Controls Workbench™ User Manual

Controls Workbench™ User Manual

MKS Instruments. Automation & Control Solutions 1321 Rutherford Lane, Suite 200 Austin, TX 78753 Main: 512.719.8000 Fax: 512.719.8095

Controls Workbench™ 2.11 Manual Revision 0.2

February 2017

Automation & Control Solutions

MKS Controls Workbench™ 2.11 User Manual

Page 2 of 101 © MKS Instruments–Automation & Control Solutions, 2015–2017

Copyright Copyright © MKS Instruments, 2015–2017 This manual and the software described in it are copyrighted with all rights reserved. Under the copyright laws, this manual and software may not be copied, in whole or part, without the prior written consent of MKS Instruments. The same proprietary and copyright notices must be affixed to any permitted copies as were affixed to the original. This exception does not allow copies to be made for others whether or not sold, but all of the materials purchased may be sold, given, or loaned to another person. Under the law, copying includes translating into another language or format. MKS Instruments, Automation and Control Solutions 1321 Rutherford Lane, Suite 200 Austin, TX 78753 Main: 512-719-8000 Fax: 512-719-8095 mksinst.com Email: A&[email protected]

Trademarks MKS®,mksinst®, and mksinst.com® are registered trademarks of MKS Instruments, Austin, TX. Controls Workbench™, MultiTherm™, and PAC 100™ are trademarks of MKS Instruments, Austin, TX. All other product or service names are the property of their respective owners.

Export Regulation MKS Products provided subject to the US Export Regulations. Diversion or transfer contrary to U.S. law is prohibited.

About this manual This manual is designed to serve as a guideline for the installation, setup, operation and basic maintenance of the Controls Workbench software and its use with MultiTherm 1000 and 2000, MKS CM, and MKS PAC 100 devices. The information contained within this manual, including product specifications, is subject to change without notice. Please observe all safety precautions and use appropriate procedures when handling the products and related software.

http://www.mksinst.com/

mailto:A&[email protected]



Table of Contents 1. GENERAL INFORMATION .................................................................................................... 5

1.1 CONVENTIONS USED IN THIS USER MANUAL ....................................................................... 5

2. INTRODUCTION..................................................................................................................... 6

2.1 DEVICES TO WHICH CWB CAN CONNECT ........................................................................... 7 2.2 REQUIRED HARDWARE AND SOFTWARE ............................................................................. 7

3. INSTALLING CWB ................................................................................................................. 8

4. RUNNING CWB .................................................................................................................... 14

4.1 STARTING CWB ............................................................................................................. 14 4.2 ADDING DEVICES ............................................................................................................ 16 4.3 DEVICE TREE ................................................................................................................. 19 4.4 VIEWING DEVICES .......................................................................................................... 21 4.5 WORKING WITH SLICES AND DEVICES .............................................................................. 24

4.5.1 Renaming Items in the Device Tree ........................................................................ 25

4.5.2 Channel Display Options ......................................................................................... 26

4.5.3 Changing Temperature Units ................................................................................... 29

5. DEVICE MANAGEMENT ..................................................................................................... 30

5.1 USING THE TOOLS IN THE CWB MENU BAR ..................................................................... 30 5.1.1 File Menu ................................................................................................................. 30

5.1.2 Tools Menu .............................................................................................................. 32

5.1.3 Help Menu ................................................................................................................ 36

5.2 MODULE CONFIGURATION ............................................................................................... 37 5.2.1 Configuring MFCs in the Device Tree ...................................................................... 38

5.2.2 Configuring DIOs and PWMs in the Device Tree .................................................... 44

5.2.3 Renaming Devices and Loops ................................................................................. 45

5.2.4 Displaying I/O in the Device Tree ............................................................................ 46

5.2.5 Device Configuration Changes Requiring Reset ..................................................... 49

6. DIAGNOSTICS ..................................................................................................................... 50

6.1 DATA COLLECTION ......................................................................................................... 50 6.1.1 Adding a Chart ......................................................................................................... 50

6.1.2 Chart Navigation ...................................................................................................... 53

6.1.3 Data Export .............................................................................................................. 57

6.2 DASHBOARDS ................................................................................................................. 58 6.2.1 Adding a Dashboard ................................................................................................ 58

6.2.2 Customizing Analog Widgets in the Dashboard ...................................................... 61

6.2.3 Using MFC Widgets ................................................................................................. 63



6.2.4 Making Batch Level Changes .................................................................................. 64

7. THERMAL CONTROLS ....................................................................................................... 66

7.1 SYSTEM CONFIGURATION ............................................................................................... 66 7.1.1 Configuring PID Auto-Recover ................................................................................ 66

7.1.2 Configuring Input Types ........................................................................................... 66

7.1.3 Easy Control View of Temperature Loop ................................................................. 68

7.1.4 Zone Configuration .................................................................................................. 68

7.1.5 Export Loop Settings and Device Configurations .................................................... 72

7.1.6 Setting Alarm Limits ................................................................................................. 73

7.2 LOOP TUNING ................................................................................................................. 78 7.2.1 Open-Loop Control .................................................................................................. 78

7.2.2 Proportional-Integral-Derivative (PID) Control ......................................................... 79

7.2.3 Model Predictive Control (MPC) .............................................................................. 84

7.2.4 Filters in Auto-Tune Modes ...................................................................................... 88

7.2.5 Using CWB in PID/MBC Mode ................................................................................ 90

8. DEVICE MAINTENANCE ..................................................................................................... 93

8.1 UPDATING FIRMWARE ..................................................................................................... 93 8.2 CONNECTING CWB TO AN MKS DEVICE .......................................................................... 94

8.2.1 Connecting using Modbus TCP ............................................................................... 94

8.2.2 Connecting with EtherCAT ...................................................................................... 95

9. TROUBLESHOOTING ......................................................................................................... 97

10. CWB SYSTEM REQUIREMENTS ................................................................................. 100

WARRANTY ................................................................................................................................ 101

Revision History Revision Description of changes Date 0.1 First Release 5/2016 0.2 Updates for ver. 2.11, updated formatting, editorial improvements. 02/28/2017 Revision method: Rev X.Y X = 'major revision' — Any change that affects functional safety shall affect this numeral and will require re-assessment by the certification body. Y = 'minor' revision' — Any change that does not affect functional safety should be recorded by this numeral which will not require re-assessment by the certification body.



1. General Information Product: Controls Workbench™ (CWB) version 2.11

Verified compatibility with:

• MultiTherm™ 1000 Firmware: 3.2.8

• MultiTherm 2000 Firmware: 1.3.2, 1.5.4

• MKS® CM Firmware: 1.3.2, 1.5.4

• MKS PAC 100™ Firmware: 1.3.2, 1.5.4

The CWB software provides a single interface for controlling, tuning, monitoring, and configuring multiple MKS controllers, including the MKS Automation Platform and the MultiTherm product family. It uses Modbus TCP/IP for interacting with the units.

1.1 Conventions used in this User Manual The following conventions are used in this manual.

WARNING

The WARNING sign denotes a hazard to personnel. It calls attention to a procedure, practice, condition, or the like,

which, if not correctly performed or adhered to, could result in injury to personnel.

CAUTION The CAUTION sign highlights information that is important to the safe operation of the system, or to the integrity of your files.

Note The NOTE sign denotes important information. It calls attention to a procedure, practice, condition, or the like, which is essential to highlight.

Loops The number of Proportional-Integral-Derivative (PID) loops (48) available on the PAC 100 via Modbus is 48. These comprise 34 loops with Process Data Objects (PDOs) included, and 14 loops with no PDO data, but which are still accessible via Service Data Objects (SDOs).

Zones The number of zones equals the number of physical outputs available. Configuration of each zone includes selecting inputs from the inputs available and the PID loops, and selecting the output for the zone from the available outputs.

On-screen buttons or menu items are displayed in bold and italics. Example: Click OK to save the settings.

Keyboard keys are called out in brackets. Example: [ENTER] and [CTRL]

Text entered into a text box or command line interface appears in Courier font. Example: Enter netstat

Pages with additional information about a specific topic are cross-referenced within the text, displayed in italic Times font, and hyperlinked. Example: (See Section xxx)



2. Introduction The Controls Workbench™ (CWB) software leverages multivariate analytics for advanced auto-tuning to improve process performance compared to existing tuning approaches. Ideal for vacuum and temperature control applications, CWB features user-customizable dashboards that allow for easy process visualization and remote process control. Each CWB dashboard can be configured with digital readouts of temperature loops, mass flow controllers (MFCs), and generic analog and digital I/O channels, for manual control of a single or multiple processes with one interface.

When used with MultiTherm products, CWB provides support for advanced options that include model-based temperature control, cascading loops and Proportional-Integral-Derivative (PID) gain scheduling. It communicates to MKS devices such as MFCs and capacitance manometers using Modbus TCP/IP, enabling Ethernet communication to all compatible devices, while enabling custom visualizations with device-specific views and charts for individual processes or across an entire plant or fab. CWB offers built-in data logging, charting, and data exporting; advanced process diagnostic capabilities; incorporation of PLC and IEC 61131-3 projects and recipes; and the ability to remotely activate, pause, or stop process routines.

When used with the MKS Communications & Fieldbus Coupler Module (CM) or the MultiTherm 1000, all basic features of CWB are supported, but those devices do not provide the advanced processing features present in the PAC 100 and MultiTherm 2000 hardware.

CWB supports Modbus TCP/IP connectivity to provide data exchange and seamless integration into a Modbus network. CWB must be installed on a PC that is on the same network as the MKS devices. CWB can be used for configuration, process monitoring, plotting, data export, auto-tuning, and remote manual control of your connected MKS devices.

For accessing the MKS website for more details on CWB, after opening CWB, navigate to Help > View Help. By clicking View Help, you are redirected to the MKS webpage for Controls Workbench. Internet access is required. From this page, the User Manual can be found under the Documents and Downloads tab.

http://www.mksinst.com/product/product.aspx?ProductID=1479

Figure 1—Controls Workbench Page on MKS Website




2.1 Devices to which CWB can Connect CWB can connect to the following MKS devices:

1. MultiTherm 1000 (over Modbus TCP). Details about this product can be located at http://www.mksinst.com/product/Category.aspx?CategoryID=529

2. MultiTherm 2000 (over Modbus TCP). Details about this product can be located at http://www.mksinst.com/product/Category.aspx?CategoryID=529

3. MKS Communications Module (CM) (over Modbus TCP). Details about this product can be located at http://www.mksinst.com/product/product.aspx?ProductID=1487

4. MKS PAC 100 (over Modbus TCP). Details about this product can be located at http:/www.mksinst.com/product/product.aspx?ProductID=1489

Other devices and protocols will be added to this list as the functionality becomes available.

2.2 Required Hardware and Software To install and run CWB, you need the following:

• A laptop or PC running Windows 7 with .NET 4.5 or higher

• Your MultiTherm 1000, MultiTherm 2000, MKS CM, or MKS PAC 100.

• CWB installation package. Please refer to the Installing CWB section for more details on installing this software.

• Up-to-date XML file for your MultiTherm 1000, MultiTherm 2000, MKS CM, or MKS PAC 100.

• Ethernet cable, connected:

o Directly between the computer where CWB is installed and your MKS device, or

o Through an Ethernet router or hub between the computer where CWB is installed and your MKS device.

http://www.mksinst.com/product/Category.aspx?CategoryID=529

http://www.mksinst.com/product/Category.aspx?CategoryID=529





3. Installing CWB This chapter describes how to install the Controls Workbench software on your Windows computer.

Updates to CWB can be downloaded from ftp://ftp.mksinst.com/CWB/ using the following credentials:

User ID: mkscit Password: V@lue*25

Refer to Chapter 10, CWB System Requirements section for the system requirements for running CWB. CWB should be installed on a PC that is on the same network as the MKS devices. Once you decide which computer you want to use, the CWB software needs to be installed on the PC that will connect to the MultiTherm or other MKS device. For this, you need to run the CWB installer, which can be found on the MKS Controls Workbench ftp page.

After you download the CWB installer, double-click on its icon to start the installation.

1. The installer first checks whether .NET 4.5 is already installed on your PC. Click Install.

Figure 2—CWB Installer

The following window is shown.

Figure 3—Installer Confirmation

ftp://ftp.mksinst.com/CWB/



2. Click Yes to allow the installer to make changes.

3. The installer installs all the .NET dependencies, Microsoft Visual C++ dependencies, and libraries needed to run the CWB software.

Figure 4— .NET Installation

4. If the installer finds Visual C++ installed on the PC, it displays the following message. Click Yes to proceed.

Figure 5—Visual C++ is Detected

If Visual C++ is not installed on the PC already, the following window is displayed. Click Next to proceed.



Figure 6—Visual C++ Installer

5. Read the License agreement and select I accept the terms in the license agreement. Then click Next.

6. The following window details the destination folder to which all the program files will be installed. Click Install.

Figure 7—Destination Install Folder for CWB

7. The window shown in Figure 8 is displayed. Click Yes to allow the installer to make changes.



Figure 8—Allowing Installation of CWB

8. You should see the window in Figure 9 that indicates that the software has been installed. Click Finish. CWB is now installed.

Figure 9—Completed CWB Installation

Before running CWB, verify your computer’s IP settings from the control panel. See Figure 10. Your computer needs to have a TCP/IP configuration that is compatible with your MKS device’s configuration.



Figure 10—Verifying your PC’s IP Address from its Control Panel

The default TCP/IP settings for MKS devices are as follows: Table 1—Default TCP/IP Settings

Parameter Value

Static IP address 192.168.1.3

Subnet mask 255.255.255.0

Default Gateway None

Your computer needs the same IPv4 subnet mask as the MKS default (255.255.255.0), but a different IP address than the MKS default (192.168.1.3). If you are communicating through a gateway between your computer and your MKS device, contact your IT department for support.

Next, verify that your MKS device is powered on and has an Ethernet connection. From the command prompt on your PC, type ping 192.168.1.3

Your MKS device should respond with results similar to those shown in Figure 11.



Figure 11—Successful Ping Results

If you cannot successfully ping your MKS device, see Connecting CWB to an MKS Device and Troubleshooting at the end of this manual.



4. Running CWB This chapter describes the basics of starting CWB, adding devices, and navigating the Device tree. Later chapters describe:

• Device Management • Diagnostics

• Thermal Controls

• Troubleshooting

4.1 Starting CWB The CWB installer places a Controls Workbench icon on the Windows Start menu, as well as an icon the MKS Instruments folder in the Start Menu. You can use either to start CWB.

Figure 12—Opening CWB

1. Start CWB by clicking the Controls Workbench icon in the Start menu, or by opening the MKS Instruments folder in the Start menu and selecting Controls Workbench. The CWB startup screen, shown in Figure 13, is displayed. Click OK.



Figure 13—CWB Startup Screen

2. The CWB application screen is displayed. This screen has the screen areas shown in Figure 14.

Figure 14—CWB Application Screen

The Main Screen Area displays the details for the CWB components you are using. The CWB Menu Bar is always present, and offers a variety of tools and functions. The CWB Icon Area provides icons that allow adding and removing devices and visual diagnostic tools called Charts and Dashboards. The Workspace Area tells you the name of your current workspace. When you hover the pointer over it, the Workspace Area shows the path to this workspace. The Device tree lists the populated MKS devices and the Diagnostics for each device in the tree. All these areas are described later.

At this point, no devices are populated for this CWB session, and only the Add Device icon, shown in Figure 15, is active. Clicking this icon allows you to scan and detect MKS



devices connected to the PC over Modbus. The other icons are disabled by default until a device is added to the Device tree.

The CWB window can be resized with the handle in the bottom right corner or with the Maximize icon in the title bar.

4.2 Adding Devices A device is any MKS device that can be controlled or monitored by CWB. Examples include:

• MultiTherm 1000

• PAC 100

• CM

• MultiTherm 2000 (PAC 100 configured specifically for temperature control)

To locate and enumerate devices, CWB has two methods, adding by IP address, and adding by network scanning.

Figure 15—Add Device Icon

1. To add devices in CWB, click the Add Device icon. A pull-down menu is displayed, allowing you to scan the network or choose a device by its IP address. Figure 16 shows the pull-down menu for the Add Device icon, and the dialog box for choosing a device by its IP address.



Figure 16—Adding a Device Using its IP Address

2. To add a device by its IP address, select Add by IP… from the pull-down menu. Then enter its IP address in the field in the Add device IP dialog box, and click OK. This input field has error checking, and will not accept an IP address of an incorrect format. The default IP address for MKS devices that work with CWB is 192.168.1.3. You should ensure that you do not have multiple devices with this address on your network.

3. To add a device by scanning the network, select Scan all local networks from the pull-down menu. The Device Scan Progress dialog box is displayed, as shown in Figure 17.

Figure 17—Devices Detected by Scanning the Network

When scanning the network, CWB looks for devices with XML files that identify those devices to which it is trying to connect. The firmware version running on each device needs to match the firmware version as described in the XML filename. If there is no XML filename with the same firmware version that is running on the MKS device, CWB cannot connect to the unit.

Any new device found during the scan is detected and populated under the Devices added: display. MKS devices that are already connected to CWB, or any unidentified devices, are listed under the Other devices found display.

4. When the network scan has completed, the Device Scan Progress dialog box tells you how many devices it has located and made available to add to the Device tree. Click Next. The Device Scan Results dialog box, shown in Figure 18, is displayed.



Figure 18—Device Scan Results

5. To add detected devices to the Device tree, click on the green plus sign at the left end of the row for the desired device. Wait until each plus sign turns to a check sign, and then press Close. The devices you have selected are added to the Device tree, as shown in Figure 19.

CAUTION Do not click the plus signs more than one time each. Wait for the devices to be added to the Device tree.

Figure 19—Devices Added to the Device Tree

Note

Any subsequent scan of the network to add additional devices does not cause a device already connected

to CWB to lose connection.

If a device becomes disconnected, or if you have reset the device, the dialog box shown in Figure 20 is displayed.



Figure 20—Device Disconnected

If you add a slice to a device, or remove a slice from a device, the dialog box shown in Figure 21 is displayed when the device restarts.

Figure 21—Device Updated

CAUTION

Never attempt to “Hot Connect” or “Hot Swap” the components of the MKS Automation platform (i.e., do NOT connect or detach the modules while they are powered on). This can damage the PACs

and modules, and is not covered by your product warranty.

Always turn off or disconnect all power before attempting to service your PAC system.

4.3 Device Tree The network scan utility adds all the devices it finds to the Device tree, shown in Figure 22. Once a device has been populated in the Device tree, its information can be viewed.

Once a device is detected, it can be viewed in the CWB Device tree, shown in Figure 22. The Device tree populates all the MKS devices available on the network that can work with CWB, and saves their information in the workspace.xml file. These include both 8-loop and 16-loop MultiTherm 1000 devices, along with MultiTherm 2000 devices with any combination of attached MKS I/O modules.



Figure 22—Device Tree

Notice in Figure 22 that CWB has three MKS devices populated. The number to the left of the device shows its position in the device section, and this information is used in other parts of CWB. The names of two devices are colored red. This means that this CWB installation has detected them in the past, but the devices are not active on the network now. When they become active again, their configuration information will be restored as it was when they were last connected. If any modules were added or removed, CWB updates this information.

Each device in the Device tree populates its signals in this order:

• Detected inputs and outputs, which are denoted with blue arrows and the number of their type. Types include analog inputs, analog outputs, digital inputs, digital outputs, and power outputs. Signals can be enumerated from more than one module or slice. In this part of the Device tree, these signals are read-only.

• Loops (inputs), which are inputs that provide data to CWB. Typically, this is input from thermocouples (TCs) or Resistance Temperature Detectors (RTDs).

• Zones (outputs), which represent the available physical outputs. Zones are configured by selecting the inputs from the available inputs and loops, and selecting the zone’s output from the available outputs. Loops and zones are for temperature control.

• MFCs (Mass Flow Controllers), which are a type of proportional valve that controls the flow of gases.

• Channels, which are denoted by a yellow tee icon in the Device tree. Channels represent sets of Modbus registers and hold various configuration parameters and settings.



Upon connection to a device with some I/Os, CWB automatically detects and displays the associated I/O channels that are integrated on the modules of the device. Also, if a module changes upon hardware power down, CWB recognizes the change in I/O type and connection order, and displays the new I/O in the Device tree upon power up.

The Device tree shows the read-only I/O view for each of the I/O types. It also shows the Device Configuration section, where the global attributes for the entire controller are stored. Making any changes here affects all the loops/channels in the controller. Modbus registers for each of the loops in the MultiTherm are also displayed. Making changes in any of the loop sections only affects that loop. Further details of the I/O view are described in Section 5.2.4, Displaying I/O in the Device Tree.

The Data Collection and Dashboards section are also displayed in the Device tree. Further details of the I/O view are described in Chapter 6, PLC.

4.4 Viewing Devices Once devices are populated in the Device tree, you can view their properties.

1. To see device information, click on a device name in the Device tree. The Information tab is displayed in the main screen area, with the Device Configuration Menu Bar shown above it. See Figure 23. This tab displays the device’s IP address, its manufacturer, its product name, its serial number, and hardware and software revision numbers. The menu bar provides icons for performing context-sensitive tasks for the selected device.

Figure 23—Device Information Tab

2. To see module (slice) configuration information, click on the Configuration tab. The Slice Configuration tab is displayed, as shown in Figure 24.



Figure 24—Slice Configuration Tab

This tab lists configuration information for each module, or slice, connected to the device. The circle arrow icons to the right of each Slice Configuration row allow expanding and collapsing the slice configuration information, as shown in Figure 25. The buttons access pull-down menus that allow changing various parameters for each slice.

Figure 25—Slice Configuration Tab, Expanded

3. To change a slice’s configuration, expand the slice description with the slice’s circle arrow icon, then click one or more buttons and change the parameters. When you change a parameter, a small yellow “exclamation point within a triangle” symbol is displayed next to the device in the Device tree, as shown in Figure 26. This symbol means that you need to reset your device for your change to be effective.



Figure 26—Save NVRAM before Device Reset

4. You can change as many parameters on as many slices as you wish at one time. When you are satisfied with your changes, click on the Save NVRAM icon, also shown in Figure 26, and then click on the Reset device icon.

Note

Any time you change a slice parameter, even if you do not commit the change, a device reset is required. To undo a change, reset the

device without saving the change to NVRAM.

When you click the Reset device icon, the Device reset confirmation dialog box is displayed. This dialog box is always displayed before any device reset.

Figure 27—Device Reset Confirmation

5. Click Yes to reset. Your device will disconnect, go offline for a short time, reset, and then reconnect. You can ignore the Device disconnected dialog box, which closes automatically when your device comes back online.

When you highlight any object in the Device tree (click on it so that its name turns blue), you can arrow up or down through all the expanded items in the Device tree. This is useful for viewing a lot of information in a short time, particularly configuration information.

See also Section 5.2.5, Device Configuration Changes Requiring Reset.



4.5 Working with Slices and Devices This subsection describes some of the ways you can work with items in the Device tree.

To see all the available signals for a device, click the triangle in front of the device name in the Device tree. The Device tree expands, as shown in Figure 28.

Figure 28—Device and Channel Names

These items are associated with the device under which they are nested in the Device tree. A device is any MKS device that can be controlled or monitored by CWB.

Analog, Digital, and Temperature Inputs are process inputs that help the user to monitor processes, and CWB to control processes.

Analog, Digital, and Power Outputs are the outputs that go to the processes under control.

Loops are inputs for temperature control that provide data to CWB.

Zones are the physical outputs available for temperature control. Configuration of each zone includes selecting inputs from the available inputs and PID loops, and selecting the output for the zone from the available outputs.

MFCs are Mass Flow Controllers, a type of proportional valve that controls the flow of gases according to pressure and temperature.

Listed below the MFCs are the channels designated by the channel icon These represent the Modbus registers in which the modules attached to the device are defined. These registers hold various configuration parameters and settings.



Loops designated by the channel icon are available physical inputs. The MultiTherm 2000 (PAC 100) has 48 PID loops available via Modbus. The number of loops with Process Data Objects (PDO) included is 34, plus 14 more with no PDO data included, which are still accessible via Service Data Objects (SDO). The MultiTherm 1000 comes configured with either 8 or 16 loops/zones. For more information on configuring the inputs and outputs for each zone on the MultiTherm 1000 or MultiTherm 2000, refer to Section 7.1, System Configuration. Notice how items specifically associated with a device, such as loops, zones, and I/O, are nested under the device, but items that can apply to more than one device, such as the Diagnostics items, are not nested.

Instead, the Diagnostics are grouped into Data Collection items (collection plans and charts) and Dashboards, which you create and modify. This allows controlling and monitoring items and properties for more than one device at the same time. For more information about Data Collection items and Dashboards, see Chapter 6, Diagnostics.

4.5.1 Renaming Items in the Device Tree The following items in the Device tree can be renamed by double-clicking on their name, and entering text:

• MKS Devices (such as a PAC 100, CM, or MultiTherm)

• Channels designated by the channel icon, including the following:

o Device Configuration

o PLC-Related Channels

o Model User Variables

o Device I/O

o Loops

• Diagnostics, including the following:

o Data Collection Charts

o Dashboards

A device reset is not required after renaming these items in the Device tree, and these new names persist through device reset. Default names cannot be restored except by manually re-entering them.

One possible renaming scheme is as follows:

1. Rename your MKS device to something that describes the functions it controls, such as “Injection Molder #1.”

2. For items listed under that device, rename them according to their function or use.

3. Do not rename channels (designated by the channel icon) other than the loops.



When you name your Diagnostics items, you can give them names that describe the functions they compare, such as “Pump 1 and Pump 2 Pressure” (when your MKS devices are renamed “Pump 1” and “Pump 2”) or “Reactor Pressure vs. Input Temp.”

One important naming consideration is that your names should be descriptive, meaningful, and short.

For more information, see Section 5.2.3, Renaming Devices and Loops.

4.5.2 Channel Display Options The channels provide access to the Modbus registers for the devices and hardware controlled by CWB. Some information contained in these registers is read-only. Some data can be directly written. Some registers contain buttons that allow manipulating data, such as entering an offset value or applying data scaling.

CWB allows changing how the registers are displayed, and allows for limited editing of the registers’ contents. This subsection discusses those topics.

4.5.2.1 Adding Columns in the Channel Configuration Screens To add additional columns to the channel configuration screens, right-click on one of the labels in the Channels Configuration menu bar. A pull-down menu is displayed that lists all the additional columns that can be displayed. Click to the left of each desired item to add it to the display.

Figure 29—Adding Columns to the Channel Configuration Display

For example, the Address column displays the address of each of the Modbus registers for this channel. The Display column shows the data type of this attribute stored in the register. The Access column shows the access type of the register — whether it is read-only or whether it can be changed by you. Figure 30 shows all the columns displayed, with a sample of the data they can display.



Figure 30—Channel Configuration Display with all Columns Displayed

To remove some of the columns, go back and deselect the columns that you do not wish to display. For more information on each of the Modbus registers accessible through CWB, please refer to the MultiTherm 2000 User Manual or the MKS PAC 100™ Modbus & EtherCAT Addendum.

4.5.2.1 Editing and Scaling your Data After right-clicking in the channel configuration menu bar and adding the display options for Data and Scale, CWB allows you to make scaling adjustments to a signal. You cannot modify grayed-out registers. Only non-gray registers can be modified. Once the Scale column has been added, you can adjust the scale of a register by clicking its Scale button, if available. The Configure Scaling window, shown in Figure 31, is displayed.

Figure 31—Configuring Scaling

When you set scaling on a signal, its name is displayed in the Device tree and in charts with an asterisk. A sample is shown in Figure 32.



Figure 32—Asterisks on Signal Names

Figure 33 shows the changed data scaling for the Manipulated Value register. In this example, a gain offset of 5 has been added.

Figure 33—Configured Scaling

As shown in Figure 34, you can enter and apply negative values for gain and offset in the Configure Scaling dialog box.

Figure 34—Entering Negative Values for Gain and Offset

Additionally, some channels allow you to directly modify their data. Type your changes in the specific data field to be changed, and press [ENTER]. Your new data value is displayed in green. Data typing and range values are enforced, so if you enter an invalid value, your value is displayed in red.



4.5.3 Changing Temperature Units CWB can swap the displayed temperature units between Celsius and Fahrenheit in these locations:

• In the Device tree, MKS Devices > “Device Name” > Temperature Inputs

• In the Device tree, MKS Devices > “Device Name” > Loops > MKS Loop Info

• In any Diagnostic Dashboard created by you

To perform this swap, select Tools > Settings from the CWB toolbar. The Settings window, shown in Figure 35, is displayed. From here, you can change the temperature display between Celsius and Fahrenheit.

Figure 35—Changing Temperature Units

CAUTION Do not change the temperature units while running a process.

The Settings screen also allows changing a user’s password, adjusting chart colors, and setting the save location for exception files. For more information, see Section 5.1.2.3, Settings.



5. Device Management This chapter describes ways to manage your connected devices.

5.1 Using the Tools in the CWB Menu Bar CWB provides a number of tools in its menu bar, as shown in Figure 14. Three pull-down menus are available:

• File • Tools • Help

The following sections describe those menus and the uses of their menu selections.

5.1.1 File Menu The following are the choices on the File menu.

• New Workspace • Open Workspace • Save Workspace • Save Workspace As • Exit

Your workspace is an XML file that contains information about your most recently used CWB session, including devices populated, configuration settings made, and diagnostic items created or modified. Essentially, it lets you pick up where you left off in your last CWB session.

The File menu allows creating a new workspace, opening an existing workspace, saving a new or existing workspace, and renaming a workspace. In addition. it provides a preferred method of closing your CWB session.

To save your CWB workspace, close CWB with your current configuration by clicking the x on the top right corner of CWB or by navigating to File > Exit. Another way to save the state of CWB is to select either the Save Workspace option or the Save Workspace As option under the File menu.



Figure 36—Saving the Workspace

This ensures that you do not need to do any configuration next time after CWB starts up. All your dashboards and charts are loaded automatically. You can also move your workspace between PCs and reuse your configurations.

5.1.1.1 New Workspace When you start CWB for the first time, this menu selection is automatically invoked, and a new workspace named workspace.xml is set up in your \My Documents folder.

When you subsequently use this menu selection, CWB sets up a new, empty workspace in a location of your choosing. If you choose your \My Documents folder and use the name workspace.xml, CWB overwrites your previous workspace and you lose all the diagnostics you’ve created. You also will need to rescan for devices.

5.1.1.2 Open Workspace This menu selection opens a previously saved workspace. When you open a saved workspace, CWB looks for the devices that were connected when you saved that workspace. It takes a few moments for the CWB window to refresh. Also, you may need to re-scan the network to find previously connected devices.

If CWB cannot find devices that were populated the last time you used that workspace, it keeps them in the Device tree, but none of the device or diagnostic information is available. Figure 37 shown an example with two inactive devices in the Device tree.



Figure 37—Opening a Workspace with Inactive Devices

When those devices are activated or reconnected to the network, all your previous information for them is made available.

5.1.1.3 Save Workspace This menu selection saves your workspace. Closing CWB normally performs this action automatically. You may choose to use Save Workspace after making a lot of configuration changes, or if you find a section of CWB that appears unstable with your particular system.

5.1.1.4 Save Workspace As This menu selection saves your workspace wherever you choose, and with whatever name you choose. When you restart CWB normally, it looks in this location for your most recent workspace unless you opened or created (saved) a different workspace in the meantime. You can also move your workspace between PCs and reuse your configurations.

5.1.1.5 Exit This menu selection closes CWB (and saves your workspace).

5.1.2 Tools Menu The Tools menu gives access to three useful tools:

• Interlock Config • Event Log • Settings



5.1.2.1 Interlock Config This menu selection starts the Interlock Configurator applet, which runs outside of CWB. This applet is designed specifically for use with the MultiTherm 1000.

Interlock Configurator provides for 64 inputs and 48 outputs. Input and output values can be mapped onto outputs to provide interlock functionality. Interlock Configurator supports 64 interlock inputs: 48 real (physical) input functions (1–48), and 16 dummy/virtual input functions (49–64). It also supports 48 interlock outputs: 32 real (physical) output functions (1–32), and 16 dummy/virtual functions (33–48). This provides for extended complexity of interlock logic.

Figure 38 shows the Interlock Configurator.

Figure 38—Interlock Configurator Window

Physical inputs are on J22, J23, and J24 of the MultiTherm 1000. Physical outputs are on J25 and J26 of the MultiTherm 1000. Pin mappings are shown when you hover over the input and output labels.

Figure 39 shows the eight gates to which input and output signals can be connected.



Figure 39—Interlock Configurator Tabs

When you click on a cell, the widget shown in Figure 39 is displayed. Choose one of the gates for that cell. As you add gates, the Equations pane shows the logical equations for the Output column. The white … tab on the widget clears the cell entry.

Figure 40 shows a sample mapping of inputs and outputs.

Figure 40—Interlock Configurator Sample

Inputs can either be inputs or outputs, as the bottom of the Interlock Configurator repeats the outputs at the bottom of the screen.

The Save button saves your interlock configuration at a location of your choosing. By default, Interlock Configurator saves its files at C:\Program Files (x86)\MKS Instruments\Controls Workbench\Tools\Interlock Configurator\<filename.csv>.

The Open button opens a previously saved interlock configuration file.

The Clear button removes all entries in a configuration. If you had previously saved that configuration, its contents are intact and you can re-open it.

5.1.2.2 Event Log This menu selection displays a log of actions performed in CWB since its initial installation on your system. Figure 41 shows a sample event log. Note that not all user actions are saved in this log.



Figure 41—Event Log Window

Events can be selected by date with the Filter by date: buttons at the top of the screen, and exported as a .csv file with the Export button at the bottom of the screen.

In the unlikely circumstance CWB crashes and an exception (crash) report may be produced, it is saved to the default /My Documents folder on your PC, but not recorded in the Event Log. This exception report is not always produced upon a crash. The less catastrophic the crash, the more likely a file is to be produced. You can change this file’s destination with the Settings selection in this menu. See Figure 42.

5.1.2.3 Settings This menu selection allows changing a number of system-wide settings. They include:

• Adding users

• Editing user passwords

• Requiring passwords to run CWB

• Changing temperature units between Celsius and Fahrenheit

• Setting the Scan timeout for adding devices

• Changing the color sets for chart plotting

• Specifying the target directory for exception (crash) files

Figure 42 shows the Settings window.



Figure 42—Settings Window

The Settings window allows you set up users and passwords. Users can be created, but not deleted. User passwords can be set and edited. Use the Enabled? check box to deactivate unwanted users, or change their password.

The Settings window also allows you to define the temperature units used in the system, either Celsius or Fahrenheit. When changes are made to this setting, they propagate through the system, but not all values are recalculated.

CAUTION Do not change the temperature units while running a process.

The Settings window also allows you to define the Scan Connection Timeout in milliseconds, which is the time CWB scans each IP address to locate a device before continuing on to the next IP address. The default timeout should be set to 100 ms, as shown in Figure 42.

The Settings window provides a choice between three different color sets for charts, a useful function for charts with large signal sets.

Finally, The Settings window lets you choose where CWB saves exception reports in the event that CWB crashes.

5.1.3 Help Menu The Help menu provides the following options:

• About • View Help • Export Support Info



5.1.3.1 About This menu selection displays the start-up screen for CWB, which gives versioning information.

5.1.3.2 View Help This menu selection displays the URL for the MKS website, where the latest version of this manual can be downloaded as a PDF file.

5.1.3.3 Export Support Info This menu selection exports the workspace.xml file with additional information regarding existing settings for this device and its attached slices. This information is intended for the use for MKS Support personnel. This file is saved to the default /My Documents folder on your PC.

5.2 Module Configuration Module (or “slice”) configuration can be performed in the Configuration tab, as shown in Figure 43. To change slice configurations, click on the device name in the Device tree, and then click on the Configuration tab. The Slice Configuration tab is displayed. This example shows a Serial slice, an MFC slice, and an Analog slice. Changes require a device reset to be effective.

Figure 43—Slice Configuration

When changing configurations for the attached slices, you need to click on the Save NVRAM icon before clicking the Reset device icon. Otherwise, your configuration changes are not recorded.



Note

Module configuration settings are all saved on the Multitherm CPU module, MKS CM, or MKS PAC 100 device.

Therefore, if the device is replaced, these settings need to be redone.

5.2.1 Configuring MFCs in the Device Tree CWB allows you to add and configure the inputs and outputs for MFCs in the Device tree. To configure MFCs, do the following:

1. Begin by clicking on MFCs(#) in the Device tree, then on the Add MFC button, which is the upper green Plus sign highlighted in Figure 44.

Figure 44—Adding an MFC or MFC Group

Once the Add MFC button is selected, the Configure MFCs dialog box (shown in Figure 45) allows you to name and configure the inputs and outputs of each MFC from pull-down menus. These inputs and outputs are composed of I/O that is allowable for the MFC.



Figure 45—Configuring an MFC

CWB has no knowledge of the configuration of the MFC, nor the source of the analog signals controlling the MFC. Therefore, you must make the correct selections from the pull-down options for Channel Name and Channel Range. The Channel Name Flow Rate is source of the I/O for the feedback to the MFC slice from the MFC. The Channel Name Set Point is the source of the I/O for the setpoint (SP) command from the MFC slice to the MFC.

All analog signals from all slices are shown to be available for configuration for the MFC, including both MFC and Analog (AIO) slices. You must verify which pins are wired to the MFC device from the installed I/O modules, and then make the correct selection in the Configure MFC window. MFC I/O signals from the MFC slice are labeled to reflect the connector number (for example, MFC Flow 1 for connector 1).

The I/O board for the MFC slice is manufactured with voltage ranges –14.2 V to 14.2 V for the MFC flow rate feedback, and voltage range 0–10 V for the setpoint. As such, when configuring the MFC widget and selecting any MFC I/O signal from the MFC slice, CWB automatically assigns the voltage range.

The AIO slice can be configured with voltage ranges ±10 V, ±5 V, 0–10 V, or 0–5 V. You must identify the analog I/O board configuration of the unit and make the correct assignment in the CWB MFC widget.

2. From the Configure MFC window, select the signals for the flow and setpoint, for example, MFC Flow 1, which corresponds to the flow signal output on the first connector. MFC Set Point 1 corresponds to the setpoint for first connector. MFC Flow 2 corresponds to the flow signal output on the second connector. MFC Set Point 2 corresponds to setpoint on the second connector, and so on.

3. The Configure MFC window allows you to set the Gas Correction Factor (GCF) for both the MFC configuration as well as the Process Gas. The pull-down menus for both the MFC calibration GCF and Process gas GCF include GCFs for approximately 70 of the most commonly used gases. The most commonly used



MFC Calibration gas is N2. By selecting Custom from the pull-down menu, you can enter a value for a custom GCF not found among the provided list. Select these values and press OK.

4. The last option is to select the Max flow rate from the pull-down list in the Configure MFC window. In this case, the G series MFC being used has a maximum flow rate of 50 sccm. To know this value for the MKS MFC being used on your application, refer to the specification on the MFC. When you choose this value, the Process max flow rate field in the Configure MFC window (see Figure 45) shows the calculated maximum flow for the MFC, in sccm.

Once you have added all the MFCs and selected MFCs (#) in the Device tree, a list of all the configured MFCs is displayed at the top of the right-hand CWB window pane, as shown in Figure 46.

Figure 46—Configured MFCs

Each MFC can be edited by using the Gear icon, or deleted from the Device tree by using the Red Minus icon. Their labels (when you hover the cursor over them) are Edit and Delete.

After you configure all your MFCs, you can optionally create MFC Groups. Begin by clicking on MFCs(#) in the Device tree, then on the Add MFC Group button, which is the lower green Plus sign highlighted in Figure 44.



Figure 47—Creating an MFC Group

You are prompted to enter an MFC Group name. Enter a name and press OK. The name is populated in the MFC Groups pane, with an arrow icon at the left end.

Figure 48—New MFC Group

Click that icon to expand the group list, as shown in Figure 48.

To add an MFC to the MFC Group, double-click in the field beneath the MFC Name label. A pull-down menu is displayed, containing the names of the MFCs you configured. Add your MFCs, then save your workspace.

Once you create an MFC dashboard widget, the MFC widget automatically displays flow (in sccm, or standard cubic centimeters per minute) in units of the configured process gas. To determine how to calculate the Actual Flow Rates (AFRs) using the GCF, see the following examples.



~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~ Programmed Set Point Flow Rate = SPFR MFC calibration GCF = GCF1 Process Gas GCF = GCF2 Actual Flow Rate = AFR (N2 gas equivalent flow rate) AFR = SPFR / (GCF1 / GCF2)

~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~ Example 1 100 sccm Argon (Ar) GCF: 1.39 Equivalent flow of N2 = 71.9 sccm N2 (100 / 1.39 = 71.9 sccm )

Example 2 100 sccm Silane (SiH4) GCF: 0.60 Equivalent flow of N2 = 166.67 sccm N2 (100 / 0.6 = 166.67 sccm) ~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~

For an MFC with a base calibration other than N2: 100 sccm Argon MFC converted to Silane 0.60 / 1.39 = 0.43 100 sccm silane = 232.56 sccm of Argon (100 / 0.43 = 232.56 sccm)

~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~ The MFC voltage range needs to be set for the MFC you’re using. For example, set the voltage range to 0–5 V for G series MKS MFCs. To do this, first set the configuration for the Valve open and close to 3 as shown in Figure 49. These registers are found in the Device tree at Device I/O > MFC Digital Output Configuration.

Figure 49— Successful MFC Configuration

Now the voltage applied on the pin on the MFC slice is approximately 5 V in normal state and 0 V when triggered. Then set the valve open or closed through the dashboard. The valve opens or closes depending on whether DO1 (valve close) or DO2 (valve open) is triggered.

If not 0–5 V, the MFC needs to be set to 1–5 V or 0–10 V for Brooks MFCs (example: http://www.brooksinstrument.com/products/mass-flow-controllers/thermal-elastomer-sealed).

http://www.brooksinstrument.com/products/mass-flow-controllers/thermal-elastomer-sealed

http://www.brooksinstrument.com/products/mass-flow-controllers/thermal-elastomer-sealed



The next step is to create a dashboard for controlling the MFCs or monitoring the flow rates, and create line charts for realtime tracking of the setpoint and flow rates. Refer to Section 6.2.1, Adding a Dashboard for more information on how to add a dashboard. Figure 50 shows MFCs selected for a dashboard, and Figure 51 shows that dashboard, with Batch change selected.

Figure 50—Selecting MFCs for a Dashboard

Figure 51—MFCs in a Dashboard, Ready for Batch Change

You can also control MFCs or MFC Groups individually.



Figure 52—Slice Configuration

5.2.2 Configuring DIOs and PWMs in the Device Tree CWB allows you to reconfigure the outputs of DIOs and PWMs, effectively changing a DIO slice to a PWM slice, or a PWM slice to a DIO slice. To reconfigure a DIO’s or PWM’s digital output, do the following:

1. Begin by clicking on Digital Outputs in the Device tree.

2. In the Configuration tab for the device with the DIO or PWM slice you want to reconfigure, click on the blue button to expand its configuration settings.

3. Click the Application Output Mode: pull-down to expand it. Its choices are shown in Figure 53. For a DIO slice, the default choice is Generic DO.

Figure 53—Reconfiguring Digital Outputs for DIO and PWM Slices

4. Choose a new output mode.



5. Click the Save NVRAM icon to save your change, and then click the Reset device icon to commit the change. The device restarts, saving your change.

5.2.3 Renaming Devices and Loops The MKS device and channel names displayed in the Device tree can be modified, including Loop names.

Figure 54—Device Names vs. Channel Names

To rename a device, you have two options. First, highlight the device, then left-click on the device. After the dialog box shown in Figure 55 is displayed, enter the desired name (for example, Process 3A) for the device in the Rename Device dialog box.

Figure 55—Renaming a Device

The second option to rename a device or loop is to double-click on either item, and enter the desired name for the device or loop (for example, the Process 3B loop, shown in Figure 56).



Figure 56—Renaming a Device or a Loop

You may find that shorter names are easier to manage, as CWB concatenates device and signal names in many displays.

5.2.4 Displaying I/O in the Device Tree CWB allows you to quickly view all the Temperature Inputs, PWM (Power) Outputs, Digital Inputs, Digital Outputs, Analog Inputs, and Analog Outputs in the CWB Device tree through the use of a read-only I/O view. These I/Os are shown with blue arrows at the top of the Device tree. You can select any of the I/O s in the Device tree, as seen in Figure 57.

Remember that you can change the modes of digital outputs on DIO and PWM slices. See Section 5.2.2, Configuring DIOs and PWMs in the Device Tree, for more information.

The number within the parentheses for each of the I/Os in the Device tree indicates the quantity of available signals for that type of I/O. The values displayed in the right window pane are the values associated with each of the I/Os. Temperature values are displayed in degrees (Centigrade or Fahrenheit). Power Output values are displayed in percentage of power. Analog values are displayed in unit-less DAC counts. Digital values are displayed as gray = OFF, and green = ON.

Note

All analog and digital I/Os associated with the MFCs are incorporated within the generic Analog and

Digital I/O displays.



Figure 57—Temperature Inputs

Figure 58—Digital Inputs

Figure 59—Analog Inputs

Notice the Settings (Gear) icon in the MFC analog inputs shown in Figure 59. This indicates that configuration changes can be made in this widget.



Figure 60—Power (PWM) Outputs

Figure 61—Digital Outputs

Figure 62—Analog Outputs

Note Support for I/Os on the Serial module are planned

to be added in future versions of CWB.



5.2.5 Device Configuration Changes Requiring Reset When you change device configurations:

Any time you change a parameter in the Device Configuration table for which a device reset is required, this icon is displayed next to the device name until the device is reset. As seen in the screen shot in Figure 63, the Change Requires Reset dialog box is displayed, requesting you to reset the device.

Figure 63—Change Requires Reset Dialog Box

To reset the device, use this icon. This icon is shown whenever you are in the MKS Devices section of the Device tree. It is not available in the Diagnostics half of the tree, because signals from more than one device could be associated with a given chart or dashboard, and the wrong device could inadvertently be reset.

When selecting the Device name, the Reset device confirmation dialog box is displayed. This “Are you sure” dialog box is always displayed when a reset is requested.

Figure 64—Reset device confirmation Dialog Box



6. Diagnostics This chapter discusses creating, editing, and using the tools for data collection, storage, and viewing. Device data is collected whenever a connection to CWB is available and diagnostics have been set up by the user. Diagnostics are the charts and dashboards created by the user to manage the data collected by CWB.

6.1 Data Collection Collection plans and charts choose the data that you can view and collect. A data collection plan selects the process variables of interest, and the frequency of data collection.

Charts serve to record data from multiple sources and allow comparisons over time. In CWB, realtime data is displayable in charts, and historic data can be displayed and reviewed as well.

In CWB, charts are the tools that represent your collection plans.

Dashboards, discussed in a later section, allow viewing and managing realtime data but provide no means to capture that data.

6.1.1 Adding a Chart Charts record and display data from multiple sources and capture a history of this data.

1. To add a chart, click on the Add diagnostic icon in the CWB icon area, as shown in Figure 65.

Figure 65—Adding a Chart

2. From the pull-down menu, select Collection plan and chart. The Chart Name dialog box shown in Figure 66 is displayed. You can rename your chart later if you need, and you can have multiple charts with the same name.



Figure 66—Entering a Chart Name

3. Enter a name for the chart to be created, and press OK. The Select signals dialog box, shown in Figure 67, is displayed.

4. The Select signals dialog box allows choosing any signal from any device listed in the Device tree. Whenever more than one device is populated in the Device tree, CWB places every device into the signal groups. Choose the signals you wish to chart, and press Add Signals.

Figure 67—Selecting Signals

You can select signals from more than one source or device for your chart, and you can mix analog and digital signals on a chart. You can add more signals to your chart later, turn them off from view, or remove them completely.

5. Your new chart is now visible in the Device tree under Diagnostics > Data Collection. Device data is collected whenever a connection between the device and CWB is available. A sample chart is shown in Figure 68.

You can create multiple charts for each loop/zone or even separate charts for separate loops/zones.



Figure 68—Sample Chart

6. To set the collection rate of a device, select the device in the Data Collection in the Diagnostics tab. Move the slider bar to change the Update Rate. The minimum is 0.5 seconds and the maximum is 10 seconds, in 0.5-second intervals.

Figure 69—Slider Bar for Changing the Update Rate



Whenever you are viewing a chart, you can double-click in the chart area to start or stop the display. Data continues to be collected.

6.1.2 Chart Navigation Once your chart is created, you can begin exploring how it displays your data, and how you can customize that display.

6.1.2.1 Chart Features CWB has numerous features that enhance chart usability. Figure 70 shows some of these. The chart name in the Device tree can be expanded to show all the parameters that the chart can display. The Show/Hide Legend icon at the top right of the chart allows displaying the signals being plotted. Hovering the cursor over the chart allows selecting a single data point with timestamp. Selecting the Change button below the chart expands the time period being shown.

Figure 70—Additional Chart Display Features

At the bottom of the chart, a graphic slider window allows rapid viewing of the stored chart data. Dragging the vertical slider handles changes the display of the Visible time and the charted data dynamically.

In the Device tree, your chart can be expanded to display all the signals it is recording and displaying. Whenever a gain, offset, or scaling has been applied to a signal, an asterisk (*) is displayed at the start of its name.

Finally (not called out in Figure 70) the Overview feature is a pull-down list that allows displaying just the selected signal in the bottom pane. See Figure 71.



Figure 71—Using the Overview Chart

Here, the Overview pull-down list has been used to select and display just one of several signals in the chart.

6.1.2.2 Editing a Chart Besides having a variety of tools for viewing charts, you can also add or remove signals from charts.

1. To add more signals or remove signals from an existing chart, highlight the desired chart in the Device tree, then click the Edit signals… icon shown in Figure 72. The Edit Chart window is displayed.



Figure 72—Editing Signals

2. Navigate to the Device tree selection where your signals are located, and you can select or deselect the desired signals.

Figure 73—Edit Chart Window

When plotting more than one signal at a time on the same chart, users can normalize the data being plotted by selecting the Normalize button, shown in Figure 74, which centers the Y axes of all the data plots. Deselecting the button removes the normalization. The chart on the left is not normalized. The chart on the right is normalized.



Figure 74—Selecting Normalization

6.1.2.3 Removing a Chart Charts can be removed as easily as they can be created or edited. To remove a chart, do the following:

1. Highlight the desired chart in the Device tree, and then click on the Remove Selected Diagnostics Chart icon, as shown in Figure 75. Note that chart deletion is immediate and cannot be undone.

Figure 75—Removing a Chart



6.1.3 Data Export The Export Data icons shown in Figure 76 allow you to export all the data collected, or select a range of the data to be exported.

Figure 76—Export Data Icons

The left-hand icon is the Export to CSV icon. The right-hand icon is the Export to PNG icon.

Exporting data as a .csv file can be done one of three methods, as follows:

1. Export all exports all the data collected since the collection plan was created.

2. Export view only exports the data in the current view of the chart.

3. Export time period… allows the data to be exported for a user-defined time period. Figure 77 shows the Select time period dialog box that is displayed when this option is chosen. When you press OK, you can save the .CSV file anywhere on your PC or network.

Figure 77—Exporting .CSV Data for a Selected Time Period

For all these options, the data is exported in a .csv file format.



When exporting a .csv file to Microsoft Excel, a custom format can be applied to the Sample timestamp column, which has a condensed default format. A method for expanding into better resolution is as follows:

1. Open the .csv file in Excel.

2. Highlight the Sample timestamp column.

3. Right-click on the highlighted column, and select Format Cells….

4. Under the Number tab header, select Custom and scroll until you see h:mm:ss.

5. Within the Type: data field, append .00 to view the data in milliseconds.

6. To display the timestamp with a date, select Custom and scroll until you see m/d/yyyy h:mm. This shows the date. To expand the timestamp to include milliseconds, append :ss.00 to the custom format.

Thus the complete Type: string would be m/d/yyyy h:mm:ss.00

The Export to PNG icon exports the current view in the Main chart (up to 60 seconds) to a .png file. When you select this icon, you can save the .png file anywhere on your PC or network.

6.2 Dashboards Dashboards allow viewing and managing realtime data but provide no means to capture that data. Charts are the primary data capture tool. Dashboards are the best tool for realtime, at-a-glance data monitoring.

6.2.1 Adding a Dashboard You can create dashboards for individual or multiple MKS devices on the same network. Each CWB dashboard can be configured with digital readouts of temperature loops, Mass Flow Controllers (MFCs), and generic analog and digital I/O channels, for manual control of a single or multiple processes with one interface. The dashboard also allows you to make batch level changes (commanding multiple inputs/outputs at the same time) for any temperature loop, MFC, digital, or analog I/O signals.

1. To create a dashboard chart, first click on the Add diagnostic icon (see Figure 65), and select Dashboard. The Dashboard Name dialog box is displayed.

Figure 78—Entering a Dashboard Name

2. Enter a name and select OK. You can rename your dashboard later if you need.

3. Scroll to the bottom of the Device tree and select the newly created dashboard. At the top of the CWB main screen, groups of options allow you to add signals to



your dashboard, including adding a pre-existing Line Chart to the dashboard view. You also can create a new chart within the dashboard view.

Figure 79—Selecting Signals for a Dashboard

You can select signals from more than one signal type and more than one device for your dashboard. Whenever more than one device is populated in the Device tree, CWB places every device into the signal lists, as shown in the Select MFCs signal list in Figure 79.

4. Select which signals to add from the Temperature Loop, MFC I/O, Digital I/O, Analog I/O, Temperature Inputs, or Power Output signals by clicking the check boxes, and select OK. Examples of many of the available signals are shown in Figure 79.

5. A dashboard view can be created by any combination of the Temperature Loop, MFC, Digital, or Analog I/O signals shown in Figure 79. An example of plotting a Temperature Loop, an MFC, Digital Inputs, and Analog Inputs and Outputs is shown in Figure 80.

The number in the top left corner of each widget matches the associated device in the device tree.

In the Digital Outputs widget, the buttons can be clicked to turn the outputs on and off. In Figure 80, DO2 has been turned on, and displays green.



Figure 80—Example Dashboard

6. Widgets can be resized by dragging the handle in its lower right-hand corner to the desired size. The minimum size is 100x100 pixels. Widgets can be reordered on the dashboard by dragging them (click and hold) from their current location to their new desired location. Widgets auto-align to the left edge of the viewing area. The resize handle is indicated in Figure 81.

Figure 81—Widget Resizing Handle



6.2.2 Customizing Analog Widgets in the Dashboard You have a number of ways to customize analog widgets.

You can scale the analog inputs or outputs in a dashboard. First, select a dashboard with analog inputs or outputs. Figure 82 shows such a dashboard with one analog input and one analog output signal. The values shown here are in terms of raw counts.

Figure 82—Dashboard with One Analog Input and One Analog Output

Click on the Gear icon to open the widget for editing.

To view the values as volts, click the Range button, as shown in Figure 83. Then choose a voltage (or current) range.

Figure 83—Setting Units on an Analog Input

Now the value is displayed as volts or mA. Figure 84 shows volts displayed.

Figure 84—Analog Input Displayed in Volts

You can change the scaling on the analog value. Choose a Scaling option by clicking the Change… button, shown in Figure 85.



Figure 85—Scaling Option

Now you can select a Gain/Offset or a Table to use for non-linear inputs, as shown in Figure 86.

Figure 86—Configuring Scaling Type

Figure 87 shows the scaling options, with Gain/Offset on the left and Table on the right. In the Table window, click below the table to add rows, and enter your scaling data. For both windows, press Update to save your changes.

Figure 87—Scaling Configuration Options

When using a table to scale your data, you can easily apply either linear or non-linear scaling.

You can also select an image file to use on an analog widget by clicking on the Image checkbox, then clicking on Set… to browse for an image file. See Figure 88.



Figure 88—Selecting a Widget Image

Click the Set button at the bottom of the widget.

Figure 89—Selecting a Widget Image

Your image is placed on the widget.

Figure 90—Saving a Widget Image

You can remove the image by clicking the Gear icon, and un-checking the Image checkbox.

6.2.3 Using MFC Widgets MFC and MFC Group widgets provide a graphical representation of an MFC. Figure 91 shows an MFC widget on the left, and an MFC Group widget on the right.

Figure 91—MFC Widget vs. MFC Group Widget



Flow rate (FR) is a feedback read-only view, and the Set point (SP) is a read-write programmable value. The FR is in units of Process gas (in sccm) as configured in Section 5.2.1, Configuring MFCs in the Device Tree. You can adjust an MFC’s flow rate setpoint from its dashboard widget. You also can adjust the Master set point for an MFC Group in its widget. If you change the setpoint to 0, you effectively shut off the MFC, or every MFC in the MFC Group.

The MFC setpoints cannot be manually programmed (by using the arrows or by manual text entry) above the maximum setpoint already configured for the MFC. This prevents damage to the MFC.

6.2.4 Making Batch Level Changes CWB allows you to make batch level changes (commanding multiple inputs/outputs at the same time) for any Temperature Loop, MFC, Digital, or Analog I/O signals on your dashboard.

1. Open your dashboard and click on the Batch Change icon. Any I/O that is applicable for batch change is displayed. The Batch Change icon is active only after selecting and adding the desired signals and widgets to the dashboard. In the example in Figure 92, Loops… were chosen.

Figure 92—Batch Change

When you select Loops… from the batch change utility, the Select change temperature loops to change dialog box is displayed. Select the desired Loops to make the batch change along with the new desired setpoint. Clicking Set sends the command for the new target setpoint.



Figure 93—Batch Changing Temperature Loops

Depending on the signals selected for batch change, you are presented with an appropriate dialog box.



7. Thermal Controls This chapter describes the basics of performing thermal control with CWB, including:

• Configuring input signals (Loops)

• Configuring output signals (Zones)

• Setting up auto-tuning

7.1 System Configuration This section describes configuring the auto-recover function, selecting the input sensor types, configuring inputs and outputs on a Zone or Loop, and defining the alarm limits.

7.1.1 Configuring PID Auto-Recover Via CWB, you can configure the MultiTherm so that the startup control mode reboots into PID mode and goes back to maintaining the previously set temperature setpoint. If the MultiTherm was previously set to Manual Output mode, the device recovers with 0% output power. When the PID Auto Recover register is set to True, the device recovers with its previous output power level.

Figure 94—Setting PID Auto Recover

The PID Auto Recover register can be found in Device Configuration in the Device tree, as shown in Figure 94. For this feature to be available on a MultiTherm 2000, its firmware revision must be at least 0.6.1.

7.1.2 Configuring Input Types CWB supports configuration of the input type on the MultiTherm as either two-wire thermocouple or three-wire Resistance Temperature Detector (RTD). To change this setting, edit the Sensor Configuration register in the Device Configuration section of the Device tree. Setting it to 0 configures all inputs to be thermocouples. Setting it to 1



configures all inputs to be three-wire RTD. This change affects ALL loops on that MultiTherm.

Reset your device for this change to take effect.

Figure 95—Configuring Input Types

After the device restarts, the confirmation of this change can be done in the Channel Configuration section for Loop 1, as shown in Figure 96.

Figure 96—Successful Input Configuration



7.1.3 Easy Control View of Temperature Loop When a Temperature Loop is selected from the Loops list in the Device tree, CWB displays the current values and controls for the temperature loop in an Easy Control view that can be used for manual tuning and easy viewing of its response.

Figure 97—Temperature Loop Controls

For a selected temperature loop, you can view and control:

• Readings

o Process Value (PV)

o Manipulated Value (MV)

• Control Settings

o Control Type (PID, MPC, Model master, Model slave)

o Control Word (Off, Closed Loop, Open-Loop)

o Target Set Point (temperature)

o Forced MV (% power)

• Tuning Parameters (PID, Tau, MPC)

7.1.4 Zone Configuration On a single loop/zone, there is one input and one output assigned. If needed, you can assign two inputs to a zone.

The numbers within the parentheses for Temperature Inputs and Power Outputs in the Device tree display the quantity of available signals. As shown in Figure 98, only 8



inputs are available to be selected for the Temperature Inputs, so only Temperature1–8 are options in the pull-down menus. These inputs can be selected for more than one loop or zone. 12 Power Outputs are available, so Power 1–8 are options in the pull-down menus.

Figure 98—Configuring a Loop

To configure a loop, do the following:

1. Select a loop from the channel area of the Device tree. The Channel tab shown in Figure 98 is displayed.

2. Click the Loop Settings menu option. The Loop Settings pop-up window, also shown in Figure 98, is displayed.

3. Select the Temperature Control input from the Power menu selection in the pull-down menu shown in Figure 98. The number within the parentheses for the Temperature Inputs and Power Outputs in the Device tree displays the quantity of available signals. As shown in Figure 98, only 8 inputs are available to be selected for the Temperature Inputs, so only Temperature1–8 are options in the pull-down menu.

4. Select the power output for each loop from the Power pull-down menu in the Loop Settings function. The number within the parentheses for each of the Temperature Inputs and Power Outputs in the Device tree displays the quantity of available signals. In the following case, only 8 inputs are available to be selected for the Power, so only Temperature1–8 are options in the pull-down menu.

5. Select the Alarm Limit from its pull-down menu. The number within the parentheses for each of the Temperature Inputs and Power Outputs in the Device tree displays the quantity of available signals. In the following case, only 8 inputs are available to be selected for the Alarm Limit, so only Temperature1-8 are options in the pull-down menu.



CWB allows you to auto-configure the loop inputs. By clicking the Auto-configure loop inputs button in the MKS device Information tab (see Figure 99), a pop-up configuration dialog is displayed. You can select to configure either the Temperature Control or Alarm Limit inputs, or both.

Figure 99—Auto-configuring Loop Input Settings

For example, if utilizing this Auto-configure functionality, Loop 1 is configured with Temperature Control input set to Temperature 1, and Alarm Limit input set to Temperature 2. Similarly, Loop 2 is configured with Temperature Control input set to Temperature 3, and Alarm Limit input set to Temperature 4. See Figure 100. Power, which is an output, is not auto-configured, and previous power configurations are unchanged when loop inputs are auto-configured.

Figure 100—Auto-configured Loops



CWB allows you to configure the loops within each zone for Multitherm 2000 without navigating into the loop settings of each loop. Go to the Zones view in the tree, select which loop to configure, and click OK.

Figure 101—Choosing an Output Loop

Now configure the inputs and outputs for each loop within that zone. This utility allows configuring cascaded loops.



Figure 102—Cascaded Loops

After completing the setup for the inputs and outputs for each loop, you can review the setup of each zone in the diagram. Notice that you can edit zone configurations at any time from this screen.

On a single loop/zone, there is one input and one output assigned. If needed, you can assign two inputs to a zone.

This can be done by clicking on the Loop Settings icon to configure an input on one of the other loops to use the RTD input for Loop 1 by changing the Control loop input value for Loop 2. Change this to 3 to use Loop 3’s input RTD. You can then see the process value on Loop 1 change to the temperature being read from the RTD on Loop 3.

7.1.5 Export Loop Settings and Device Configurations CWB lets you export loop and device configuration setting information to a file that can be saved on your PC. CWB also lets you import a configuration file that may have been created in another CWB installation. Figure 103 shows the Import… and Export… icons.



Figure 103—Loop Settings Import and Export Icons

7.1.6 Setting Alarm Limits Two sets of alarms for each zone can be configured in this step.

1. The first set of alarms is based on the Limit Loop Input. The limit loop input configures the input to be connected to limit output of this zone. For each zone, this can be a secondary temperature input on one of the other loops (for example, Loop 1) or can be the same process value input for that zone (in this example for Loop 2, limit loop input can also be set to 2).

2. Any time the process temperature exceeds either of the limits, an Alarm condition flag in one of the Modbus register for the Channel Input section is switched on. The alarm can be cleared by the Clear Alarms register in the Channel Output section.

3. You can set the Limit Alarm 1 SP1 High and Limit Alarm 1 SP1 Low (absolute limits), Limit Alarm 1 SP1 Max and Limit Alarm 1 SP1 Min based on your specific process/application as shown in Figure 104 in the MKS Loop configuration section. If needed, Alarm 2 limits (relative limits), can similarly be defined.

4. If the Limit Alarm1 SP High limit is exceeded, you can define the Action for each alarm in the Limit Alarm 1 High Action. Three options are available

• 0 – Turn Output Off

• 1 – No change

• 2 – Safe setpoint

The safe setpoint is discussed in step 7 in this section. Similarly, for the set of Alarm 2 actions, you can define the actions that need to happen. To enable the alarms, the Limit Alarm 1 Enable and Limit Alarm 2 Enable registers need to be set to 1 in the MKS Channel Configuration section.



Figure 104—MKS Channel (Loop) Configuration Screen

5. To check the alarm status, monitor the Limit Condition register under the Channel Inputs section, as shown in Figure 105. Whenever any of the limits defined in the Channel Configuration section are exceeded, this register value changes to 1 and stays latched on.



Figure 105—Limit Condition Register

6. To clear the limit alarms, the Limit Clear Alarms register shown in Figure 106 needs to be set to 1. If the fault condition that triggered the alarm is not present anymore, the Alarm condition value changes from 1 to 0. Otherwise, if the fault condition persists, the Alarm condition value stays at 1.

Figure 106—Limit Clear Alarms Register

7. Another set of Alarms for each zone can be configured in the Channel Configuration section of Loop 1, as shown in Figure 107. These alarms are based on the Process Value (based on the control loop input). By default, all these values are set at 350º C. You can set the Alarm 1 SP1 High and Alarm 1 SP1 Low (absolute limits), Alarm 1 SP1 Limit High and Alarm 1 SP1 Limit Low registers based on your specific process/application. If needed, Alarm 2 limits (relative limits), can be similarly defined. To enable the alarms, set the Alarm 1 Enable and Alarm 2 Enable registers to 1.



Figure 107—Channel Configuration Section

8. Another important parameter to be defined is the Standby Set Point, which defines the safe setpoint in 0C for the system. This is used for the set of Limit alarms discussed previously.

9. In order to set up the low and high limits for the manipulated value (output power), you can adjust the MV High Limit and MV Low Limit in the Channel Configuration section, shown in Figure 107.

10. To check the alarm status, monitor the Alarm Condition register under the Channel Inputs section, as shown in Figure 108. This changes to 1 and stays latched on any time any of the limits defined in the Channel Configuration section are exceeded.



Figure 108—Alarm has been Cleared

11. To clear the alarm, set the Clear Alarms register value to 1, as shown in Figure 109. When the fault condition that triggered the alarm is not present any more, the Alarm Condition register value changes from 1 to 0. Otherwise, if the fault condition persists, the Alarm Condition register value stays at 1.

Figure 109—Clearing an Alarm



7.2 Loop Tuning CWB provides three methods for process control. These methods are:

• Open-loop control

• Proportional-Integral-Derivative (PID) control

• Model Predictive Control (MPC) control

7.2.1 Open-Loop Control In an open-loop system, the control action from the controller is independent of the process output, which is the process variable that is being controlled.

CWB can operate a device in open-loop mode (manual mode) by commanding a fixed power percentage to the output drivers.

Be aware that in this mode, the heater temperature is not controlled and hence could increase without limit. To use CWB in manual mode, do the following:

1. First, change the Control Word register in the Channel Outputs section from 0 (default). The Control Word register indicates if the control loop is off (0), on (1), or in Manual Output mode (3). Set the Control Word register to 3 to put it in Manual Output mode, as shown in Figure 110.

Figure 110—Setting the Control Word

2. Next, change the Forced MV (manipulated value) register, which is the % power in Manual Output mode. Changing it from 0 to 5 sets the power level to the heater to 5%. This starts increasing the temperature on the heater plate. The maximum allowable value for this field is 100.

The temperature can be monitored by going to the Channel Inputs section and looking at the Process Value register, as shown in Figure 111. After a certain time, the rising temperature on the heater plate should start to steady out.



Figure 111—Process Value Register

Note On the MultiTherm 1000, the CH STAT LED

for Loop 0 is flashing green at this point.

3. To switch off the power, go back to the Channel Output section and change the Forced MV register to 0. For MultiTherm 1000 users, also change the Control Word register to 0 to switch off the Manual Output mode.

In the truest sense of open-loop control, there is no feedback. In actual practice, the user manually applies some feedback into the system to reach a relatively stable process value (PV).

7.2.2 Proportional-Integral-Derivative (PID) Control Proportional-Integral-Derivative (PID) control is a commonly used closed-loop control algorithm that uses proportional, integral, and derivative factors to control a process.

The Proportional (P) value is a constant multiple. A number is a proportion to another when a constant n exists such that y = nx. This n is the process error and can be positive or negative, and greater or less than one.

The Integral (I) value is the summation of the process error over time.

The Derivative (D) value is the rate of change in the process error during a given interval.

In this mode, the sensor input is used to determine an appropriate power percentage to reach the target Setpoint (SP). There are several filters and parameters that can be adjusted to achieve optimal response.

The process of determining the optimal values for P, I, and D to get an ideal response from a control system is called tuning.



7.2.2.1 Advanced PID Auto-Tune in CWB This section describes the Advanced PID Auto-Tune feature in CWB.

The Advanced PID Auto-Tune feature in CWB can be used to provide optimal settings for proportional, integral, and derivative control for a given setpoint in PID mode. Alternately, manual tuning can also be performed to derive these values. The auto-tune routine first tunes the P value, followed by the I value. The D value is calculated to be 1/6th of the I value. CWB places parameter value constraints on the P, I, and D values so you do not run the auto-tuning with inappropriate values. For Advanced auto-tuning, all values except temperature must be zero or greater, and the high factor setpoint must be greater than the low setpoint.

Note

During the auto-tune, the temperature may exceed the target setpoint as it is goes through the process to determine

the optimal P and I values. Therefore, allow some margin between the setpoint and the maximum temperature your application can

tolerate. Typically, this margin needs to be at least 10–15°C.

1. Click the Tuning icon, and select Advanced PID auto-tune. The Auto-Tune PID (Advanced) window for your chosen temperature loop is displayed, with the Setup tab selected. See Figure 112.



Figure 112—Auto-Tune PID (Advanced) Window, Setup Tab

2. You can select the mode into which CWB exits once the auto-tuning is complete. CWB turns off the output after auto-tuning if you select Turn output off when tuning stops. Otherwise, the auto-tune exits in PID mode with the newly determined PID settings.

3. You can adjust the starting Proportional gain (P) setting. By default, starting P is set to 30% of the closed loop setpoint. This is the value that the auto-tuning routine uses as the starting point while tuning the P value.

4. The default integral gain (I) is set to 60. This is the starting value that the auto-tuning uses while tuning the I value, after optimizing the P value.

5. The optimized derivative gain (D) is the optimized integral gain divided by 6.

6. You are not required to run a 5 factor PID auto-tuning. By deselecting the check boxes shown in Figure 112, the factors can be reduced to select the cases for which you may be concerned for stability and response. At least 2 of the 5 variables need to be selected as a factor in order to run the PID auto-tuning.



7. By selecting the Run extended testing check box (shown in Figure 112), CWB progresses through additional iterations of the PID tuning sequence. Using extended testing takes longer to tune.

8. In addition, the Power Capture Period for each step in the auto-tuning routine can also be adjusted. The default is 1 minute, but this can be adjusted to any other setting. Over the span of 1 minute, the auto-tune routine calculates the standard deviation for the power variation for each step of tuning the P value, and compares it against the allowed power variation.

9. The default Acceptable variation around temp setting is 2%, but this value can be changed depending on the application/setup being used.

10. Under the Tune tab (see Figure 113) of the Auto-Tune PID (Advanced) window, the Pre-ramp start point is the stable temperature setpoint that must be achieved before the auto-tuning can begin. It is recommended to set this value between room temperature and the auto-tune setpoint.

Figure 113—Auto-Tune PID (Advanced) Window, Tune Tab

11. The Auto-tune set point should be the target for which CWB tunes its PID parameters.

12. The default value for the Auto-tune temp. stable period is 2 minutes. The power needs to be within the ‘Acceptable standard deviation of power output’ of 2%, along with the temp must fall within the Acceptable variation around SP: ± for at least 2 minutes. If the power is within 2%, the auto-tune routine treats this step as a stable case.

13. The default value for the Pre-ramp temp stable period is 1 minute. The power needs to be within the acceptable standard deviation of power output of 2%, along with the temp must fall within the Acceptable variation around SP: ± for at least 1 minute. Once the pre-ramp temp has been reached, and the power is within 2%, the auto-tune routine begins.



If the power and temperature stability setpoints are not achieved within the Temperature stability timeout default of 15 minutes, the auto-tune stops.

14. You may not require the auto-tuning routine to tune for all four priorities: Power Stability, Overshoot, Time to SP, and Time to Stable SP. You can turn each of the four current responses OFF, as an alternative to High, Medium, or Low weights. However, you must have at least one response turned on.

15. You can define a response to base the exit conditions of auto-tuning, and are allowed to set appropriate values around responses to the exit condition (see Figure 114). This can be done from the Auto-tune exit condition: pull-down menu in the Auto-Tune PID (Advanced) window Setup tab, shown in Figure 114.

Figure 114—Pulldown Menu for Auto-tune Exit Condition

16. Once all the setup parameters have been defined, the auto-tune can be started.

When auto-tune is in progress, the loop (channel) icon for the Loop N changes to a yellow lightning bolt, and Loop N in the Device tree is bolded. More than one Loop can be auto-tuned at once. When auto-tune completes, the lightning bolt changes back to the loop (channel) icon.

17. As a precautionary feature, after the auto-tune is active, all the parameters in the Setup tab are grayed out and unable to be modified.

18. The auto-tune sets the MultiTherm in PID mode before starting with the first step of optimizing the P value.

Once the P value has been optimized, the auto-tune routine calculates the standard deviation for the power variation for the first step of tuning the I value. If the auto-tuning routine determines that the stability of the system exceeds the allowed power variation of 2% for the initial I value, the tuning stops at this point and the original P, I, and D values are restored. In this case, you need to adjust the setup parameters by one of these methods:

• Changing the tuning starting value for I and restarting the auto-tune process

• Increasing the allowed power variation and restarting the auto-tune process

• Decreasing the minimum allowed stability and then restarting the auto-tune process

If, prior to the completion of the PID auto-tuning sequence, you decide to close and exit the entire CWB main window, the auto-tune does not continue and all windows are closed. Prior to the CWB main window closing, you will receive pop-up warnings requesting confirmation of auto-tune and CWB exit.



Figure 115—Exiting CWB with Auto-Tune Running

At the end of the auto-tuning routine, a set of P, I, and D values are displayed in a dialog box and you are asked whether you wish to use these values as the new P, I, and D values.

Note If you interrupt the auto-tuning routine mid-way, the original

PID values are restored automatically.

The total time it takes for auto-tuning to complete depends on the capture period and the response of the system.

7.2.3 Model Predictive Control (MPC) Model Predictive Control (MPC) uses the results gathered from a control example and builds a predictive model with that data.

7.2.3.1 MPC Auto-Tune in CWB In addition to the Advanced PID Auto-Tune, CWB contains an MPC auto-tuning routine that utilizes a predictive model-based control algorithm developed exclusively by MKS that outperforms competitive solutions. After executing an iterative test using data gathered from PID routines, CWB automatically calculates and inserts the tuning coefficients into the control algorithm.



1. To begin, select the Loop desired for the auto-tune from the Device tree, then click on the Tuning pull-down menu and select MPC auto-tune, as shown in Figure 116. After clicking MPC auto-tune, the Auto-Tune setup page is displayed.

Figure 116—MPC Auto-Tune Menu Option

Once the auto-tune is finished, you will see a message like the one shown in Figure 117.

Figure 117—Auto-Tune Results

2. Click on OK to save the tuned values. This also activates the closed-loop MPC control.

3. If you don't want to activate the closed loop control with the tuned values, manually note the tuned values in case you wish to use them later and click on No.

An example of an Auto-tuning/System ID log follows.

[9:38:56 AM] Original values: P=7.03125, I=14.94141, D=2.490234

[9:38:56 AM] **********

[9:38:56 AM] Starting to tune P term...

[9:38:56 AM] Setting P=22.5, I=0, D=0

[9:38:56 AM] Letting unit come up to temperature and



stabilize...

[9:38:56 AM] Waiting for temperature to be attained...

[9:39:26 AM] Starting MV capture...

[9:40:26 AM] MV range is 5.08 to 6.42, std. dev. at 0.35%

[9:40:26 AM] Stable, clearing chart and starting tuning process...

[9:40:26 AM] MV stable, setting P=11.25




[9:42:26 AM] MV stable, setting P=5.625




[9:44:21 AM] MV unstable, setting P=7.03125




[9:46:16 AM] Finished tuning P term.

[9:46:16 AM] **********

[9:46:16 AM] **********

[9:46:16 AM] Starting to tune I term...

[9:46:16 AM] Setting I=60




[9:47:46 AM] MV stable, setting I=30




[9:49:11 AM] MV stable, setting I=15






[9:50:41 AM] MV unstable, setting I=22.5




[9:52:11 AM] Finished tuning I term.

[9:52:11 AM] **********

[9:52:11 AM] **********

[9:52:11 AM] Setting D=3.75

[9:52:11 AM] **********

On the Setup tab, the Loop maximum allowed MV % is the maximum allowable manipulated value (MV = Manipulated Value, % power on, max 100). When the auto-tune routine encounters the need to ramp the MV higher, the system prevents the MV from exceeding the value entered here. Before starting the Auto-Tune, you should enter an MV % value for the Standard operating MV (%)’ This value should be the typical steady state MV value during normal operation. It is desired the MPC Auto-Tune perform as close as possible to the typical process conditions to maximize the response to the test. You should enter the Min test runtime (minutes) and Max test runtime (minutes) for the MPC auto-tune routine, and it should be long enough to allow the full tune routine.

Defaults have been inserted as recommendations. Increasing the Max test runtime may be necessary for certain systems to complete the MPC auto-tune routine. A checkbox exists for the optional use of an over-temp interlock to prevent any damage to the setup. By clicking the checkbox, you can enter a value in the field. The exit condition for the pre-Step temperature test for the MPC auto-tune shall be considered complete when the slope of temperature change is less than the user-definable parameter [TEMP] Pre-step stable when dy <. The variable y is defined as the system response, temperature.

On the Tune tab, a field for closed-loop preheating the system to a steady state near the Process Value (PV) is available. Since it is desired for the MPC auto-tune to perform as closely as possible to the typical process conditions to maximize the response to the test, using a closed-loop preheat of the system to near standard operating conditions will reduce the overall test time. The temperature value should be entered into the Pre-heat if PV is under: field by calculating an approximate temperature of 65% of the standard operating PV temperature.

A Minimum time to preheat (minutes) field is also available for speeding up the MPC Auto-tune test. MPC Auto-Tune cannot start until all required fields have been completed. When this happens, the Play arrow button changes from gray to blue and becomes active. Press the blue Play button to begin MPC Auto-Tune.



Figure 118—Starting MPC Auto-Tune

Once the auto-tune is finished, a message like the one shown in Figure 119 is displayed.

Figure 119—Auto-Tune Results

Click on Yes to save the tuned values. This also activates the closed-loop MPC control. If you don't want to activate the closed loop control with the tuned values, manually note the tuned values in case you wish to use them later, and click on No. Click Cancel if you want to exit from the auto-tune without saving any values.

7.2.4 Filters in Auto-Tune Modes CWB has three filters that can be adjusted to achieve optimal response:

• Input Filter Coefficient

• Derivative Tau

• SetPoint Filter Tau

These filters are configurable for each temperature loop in the system. Figure 120 shows the location for these filters in the MKS Channel Configuration tab for each loop.



Figure 120—Input Filters

The Input Filter Coefficient is an input filter. The Derivative Tau filter and the SetPoint Filter Tau are output filters.

If a filter is set on the process value/input temperature, the derivative term output does not need an additional filter to be set. Another option available is to leave the input filter off and define a filter time constant for the derivative term output.

7.2.4.1 Input Filter Coefficient The Input Filter Coefficient in the MKS Channel Configuration section shown in Figure 120 is a low-pass filter used to filter the high-frequency disturbances in the input signal from the temperature sensor (RTD or TC). A typical value is 5.

7.2.4.2 Derivative Tau Output Filter Another available filter is the Derivative Tau output filter, which reduces the variation in the controller output. Increase this value to filter the output of the derivative term. Typical values are 0 to 3 depending on system noise and speeds.

7.2.4.3 Setpoint Filter Tau The Setpoint Filter Tau filter is another available filter that smooths the response of the controller. The controller takes a step change in the Setpoint and runs this through the filter, providing a smooth signal to the controller. This is typically used to limit the overshoot at the end of a step change. Typical values are 0.1 for a fast system and 1.0 for a slow system.



7.2.5 Using CWB in PID/MBC Mode Set the Control Word to 1 to put the device in PID/MBC mode. The Target Set Point should already be set to the value used for the auto-tuning process in the previous section.

Figure 121—Target Set Point from Auto-Tune

Note For MultiTherm 1000 users only, the CH STAT LED for Loop 1 is

solid green at this point (if Loop 1 is the loop being used).

Alternatively, you can set the Control Word in the dashboard using the pull-down menu in your Temperature Loop widget, shown in Figure 122. When the mode (Control Word) is set to Open Loop, as shown on the left, the process reading is the Manipulated Value. This value can be changed using the up/down arrows in the widget. When the mode is set either to Closed Loop or Off, as shown on the right, the process reading is the setpoint. It also can be adjusted with the up/down arrows in the widget.



Figure 122—Control Mode Pull-Down Menu in a Widget

In PID mode, you can observe the Process Value (temperature), as shown in Figure 123, start increasing from ~29.1 ºC (room temperature).

Figure 123—Viewing Process Value

For plotting the process value and manipulated value, refer to Chapter 6, Diagnostics.

Two registers allow making offset adjustments by applying a delta. The unit of the value can be found by (Δ ºC or Δ ºF). Locations are as follows:

• Loop N > MKS Channel Configuration > Limit Temperature Bias • Loop N > Channel Configuration > PV Bias (offset)



Figure 124—Setpoint Delta

The PID settings from the auto-tune or manual tuning can be saved and reloaded at any time by clicking the PID Settings icon shown in Figure 125. The PIDs are saved in a .pid format in your \My Documents folder by default, or in a folder of your choice.

Figure 125—PID Settings Icon



8. Device Maintenance This chapter describes device maintenance tasks.

Note This section does not cover the wiring for the I/O. Refer to the

MultiTherm 2000 or PAC 100 manuals for these details.

8.1 Updating Firmware To update the firmware on your device, select the device in the Device tree. Click the Update Device icon on the top right of the device information page. Select the appropriate bootloader or firmware update file, and follow the prompts.

Figure 126—Updating a Device

Remember that if you update your device’s firmware, you need a corresponding revision XML file on your PC. On a default installation of CWB, the path to that XML file should be in the following folder:

C:\Program Files (x86)\MKS Instruments\Controls Workbench\Device Config\

It is permissible to have multiple revisions of XML files in this folder – in fact, it’s a requirement if you have more than one type of MKS device to manage with your CWB installation. The default CWB installation places multiple versions of the XML file in your \Device Config folder. You need to add updated versions of the XML file only when you update your firmware.



Note

CWB looks for XML files to identify the MKS devices to which it is trying to connect. The firmware version running on

each device needs to match the firmware as described in the XML filename.

If there is no XML filename with the same firmware version that is running on the MKS device, CWB cannot recognize the unit.

You do not need to remove older versions of XML files, since CWB matches the firmware revision of each MKS device to its respective XML file version.

8.2 Connecting CWB to an MKS Device This section details connecting CWB, which is a Modbus master, to your MultiTherm 1000, MultiTherm 2000, MKS CM or MKS PAC 100, which are Modbus slaves. Connections can be made using either Modbus TCP (Ethernet) or EtherCAT.

8.2.1 Connecting using Modbus TCP When connecting with Modbus TCP, the first task is to verify your PC and MKS device TCP/IP settings. The factory-configured default TCP/IP settings for MKS devices that use CWB are shown in Table 2.

Table 2—Default TCP/IP Settings

Parameter Value

Static IP address 192.168.1.3

Subnet mask 255.255.255.0

Default Gateway None

1. Using the Network and Internet page in your PC’s Control Panel, change the IP settings of the PC to have a static IP address of 192.168.1.1 and a subnet mask of 255.255.255.0.

Hint: A fast way to see your PC’s IP address is to enter systeminfo at the command prompt.

2. Connect an Ethernet cable directly from your PC to your MKS device’s Modbus TCP port.

For a MultiTherm 2000, PAC 100 or CM, the Ethernet cable must be in the Modbus TCP port on the unit, marked LAN as shown in Figure 128, and not in either ECAT port. For a MultiTherm 1000, the Ethernet cable must be in the Ethernet port, marked LAN. The PAC 100 devices have 10/100BaseT Ethernet ports with Auto MDI-X capability, so a crossover cable is not needed.

3. Power on the PC and the MKS device.

4. From the command prompt of the PC, enter ping 192.168.1.3



5. The MKS device should respond. If the device does not respond, use a paperclip to reset the IP address on the device. For the PAC 100 and MultiTherm 1000, this switch is accessible through a small hole on the front panel marked IP RESET.

6. Issue the ping command again. If you do not get a response, see Troubleshooting for more details. If you get a response, change the IP address of the device by doing the following.

7. Telnet into the device by entering telnet 192.168.1.3 at the PC’s command prompt.

8. Enter the following commands:

ipsave nnn.nnn.nnn.nnn 255.255.255.0 (the new IP address)

(for example, ipsave 192.168.1.26 255.255.255.0)

nvsave

reset

Remember that your MKS device and your PC must be on the same subnet (default is 255.255.255.0) and must have different IP addresses. If you are using CWB with more than one MKS device, all the devices must have different IP addresses.

Note

One strategy for assigning IP addreses is to use the last two digits of the device’s serial number as the

last octet of its IP address.

9. Once you have reset the IP address, use the Add Device icon in CWB to scan for and add devices.

8.2.2 Connecting with EtherCAT MKS devices come configured to use Modbus TCP for communication. To use EtherCAT, you need to change that configuration from Modbus TCP using the Modbus TCP (Ethernet) port on your device, and then connect your EtherCAT cabling.

CAUTION This release of CWB does not support EtherCAT communications.

Figure 127 shows the Modbus TCP and EtherCAT connections on the PAC 100 / CM / MultiTherm 2000.



Figure 127—EtherCAT and Modbus Connectors

To switch protocol from Modbus TCP to EtherCAT, use the PC’s command prompt.

1. Navigate to the Windows Start menu.

2. Enter cmd in the Search field.

3. Once the cmd.exe window opens, enter telnet and the device’s IP address (the default is 192.168.1.3).

4. Upon successful connection, enter tc_wr protocol 0 ( ‘0’ for EtherCAT, ‘1’ for Modbus ).

5. Enter nvsave

6. Enter reset

Once the protocol change from Modbus to EtherCAT takes effect after system reset, Telnet can no longer be used.

Note

If you need to convert protocol from EtherCAT to Modbus, please contact MKS Instruments, Automation and Control Solutions, to request the instruction video using Twin Cat

from Beckhoff. Email: A&[email protected]




9. Troubleshooting In all cases:

• Your device must have good power to it (verify the voltage, current, and DC purity at the device)

• Your device and your PC must be on the same subnet (255.255.255.0)

• Your device and your PC must not have the same IP address.

• Troubleshooting is usually easier when you isolate each suspect device by cabling directly into the device.

In case the scan through CWB does not display your MultiTherm, PAC 100, or CM, try the following:

1. Make sure your PC or laptop is on the same subnet as your MultiTherm, PAC 100, or CM. The default subnet is 255.255.255.0.

2. Make sure that you do not have multiple MKS devices with the same IP address on your network. The default IP address for all MKS devices is 192.168.1.3, and needs to be changed if you are connecting multiple devices. A procedure to change these is found in Section 8.2.1, Connecting using Modbus TCP.

3. Ensure that all Ethernet cable connections are inserted correctly. For a PAC 100 or CM, the Ethernet cable must be in the Ethernet port on the unit, marked LAN as shown in Figure 128, and not in either ECAT port. For a MultiTherm 1000, the Ethernet cable must be in the Ethernet port, marked LAN.

4. On power up:

• The MultiTherm 2000, PAC 100, or CM displays the STAT and 24V IO LEDs as solid green.

• On the MultiTherm 1000, the STAT, 24V, and COM LEDs should display solid green.

If this is not the case, call MKS ACS Applications for support at 800-227-8766, or 978-284-4000 if outside the USA; or email at A&[email protected]

On the I/O slices, the 24VIO, DNL, and UPL LEDs also should be solid green, except for the UPL LED on the last slice in the string, which should be OFF.

The example shown in Figure 128 is for an MKS PAC 100 and MFC slice, where the MFC slice is the last slice in the chain.

5. Retry the scan through CWB.




Figure 128—Verifying Cable Connections

6. If the issue is still unresolved, select the Command Prompt in Windows.

7. Type cmd

8. Enter ping 192.168.1.3

If your device is on the network, the response looks like this:

Figure 129—Successful Ping Results

If your device is not on the network, the response looks like this:



Figure 130—Unsuccessful Ping Results

9. If your device is on the network, CWB should be able to detect it during its scan. Close the command prompt window and retry the scan through CWB.

10. If your device is not on the network, there could be a potential IP configuration issue on your system. Repeat the steps in the Connecting CWB to an MKS Device section. Then retry the scan through CWB.

11. If your device is still not on the network or being detected by CWB, call MKS ACS Applications for support.

In case the scan through CWB displays your MultiTherm, PAC 100, or CM, but you cannot log on or CWB recognizes your device as “other”, try the following:

1. Make sure nobody else is logged on to the device with CWB or another Modbus master.

2. Physically cycle power at the device, and re-scan with CWB after it restarts. If this is unsuccessful, try the following:

3. Remove the Ethernet cable from the device and connect a different, known-good Ethernet cable directly between your PC’s Ethernet port and the device’s LAN port.

4. Ensure both ends of the cable are securely connected, cycle power on the device, and re-scan with CWB.

5. If your device is still not being detected by CWB, call MKS ACS Applications for support.



10. CWB System Requirements Table 3 lists the system requirements for Controls Workbench.

Table 3—CWB System Requirements

Controls Workbench System Requirements

Operating system Microsoft Windows 7 (32-bit)

Processor 1 GHz or faster x86- or x64-bit processor

Memory 1 gigabyte (GB) RAM (32-bit); 2 GB RAM (64-bit)

Hard disk 3.0 GB of hard drive space available

Graphics Graphics hardware acceleration requires a DirectX10 graphics card

Display 1024 x 576 or higher resolution monitor

.NET version 4.5 or higher

Other Need at least one network interface card (NIC) on PC for connection to the controlled MKS device and second (optional) for external internet connection



WARRANTY

MKS Instruments, Inc., Automation and Control Solutions (MKS) warrants that for one year from the date of shipment the equipment described above (the “equipment”) manufactured by MKS shall be free from defects in materials and workmanship and will correctly perform all date-related operations, including without limitation accepting data entry, sequencing, sorting, comparing, and reporting, regardless of the date the operation is performed or the date involved in the operation, provided that, if the equipment exchanges data or is otherwise used with equipment, software, or other products of others, such products of others themselves correctly perform all date-related operations and store and transmit dates and date-related data in a format compatible with MKS equipment. THIS WARRANTY IS MKS’ SOLE WARRANTY CONCERNING DATE-RELATED OPERATIONS.

For the period commencing with the date of shipment of this equipment and ending one year later, MKS will, at its option, either repair or replace any part which is defective in materials or workmanship or with respect to the date-related operations warranty without charge to the purchaser. The foregoing shall constitute the exclusive and sole remedy of the purchaser for any breach by MKS of this warranty.

The purchaser, before returning any equipment covered by this warranty, which is asserted to be defective by the purchaser, shall make specific written arrangements with respect to the responsibility for shipping the equipment and handling any other incidental charges with the MKS sales representative or distributor from which the equipment was purchased or, in the case of a direct purchase from MKS, with the MKS Instruments, Automation & Control Solutions home office in Austin, TX.

This warranty does not apply to any equipment, which has not been installed and used in accordance with the specifications recommended by MKS for the proper and normal use of the equipment. MKS shall not be liable under any circumstances for indirect, special, consequential, or incidental damages in connection with, or arising out of, the sale, performance, or use of the equipment covered by this warranty.

THIS WARRANTY IS IN LIEU OF ALL OTHER RELEVANT WARRANTIES, EXPRESSED OR IMPLIED, INCLUDING THE IMPLIED WARRANTY OF MERCHANTABILITY AND THE IMPLIED WARRANTY OF FITNESS FOR A PARTICULAR PURPOSE, AND ANY WARRANTY AGAINST INFRINGEMENT OF ANY PATENT.