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to which this declaration r,elates is in conformity with the following standard(s)or other normative document(s)
IEC1010-1 (1992) Safety Requirements for Electrical Equipment for Measurement,Control and Laboratory Use.Electrical Equipment for Measurement, Control and Laboratory Use-EMC Requirements.
EN61326(Class B Emissions)
following the provisions O1:
73/023/ EEC89/336/ EEC
Low Voltage Directive.Electromagnetic Compatibility Directive
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Dr. J.D. Watson, Senior Technical Manager, VED
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Date and Place
CONTENTS
Section Title Page
1 INTRODUCTION 1
1.1 Scope and definitions 1
1.2 Description 2
1.3 Controls and indicators (EXC120/300/300M only) 3
1.4 Bakeout band control (EXC120/300/300M only) 6
1.5 Connection of an Active gauge 7
1.6 Backing pump control (EXC120/300/300M only) 7
1.7 Logic interface 7
1.7.1 Introduction 7
1.7.2 Electrical supplies 8
1.7.3 Control inputs 8
1.7.4 Status outputs 10
1.7.5 Analogue outputs 10
1.8 Vent-valve control 10
1.8.1 Introduction 10
1.8.2 Vent on Stop 11
1.8.3 Vent on Fail and Vent on Axial Emergency 11
1.9 Controller Fail conditions 12
1.9.1 General 12
1.9.2 Internal Timer 12
1.9.3 Axial Emergency (EXC300M only) 13
1.10 Electrical connections 13
2 TECHNICAL DATA 17
2.1 General 17
2.2 Operating and storage data 17
2.3 Mechanical data 17
2.4 Logic interface 17
2.5 Factory settings 21
2.6 Electrical connectors 21
2.7 Fuse ratings 21
3 INSTALLATION 22
3.1 Unpack and inspect 22
3.2 Fit the Controller 23
3.3 Introduction to Controller electrical connections 23
5. Active gauge connector 11. Electrical supply fuse
6. Logic interface connector
2 TECHNICAL DATA
Note: Unless otherwise specified, technical data in the following sections applies to all Controller models.
Refer to Table 1 for other technical data.
2.1 General
Performance data See Table 1
Electrical data See Table 1 and Sections 2.4, 2.6 and 2.7
2.2 Operating and storage data
Ambient operating temperature range 0 to 35 oC
Ambient storage temperature range -20 to +40 oC
Maximum ambient operating humidity 10 to 95% RH (non-condensing
to DIN 40040)
Maximum operating altitude 3000 m
2.3 Mechanical data
Dimensions See Figures 6 and 7
Mass See Table 1
2.4 Logic interface
Relay contact rating (resistive load) 1 A at 25 V d.c.
Remote control signals
Control voltage: low (close) < 0.8 V d.c.
Control voltage: high (open) 4 to 24 V d.c.
Maximum input current (at 24 V) 80 µA
Maximum output current (at 0 V d.c.) 160 µA
Air-cooler electrical supply See Table 1
Vent-valve electrical supply See Table 1
Analogue EXT pump speed output
Output voltage 0 to +5 V d.c., proportional to EXT speed
Maximum output current 5 mA
EXC Turbomolecular Pump Controllers 17
Parameter EXC120 EXC120E EXC300 EXC300M
Mass 2 kg 1.3 kg 4.6 kg 4.6 kg
Cooling Natural
convection
Natural
convection
Forced air Forced air
Electrical supply voltage 90 to 264 V a.c. 90 to 264 V a.c. 90 to 132 or
180 to 264 V a.c.
90 to 132 or
180 to 264 V a.c.
Electrical supply frequency 47 to 63 Hz 47 to 63 Hz 47 to 63 Hz 47 to 63 Hz
Maximum input power 400 VA 260 VA 700 VA 700 VA
Peak inrush current 27 A at 110 V a.c.
54 A at 240 V a.c
27 A at 110 V a.c.
54 A at 240 V a.c.
27 A at 110 V a.c.
54 A at 240 V a.c.
27 A at 110 V a.c.
54 A at 240 V a.c.
Compatible EXT pumps EXT70, EXT250
EXT351, EXT501
EXT70, EXT250
EXT351, EXT501
EXT70, EXT250
EXT351, EXT501
EXT250M
EXT pump-motor
electrical supply
Maximum continuous
output power 110 W 110 W 290 W 290 W
Maximum output voltage 90 V peak to peak 90 V peak to peak 90 V peak to peak 90 V peak to peak
Switching frequency 32 kHz 32 kHz 32 kHz 32 kHz
Nominal commutation
frequency 600 Hz to 1.5 kHz 600 Hz to 1.5 kHz 600 Hz to 1.5 kHz 600 Hz to 1.5 kHz
Maximum commutation
frequency 1.07 x nominal 1.07 x nominal 1.07 x nominal 1.07 x nominal
Standby frequency 70% of nominal 70% of nominal 70% of nominal 70% of nominal
Maximum continuous axial
bearing current - - - 4.75 A
Axial bearing drive voltage
Maximum - - - 26 V d.c
Minimum - - - 10 V d.c.
Air-cooler electrical supply
Voltage range +18 to +26 V d.c. +18 to +26 V d.c. +12 to +26 V d.c. +12 to +26 V d.c.
Maximum output current 100 mA 100 mA 100 mA 100 mA
Vent-valve electrical supply
Voltage range +18 to +26 V d.c. +18 to +26 V d.c. +12 to +26 V d.c. +12 to +26 V d.c.
Maximum output current 80 mA 80 mA 80 mA 80 mA
Bakeout band electrical
supply
Voltage range 90 to 132 or
180 to 264 V a.c.
- 90 to 132 or
180 to 264 V a.c.
90 to 132 or
180 to 264 V a.c.
Maximum power 150 W - 150 W 150 W
Table 1 - Technical data
18 EXC Turbomolecular Pump Controllers
EXC Turbomolecular Pump Controllers 19
Figure 6 - EXC120, EXC300 and EXC300M Controller dimensions (mm)
1. Front panel
2. View from top
3. Clearance for cables
4. Clearance for ventilation
5. Panel cut-out
A EXC120
B EXC300/EXC300M
20 EXC Turbomolecular Pump Controllers
Figure 7 - EXC120E Controller dimensions (mm)
1. Front panel
2. Clearance for ventilation
3. View from top
4. Clearance for cables
5. Panel cut-out
2.5 Factory settings
Normal speed setpoint 80% of full rotational speed
Internal Timer 8 min, enabled
Vent options See Table 4
Logic interface: pins linked
on the mating connector
EXC120/E Pins 8 & 9, pins 12 & 13, pins 14 & 15
EXC300/M Pins 9 & 10, pins 13 & 14, pins 15 & 16
2.6 Electrical connectors
Electrical supply connector socket type CEE/IEC 320
Earth (ground) stud (on rear panel) M4
Backing pump relay connector *
Socket type Stak 200
Maximum voltage 250 V a.c.
Maximum current (a.c. r.m.s. inductive
load, 0.8 pf lagging) 15 A
Bakeout band connector *
Socket type CEE/IEC/320
Maximum power 150 W
Active gauge connector
Signals on the connector pins See Figure 16 and Table 3
Socket type FCC68, 8-way
Manufacturer Western Electric
Maximum power 3 W
Logic interface connector
Socket type (EXC120/120E/300M) MVSTBR 2,5/17-st5,08
Socket type (EXC300) MVSTBR 2,5/18-st5,08
Manufacturer Phoenix Combicon
2.7 Fuse ratings
Electrical supply fuse
EXC120/EXC120E 3.15 A, type T 20 mm
EXC300/EXC300M 6.3 A, type T 20 mm
Bakeout band fuse *
90 to 132 V a.c. electrical supply 1 A, type F 20 mm
180 to 264 V a.c. electrical supply 0.5 A, type F 20 mm
* Not applicable to the EXC120E Controller.
EXC Turbomolecular Pump Controllers 21
3 INSTALLATION
3.1 Unpack and inspect
Remove all packing materials and check the Controller.
If the Controller is damaged, notify your supplier and the carrier in writing within three days;
state the Item Number of the Controller together with your order number and your suppliers
invoice number. Retain all packing materials for inspection. Do not use the Controller if it is
damaged.
Check that your package contains the items listed in Table 2. If any of these items is missing,
notify your supplier in writing within three days.
If the Controller is not to be used immediately, store the Controller in suitable conditions as
described in Section 6.1.
Qty Description Check ( )
1
1
1
1
1
1
1
EXC Controller
Backing pump relay electrical connector *
Security bracket for backing pump relay connector *
Logic interface electrical connector
Electrical supply cable
In-line filter
Double-sided earth (ground) tab
* Not supplied with the EXC120E Controller.
Only supplied with the EXC300 and EXC300M Controllers.
Only supplied with the EXC300M Controller; only needed if dual earth (ground)
bonding is required.
Table 2 - Checklist of contents
22 EXC Turbomolecular Pump Controllers
3.2 Fit the Controller
WARNING
The Controller contains electrolytic capacitors and, under certain fault conditions, mayemit dangerous fumes. Ensure that the Controller is operated in a well-ventilated area.
CAUTION
You must allow the correct clearances for air circulation and you must fit the EXC120EController onto a thermally conductive surface. If you do not, the performance of the
Controller may be affected at high operating temperatures.
The Controller can be used on a bench-top or can be fitted in a rack or cabinet. You can operate
the EXC120, EXC300 and EXC300M Controllers in a horizontal position or in a vertical position
with the front panel at the top. You can operate the EXC120E Controller in a horizontal position
or in a vertical position with the side vents at the top.
When you fit a Controller in a rack or a cabinet, you must allow 15 mm clearance at the sides of
the Controller for air circulation and you must allow 75 mm clearance at the back of the
Controller for the cables. Do not obstruct the cooling-fan on the EXC300 and EXC300M
Controllers. The size of the front panel cut-out required and the location of the front panel fixing
holes for the EXC120, EXC300 and EXC300M Controllers are shown in Figure 6.
When you fit the EXC120E Controller, you must firmly fit the Controller onto a thermally
conductive material, for example aluminium or steel. The location of the bottom panel
fixing-holes are shown in Figure 7.
3.3 Introduction to Controller electrical connections
When you make the electrical connections to the Controller described in the following sections,
refer to Table 3 for full details of the logic interface connections and refer to Figures 8 and 9 which
show schematic diagrams of the electrical connections. Take note of the following:
• The backing pump and bakeout band connectors are not available on the EXC120E
Controller.
• The EXC120 and EXC120E Controllers have a 17-way logic interface connector. The EXC300
and EXC300M Controllers have an 18-way logic interface connector.
You must provide suitable strain-relief on the cables which you fit to the Controller.
EXC Turbomolecular Pump Controllers 23
Pin number
(EXC300/M)
Signal Polarity* Signal
type
Pin number
(EXC120/E)
1 Vent-valve electrical supply: 24 V +Supply
1
2 Vent-valve electrical supply: 0 V - 2
3 Air-cooler electrical supply: 24 V +Supply
3
4 Air-cooler electrical supply: 0 V - 4
5 TMP Normal (closed when pump speed reaches
the Normal speed setpoint)
N/A
Status
outputs
5
6 TMP Fail (open when fail condition exists) N/A 6
High voltages exist in the Controller when it is operating. Ensure that the Controller isearthed (grounded) and observe all appropriate safety precautions for the safe installation
and handling of electrical equipment. If you do not, there will be a danger of injury ordeath to people by electric shock.
Note: If you will use an EXC300 or EXC300M Controller in a commercial or residential environment,
you must fit the in-line filter supplied to the electrical supply connector on the Controller, then fit
the connector on the electrical supply cable to the filter.
1. Connect the wires at one end of the electrical supply cable to a suitably rated and fusedelectrical supply; if required, connect the wires to a suitably rated plug. Connect the wires asfollows:
• Connect the green/yellow wire to earth (ground).
• Connect the brown wire to the live electrical supply.
• Connect the blue wire to the neutral electrical supply.
2. On EXC120, EXC300 and EXC300M Controllers, ensure the electrical supply isolator on therear panel is in the off position.
3. Fit the connector on the other end of the electrical supply cable to the electrical supplyconnector on the rear of the Controller (see Figures 3 to 5).
Protective earthing (grounding) for electrical safety of the EXC Controller, EXT pump and
accessories is provided by the electrical supply cables and connectors and the
pump-to-controller cable. However, additional earth (ground) bonding may be required to
improve the reliability of the system by reducing any effects of RFI (radio frequency
interference), particularly if the vacuum system is prone to high voltage discharges or other
radio frequency emissions.
Use good EMC (electromagnetic compatibility) practices and take note of the following EMC
earthing (grounding) guidelines to reduce the susceptibility of the system to RFI:
• Connect the Controller, the EXT pump and the vacuum chamber to a common earth
(ground) point on the pumping system; this star earth (ground) is typically in the electrical
power distribution box.
• Clamp the Controller earthing (grounding) terminal between the two lock-nuts provided on
the earth (ground) stud on the rear panel of the Controller.
• Use suitable heavy duty cable or braid to ensure a low impedance bond to the earth (ground)
point (typically less than 0.1Ω for each leg of the star).
• Use screened cable for all wiring to the logic interface connector. (The TAV5 vent-valve and
the ACX Air Cooler accessories are provided with screened cable.) Connect each screen to
the Controller earth (ground) stud to ensure that they are properly earthed (grounded).
EXC Turbomolecular Pump Controllers 27
3.6 Connect the EXT pump
Use a pump-to-controller cable (not supplied) to connect the Controller to the EXT pump. Fit the
connectors on the ends of the cable to the appropriate mating-halves on the Controller and on the
EXT pump. The connectors are polarised so you cannot fit a connector in the wrong orientation
and different connector types are used on the Controller and on the EXT pump, so you cannot fit
the cables the wrong way round.
3.7 Connect the backing pump (EXC120/300/300M only)
WARNING
Fit an earth (ground) wire to the backing pump relay electrical connector. If you do not,the case of the Controller may become live if there is a wiring fault.
Note: To control a backing pump with the EXC120E, use the 24 V d.c. vent-valve electrical supply on the
logic interface to operate the pump through a suitable relay or contactor. This configuration will
provide identical control logic to that for the backing pump relay on the other Controllers.
The single-pole backing pump relay in the Controller provides a switching signal to control the
backing pump electrical supply; it does not provide a backing pump electrical supply. You can
use the backing pump relay to control the backing pump in one of two ways:
• Directly, as shown in Figure 10
• Through a contactor, as shown in Figure 11.
Use a suitably rated three-core cable to connect the backing pump to the Controller. If you use an
external contactor, ensure that the contactor is suitably rated for use in this way.
1. Connect the wires of your backing pump cable to the appropriate pins of the backing pump
relay electrical connector (supplied). The pins of the connector are used as follows:
Pin Use
1 Live in
2 Switched live out
3 Earth (ground)
2. Connect the other end of your cable to the backing pump and/or the electrical supply, as
appropriate.
28 EXC Turbomolecular Pump Controllers
Figure 10 - Direct operation of the backing pump
Figure 11 - Operation of the backing pump through a contactor
3.8 Connect the bakeout band (EXC120/300/300M only)
If you have fitted a bakeout band to the EXT pump, insert a suitably rated fuse into the bakeout
band fuse holder, then fit the connector on the bakeout band cable to the heater connector on the
rear of the Controller (see Figures 3 and 5).
EXC Turbomolecular Pump Controllers 29
1. EXC backing pump relay
2. Backing pump motor
3. EXC Controller
1. EXC Backing pump relay
2. Backing pump motor
3. EXC Controller
1. EXC Backing pump relay
2. Backing pump motor
3. EXC Controller
3.9 Connect an Active gauge
Use a BOC Edwards Active gauge cable (available as an accessory: see Section 7) to connect a
BOC Edwards Active gauge to the Controller through the active gauge connector on the rear of
the Controller (see Figures 3 to 5).
If you want to use the set-point facility on an Active Pirani Gauge or Active Thermocouple
Gauge to operate the TMP Interlock, you must remove the link fitted to the TMP Interlock control
input on the logic interface; that is:
• On EXC120 and EXC120E Controllers, remove the link between pins 12 and 13.
• On EXC300 and EXC300M Controllers, remove the link between pins 13 and 14.
If you want to use the Controller TMP Normal relay to enable an Active Inverted Magnetron
Gauge, you must connect the TMP Normal relay isolated common line to the electrical supply
0 V line; that is:
• On EXC120 and EXC120E Controllers, link pins 4 and 7.
• On EXC300 and EXC300M Controllers, link pins 4 and 8.
3.10 Connect the logic interface to your equipment
CAUTION
Do not earth (ground) the logic interface 0 V line (pins 2 and 4). If you do, you willprovide an earth (ground) return path for any electrical fault in the pump-motor and this
could damage the Controller or your control equipment.
CAUTION
Do not connect voltages greater than 45 V to the logic interface. If you do, the Controllerwill not comply with the low voltage safety recommendations of IEC 1010.
Note: If your backing pump will take more than 30 minutes to reduce the pressure in the vacuum chamber
to 1 mbar, we recommend that you use the TMP Interlock to delay the EXT pump Start until this
pressure is reached.
The Controller is supplied with a mating-plug for the logic interface connector. As supplied, this
mating-plug has three links fitted to close the TMP Interlock and SYS Interlock and to close the
Start/Stop input. If you want to use the Controller for stand-alone operation, you must fit this
mating-plug to the logic interface connector on the rear of the Controller (see Figures 3 to 5).
Use the appropriate pins on the mating-plug to connect your control equipment and accessories
to the Controller, as described in the previous sections and as shown in Table 3 and Figures 8 and
9. Note that, depending on how you want to use the Controller, you may have to remove the
factory fitted links from the mating-plug.
30 EXC Turbomolecular Pump Controllers
3.11 Adjust the Normal speed setpoint
Note: If you set the Normal speed setpoint to be more than 70% of full rotational speed, the TMP Normal
relay will open when you select Standby. The Controller is supplied with the Normal speed
setpoint adjusted to 80% of full rotational speed.
You can adjust the Normal speed setpoint (at which the TMP Normal relay will close: see
Section 1.7.4) between 65 and 95% of full rotational speed.
To adjust the Normal speed setpoint, use a small screwdriver to turn the SET POINT
potentiometer; an access hole is provided on the top cover of the Controller. Figure 12 detail A
shows the approximate Normal speed setpoint settings for different potentiometer adjustments.
EXC Turbomolecular Pump Controllers 31
Figure 12 - Top cover of the Controller
3.12 Adjust the Internal Timer
The Internal Timer can be adjusted between approximately 1 and 30 minutes. The Controller is
supplied with the Internal Timer adjusted to 8 minutes (see Section 1.9.2).
To adjust the Internal Timer, use a small screwdriver to turn the TIMER potentiometer; an access
hole is provided on the top cover of the Controller (see Figure 12).
1. Turn the potentiometer fully anticlockwise; this position corresponds to the minimum time
of approximately 1 minute.
2. Turn the potentiometer clockwise to set the required time; one full turn adds approximately
two minutes to the set time. For example, seven full turns give a set delay time of
approximately 15 minutes.
3.13 Configure the Controller
3.13.1 Introduction
The Controller has four DIP switches which can be used to configure the Controller for your
application. The DIP switches are on the top of the Controller (the CONFIG switches shown in
Figure 12). Set the DIP switches as described in the following sections.
3.13.2 Enable/disable the Internal Timer to monitor low pump speed
Note: If you pump a high gas load with the Internal Timer enabled (DIP switch 1 set to the off position),
the EXT pump may stall before the Controller trips into Fail condition. Ensure that oil which
backstreams from the backing pipeline will not adversely affect your process.
Disable the Internal Timer to provide the greatest protection against backstreaming when Fail
condition occurs; as supplied, the Internal Timer is enabled.
Set DIP switch 1 to enable or disable the use of the Internal Timer when the pump rotational
speed falls to below 50% of full rotational speed during operation (see Section 1.9.2):
• Set DIP switch 1 to 'on' to disable the timer. The Controller will then trip into Fail condition
as soon as the pump rotational speed falls to below 50% of full rotational speed.
• Set DIP switch 1 to 'off' to enable the timer. The Internal Timer will then start as soon as the
pump rotational speed falls to below 50% of full rotational speed. If the pump speed remains
below 50% of full rotational speed after the preset time, the Controller will trip into Fail
condition.
32 EXC Turbomolecular Pump Controllers
3.13.3 Vent options
Note: The Axial Emergency condition is only available on the EXC300M Controller. On other
Controllers, the position of DIP switch 2 can be ignored.
DIP switches 2 to 4 are used to select the vent-valve control options (refer to Section 1.8). Select
the required vent options as shown in Table 4.
Note however, that if the electrical supply to the Controller fails, the Controller will always
switch off the electrical supply to the vent-valve when the EXT pump speed falls to below 50% of
full speed (see Section 1.8.1).
DIP switch positions
Vent option(s) selected2
(Vent on
Axial
Emergency)
3
(Vent on
Fail)
4
(Vent on
Stop)
Off Off Off No optional vent selected: Vent when EXT pump
speed falls to below 50% of full speed after Stop is
selected
Off Off On Vent on Stop
Off On Off Vent on Fail and Vent when EXT pump speed falls
to below 50% of full speed after Stop is selected
Off On On Vent on Fail and Vent on Stop
On Off Off Vent on Axial Emergency* and Vent when EXT
pump speed falls to below 50% of full speed after
Stop is selected
On Off On Vent on Axial Emergency* and Vent on Stop
On On Off Vent on Axial Emergency* and Vent on Fail and
Vent when EXT pump speed falls to below 50% of
full speed after Stop is selected
On On On Vent on Axial Emergency* and Vent on Fail and
Vent on Stop
* Only available on the EXC300M Controller.
Factory setting
Table 4 - Selection of vent-valve control options
EXC Turbomolecular Pump Controllers 33
4 OPERATION
4.1 Start-up
Note: If you wish, you can start the backing pump and the EXT pump at the same time; the EXT pump
will not be damaged and can operate as an effective baffle. However, if the system pressure remains
too high for the EXT pump to reach 50% of full rotational speed in the preset time (set by the
Internal Timer), the Controller will trip into Fail condition: refer to Section 3.12 for adjustment of
the Internal Timer.
When Start is selected, if all Interlocks are closed, the Controller will switch on the electrical
supply to the EXT pump and the pump rotor will start to accelerate.
Use the following procedure to start up your system. This procedure assumes that you will
manually operate the vent-valve and the backing pump, however you can configure all EXC
Controllers to automatically operate the vent-valve and you can configure the EXC120, EXC300
and EXC300M Controllers to automatically operate the backing pump (refer to Sections 1.8
and 3.13.3).
1. On EXC120, EXC300 and EXC300M Controllers, switch on the electrical supply isolator on
the rear of the Controller (see Figures 3 and 5).
2. Close the vent-valve (if fitted).
3. Start the backing pump.
4. Start the EXT pump:
• On the EXC120, EXC300 and EXC300M Controllers, press the Start button on the frontpanel of the Controller (Figures 1 and 2, item 4) and (if you have connected yourequipment to the logic interface) close the Start/Stop input on the logic interface (seeSection 1.7.3).
• On the EXC120E Controller, close the Start/Stop input on the logic interface (seeSection 1.7.3).
4.2 Standby
You can select Standby in one of two ways:
• On the EXC120, EXC300 and EXC300M Controllers, select the Standby button on the front
panel of the Controller (Figures 1 and 2, item 3).
• Use your control equipment to close the Standby input on the logic interface (that is, ensure
that the appropriate pins are linked: see Section 1.7 and Figures 8 and 9).
On the EXC120, EXC300 and EXC300M Controllers, the LED on the Standby button will go on
when the Standby mode is selected (either by the button or the logic interface).
If you select Standby when the pump is operating, the speed of the pump will be reduced to the
Standby speed. If you select Standby before you switch the pump on, the pump will run up to
Standby speed, not up to full speed.
34 EXC Turbomolecular Pump Controllers
4.3 Bakeout band control (EXC120/300/300M only)
Note: As described in Section 3.8, you must insert a suitably rated fuse into the bakeout band fuse holder
before you can use a bakeout band.
Press the Heater switch on the front panel of the Controller (Figures 1 and 2, item 2) to select the
bakeout band on.
The Controller will switch on the electrical supply to the bakeout band when the EXT pump
speed has reached the Normal speed setpoint. The electrical supply to the bakeout band will
switch off if the pump speed drops to below the Normal speed setpoint, if the Controller is
switched off, or if the Controller trips into Fail condition or Axial Emergency condition.
The LED on the Heater switch is on when the electrical supply to the bakeout band is on.
4.4 Operation with high inlet pressure
If the EXT pump inlet pressure rises, the power supplied by the Controller to the pump-motor
will increase to counteract the gas frictional load. The pump rotational speed will remain
constant until the Controller peak power level is reached; beyond this power level, the speed of
the pump will start to reduce.
If the pump speed falls to below 50% of its full rotational speed, the Controller may trip into Fail
condition, depending on how you configured the Controller (see Sections 1.8, 1.9 and 3.13).
Refer to the EXT pump instruction manual for the maximum allowable inlet pressure.
4.5 Operation with high pump temperature
Temperature sensors in the Controller and the EXT pump are monitored by the Controller. If the
Controller detects that the pump temperature is too high, the power supplied to the pump-motor
is reduced; the pump may not therefore be able to maintain full rotational speed if it is too hot.
If the pump speed falls to below 50% of its full rotational speed, the Controller may trip into Fail
condition, depending on how you configured the Controller (see Sections 1.8, 1.9 and 3.13).
Refer to the EXT pump instruction manual for the pump operating temperature ranges.
EXC Turbomolecular Pump Controllers 35
4.6 The hours counter (EXC300 only)
The EXC300 Controller has an hours counter (see Figure 13) which shows the number of hours
that the Controller has operated an EXT pump.
The hours counter has a 7-digit display (with no decimal point), on which the left-hand 5 digits
(2) show the whole numbers of hours and the right-hand two digits (3) show the tenths and
hundredths of hours. For example, if the hours counter shows 0010375", this indicates that the
EXT pump has been operating for 103 hours and 45 minutes.
Figure 13 - Hours counter (EXC300 only)
4.7 Normal shutdown
Use the following procedure to shut down your system. This procedure assumes that you will
manually operate the vent-valve and the backing pump, however you can configure all EXC
Controllers to automatically operate the vent-valve and you can configure the EXC120, EXC300
and EXC300M Controllers to automatically operate the backing pump (refer to Section 3.13).
1. Select Stop:
• On the EXC120, EXC300 and EXC300M Controllers, press the Start/Stop button on the
front panel of the Controller (Figures 1 and 2, item 4) or open the Start/Stop input on the
logic interface connector (see Section 1.7.3).
• On the EXC120E Controller, open the Start/Stop input on the logic interface connector
(see Section 1.7.3).
2. Open the vent-valve before the EXT pump speed is below 50% of full rotational speed.
3. Switch off the backing pump.
36 EXC Turbomolecular Pump Controllers
4.8 Automatic shutdown after Fail condition
WARNING
If Start is selected, the Controller will automatically restart the EXT pump when theelectrical supply is restored after an electrical supply failure. Ensure that people cannot be
injured by the rotating rotor blades of the EXT pump.
The EXC120, EXC120E and EXC300 Controllers will automatically switch off the electrical
supply to the EXT pump if the Controller trips into Fail condition (see Section 1.9), though the
EXC300M Controller will continue to provide an electrical supply for the electromagnetic
bearings of the EXT250M pump.
If the SYS Interlock opens (see Section 1.7.3), the Controller will automatically open the
vent-valve and (on the EXC120, EXC300 and EXC300M Controllers) will automatically open the
backing pump relay. The operation of the vent-valve and backing pump in all other Fail
conditions depends on how you have configured the Controller: refer to section 3.13.
4.9 Reset the Controller after Fail condition
Note: You can only reset the EXC300M Controller after an Axial Emergency condition if the EXT pump
speed is below 10% of full rotational speed.
To reset a Fail condition, press the Start/Stop button (Figures 1 and 2, item 4) to select Stop, then
press it again, or (if you have connected your equipment to the logic interface) open the
Start/Stop input on the logic interface for a minimum time of 300 ms and then close the input.
4.10 Electrical supply failure
If the electrical supply to the Controller fails when the EXT pump is rotating:
• The backing pump shuts down (due to the electrical supply failure).
• The motor of the EXT pump is used as a generator and the electrical supply for the vent-valve
is maintained until the pump speed falls to 50% of full rotational speed, then the electrical
supply for the vent-valve is switched off.
• EXC120, EXC120E and EXC300 Controllers will then shut down. On the EXC300M
Controller, the motor of the EXT pump will continue to act as a generator until pump speed
is reduced to approximately 10% of full rotational speed. The EXC300M Controller then
shuts down and the EXT250M pump rotor drops onto its safety bearings.
EXC Turbomolecular Pump Controllers 37
5 Maintenance
5.1 Safety
WARNING
Obey the safety instructions given below and take note of appropriate precautions. If youdo not, you can cause injury to people and damage to equipment.
• A suitably trained and supervised technician must perform maintenance work.
• Isolate the Controller and other components in the pumping system from the electrical
supply so that they can not be operated accidentally.
• Dispose of components safely (see Section 6.2).
5.2 Replace a fuse
5.2.1 Introduction
If a fuse fails immediately after you have replaced it, determine the cause of the failure and
rectify the fault before you use the Controller.
5.2.2 Replace the electrical supply fuse
The electrical supply fuse is an integral part of the electrical supply socket on the rear of the
Controller (see Figures 3 to 5).
1. Remove the electrical supply plug.
2. Remove the fuse holder, remove and discard the failed fuse.
3. Insert a new fuse of the correct rating (refer to Section 2.7) and refit the fuse holder.
5.3.3 Replace the bakeout band fuse (EXC120/300/300M only)
The bakeout band fuse is on the rear of the Controller (see Figures 3 and 5).
1. Turn and pull out the fuse holder.
2. Remove and discard the failed fuse and replace with a new fuse of the correct rating (refer to
Section 2.7).
3. Refit the fuse holder.
38 EXC Turbomolecular Pump Controllers
5.4 Fault finding
If the Controller shuts down because of Fail condition, refer to the appropriate sections of this
manual to determine the cause of the Fail. If necessary, refer to the appropriate fault finding
section of the instruction manual supplied with the EXT pump.
5.5 Clean the Controller
If necessary, use a soft dry cloth to clean the exterior of the Controller.
If you need to clean the interior of the Controller, we recommend that you return the Controller
to your supplier or your nearest BOC Edwards Service Centre.
6 STORAGE AND DISPOSAL
6.1 Storage
Fit protective covers over the electrical connections and store the Controller in clean dry
conditions until required.
When required for use, prepare and install the Controller as described in Section 3 of this
manual.
6.2 Disposal
WARNING
Do not incinerate the Controller. If you do, you may cause injury to people.
Dispose of the Controller and any components safely in accordance with all local and national
safety and environmental requirements.
Do not incinerate the Controller. If the Controller is heated to very high temperatures,
dangerous gases may be emitted and internal components may explode.
EXC Turbomolecular Pump Controllers 39
7 SPARES AND ACCESSORIES
7.1 Introduction
BOC Edwards products, spares and accessories are available from BOC Edwards companies in