CRC Handbook of Metal Etchants - GBV

CRC Handbook

of Metal Etchants

Editors

Perrin Walker

William H. Tarn

(g) CRC Press

Boca Raton Ann Arbor Boston

TABLE OF CONTENTS

Introduction 1

Chapter 1: Material Format Section 9

Introduction 9 Electrolytic Format 23 Dry Chemical Etch Format 24 Methods of Etching 26 Methods of Etching Index 29 Method Definitions 33 Named Etchants 70

Chapter 2: Etchant Section 75 Adhesion 75 Air 76 Aluminum 80 Aluminum Alloys 106 Aluminum Antimonide 114 Aluminum Arsenide 117 Aluminum Nitride 118 Aluminum Oxide 121 Aluminum Phosphate 130 Amalgam 131 Antimony 132 Argon 136 Arsenic 137 Barium 141 Barium Fluoride 142 Barium Titanate 144 Barium Tungstate 147 Beryllium 147 Beryllium Alloys 151 Beryllium Oxide 152 Bismuth 155 Bismuth Alloys 159 Bismuth Germanate 161 Bismuth Selenide 162 Bismuth Telluride 163 Bismuth Trioxide 165 Blisters 166 Bonding 171 Boron 177 Boron Carbide 179 Borides 180 Boron Nitride 187 Boron Phosphide 191 Boron Telluride 192 Boron Trifluoride 193 Brass 194 Bromine 199

Bronze 202 Cadmium 206 Cadmium Antimonide 210 Cadmium Arsenide 211 Cadmium Fluoride 211 Cadmium Indium Selenide 213 Cadmium Indium Telluride 214 Cadmium Iodide 214 Cadmium Oxide 215 Cadmium Phosphide 216 Cadmium Selenide 217 Cadmium Silicon Arsenide 222 Cadmium Sulfide 222 Cadmium Telluride 229 Calcium 240 Calcium Carbonate 242 Calcium Fluoride 246 Calcium Molybdate 250 Calcium Nitride 250 Calcium Tungstate 251 Californium 254 Carbides 254 Carbon 255 Carbon Dioxide 261 Ceramics 262 Cerium 265 Cerium Dioxide 266 Cesium 267 Cesium Bromide 268 Cesium Chloride 269 Cesium Dioxide 270 Cesium Iodide 271 Chlorine 272 Chlorine Hydrate 272 Chromium 284 Chromium Alloys 292 Chromium Trioxide 292 Cleaning, General 295 Cobalt 314 Cobalt Oxide 316 Colbalt Sulfide 318 Colemanite 318 Columbium 319 Copper 320 Copper Alloys 341 Copper Bromide 346 Copper Chloride 346 Copper Iodide 347 Copper Oxide 348 Copper Phosphide 352 Copper Selenide 353

Copper Sulfide 355 Copper Disulfide 356 Copper Phospho-Sulfide 358 Copper Telluride 359 Copper Indium Telluride 360 Corundum 361 Cronstedite 362 Cristobalite 363 Deuterium 365 Diamond 366 Dielectrics 371 Dysprosium 372 Electride 374 Epoxy and Polyimide 375 Erbium 377 Etching 379 Europium 384 Europium Oxide 386 Ferric Oxide 387 Ferrite 387 Fluorapatite 390 Fluorine 391 Fresonite 401 Gadolinium 402 Gallium 403 Gallium Antimonide 406 Gallium Arsenide 413 Gallium Aluminum Arsenide 487 Gallium Nitride 488 Gallium Oxide 490 Gallium Phosphide 493 Gallium Selenide 500 Garnets 501 Germanium 509 Germanium Alloys 581 Germanides 583 Germanium Arsenide 587 Germanium Nitride 589 Germanium Oxide 590 Germanium Selenide 592 Germanium Sulfide 593 Germanium Telluride 593 Gold 594 Gold Alloys 606 Graphite 612 Hafnium 615 Helium 617 Hematite 618 Holmium 619 Hydrides 621 Hydrocarbon 622

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Appendix A: Crystallography 1368 Appendix B: Major Elements and Radicals 1370 Appendix C: Metals and Metallic Compounds with Reference Acronyms 1372 Appendix D: Miller Indices 1389 Appendix E: Natural Minerals 1391 Appendix F: Common Chemicals 1406 Appendix G: Hardness 1409 Appendix H: Common Acronyms and Abbreviations Used Throughout the Text 1411