April 2008, AAF Taiwan CHEMICAL CHEMICAL FILTERS FILTERS for CLEAN ENVIRONMENTS
April 2008, AAF Taiwan
CHEMICALCHEMICAL FILTERSFILTERSfor
CLEAN ENVIRONMENTS
April 2008, AAF Taiwan
SAAF Chemical Filters
AAF’s innovative alternative to chemical filters.
Designed to control airborne molecular contaminations (AMCs)that can negatively affect semiconductor manufacturing processand lower pressure drop, long life and high removal efficiency.Includes chemical filter media. (adsorbents, sheets for pleating, and cells)
Key features and benefits include:
● Lower pressure drop decreases energy usage● Light weight enable easy handling and installation● Media can be shaped into multiple forms
(e.g. sheet, cell, etc)● Suitable for full fab., fan filter units (FFU), make up air unit (MAU),
tracks, tool-mount.● Superior flow reconstruction
April 2008, AAF Taiwan
Imreg.
(Conventional)
Vacuum Im
prg.(SA
AF)
Before Impreg. Progress Impreg. After Impreg. Characteristics
▪ Non-homogeneous Impreg.▪ Process Time : Over 12 hrs▪ Needed Drying Process▪ Difficult control of impregnated chemical content.
▪ Homogeneous Impreg.▪ Process Time : 3 hrs▪ Process with one-time drying▪ Easily control of impregnated chemical content
: Adsorbate (air, vocs) : Adsorbent (activated carbon or activated alumina, etc)
: Treated chemical
● Vacuum Impregnation Process
SAAF Media Production Technologies
April 2008, AAF Taiwan
0 10 20 30 40 50 60 70 80 90 10050
60
70
80
90
100
NO
x R
emov
al E
ffici
ency
, [%
]
T ime, [m in]
Non-Im pregnated AC Im pregnated AC , (Soaking) Im pregnated AC , (Vacuum )
Test Conditions
Specimen Size : Ø 50mm
Sample Vol. :20ml
NO2 Conc. : 45ppm
L.V. : 0.3 m/sec
Temp. : 20±2℃
Humidity : 40±5%RH
● Acceleration Test Results – NOx Removal Efficiency(Compare to Impregnation Methods)
April 2008, AAF Taiwan
● Combination Media Coating Technology
☞☞ TThe same kindhe same kind or or a different kinda different kind adsorbents hybrid coating is possibleadsorbents hybrid coating is possibleby by SAAFSAAF’’ss original technologyoriginal technology
CationExchange Resin
AnionExchange Resin
SAAF Media Production Technologies
April 2008, AAF Taiwan
● Chemical Filter Preparation of Using Mini-Pleat Method
Air + Gases Air + Gases
Purified Air
1 time
2 times
3 times
Turbulence
Purified Air
SAAF Media Production Technologies
April 2008, AAF Taiwan
Granularactivated carbon
Cationexchange resin
Anionexchange resin
Class
Equipment Filters,Tray FiltersCells (Panel)
Target Gases
Sheets (Pleating)
Adsorbents
Organics,Silane, Siloxane
Amine, AmmoniaAcid Gases
Pleated Filters
Tool-mount Filters
C300B100A62Applications
Chemical Filter Media
Classification of Chemical Filter Media
April 2008, AAF Taiwan
3D mesh media PU form media Mini-pleated media
Punched media Non-woven media(Cation)
Non-woven media(Anion)
Classification of Chemical Filter Media
April 2008, AAF Taiwan
Classification of Chemical Adsorbents Media
Φ4mm AC pellet Φ3mm AC pellet Φ2mm AC pellet
#4~8 mesh AC granular #20~40 mesh AC granular Φ3~4mm Activated Alumina bead
April 2008, AAF Taiwan
IER media
AC media Extremely lowLowExtremely lowDust emission
NoNoNo
FlexibleStd. 610*610*450T
and half sizeFlexible
Std. 610*1200*60TFlexibleAvailable size
NoYesNoExchangeable media
AluminumSTSAluminumFrame material
Yes beadYes beadYes beadIon exchange resin
Yes beadYes pellet/granularYes beadActivated carbon media
~ 35 PaDepends on media~ 35 PaPressure drop
~ 0.5 m/s~ 2.5 m/s~ 0.5 m/sRelated face velocity
Typically > 95%Typically > 95%Typically > 95%Initial efficiency
Tray Type for FFUTray type for MAUPanel TypeModels
SAAF Chemical Filter Classification
April 2008, AAF Taiwan
IER media
AC media Extremely lowLowExtremely lowDust emission
NoNoNo
FlexibleStd. 610*610*150T
Flexible
552*430*185T630*335*155T
FlexibleAvailable size
YesNoNoExchangeable media
AluminumAluminumAluminumFrame material
Yes beadYes beadYes beadIon exchange resin
Yes beadYes beadYes beadActivated carbon media
~ 35 Pa~120 Pa~ 50 PaPressure drop
~ 0.5 m/s~ 2.5 m/s~ 1 m/sRelated face velocity
Typically > 95%Typically > 95%Typically > 95%Initial efficiency
Box TypeTrays for MAU & RAUMini-Pleated TypeModels
SAAF Chemical Filter Classification
April 2008, AAF Taiwan
● Panel Type
Panel type filters have been developed for installation in or on a fan filter unit (FFU) and for stacking on ULPA filters.
NoIER media
Extremely lowAC mediaDust emission
Std. 610*1200*60TFlexible
Available size
NoExchangeable media
AluminumFrame material
Yes beadIon exchange resin
Yes beadActivated carbon media
~ 35 PaPressure drop
~ 0.5 m/sRelated face velocity
Typically > 95%Initial efficiency
Panel TypeModels
April 2008, AAF Taiwan
Multi-tray type filters are designed for installation in high air speed areas where the air speed is ~2.5m/sec, such as inside an make-up air unit (MAU)
NoIER media
LowAC mediaDust emission
Std. 610*610*450TFlexible
Available size
YesExchangeable media
STSFrame material
Yes beadIon exchange resin
Yes pellet/granularActivated carbon media
Depends on mediaPressure drop
~ 2.5 m/sRelated face velocity
Typically > 95%Initial efficiency
Tray Type (MAU)Models
● Tray Type for MAU
April 2008, AAF Taiwan
Muti-tray type filter have been developed for incorporation into various types of semiconductor production equipment, and for stacking on FFU.
NoIER media
Extremely lowAC mediaDust emission
FlexibleAvailable size
NoExchangeable media
AluminumFrame material
Yes beadIon exchange resin
Yes beadActivated carbon media
~ 35 PaPressure drop
~ 0.5 m/sRelated face velocity
Typically > 95%Initial efficiency
Tray Type (FFU)Models
● Tray Type for FFU
April 2008, AAF Taiwan
Mini-pleated type filters have been developed for incorporation into various types of semiconductor production equipment, FFU and forstacking on ULPA filters
NoIER media
Extremely lowAC mediaDust emission
552*430*185T630*335*155T ,Flexible
Available size
NoExchangeable media
AluminumFrame material
Yes, beadIon exchange resin
Yes, beadActivated carbon media
~ 50 PaPressure drop
~ 1 m/sRelated face velocity
Typically > 95%Initial efficiency
Mini-Pleated TypeModels
● Mini-Pleated Type
April 2008, AAF Taiwan
NoIER media
LowAC mediaDust emission
Std. 610*610*150TFlexible
Available size
NoExchangeable media
AluminumFrame material
Yes beadIon exchange resin
Yes beadActivated carbon media
~120 PaPressure drop
~ 2.5 m/sRelated face velocity
Typically > 95%Initial efficiency
Multi-Trays (MAU & RAU)Models
Multi-tray type filters are designed for installation in high air speed areas where the air speed is ~2.5m/sec, such as inside an make-up air unit (MAU) and recirculation air unit (RAU)
● Multi-Tray Type for MAU & RAU
CAFILDEX Chemical Filter Classification
April 2008, AAF Taiwan
NoIER media
Extremely lowAC mediaDust emission
FlexibleAvailable size
YesExchangeable media
AluminumFrame material
Yes beadIon exchange resin
Yes beadActivated carbon media
~ 35 PaPressure drop
~ 0.5 m/sRelated face velocity
Typically > 95%Initial efficiency
Box TypeModels
Box type filters have been developed for installation on a fan filter unit (FFU) and for stacking on ULPA filters.
● SAAF Box Type
CAFILDEX Chemical Filter Classification
April 2008, AAF Taiwan
Pressure Drops Test Results
● SAAF Panel Type ● SAAF Tray Type for MAU
0.2 0.3 0.4 0.5 0.60
1
2
3
4
5
Pre
ssur
e D
rop
, [m
mA
q]
Face Velocity , [m/s]0.5 1.0 1.5 2.0 2.5 3.0
0
5
10
15
20
Pre
ssur
e D
rop
, [m
mA
q]
Face Velocity , [m/s]
Filter Size: 610*1200*60T Filter Size: 610*610*450T
April 2008, AAF Taiwan
Pressure Drops Test Results
● SAAF Tray Type for FFU ● SAAF Mini-Pleated Type
0.2 0.3 0.4 0.5 0.6 0.70
1
2
3
4
5
6
Pre
ssur
e D
rop
, [m
mA
q]
Face Velocity , [m/s]0.5 1.0 1.5
0
2
4
6
8
10
Pre
ssur
e D
rop
, [m
mA
q]
Face Velocity , [m/s]
Filter Size: 510*510*350T Filter Size: 552*430*185T
April 2008, AAF Taiwan
Pressure Drops Test Results
● SAAF Multi-Tray Type for MAU & RAU
● SAAF Box Type
0.2 0.3 0.4 0.5 0.6 0.70
1
2
3
4
5
6
Pre
ssur
e D
rop
, [m
mA
q]
Face Velocity , [m/s]0.5 1.0 1.5 2.0 2.5 3.0
0
2
4
6
8
10
12
14
16
Pre
ssur
e D
rop
, [m
mA
q]
Face Velocity , [m/s]
Filter Size: 592*592*150T Filter Size: 640*640*470T(4ft * 4 ft FFU)
April 2008, AAF Taiwan
Acceleration Test& Expected Life Span Result for NH3
Test Conditions▪ Media size : 38T, Ø3mm pellet▪ L.V. : 0.65 m/s▪ Sample : Impregnation Activated Carbon▪ NH3 Concentration : 20 ppm (Balance gas : air) ▪ Temp & RH : 21±2 ℃, 40±5 %RH
0 100 200 300 400 500 600 700 8000
10
20
30
40
50
60
70
80
90
100
NH
3 R
emov
al E
ffici
ency
, [%
]
Time , [min]0 10 20 30 40 50
0
10
20
30
40
50
60
70
80
90
100
Exp
ecte
d Li
fe S
pan
, [m
onth
s]Concentration , [ppbv] ; at Breakthrough 80%
April 2008, AAF Taiwan
Acceleration Test& Expected Life Span Result for NH3
Test Conditions▪ Media size : 25T, 4.5ppi▪ L.V. : 0.45 m/s▪ Sample : Ion exchange media▪ NH3 Concentration : 20 ppm (Balance gas : air) ▪ Temp & RH : 21±2 ℃, 40±5 %RH
0 2 4 6 8 10 12 14 160
10
20
30
40
50
60
70
80
90
100
NH
3 R
emov
al E
ffici
ency
, [%
]
Time , [hours]0 10 20 30 40 50
0
10
20
30
40
50
60
70
80
90
100
Exp
ecte
d Li
fe S
pan
, [m
onth
s]Concentration , [ppbv] ; at Breakthrough 80%
April 2008, AAF Taiwan
Acceleration Test& Expected Life Span Result for NO2
Test Conditions▪ Media size : 40T, Ø3mm pellet▪ L.V. : 0.65 m/s▪ Sample : Impregnation Activated Carbon▪ NO2 Concentration : 20 ppm (Balance gas : air) ▪ Temp & RH : 21±2 ℃, 40±5 %RH
0 100 200 300 400 5000
10
20
30
40
50
60
70
80
90
100
NO
2 R
emov
al E
ffici
ency
, [%
]
Time , [min]0 10 20 30 40 50
0
10
20
30
40
50
60
70
80
90
100
Exp
ecte
d Li
fe S
pan
, [m
onth
s]Concentration , [ppbv] ; at Breakthrough 80%
April 2008, AAF Taiwan
Acceleration Test& Expected Life Span Result for SO2
Test Conditions▪ Media size : 30T, Ø3mm pellet▪ L.V. : 0.65 m/s▪ Sample : Impregnation Activated Carbon▪ SO2 Concentration : 20 ppm (Balance gas : air) ▪ Temp & RH : 21±2 ℃, 40±5 %RH
0 100 200 300 400 500 600 7000
10
20
30
40
50
60
70
80
90
100
SO
2 R
emov
al E
ffici
ency
, [%
]
Time , [min]0 5 10 15 20 25 30 35 40 45 50
0
10
20
30
40
50
60
70
80
90
100
Expe
cted
Life
Spa
n , [
mon
ths]
Concentration , [ppbv] ; at Breakthrough 80%
April 2008, AAF Taiwan
Acceleration Test& Expected Life Span Result for SO2
Test Conditions▪ Media size : 20T, PU-Foam ▪ L.V. : 0.65 m/s▪ Sample : Ion Exchange Resin media▪ SO2 Concentration : 20 ppm (Balance gas : air) ▪ Temp & RH : 21±2 ℃, 40±5 %RH
0 1 2 3 40
10
20
30
40
50
60
70
80
90
100
SO
2 R
emov
al E
ffici
ency
, [%
]
Time , [hours]0 10 20 30 40 50
0
10
20
30
40
50
Exp
ecte
d Li
fe S
pan
, [m
onth
s]Concentration , [ppbv] ; at Breakthrough 80%
April 2008, AAF Taiwan
Acceleration Test& Expected Life Span Result for O3
Test Conditions▪ Media size : 20T, #20~40, PU-Foam media ▪ L.V. : 0.65 m/s▪ Sample : Impregnation Activated Carbon▪ O3 Concentration : 20 ppm (Balance gas : air) ▪ Temp & RH : 21±2 ℃, 40±5 %RH
0 200 400 600 8000
10
20
30
40
50
60
70
80
90
100
O3
Rem
oval
Effi
cien
cy ,
[%]
Time , [min]0 10 20 30 40 50 60 70 80 90 100
0
10
20
30
40
50
60
70
80
90
100
Exp
ecte
d Li
fe S
pan
, [m
onth
s]Concentration , [ppbv] ; at Breakthrough 80%
April 2008, AAF Taiwan
Acceleration Test& Expected Life Span Result for PGMEA
Test Conditions▪ Media size : 23T, Ø2mm pellet▪ L.V. : 0.65 m/s▪ Sample : Impregnation Activated Carbon▪ PGMEA Concentration : 20 ppm (Balance gas : air) ▪ Temp & RH : 21±2 ℃, 40±5 %RH
0 200 400 600 800 1000 1200 14000
10
20
30
40
50
60
70
80
90
100
PG
ME
A R
emov
al E
ffici
ency
, [%
]
Time , [min]0 50 100 150 200
0
10
20
30
40
50
Expe
cted
Life
Spa
n , [
mon
ths]
Concentration , [ppbv] ; at Breakthrough 80%
April 2008, AAF Taiwan
Acceleration Test& Expected Life Span Result for Toluene
Test Conditions▪ Media size : 23T, Ø2mm pellet▪ L.V. : 0.65 m/s▪ Sample : Activated Carbon▪ Toluene Concentration : 20 ppm (Balance gas : air) ▪ Temp & RH : 21±2 ℃, 40±5 %RH
0 200 400 600 800 1000 12000
10
20
30
40
50
60
70
80
90
100
Tolu
ene
Rem
oval
Effi
cien
cy ,
[%]
Time , [min]0 10 20 30 40 50
0
10
20
30
40
50
60
70
80
90
100
Exp
ecte
d Li
fe S
pan
, [m
onth
s]Concentration , [ppbv] ; at Breakthrough 80%
April 2008, AAF Taiwan
Acceleration Test& Expected Life Span Result for HCHO
Test Conditions▪ Media size : 60T, Ø3mm pellet▪ L.V. : 0.65 m/s▪ Sample : Impregnated Activated Carbon▪ HCHO Concentration : 20 ppm (Balance gas : air) ▪ Temp & RH : 21±2 ℃, 40±5 %RH
0 100 200 300 400 500 6000
10
20
30
40
50
60
70
80
90
100
HC
HO
Rem
oval
Effi
cien
cy ,
[%]
Time , [min]0 10 20 30 40 50
0
10
20
30
40
50
60
70
80
90
100
Exp
ecte
d Li
fe S
pan
, [m
onth
s]Concentration , [ppbv] ; at Breakthrough 80%
April 2008, AAF Taiwan
Acceleration Test& Expected Life Span Result for H2S
Test Conditions▪ Media size : 30T, Ø3mm granular▪ L.V. : 0.65 m/s▪ Sample : Impregnated Activated Alumia▪ H2S Concentration : 20 ppm (Balance gas : air) ▪ Temp & RH : 21±2 ℃, 40±5 %RH
0 50 100 150 200 250 300 350 400 4500
10
20
30
40
50
60
70
80
90
100
H2S
Rem
oval
Effi
cien
cy ,
[%]
Time , [min]0 10 20 30 40 50
0
10
20
30
40
50
60
70
80
90
100
Exp
ecte
d Li
fe S
pan
, [m
onth
s]Concentration , [ppbv] ; at Breakthrough 80%