Single-Crystal Growth of Silicon Czochralski's Creative Mistake: A Milestone on the Way to the Gigabit Era Jürgen Evers,* Peter Klüfers, Rudolf Staudigl,* and Peter Stallhofer Keywords: crystal growth · Czochralski, Jan · defect engineering · microelectronics · silicon Dedicated to Professor Heinrich Nöth on the occasion of his 75th birthday J. Evers, R. Staudigl et al. Reviews 5684 # 2003 Wiley-VCH Verlag GmbH & Co. KGaA, Weinheim DOI: 10.1002/anie.200300587 Angew. Chem. Int. Ed. 2003, 42, 5684 – 5698
Czochralski's Creative Mistake: A Milestone on the Way to the Gigabit Era
May 17, 2023
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