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Combinatorial Fe-Co thin film magnetic structures obtained by ThermionicVacuum Arc Method
I. Jepu, C. Porosnicu, C.P. Lungu, I. Mustata, C. Luculescu, V. Kuncser,G. Iacobescu, A. Marin, V. Ciupina
PII: S0257-8972(13)01205-XDOI: doi: 10.1016/j.surfcoat.2013.12.050Reference: SCT 19095
To appear in: Surface & Coatings Technology
Received date: 5 August 2013Accepted date: 19 December 2013
Please cite this article as: I. Jepu, C. Porosnicu, C.P. Lungu, I. Mustata, C. Luculescu,V. Kuncser, G. Iacobescu, A. Marin, V. Ciupina, Combinatorial Fe-Co thin film magneticstructures obtained by Thermionic Vacuum Arc Method, Surface & Coatings Technology(2013), doi: 10.1016/j.surfcoat.2013.12.050
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Combinatorial Fe-Co thin film magnetic structures obtained by Thermionic Vacuum
Arc Method
I. Jepu1*
, C. Porosnicu1, C. P. Lungu
1, I. Mustata
1, C. Luculescu
1, V. Kuncser
2,
G. Iacobescu3, A. Marin
4, V. Ciupina
5
1National Institute for Lasers, Plasma and Radiation Physics, Magurele-Bucharest, RO
2National Institute of Materials Physics, Bucharest-Magurele, RO
3University of Craiova, Faculty of Physics, Craiova, RO
4 Institute of Physical Chemistry,”Ilie Murgulescu”, Bucharest, RO
5 “Ovidius” University, Faculty of Physics, Constanta, RO
*Corresponding author. Address: National Institute for Lasers, Plasma and Radiation
Physics, Atomistilor No. 409 Street, Magurele, Ilfov, 077125, Romania
Tel: +1 858 405 8398
Fax: +4021 457 4468
Email address: [email protected] (Ionut Jepu)
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Combinatorial Fe-Co thin film magnetic structures obtained by Thermionic Vacuum
Arc Method
I. Jepu1*
, C. Porosnicu1, C. P. Lungu
1, I. Mustata
1, C. Luculescu
1, V. Kuncser
2,
G. Iacobescu3, A. Marin
4, V. Ciupina
5
1National Institute for Lasers, Plasma and Radiation Physics, Magurele-Bucharest, RO
2National Institute of Materials Physics, Bucharest-Magurele, RO
3University of Craiova, Faculty of Physics, Craiova, RO
4 Institute of Physical Chemistry,”Ilie Murgulescu”, Bucharest, RO
5 “Ovidius” University, Faculty of Physics, Constanta, RO
Abstract
Magnetoresistive Fe-Co based thin film structures were produced using thermionic vacuum
arc method. The purpose of this work was to obtain significant magnetic response on different
granular combinatorial structures. The Giant Magnetoresistive (GMR) and combination
between GMR and Tunneling Magnetoresistive (TMR) properties of the thin film structures
were the aim of the work. The proposed method in order to obtain the desired granular
structures is based on electron beam emitted by an externally heated cathode, accelerated by a
high anodic potential.
The work consisted in preparing two sets of samples, first being a combination between Fe-
Co as magnetic materials embedded in a Cu matrix, with a total thickness of 200nm. The
second structure was a combination between Fe-Co (50%-50%) alloy, embedded in a matrix
of Cu combined with MgO with a thickness of 200nm. Both sets of samples were obtained by
three simultaneously types of discharges. Because of the substrate positioning in respect with
the three anode-cathode systems, different material concentrations were obtained, confirmed
by Energy Dispersive Spectroscopy (EDS) measurements results. Structural and
morphological properties were investigated using Scanning Electron Microscopy; Atomic
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Force Microscopy and EDS. Electrical properties of the obtained samples were studied using
the 4 point measurement method. The magnetic properties were first studied using a non-
destructive optical method called MOKE (Magneto-Optical Kerr Effect). Electrical resistance
behavior of the granular type structures was studied for different values of the magnetic field,
up to 0.3 T, at different values of the sample temperature. The magnetoresistive effect
obtained for the two sets of samples varied from 1.5% to 81 % in respect with the substrate
positioning and samples temperature for a constant magnetic field.
Keywords: Thermionic Vacuum Arc, Giant Magnetoresistive (GMR), Tunneling
Magnetoresistive (TMR), Magneto-Optical Kerr Effect (MOKE)
I. Introduction
Magnetorezistive structures are of a high interest in the magnetic memory technology,
bringing an improvement to the memory devices and in the same time a significant increase of
the reading speed of this type of storage devices. The known magnetoresistive structures are
(1) Giant Magneto Resistence (GMR) multilayer type, which consists in two ferromagnetic
layers separated by a non magnetic highly conductive metal; (2) GMR granular type, where
the magnetic metal is embedded in the non magnetic material matrices; (3) Tunnel Magneto
Resistance (TMR) multilayer where the magnetic thin film structures are separated by thin
non magnetic electrically insulating layers; (4) TMR granular type where the magnetic
elements are embedded in a non magnetic non conductive element matrices; (5) combinatorial
GMR+TMR multilayer structures, and (6) combinatorial GMR+TMR granular type of
structures [1-5]. All of these thin films can be easily obtained by Thermionic Vacuum Arc
(TVA) deposition method due to its possibility of simultaneously multiple discharges. This
deposition technique is using the energetic ions released from the anode by igniting the pure
material vapors in high vacuum atmosphere [6-10]. The plasma formed in this way is in
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contact with the high positive anode and receives, in turn, a high positive potential too.
Therefore the plasma ions flying from this high positive region towards the grounded
substrate probes are able to bombard the just forming layer with high energy. By easily
controlling the external plasma parameters like the heating of the cathode, potential applied
on anode, inter-electrode distance, the flux of energetic ions from the plasma can be as well
controlled. This (intense) ionic bombardment has a beneficial contribution to the formation of
the deposited layers, by increasing their compactness, and by ensuring a uniform distribution
of the magnetic domains of almost the same size within the non magnetic network [11-14].
It is known that magnetic structures are highly sensitive to the purity and thickness of each
contained individual layer (TMR type of structures) and to the ferromagnetic granular
concentration embedded in a non-magnetic matrix (GMR type of structures) [15-17]. The lack
of any buffer gas inclusions inside the structure represents one of the main advantages of this
deposition technique. Another positive aspect about TVA method, which led to using it in
obtaining the desired structures, consists in the possibility of simultaneously igniting [6]
inside the deposition chamber of different punctual evaporation sources that allow obtaining
of different relative elemental concentrations structures in respect with the distance between
the samples and the anode-cathode systems during the deposition process.
The thin layers obtained in different discharge conditions are analyzed in terms of the
magnetic effect and in term of the electric resistance at a zero value of the magnetic field.
This characteristic is very interesting to be studied on GMR-TMR type structures. As it is
known from literature, the GMR-type layers have a low value of the electrical resistance at a
null magnetic field applied, being made only of metals. When an electric current is passed
perpendicular on the multilayered structure (CPP case), the magnetoresistive effect is at the
highest values (as compared with CIP case). In order to obtain a significant magnetic effect in
this case there are needed high values of the electric current, which makes the GMR structure
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improper for the development of storage magnetic devices, but ideal for obtaining reading
heads of memory devices. Instead, the storage magnetic memories can be produced by using
TMR type of structures. They have higher values of the electric resistance at a null magnetic
field and have a higher magnetic effect in the presence of the magnetic field, which means in
the end that the magnetic elements of the storage devices are sensible to low values of the
electric currents used. The reason for building a combination of the GMR+TMR structure
with a Fe-Co base was to vary another important parameter of these types of layers, the null
magnetic field value of the electrical resistance, around which the value of the electric
resistance in the presence of the magnetic field oscillates. With other words, it has been tried
to obtain the same high values of the magnetoresistive effect for different null magnetic field
values of the electric resistance that is in close connection with the non magnetic insulating
relative concentration of the material present in the thin film structure. That is why, two types
of Fe-Co structures were prepared, one a GMR granular structure containing Fe, Cu and Co,
and the second structure, a GMR-TMR granular combination of Fe-Co 50%-50% alloy, Cu
and MgO. Both structures were obtained by three simultaneously discharges, as it will be seen
in the experimental set-up chapter.
II. Experiment
Thermionic vacuum arc method was used to obtain both granular GMR and the combinatorial
GMR+TMR structures. This technique is described elsewhere [18-21]. It consists in an
electronic bombardment of the emitted electrons from a heated tungsten filament that plays
the role of the grounded cathode. The electrons are focused using a Whenelt cylinder on the
anode, by a high voltage potential applied on it being forced to heat and evaporate the anode
material. The interest material is placed on the anode, on a special highly thermal resistant
crucible made of graphite and inner coated with tungsten.
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The accelerated electrons focused on the anode start the evaporation process that afterwards,
leads to the ignition of a bright plasma discharge in pure anodes vapors, all process taking
place in high vacuum conditions [6]. For the present work, three anode-cathode independent
systems were used (Fig.1). Each of the systems functioned as described above, simultaneously
in the high vacuum deposition chamber. For the GMR structure, one anode contained the iron
crucible, the second anode contained the cooper crucible and the third anode contained the
cobalt crucible. For the combinatorial GMR+TMR structure, a Fe-Co alloy having a 50-50%
ratio was previously prepared using the same deposition technique. Due to iron and cobalt
respectively near melting temperature points, this alloy was easily produced. The second
anode contained cooper as in the first structure, while the third one contained magnesium
oxide. MgO is the non magnetic electric insulating material of the GMR+TMR thin film
production. During the deposition process, it was used an evaporation rate as low as possible
in order to precisely monitor the deposition of very thin layers. For the present work, the
coating rate and the thickness of the structures were in situ monitored using a FTM7 micro-
quartz balance. The total thickness of both types of thin films was of 200 nm. The substrates
used were silicon and glass, placed at a distance of 25 cm above the anode-cathode systems in
a specially designed rectangular holder with 4 rows and 12 columns, each sample being
numbered “a-b” where a stands for the row number and b for column number. Samples in the
same column have the same morphological structural electric and magnetic properties. Due to
substrates position in respect with each element to be deposited, different elemental
concentrations were obtained in the same deposition batch. The entire coating process was
performed in a high vacuum chamber, with a base pressure in the deposition time of 5x10-6
Torr. This high vacuum pressure assured the obtaining of high purity structures, made only of
the interest materials, without any other unwanted inclusions.
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III. Results and discussion
III.1 Structural and morphological analysis of the obtained thin films
SEM and EDS measurements were performed on both FeCo-based structures in order to
analyze the surface morphology and the elemental concentration distribution of the materials
used for each type of thin film using the Scanning Electron Microscope, FEI Co., model
Inspect S, with an accelerating voltage range of 0-30 kV, working distance in the range of 0-
30 mm, in low vacuum conditions, EDS capable with an EDAX SiLi detector.
The EDS measurements revealed different elemental concentration on each sample in respect
with the sample positioning. For GMR Fe+Cu+Co structure, it was obtained an iron relative
atomic concentration from 25% to 11.5 %, cooper relative atomic concentration between 50.9
and 69% and a cobalt relative atomic concentration between 6.9% and 31.2%. The highest
relative concentration of each material was obtained for the sample positioned at the
minimum distance of the anode-cathode system with the specific material. This different
elemental ratio influenced, as it can be seen later on this work, the electric and magnetic
response of each sample. This is considered to be one important advantage of this deposition
method, consisting in obtaining within the same deposition process many types of thin films
with different properties.
From SEM images it can be seen the compact shape without major imperfection for both
structures. Again, due to different positioning in respect with the anode-cathode systems it can
be seen for the Fe+Cu+Co structure how the high iron concentration on the sample 4-2,
influenced the surface morphology of the thin film. As the iron concentration decreases, for
the 4-11 samples it can be observed a change of the surface morphology as well (Fig. 2-3).
For the FeCo+Cu+MgO structure, the SEM images show high compact smooth surfaces for
each studied thin film, in respect with the position and elemental concentration.
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The atomic force microscopy (AFM) measurements were recorded using the Park XE-100
model in a non-contact operating mode (NC-AFM). It was used a silicon cantilever with a
nominal length of 125 mm, with an oscillation range of 275-328 kHz. The sample scanned
surface was 5x5 μm, with the horizontal “line-by-line” flattening as planarization method.
The surface topographies carried out on both GMR and combinatorial GMR+TMR structures
coated on silicon substrates have shown different roughness values in respect with the sample
positioning and samples relative elemental concentration consequently. For the Fe+Cu+Co
structure, the highest value of the roughness was of 17.17 nm, on the sample placed over the
iron anode-cathode system. The roughness decreases significantly with the decrease of the
iron concentration in the structure, to a minimum of 1.35 nm for the sample with the lowest
iron concentration (Fig.4). For the FeCo+Cu+MgO structure, the value of the measured
roughness was in the range of 3.06 nm to 1.36 nm in respect with the sample positioning
(Fig.5-6). The roughness values for both types of structures are in perfect concordance with
the obtained SEM images.
The X-Ray Photoelectron Spectroscopy (XPS) surface analysis performed on the
combinatorial GMR+TMR structure composed of FeCu+Cu+MgO was carried out with a
Quantera SXM equipment, with a base pressure in the analysis chamber of 10-9
Torr. The X-
ray source was Al Kα radiation (1486.6eV, monochromatized) and the overall energy
resolution is estimated at 0.65 eV by the full width at half maximum (FWHM) of the Au4f7/2
line. In order to consider the charging effect on the measured Binding Energies (BEs) the
spectra were calibrated using the C1s line (BE = 284.8 eV, C-C (CH)n bondings) of the
adsorbed hydrocarbon on the sample surface. A dual beam neutralizing procedure (e- and Ar
+
ion beams) has been used to compensate the charging effect in insulating samples [22-26].
The XPS analysis was used to determine the chemical states of the elements present on the
surface and, after quantitative analysis, to find the elemental and chemical state relative
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concentrations as well. After scanning survey XPS spectra, the high resolution photoelectron
spectra of the most prominent XPS transitions (C 1s, O 1s, Cu2p3/2, Co2p, Fe2p, Mg1s and
MgKLL) were recorded for the FeCo+Cu+MgO structure.
It is appropriate to note here that all the calculations were performed assuming that the
samples were homogeneous within the XPS detected volume. We have to emphasize that the
errors in our quantitative analysis (relative concentrations) were estimated in the range of ± 10
%, while the accuracy for Binding Energies (BEs) assignments was ± 0.2 eV.[22-26]
From the XPS (Fig.7) spectra it can be seen that for the high relative concentration of the
FeCo alloy, present in the sample 4-3, after Argon Ion etching, a high amount of carbon is
still present on top of the surface. Sampling depth is estimated according to the corresponding
sputter rates, as: Sputtering rate=1.4nm/min; but analysis depth = 6.5 nm/after 1 min
sputtering 1kV (3x3); 2 min sputtering ~ 2.8nm, analysis depth=7.9nm; 3 min sputtering ~ 4.2
nm, analysis depth=9.3nm. The rather high C relative concentration suggests that the surface
could be contaminated during deposition process beyond the unavoidable carbon
contamination in the atmosphere. One possible explanation could be the pumping system
used, formed by preliminary and diffusion oil pumps which assured an inside working
pressure of 5x10-6
Torr. We can notice the presence of the hydrocarbon layer on the top of the
surface progressively decreasing after Ar ion etching. The contaminant present in the first
mono-layers of the surface is removed by the argon ion beam.
The relative carbon concentration decreases from sample 4-3 to sample 4-11, and it can be
explained also by the fact that sample 4-3 was placed over the FeCo anode-cathode system.
Because both iron and cobalt have a relative high melting temperature (around 15000C), the
energy needed to melt and evaporate this alloy was quite high. Because the Fe-Co alloy was
placed in a graphite crucible, it can be assumed that part of the carbon concentration is due to
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the crucible contamination during the deposition process. With a higher Ar ion etching time
(over 3 min) it can be assumed that the relative carbon concentration decreases considerably.
The XPS results show that the O1s band like spectra reveals two features: oxygen bounded
into the lattice oxidizing Fe, Mg and a tiny amount of Cu and OH groups confined on the
outermost layer of the surface leading to formation of Co(OH)2. The spectra reveal a
combination of metallic Fe and Fe2O3. The Co2p3/2 binding energy and the presence of OH
groups adsorbed on the top surface can be attributed to Co(OH)2. MgO can be assigned from
characteristic binding energies of Mg1s photoelectron line and Mg KLL Auger line which are
chemically shifted.
The atomic relative composition of each element contained by the GMR+TMR combinatorial
structure, after 3 min etching (~4.2nm/9.3nm) when considering the sample positioning is
presented in fig. 8.
III.2 Electric and magnetic measurements
Before any electric measurements, which consisted in the four points contact method using
silver conductive pasta, a series of non destructive Magneto-Optic Kerr Effect (MOKE)
measurement were performed on both types of structure using a longitudinal magneto-Kerr
effect magnetometer (type AMACC), with laminated sheets, zero remanence and an incident
p-polarized He-Ne laser light with λ=640 nm. The incident light made a 450 angle with the
sample plane, being linearly polarized perpendicular to the incidence plane, by a polarizer.
The MOKE effect describes the electromagnetic wave interaction with magnetic materials,
which corresponds to the rotation or changing the linear polarized light intensity by reflection
on magnetic surfaces placed in a magnetic field. This effect is similar with Faraday Effect,
which implies the rotation of linear polarized light when it passes through a transparent
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material placed in a constant magnetic field [27-30]. The Kerr effect is proportional with the
magnetization of the magnetic materials.
Figure 9 shows the MOKE signals for the ternary granular Fe+Cu+Co structure for each
studied sample in respect with its position to the anode-cathode systems. For the high relative
iron concentration the absolute value of the MOKE signal was 10.31 mdeg, with a coercive
force of 7.6 mT. As the iron relative concentration decreases, the MOKE signal decreases as
well to 1.85 mdeg, for the 3-7 sample and to 0.704 mdeg for the 3-12 sample. The coercive
force decreases as well for the 3-7 sample to 6.7 mT, but it increases to 16.4 mT for the 3-12
sample. A possible explanation can be that the domains orientation of the sample 3-2 with a
higher relative iron concentration is made much easier than in the case of the magnetic
domains of cobalt, for the case of sample 3-12 which has a higher cobalt relative
concentration.
Figure 10 shows the MOKE signals of the combinatorial GMR+TMR structures for each
studied sample in respect with the position to the anode-cathode systems. Sample 2-2 shows
the MOKE signal for the sample with the highest FeCo alloy relative concentration. The
rectangular shape can be translated by the presence of specific values of the magnetic field
that can influence the magnetic behavior of the structure. The MOKE signal for this sample
was 31.68 mdeg, with a coercive force of 2.9 mT. For the 2-6 sample, that has a lower alloy
concentration and a higher magnesium oxide relative concentration, the MOKE signal was of
41.51 mdeg. The coercive force increases as well to 9.3 mT, due to the presence of the non
conductive insulating element –MgO. The shape is also rectangular. As in the 2-2 sample, it
can be said that magnetic domains of the FeCo alloy are easier oriented with a lower
insulating relative concentration. With the increase of the magnesium oxide relative
concentration, the magnetic domains are no longer easily oriented, which can explain the high
values of the coercive force for the 2-6 sample. For sample 2-11, the one with the lowest
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relative alloy concentration and with the highest magnesium oxide presence, the hysteresis
shape is no longer rectangular and it can be seen a double opening of it. This double opening
of the hysteresis shape can be attributed to the low ferromagnetic grains concentration
embedded in the high relative concentration insulating matrix, and also to the oxidation of the
alloy due to the presence of the magnesium oxide. For this sample, the MOKE signal was of
6.25 mdeg, with a coercive force of 17.6 mT. This high value of the coercive force is
attributed to the low value of the alloy concentration in the non magnetic matrix.
Electric measurements
In order to determine the electrical resistance of the studied structures, it was used the four
probe measurement technique [31-35]. This method consists in having four metallic probes,
linearly and equidistant arranged on the surface of the studied structure. Two of the probes
were used to pass through the sample a constant electric current, and the other two probes
were used to read the dropping voltage on the sample. Fig 13 shows a schematic
representation of the electric circuit made for both sets of structures. The contact between the
interest structure and the probe was made using a highly conductive silver based paste. The
used probes were cooper thin wires, with 0.2-0.3 mm in diameter. For both sets of structures,
the electrical measurements circuit (Fig. 11) had a known resistance of 10 Ω, the calculus
formula in order to determine the value of the electric resistance was: x
x e
e
UR R
U
where Rx is the electric resistance of the interest structure; Re - known electric resistance; Ux –
the value of the dropping voltage measured on the studied structure and Ue – the value of the
measured dropping voltage on the known resistance. In order to have a precise electric
measurement and to have a transversal orientation of the electric current through the sample,
the electric contact were made between a cooper electrode coated using TVA technology
beneath the entire structure, with a total thickness of 500 nm and the surface of the measured
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thin film. In this way, it was certain that the recorded value of the dropping voltage was
entirely measured through the whole sample. In order to determine the electric resistance
through both structures, without any presence of a magnetic field, a constant current of 1 μA
was used, with an increasing ramp of 0.5μA/s. until a maximum value of 10 μA was reached.
It can be seen from fig. 12 a) and b) that for both sets of samples the current-voltage
characteristics are similar like shape, the variation of the dropping voltage with the increasing
of the electric current being linear, a normal behavior for a classic electric resistance. For the
Fe+Cu+Co structure, the value of the measured electric resistance on the sample placed in the
middle of iron and cobalt anode-cathode systems was of 1.004 Ω. This low value of the
electric resistance is due to a maximum relative concentration of cooper present in this
sample, which was positioned exactly above the cooper anode-cathode system. By increasing
the value of the relative concentration of cobalt, and a lower relative concentration of cooper,
the measured electric resistance becomes 6.91 Ω. As presented above, the sample positioning
in respect with the anode-cathode systems is crucial in obtaining optimum elemental relative
concentrations, with different values of the electric resistance. For the FeCo+Cu+MgO
structure, it can be seen an obvious difference between each studied thin film. For the sample
with the highest iron and cobalt concentration, and with a low magnesium oxide relative
concentration, the recorded electric resistance was of 0.576Ω. With the increase of the
nonconductive material present in this structure, the electric resistance had a value of 1.192Ω
for the sample placed over the cooper anode-cathode systems. The relative high value of the
cooper present in this sample explains the relative low value of the measured electric
resistance. The highest value of the electric resistance on the combinatorial GMR+TMR
structure was obtained having a value of 5.065Ω, and how it was expected, on this sample the
relative concentration of the nonconductive material had the highest value.
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Magnetic measurements were made on both types of structures in order to observe the
magnetoresistive effect on each studied sample. As the previous electric measurements were
performed, it was used the same four probe measuring technique due to its advantage in
having low errors. Two of the electric probes were used to pass a constant electric current
through the sample, and the other two probes were used to read the dropping voltage on the
interest sample. The formula used to determine the magnetoresistive effect is written below:
(0) ( )(%) .100
(0)
R R H
R
where R(0) is the value of the electric resistance measured
without any presence of a magnetic field and R(H) is the value of the electric resistance
measured at a given value of the magnetic field. In order to determine the variation of the
electric resistance of each sample in the presence of the magnetic field, a constant current of 5
μA was used. Each sample was placed in a constant magnetic field with a value of 0.3 T. The
magnetic field was perpendicular to the direction of the constant electric current through the
sample. In this way, first it was recorded the value of the electric resistance without an applied
magnetic field and then, a 0.3T magnetic field was applied, and again it was recorded the
value of the electric resistance. After every set of readings, the sample temperature was
increased and the measurements took place following the same steps. For this study, the
sample temperature was varied from 280C to a maximum of 63
0C. This way it was also
studied the variation of the magnetoresistive effect in respect with the sample temperature. As
it can be seen from fig. 13, both GMR and GMR+TMR structures have significant variation
of the magnetorezistive effect in respect with the sample temperature on one hand and on the
other hand, a variation of the MR effect in respect with each relative elemental composition.
For the GMR, Fe+Cu+Co structure, the MR effect on the sample with the lowest iron relative
concentration (sample 3-11) varies between 1.4% to a maximum of 32.28%. It is interesting to
observe that at a given sample temperature of 280C, the percentage MR effect is 1.47%. By
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increasing the sample temperature to 430C, the MR effect increases to 32.28%. A further
increase of the sample temperature with another 100C decreases the MR effect to a value of
7%. An even further increase of the sample temperature decreases the MR effect to 1.9%.
With other words, the measured MR effect increases up to a maximum value at a specific
temperature. Beyond this value, the MR effect decreases. For the central sample (3-6) the
general value of the recorded MR effect is much higher that in the case of the previous sample
and varies from 26% to a maximum of 80%. This high value of the MR effect is reached at
the same sample temperature around 400C. With further increase of this temperature, the MR
effect decreases as well.
For the combinatorial GMR+TMR FeCo+Cu+MgO structure, the same evolution of the MR
effect in respect with each sample relative elemental concentration and variation with
temperature was observed. For the sample with the highest ferromagnetic relative
concentration (FeCo) sample, the recorded MR effect varied from 1.12% to 16.45% This
maximum value of the magnetic effect was recorded for a temperature of 520C. A further
increase beyond this temperature leaded to a decrease of the MR effect. For the sample with
the lowest ferromagnetic relative concentration (3-11) but with the highest nonconductive
concentration (MgO), the MR effect varies from 7.3% to 69.2%. The maximum value was
reached at a sample temperature of 430C, as in the case of the central sample of this structure
and also as in the case of the other studied structure. It is interesting how for both sets of
samples, it was found an optimum sample temperature, around 400C, for which the MR effect
has the greatest values.
This temperature behavior of the magneto-resistive effect could be explained when
considering two counteracting physical phenomena present in these measurements. The
magnetic domain clustering determined by the temperature which can increase the GMR-
TMR effect of the granular type structures on one side [21], and the destructive action of the
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temperature concerning the magnetic domains alignment along the external magnetic field, on
the other side.
Therefore, for lower temperatures the magnetic domain clustering is lower together with
GMR-TMR effect and when the temperature increases, the percentage clustered magnetic
domains increases together with GMR-TMR effect of the granular structure. For higher
temperatures the delineating effect of the temperature becomes preponderant and decreases
the magneto resistance effects.
Conclusions
Thermionic vacuum arc method was successfully used in obtaining two types of FeCo base
structures. One, a GMR combination where the ferromagnetic grains of iron and cobalt were
embedded in a pure cooper matrix and the other one, a combinatorial GMR+TMR structure
which contained as a ferromagnetic material the FeCo alloy embedded in a nonmagnetic
semi-conductive cooper-magnesium oxide matrix. Due to different positioning of each sample
in respect with the anode-cathode systems position, different elemental concentrations were
obtained in a single batch of samples as the EDS and XPS measurements showed. Different
elemental concentration influenced also the surface morphology of both structures as it was
seen in the AFM and SEM measurements. It was obtained a variation of roughness from
17.169nm to 1.35 nm for the GMR structure and from 3.06 nm to 1.36 nm for the
combinatorial GMR+TMR structure. The electric measurements showed the normal electric
behavior of each type of structure. The current – voltage characteristics were similar to a
classic resistance behavior. MOKE measurements were first to highlight the magnetic
properties of each structure. It was seen the different hysteresis shape, with different values of
the MOKE signal and coercive force in respect with different positioning of the samples.
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The magneto-resistive effect obtained for each type of structure had a variation with the
relative elemental concentration from 1.31% to 26.4% for the Fe+Cu+Co thin films, and from
4.5% to 19% for the FeCo+Cu+Mgo structure, at a given sample temperature of 270C. It was
found for both types of structures an influence of the magneto-resistive effect in respect with
the sample temperature, at a constant magnetic field of 0.3T.
The highest MR effect of 80% for the Fe+Cu+Co structure was obtained at 400C. For the
FeCo+Cu+MgO structure the highest MR value of 69% was obtained at a temperature of
430C. The results obtained in this work prove the efficiency of TVA method in obtaining
combinatorial magnetic structures. Due to its unique advantage of having no buffer gas inside
the deposition chamber and having the possibility to ignite in pure vapors several materials,
different elemental concentrations were obtained with different values of the recorded MR
effect. Moreover, an optimum temperature was observed for which the magnetic response of
each sample had a maximum value.
Acknowledgments
This work was carried out with the financial support of National Institute for Laser, Plasma
and Radiation Physics, Romania, under the contract PN 09 39 04 01.
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REFERENCES
[1] E. Mc. Daniel, Collision Phenomena in Ionized Gases, Wiley, New York 1964
[2] M. N. Baibich, J. M. Broto, A. Fert, F. Nguyen Van Dau, F. Petroff,
Giant Magnetoresistance of (001)Fe/(001)Cr Magnetic Superlattices, Phys. Rev. Lett. 61
(1988) 2472–2475
[3] T.Kasuya, A Theory of Metalic Ferro and Antiferromagnetism on Zener’s Model, Prog.
Theor. Phys. 16 (1956) 45-57
[4] S. van Dijken, X. Fain, S.M. Watts, J.M.D. Coey, Negative Magnetoresistance in
Fe3O4/Au/Fe Spin Valves, Phys. Rev.B 70 (2004) 052409-1-052409-4
[5] P. V. Porytskyy, Mechanisms of Contraction of an Arc Discharge, Ukr. J. Phys. 49 (2004)
883-890
[6] A. Marcu, C. M. Ticos, C. Grigoriu, I. Jepu, C. Porosnicu, A. M. Lungu, C. P. Lungu,
Simultaneous carbon and tungsten thin film deposition using two thermionic vacuum arcs,
Thin Solid Films 519 (2011) 4074-4077
[7] S. Pat, N. Ekem, T. Akan, Ö. Küsmü, S. Demirkol, R. Vladoiu, C. P. Lungu, G. Musa,
Study on thermionic vacuum arc – a novel and advanced technology for surface coatings,
J. Optoelectron. Adv. M. 7 (2005) 2495–2499
[8] C. P. Lungu, I. Mustata, V. Zaroschi, A. M. Lungu, A. Anghel, P. Chiru, M. Rubel,
P. Coad, G. F. Matthews, Beryllium Coatings on Metals: Development of Process and
Characterizations of Layers, JET-EFDA Contributors, Phys. Scripta T128 (2007) 157-161
[9] C. P. Lungu, I. Mustata, G. Musa, V. Zaroschi, A. M. Lungu, K. Iwasak, Low friction
silver-DLC coatings prepared by thermionic vacuum arc method, Vacuum 76 (2004) 127-130
[10] C. P. Lungu, I. Mustata, G. Musa, A. M. Lungu, V. Zaroschi, K. Iwasaki, R. Tanaka, Y.
Matsumura, I. Iwanaga, H. Tanaka, T. Oi, K. Fujita, Formation of nanostructureed Re-Cr-Ni
diffusion barrier coatings on Nb superalloys by TVA method, Surf. Coat. Tech. 200 (2005)
399-402
[11] I. Jepu, C. Porosnicu, C. P. Lungu, V. Kuncser, F. Miculescu, Optimization of
thermionic vacuum arc plasma for multilayer GMR/TMR film preparation, Rom. Rep. Phys.
62 (2010) 771-779
[12] V. Kuncser, G. Schinteie, P. Palade, I. Jepu, I. Mustata, C. P. Lungu, F. Miculescu, G.
Filoti, Magnetic Properties of Fe-Co Ferromagnetic Layers and Fe-Mn/Fe-Co bilayers
obtained by TVA, J. Alloy Compd. 499 (2010) 23-29
[13] V. Kuncser, M. Valeanu, G. Schinteie, G. Filoti, I. Mustata, C. P. Lungu, A. Anghel,
H. Chiriac, R. Vladoiu, J. Bartolome, Exchange bias and spin valve systems with Fe-Mn
antiferromagnetic pinning layers, obtained by the thermo-ionic vacuum arc method, J. Magn.
Magn. Mater. 320 (2008) E226-E230
Page 20
ACC
EPTE
D M
ANU
SCR
IPT
ACCEPTED MANUSCRIPT
19
[14] I. Mustata, C. P. Lungu, V. Ciupina, Giant Magnetorezistive Granular Coating Prepared
by TVA Method, Rom. J. Phys. 49 (2004) 499-506
[15] I. Jepu, C. Porosnicu, I. Mustata, C. P. Lungu, V. Kuncser, M. Osiac, G. Iacobescu, V.
Ionescu, T. Tudor, Simultaneously TVA discharges in obtaining ferromagnetic thin films,
Rom. Rep. Phys. 63 (2011) 804-816
[16] A.Anghel, C. P. Lungu, I. Mustata, V. Zaroschi, A. M. Lungu, I. Barbu, M. Badulescu,
O. Pompilian, G. Schinteie, D. Predoi, V. Kuncser, G. Filoti, N. Apetroaei, Gian
magnetoresistive coatings using thermionic vauum arc technology, Czech J. Phys. 56
(2006) 16-23
[17] V.Kuncser, I. Mustata, C. P. Lungu, A. M. Lungu, V. Zaroschi, W. Keune, B. Sahoo, F.
Stromberg, M. Walterfang, L. Ion, G. Filoti, Fe-Cu granular thin films with giant
magnetoresistance by thermionic vacuum arc method: Preparation and structural
characterization, Surf. Coat. Tech. 200 (2005) 980-983
[18] I. Mustata, C. P. Lungu, A. M. Lungu, V. Zaroski, M. Blideran, V. Ciupina, Giant
magneto-resistive granular layers deposited by TVA method, Vacuum 76 (2004) 131-134
[19] V. Kuncser, G. Schinteie, P. Palade, I. Jepu, I. Mustata, C. P. Lungu, F. Miculescu
G. Filoti, Magnetic properties of Fe-Co ferromagnetic kayers and Fe-Mn/Fe-Co bilayers
obtained by thermionic vacuum arc, J. Alloy Compd. 499 (2010) 23-29
[20] V. Ionescu, M. Osiac, C. P. Lungu, O. G. Pompilian, I. Jepu, I. Mustata, G. E. Iacobescu,
Morphological and structural investigations of Co–MgF2 granular thin films grown by
thermionic vacuum arc, Thin Solid Films 518 (2010) 3945-3948
[21] I. Mustata, A. Anghel, C. P. Lungu, O. Pompilian, V. Kuncser, G. Schinteie, Tunneling
magneto-resistance granular thin films deposited by thermo-ionic vacuum arc technique,
J. Optoelectron. Adv. M. 9 (2007) 3816-3820
[22] B. V. Crist, Handbooks of Monochromatic XPS Spectra, Vol. 1: The Elements and
Native Oxides, XPS International LLC, California, United States, 1999
[23] B. V. Crist, Handbooks of Monochromatic XPS Spectra, Vol. 2: Commercially Pure
Binary Oxides and a Few Common Carbonates and Hydroxides, XPS International LLC,
California, United States, 2005
[24] A. V. Naumkin, A. Kraut-Vass, S. W. Gaarenstroom and C. J. Powell, NIST X-ray
photoelectron spectroscopy database. NIST standard reference database 20, version 4.1, 2012
[25] F. Moulder, W.F. Stickle, P.E. Sobol, K.D. Bomben, Handbook of X-Ray Photoelectron
Spectroscopy, ULVAC-PHI, Inc, 370 Enzo, Chigasaki 253-8522, Japan, 1995
[26] D. R. Baer, M. H. Engelhard, A. S. Lea, P. Nachimuthu, T. C. Droubay, J. Kim, B. Lee
C. Mathews, R. L. Opila, L. V. Saraf, W. F. Stickle, R. M. Wallace, B. S. Wright,
Comparison of the sputter rates of oxides films relative to the sputter rate of SiO2, J. Vac. Sci.
Technol. A 28 (2010) 1060-1072
Page 21
ACC
EPTE
D M
ANU
SCR
IPT
ACCEPTED MANUSCRIPT
20
[27] M. Mansuripur, The Physical Principlec of Magneto-Optical Recording, Cambridge
Univeristy Press, 1998
[28] K.Yosida, Theory of Magnetism, Springer 1996
[29] J. M. Florczak, E. Dan Dahlberg, Detecting Two Magnetization Components by the
Magneto-Optical Kerr Effect, J. Appl. Phys. 67 (1990) 7520-7525
[30] K. Kalantar-zadeth, B. Fry, Nanotechnology- Enabled Sensors, Springer, 2008
[31] R.G.Hytry, Development of a four point probe magnetoresistive measurement system,
Univeristy of Wisconsin-Oshkosh, 2006
[32] H. Czichos, T. Saito, L. Smith, Springer handbook of materials measurement methods,
Volume 978, Springer, 2006
[33] F. M. Smits, Measurements of Sheet Resistivity with the Four-Point Probe, Bel. Syst.
Tech. J. 37 (1958) 711-718
[34] L. J. Van der Pauw, A method of measuring specific resitivity and Hall effect of discs of
arbitrary shape, Philips Res. Rep. 13 (1958) 1-9
[35] I. M. Oancea-Stanescu, V. Ciupina, G. Prodan, M.Prodan, A. Caraiane, N. Dulgheru,
I. Jepu, C.P.Lungu, Transmission electron microscopy analysis and electrical measurements
of carbon thin films, J. Optoelectron. Adv. M. 12 (2010) 824 – 828
Page 22
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Figure Captions
Figure 1: Schematic view of both GMR and combinatorial GMR+TMR structures.
Figure 2: SEM images for Fe+Cu+Co structure (4-2 left, 4-11 right)
Figure 3: SEM images for FeCo+Cu+MgO structure (3-2 left, 3-12 right)
Figure 4: AFM images of Fe+Cu+Co structure (2-3 left, 2-12 right)
Figure 5: AFM images for FeCo+Cu+MgO structure (4-2 left, 4-12 right)
Figure 6: Roughness variation of the Fe+Cu+Co and FeCo+Cu+MgO structures
Figure 7: XPS spectra for the combinatorial GMR+TMR structure
Figure 8: Relative atomic concentration from the XPS spectra of the FeCo+Cu+MgO
structure
Figure 9: MOKE for Fe+Cu+Co
Figure 10: MOKE for FeCo+Cu+MgO
Figure 11: Schematic representation of the electric measurements set-up
Figure 12: a) Fe+Cu+Co and b) FeCo+Cu+MgO I-V characteristics
Figure 13: a) MR effect function of temperature for the Fe+Cu+Co structure and b) MR effect
function of temperature for the FeCo+Cu+MgO structure
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Figure 1
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Figure 2 4-2 left; 4-11 right
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Figure 3 3-2 left; 3-12 right
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Figure 4
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Figure 5
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Figure 6
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Figure 7
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Figure 8
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Figure 9
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Figure 10
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Figure 11
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Figure 12 a)
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Figure 12 b)
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Figure 13 a)
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Figure 13 b)
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Highlights to manuscript
Combinatorial Fe-Co thin film magnetic structures obtained by Thermionic Vacuum
Arc Method
by I. Jepu, C. Porosnicu, C. P. Lungu, I. Mustata, C. Luculescu, V. Kuncser,
G. Iacobescu, A. Marin, V. Ciupina
Magnetic Fe-Co based thin films obtained by Thermionic Vacuum Arc method
were studied;
A pure GMR and a combinatorial GMR+TMR type of structure were produced;
The magnetic response was highly influenced by the relative elemental
concentration;
Sample temperature influenced the magneto resistive effect on both structures;
A 69% MR effect was reported for the combinatorial GMR+TMR thin film;