fiducial
above. The pattern must be unique and different from the rest of
the image. It is best to have images that respond well to the
Bi-Level threshold. If the master image (or field of view) responds
well to the Bi-Level, then most characteristics should be able to
be found.
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Micro-Hole Drilling In CeramicIn Glass3.6um hole deep bored In
GlassDeep Hole Boring9um spout entrance and 30um spout exit)
Example of Sub-surface shaping.
(30um deep bore , Hole Drilling in 1MM Soda Lime Glass
Close up view of intra-glass nozzle restrictionApplications Deep
Hole Drilling in 1MM Thick Glass Slide
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3.6um hole deep bored In GlassDeep Hole Boring50um Exit holes in
thin polyurethaneCheaper and better capability than using an
excimer which has a higher maintenance cost.
The software seen to the left is an example of how we measure
our parts.
All objective on the 4 piece turret are calibrated to a NIST
traceable slide so that we can guarantee actual measurement and
tolerance specifications.Applications 532nm Polyurethane hole
drilling
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Applications Channel Drilling
27um Kerf Lines on Aluminum Cross PatternLaser Ablation
25um Channel in PlasticTop Hat Shape Strict Bottom
ProfileExcimer laser channel drilling for microfluidics (left) as
well as thin film ablation (right).
Channel drilling for tube bending applications where the entire
wall is removed (bottom right).27um Lines on Aluminum Using Back
Lighting as illumination
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Applications Channel Drilling Parameter Definition
Key Tube Cut Design Parameters Cut width (kerf) Spacing between
groups Spacing within a group Number of groups Rotation between
each line in a group
Varying of these parameters will result in successful
flexibility for the different tube diameters and flex
requirements
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Applications Micro Hole Drilling
Laser Hole Drilling(Micro Hole Array)Micro-Hole Drilling In
CeramicIn Glass
3.6um hole deep bored In GlassDeep Hole Boring
High Speed Micro Hole Drilling in Stainless Steel ( 0.001)
Hole Drilling in Silicon (10um and 50um)
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Applications Micro-Marking / Inscription
100 um Inscription on Diamond
High Speed Inscriptions in Polyimide (Text, Logos and 2-D
barcode)2-D Barcodes on Metal1mm Square Bounding BoxExcimer marking
using line widths down to 5 microns.
Small feature micro marking on transparent media.
75 Micron tall characters with 26 micron line thickness (fully
adjustable via ICVA) internal to the excimer laser.
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Single pulse implementation of a 2D Data Matrix barcode
Barcode is readable via a video microscope display screen using
a Data Matrix 2D barcode scanner device.
TeoSys Engineering LLC Capabilities & Products Capabilities
Part Marking for Identification
Data Matrix 2-D Barcode on Stent LegPrecision STENT Marking
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