Challenges For fab and maintenance managers who do not have up-to-date equipment data and flexible scheduling capabilities, equipment maintenance can be inefficient and costly. The high cost of operating equipment in facilities requires more predictable parts and consistent maintenance management procedures. Enterprise resource planning (ERP) systems offer maintenance management software modules, but they do not have equipment-centric data and knowledge essential to derive optimum maintenance schedules. To arrive at an optimum equipment maintenance schedule, factory equipment information is crucial, which is not available in ERP systems. Solution Description Applied Xsite is an equipment-centric computerized maintenance management system (CMMS) that automates maintenance management of capital equipment and assets in a fab. It provides comprehensive maintenance scheduling, enables factory-wide creation of unscheduled maintenance, generates alarms, and tracks maintenance activities, resources and materials based on input from equipment, people, MES and ERP systems, and other factory systems. Unlike many preventive maintenance (PM) modules included with ERP systems, which have limited capabilities for semiconductor operations, Xsite is the only equipment maintenance asset management product developed specifically for the semiconductor industry, providing in-depth semi equipment hierarchy, configurability and state modeling essential for consistently achieving optimum equipment maintenance schedules. MES INTEGRATION. Xsite can be integrated with any MES. To optimize manufacturing, Xsite is fully integrated with FACTORYworks®—working on the same factory model. It improves throughput and production by tracking equipment states and activities down to individual chambers in cluster tools. With this information, the MES can more accurately assess the availability of tools even in downgraded yet operational states. Xsite is also integrated with the Applied E3™ and APF RTD® solutions, providing real-time scheduling, new requests, current job activity and upcoming maintenance data to support work in process reallocation when necessary. APPLIED Xsite TM COMPUTERIZED MAINTENANCE MANAGEMENT SYSTEM (CMMS) The only maintenance management product developed specifically for the semiconductor industry that manages factory equipment throughout the entire maintenance life cycle and enables factory-wide creation of schedules. Industries > Semiconductor wafer manufacturing > Display manufacturing Features > Planned, scheduled and unscheduled maintenance management > Comprehensive maintenance scheduling options > Cluster & complex tool management > Graphical visualization of factory equipment status > Provision of data for audit compliance and continuous improvement > Integration with Applied Materials software & other MES & ERP solutions Benefits > Increases factory equipment (asset) availability and efficiency > Reduces labor and parts costs > Enables equipment maintenance work consistency > Improves record keeping of equipment maintenance activities Xsite manages manufacturing assets through the entire maintenance life cycle. It provides equipment-centric data and knowledge essential for developing and tracking optimum maintenance schedules. Xsite TM