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Czerny-Turner Spectrometer − Analysis of Spectral Resolution Optical Metrology > Spectrometer
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Czerny-Turner Spectrometer − Analysis - LightTrans · Czerny-Turner Spectrometer − Analysis of Spectral Resolution Optical Metrology > Spectrometer. Task/System Illustration 2

May 15, 2018

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Page 1: Czerny-Turner Spectrometer − Analysis - LightTrans · Czerny-Turner Spectrometer − Analysis of Spectral Resolution Optical Metrology > Spectrometer. Task/System Illustration 2

Czerny-Turner Spectrometer − Analysis of Spectral Resolution

Optical Metrology > Spectrometer

Page 2: Czerny-Turner Spectrometer − Analysis - LightTrans · Czerny-Turner Spectrometer − Analysis of Spectral Resolution Optical Metrology > Spectrometer. Task/System Illustration 2

Task/System Illustration

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power

?

Page 3: Czerny-Turner Spectrometer − Analysis - LightTrans · Czerny-Turner Spectrometer − Analysis of Spectral Resolution Optical Metrology > Spectrometer. Task/System Illustration 2

Highlights

• high-performance analysis of complex optical systems• full vectorial analysis of gratings by using rigorous algorithm (FMM)

www.LightTrans.com3

Page 4: Czerny-Turner Spectrometer − Analysis - LightTrans · Czerny-Turner Spectrometer − Analysis of Spectral Resolution Optical Metrology > Spectrometer. Task/System Illustration 2

Specification: Light Source

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here

Parameter Description / Value & Unittype plane wavewavelengths 534.5 nm − 535.5 nm in steps of 10 pmpolarization linear in x-direction (0°)

Page 5: Czerny-Turner Spectrometer − Analysis - LightTrans · Czerny-Turner Spectrometer − Analysis of Spectral Resolution Optical Metrology > Spectrometer. Task/System Illustration 2

Specification: Apertures

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here

here

Parameter Description / Value & Unitwidth of entrance aperture 500 µmwidth of detector aperture 649 µm

Page 6: Czerny-Turner Spectrometer − Analysis - LightTrans · Czerny-Turner Spectrometer − Analysis of Spectral Resolution Optical Metrology > Spectrometer. Task/System Illustration 2

Specification: Parabolic Mirrors

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Parameter Description / Value & Unittype parabolic mirrormaterial ideal high-reflective materialfocal length 1 mdiameter 20 mmtilt angle 5°reflectance 100%

here

Page 7: Czerny-Turner Spectrometer − Analysis - LightTrans · Czerny-Turner Spectrometer − Analysis of Spectral Resolution Optical Metrology > Spectrometer. Task/System Illustration 2

Specification: Grating

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Parameter Description / Value & Unitgrating period 833 nmgrating height 282.4 nm (optimized for -1st order efficiency)blaze angle 18.7°grating material silver (Ag)substrate material silver (Ag)

here

gratingheight

grating periodblaze angle

Page 8: Czerny-Turner Spectrometer − Analysis - LightTrans · Czerny-Turner Spectrometer − Analysis of Spectral Resolution Optical Metrology > Spectrometer. Task/System Illustration 2

Specification: Detectors

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a, b

Position Modeling Technique Detector / Analyzerfull system

3D ray tracing 3D ray tracing system visualization

a field tracing power detection

Page 9: Czerny-Turner Spectrometer − Analysis - LightTrans · Czerny-Turner Spectrometer − Analysis of Spectral Resolution Optical Metrology > Spectrometer. Task/System Illustration 2

Result: 3D Ray Tracing

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source screen gratingdetectoraperture

parabolicmirror 1

entrance aperture

parabolicmirror 2

for better illustration thedistances and focal length of the mirrors were reduced to 100 mm

Page 10: Czerny-Turner Spectrometer − Analysis - LightTrans · Czerny-Turner Spectrometer − Analysis of Spectral Resolution Optical Metrology > Spectrometer. Task/System Illustration 2

Result: Variation of Wavelength

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detector aperture

image

by varying the wavelength, the image of the entrance aperture is scanned over the detector aperture:

Page 11: Czerny-Turner Spectrometer − Analysis - LightTrans · Czerny-Turner Spectrometer − Analysis of Spectral Resolution Optical Metrology > Spectrometer. Task/System Illustration 2

Result: Variation of Wavelength

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detector aperture

image

by varying the wavelength, the image of the entrance aperture is scanned over the detector aperture:

detected power:

Page 12: Czerny-Turner Spectrometer − Analysis - LightTrans · Czerny-Turner Spectrometer − Analysis of Spectral Resolution Optical Metrology > Spectrometer. Task/System Illustration 2

Result: Resolution of Monochromator

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detected power:

50%

𝛥𝛥𝛥𝛥FWHM

𝛥𝛥0

definition of spectral resolution:

𝐴𝐴 =𝛥𝛥0𝛥𝛥𝛥𝛥

𝛥𝛥0 = 535 nm 𝛥𝛥𝛥𝛥FWHM = 0.43 nm

spectral resolution: 𝐴𝐴 =1244

Page 13: Czerny-Turner Spectrometer − Analysis - LightTrans · Czerny-Turner Spectrometer − Analysis of Spectral Resolution Optical Metrology > Spectrometer. Task/System Illustration 2

Document & Technical Info

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code SPE.0001version of document 1.0

title Czerny-Turner Spectrometer − Analysis of SpectralResolution

category Optical Metrology > Spectrometerauthor Rui Shi (LightTrans)used VL version 7.0.0.29

Specifications of PC Used for SimulationProcessor i7-4700MQ (1 CPU cores)RAM 16 GBOperating System Windows 8