Chapter 10 Mechanical Feedthroughs

10

Mechanical Feedthroughs

Rotary Feedthroughs with Magnetofluid Sealing

Rotary-Linear Feedthroughsand Transfer Systems

Linear Translators and Aligners

Y, XY and XYZ Translators

Rotary Feedthroughs with Magnetically Linked Drive

MultiCentre and EpiCentre

www.vacom-vacuum.com10-2

10

Contents

Rotary Feedthroughs with Magnetofluid SealingIntroduction Page 10-3 to 10-4SUPERSEAL Series Page 10-5 to 10-6RMS Series Page 10-7RMS-BS / RMS-LS Series Page 10-8RMS-F1 / RMS-F2 Series Page 10-8RMS-F1-W / RMS-BS-W Series Page 10-9RMS-HS / RMS-HS-C Series Page 10-9RMS-F1-HS / RMS-F1-HS-C Series Page 10-10 RMS-F1-HS-W / RMS-F1-HS-W-C Series Page 10-10 Rotary Feedthroughs with Magnetically Linked DriveMagiDrive Series Page 10-11 to 10-20UHV Rotary Source Shutters Page 10-21 to 10-22

Rotary-Linear Feedthroughs and Transfer SystemsIntroduction Page 10-23MPP / MPPL / MPPRL - Push Pull Series Page 10-24 WSL / WSLR - Wobble Stick Series Page 10-25PP Series - Sample Transfer Systems Page 10-26 to 10-29

Linear Translators and AlignersZ Translators Page 10-30 to 10-37Port Aligners Page 10-38

Y, XY, XYZ Translators Introduction Page 10-39Y Translators Page 10-40XY Translators Page 10-41 to 10-42XYZ Translators Page 10-43 to 10-45

MultiCentre UHV Probe ManipulatorsManipulators for research and development in surface physics, in synchrotron applicationsand other analysis methods in UHV - MultiCentre probe handling system Page 10-46

EpiCentre MBE Manipulators Manipulators for probe heating at MBE, CVD and sputter processes orother applications with heated probes Page 10-47- EpiCentre Model 100 Page 10-48- EpiPRO Page 10-49

Telescopic Manipulator for Radial TransferRadial Telescopic Transfer Arm Page 10-50

www.vacom-vacuum.com 10-3

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IntroductionVACOM’s rotary feedthroughs with magnetofluid sealing are delivered by RIGAKU, a leading manufacturer of these products.They stand out especially due to the following properties:

Large transmission torque No backlash Appropriate for rough, fine and high vacuum High pressure capacity High reliability due to leak-free operation Very low magnetic leakage Maintenance-free design Long-term maintenance Up to 15,000 revolutions / minute Manufacturing of customised solutions (100 pieces and upward)

Functional principleUnlike the conventional rotary feedthroughs with elastomer or bellow seal, a magnetic fluid is used as the dynamic seal that fills the gap between the moving shaft and its stationary housing. These liquid o-ring seal is held in place by powerful ring magnets without causing friction. This will result in no wearing or minimal heat generation so that long service life and high reliability are assured. The feedthroughs withstand differential pressures of above 2.5 bar. They have very low leak rates of up to 10-11 mbar l/s (He) or less and are absolutely vacuum suitable. They reach a rotational speed up to several thousand revolutions per minute. RIGAKU’s rotary feedthroughs have already proven long life and reliability by its use as components of high power x-ray generators and semiconductor process equipment. Besides standard examples customised solutions are available.

Temperatur dependencyBecause the magnetofluid is a liquid, the operating temperature is an important parameter for the usage of rotary feedthroughs.

A non-stop operation is possible up to a temperature of 60 °C. The use of water-cooled feedthroughs is recommended at higher temperatures. Furthermore the usage of temperature resistant carrier oils for the magnetofluid, such as PFPE, becomes necessary. Figure 1 allows a rough estimation of the point, when water cooling is recommended. Please contact your customer adviser for further information.

Figure 1


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Magnet alignment SUPERSEAL seriesThe SUPERSEAL series has an antipole alignment of the ring magnets. There are two ring magnets applied. The shaft itself serves as a pole shoe to support the ring magnets and the grooves for the sealing magnetofluid. The shaft's diameter is enlarged at the sealing area and designed to serve this purpose (see figure 2). This design is simpler and cheaper. Furthermore, it is possible to set static O-ring seals aside. However, it still has the same advantages concerning pressure capacity, leakage and service life as the RMS series.

Figure 2

Magnet configuration RMS seriesThe standard feedthroughs of the RMS Series include 4 antipole ring magnets with the pole position: NS-SN-NS-SN. This alignment creates an especially strong field strength at the pole shoes which generate low external stray fields. Milled circular grooves are located at the pole shoes’ inside, facing the shaft. The shaft itself is not weakened by grooves or the like. A strong magnetic field is concentrated in the gap between the magnet and the shaft, forming the magnetofluid into liquid o-rings between the grooves (see figure below) due to this design. A pressure stage is created between every two of these o-rings (see figure 3). Besides the very good leakage properties this design has another advantage, to withstand high differential pressures with few stages. Furthermore there evolves only minimal frictional heat due to the relatively big gap between magnet and shaft, as well as the low persistent forces of the magnetofluid. This also results in minmal maintenance requirements.

Figure 3

SUPERSEAL Series


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SUPERSEAL Series

Simple rotary feedthrough with bulkhead fitting for wall fastening, with KF or CF flange

No internal o-ring seals Very low magnetic stray fields No magnets inside vacuum Rugged stainless steel shafts Ø 6 mm or Ø 8 mm Revolution 5000 RPM without load Pressure-resistant up to 2.5 bar differential pressure Insensitive to external magnetic fields (> 500 Gauss) Magnetofluid: synthetic oil or PFPE

Technical data Transmittable torque shaft Ø 6 mm 5.65 Nm shaft Ø 8 mm 18.00 Nm Max. revolution (loadfree) synthetic oil 5000 RPM PFPE 2500 RPM Static friction resistance synthetic oil 7.8 Ncm PFPE 14.2 Ncm Rotary friction resistance (100 RPM) synthetic oil 4.3 Ncm PFPE 15.6 Ncm Vacuum area synthetic oil up to 10-8 mbar PFPE up to 10-9 mbar Max. temperature synthetic oil 80 °C PFPE 100 °C Vapour pressure magnetofluid synthetic oil 10-10 mbar PFPE 10-12 mbar Max. pressure difference 2.5 bar Helium leakage rate < 5 • 10-9 mbar l/s Material housing / shaft stainless steel 17-4 PH bearing grease Fomblin / Krytox blend Vapour pressure grease lubricant 10-13 mbar Max. bearing load (static) 1350 N Vacuum side arbitrarily

Order Code Vacuumconnection

Shaft diameter [mm]

Magnetofluid bearing oil

10C-26100900 DN40CF 8 synthetic oil

10C-26101400 DN40CF 6 synthetic oil

10C-26101100 DN25KF 8 synthetic oil

10C-26101300 DN25KF 6 synthetic oil

10C-26101000 M26 8 synthetic oil

10C-26101200 M26 6 synthetic oil

10C-26100902 DN40CF 8 PFPE

10C-26101402 DN40CF 6 PFPE

10C-26101102 DN25KF 8 PFPE

10C-26101302 DN25KF 6 PFPE

10C-26101002 M26 8 PFPE

10C-26101202 M26 6 PFPE


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SUPERSEAL Series

10C-26100900 and 10C-26100902 10C-26101100 and 10C-26101102

10C-26101400 and 10C-2601402 10C-26101300 and 10C-26101302

10C-26101000 and 10C-26101002 10C-26101200 and 10C-26101202

k


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RMS Series

Standard feedthroughs for a large range of applications in industry and research

Shaft ball bearings on both sides of the magnetofluid sealing Transmission of large torques Very high revolutions Various vacuum connections Robust and long-lasting Design with water cooling (optional) Design with a hollow shaft (optional)

Technical data Vacuum range < 10-8 mbar Operating temperature 0…100 °C (without cooling max. 60 °C) Differential pressure < 2.5 bar He-leakage rate < 10-11 mbar l/s Material housing stainless steel type 303 Material shaft stainless steel type 630 Material pole shoes stainless steel type 630 Ball bearing greasing vacuum side high vacuum grease atmosphere side Grease with added anticorrosive Magnetofluid bearing oil standard synthetic oil reactive gases PFPE high temperature PFPE Material O-Rings FKM (included in shipment) Water cooling flow 1…4 l/min pressure 3 bar water temperature 25 °C connection thread Rc 1/8" (2x or 4x)

Option hollow shaft (HS)The models of the RMS series with a hollow shaft (HS) can be assembled with shafts of non-magnetic materials and special shafts (tubes, drive shafts or the like). The magnetofluid sealed area of the RMS-HS series is situated between a cylindrical hull (called hollow shaft) and the external housing. The hollow shaft and the housing can be turned in the opposite direction. The shaft that is actually going to be turned, is inserted accurately through the hollow shaft. Two static O-ring seals inside of the hollow shaft connect it with the shaft and seal the gap vacuum tight. If the shaft is turned, the hollow shaft turns as well. You can protect the shaft and the hollow shaft from distortions or displacements by means of a clamp (optional).


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RMS-F1 / RMS-F2 Series

RMS-BS / RMS-LS Series Rotary feedthroughs for wall fastening RMS-BS series with housing exposed to atmosphere RMS-LS series with housing exposed to vacuum O-Ring groove on the front of the housing Including O-Ring seal, screw nut and washer Shaft diameter (mm): 5, 6, 10 and 20

Serie RMS-BS

Rotary feedthroughs with flange RMS-F1 series with housing exposed to atmosphere RMS-F2 series with housing exposed to vacuum Flange with through holes and O-Ring groove Including O-Ring seal Shaft diameter (mm): 5, 6, 10, 12, 20, 30 and 40

Serie RMS-F1 Serie RMS-F2

Serie RMS-LS


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RMS-HS / RMS-HS-C Series

RMS-F1-W / RMS-BS-W Series Rotary feedthroughs with water cooling and connection for wall fastening or with flange Housing exposed to atmosphere RMS-F1-W series with flange, through holes and O-Ring groove RMS-BS-W series with thread for wall fastening and O-Ring groove at the front, including screw nut and washer Including O-Ring seal Shaft diameter of series RMS-BS-W (mm): 12 and 20 Shaft diameter of series RMS-F1-W (mm): 6, 10, 12 and 20

Serie RMS-F1-WSerie RMS-BS-W

Rotary feedthroughs with hollow shaft Housing exposed to atmosphere O-Ring groove at the front of vacuum side Design with or without safety clamp Including O-Ring seal Hollow shaft diameter (mm): 10, 12, 20, 24, 32, 38, 40, 50 and 75

Serie RMS-HS


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RMS-F1-HS-W / RMS-F1-HS-W-C Series Rotary feedthroughs with hollow shaft, flangeand water cooling Housing exposed to atmosphere Flange with through holes and O-Ring groove Design with or without safety clamp Including O-Ring seal Hollow shaft diameter (mm): 10, 12, 20, 24, 26, 32, 38, 40, 50 and 75

Serie RMS-F1-HS-W

RMS-F1-HS / RMS-F1-HS-C Series Rotary feedthroughs with hollow shaft and flange Housing exposed to atmosphere Flange with through holes and O-Ring groove Design with or without safety clamp Including O-Ring seal Hollow shaft diameter (mm): 10, 12, 20, 24, 26, 32, 38, 40, 50 and 75

Serie RMS-F1-HS


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MagiDrive Series

Introduction

Rotary feedthroughs with magnetically coupled drive are the optimal solution to transfer rotations into UHV systems. VACOM offers MagiDrive feedthroughs from the British expert UHV Design.

A rotary feedthrough with magnetically coupled drive enables rotation to be transferred into a vacuum system without the need for mechanical connections. The actuated shaft is placed in a totally closed housing and is connected to the vacuum side only. The drive is placed outside of the housing and includes magnets. The magnetic field of the drive couples to the shaft through the wall of the housing. If the drive is moved, the shaft will be rotated too due to the magnetic coupling (see figure 4).

MagiDrive Rotary feedthroughs have many advantages compared to other feedthroughs of similar design. High power magnets of the latest magnetic materials technology are used for the feedthroughs. This causes very strong magnetic coupling with a very small torsion during rotation. The rotary feedthroughs are bakeable up to 250 °C with installed magnets. Only high-alloyed special steel is used for housings and shafts. The magnetic stray fields are very small. Due to the fact that the drive and the shaft are not mechanically connected there is no need for bellows and other flexible elements as for seals. Leakage at the actautor due to wear of connections or of gaskets is impossible.

Different bearing types are available for the vacuum side shaft bearing for special applications such as low particel generation or semiconductor processes. Numerous drive options – such as manual, pneumatic, motorized – are available. For further information please see the following pages.

Figure 4Also available as design with hollow shaft. Please find further information on the next page.


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MagiDrive Series

MagiDrive with hollow shaft

MagiDrive feedthroughs of the types MD35H, MD64H and MD100H have an additional CF adapter on the drive end (rear of drive gear).This flange is fixed and does not rotate. The driving shafts of these rotary feedthroughs consist of a tube. Resulting in free passageway from the rear of the feedthrough to the vacuum side. This enables feedthroughs to be passed axially through the tube of the rotating shaft.

A further important feature is the stacking of up to four MagiDrive rotary feedthroughs (see figure 5). This enables to create up to four independently rotating axes. The stacking allows a simple solution for multi-motion requirements.

The free inner diameters of the shafts are Ø 12 mm for MD35H with a DN16CF rear flange, Ø 26 mm for MD64H with a DN40CF rear flange and Ø 65 mm at MD100H with DN63CF mounted to the rear.

Figure 5


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Magnets of high-performance materials Strong magnetic coupling through the wall of the actuator housing Housing machined from one piece No bellows No O-Rings Complete UHV applicable Bakeable Low backlash and high precision at low loading or acceleration Magnetically shielded (standard) Numerous options Special designs on request

Overview MagiDrive models

MagiDrive Series

Manual actuaction T = Manual with hand wheel (standard) TF = Friction control for manual actuation B = Thumbscrew brake for manual actuation BF = Thumbscrew brake and friction control for manual actuation CF = Hand wheel with degree scaling (5° - or 1° graduation)

and friction control for manual actuation CB = Hand wheel with degree scaling (5° - or 1° graduation) and

thumbscrew brake for manual actuation K = Hand wheel with knurled end cap P = Hand wheel with timing pulley D = Dual shaft

Pneumatic actuation RA = Pneumatic drive, adjustable 30° - 170°,

with air flow regulating valves RAI = Similar to RA, with visual position indicator SRA = Pneumatic drive, sideways mounted, adjustable 30° - 170°,

with air flow regulating valves SRAI = Similar to SRA, with visual position indicator

Electric actuation IS = Stepper motor axially mounted ISS = Stepper motor axially mounted, with visual position indicator SS = Stepper motor, sideways mounted SSS = Stepper motor, sideways mounted, with visual position indicator ID = DC motor, axially mounted SD = DC motor, sideways mounted

Gearing optionsPlease find all available gearing options at page 10-15. We gladly assist you at selecting the right option for your application.

Model Vacuum Connection Max. Torque [Nm]

MD10 DN10CF 0.18

MD16 DN16CF 0.45

MD19 DN16CF 0.55

MD20 DN40CF 0.45

MD21 DN40CF 0.55

MD25 DN40CF 2.4

MD35, MD35H, MD35LBH DN40CF 4.5, 4.5, 6.0

MD64, MD64H, MD64LBH DN63CF 10.0, 10.0, 8.0

MD100, MD100H DN100CF 40.0, 40.0


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Order Information

Please use the following order code to order of rotary feedthroughs:


= Standard

= Option

= not available

MagiDrive Series

Shaft drives X000 = Stub shaft or tubular shaft with mounted flange

(depending on design) X030 = Extended shaft, fixed, length 30 mm XM = Exchangeable shaft extension DX = Double-sided shaft H = Hollow shaft LB = Hollow shaft with large passage

Ball bearings Z = Standard bearing (stainless steel, MoS2 coated) CE = Ceramic, ultra clean, for UHV high temperature applications SE = Special bearing for semiconductor and cryogenic applications

There are different options available for actuation, shaft and ball bearing. The complete order code is created in connection with the type. Please find the possible options in the following table:

Magi-DriveModel

ActuationShaft type Ball bearing

Manual Pneumatic Electric

Options T TF B BF CF CB K P RA RAI SRA SRAI IS ISS SS SSS ID SD X000

X030

MX000 D Z CE SE

MD10

MD16

MD19

MD20

MD21

MD25

MD35

MD35H

MD35LB *

MD64LB

MD64

MD64H

MD100

MD100H

Size

Actuation

Gearing options

Shaft

Bearings

E. g.: MD10TX000Z

*Hand wheel with timing pulley (similar to option P)


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MagiDrive Series Gearing Options

Size Motor Type Gearing Option Max. Output Torque[Nm]

Max. Output Spin Speed [1/min]

MD10

In-Line DC (ID)

1 0.18 2282 0.18 1373 0.18 614 0.18 41

In-Line stepper motor (IS)

1 0.07 2002 0.18 233 0.18 164 0.18 8

MD16MD19*MD20MD21*

In-Line DC (ID)

1 0.21 2302 0.35 1353 0.45 / 0.55* 704 0.45 / 0.55* 425 0.45 / 0.55* 216 0.45 / 0.55* 8


1 0.11 10002 0.45 / 0.51* 3003 0.45 / 0.55* 1504 0.45 / 0.55* 60

MD25

Side mounted DC motor (SD)

1 0.65 3072 1.46 1233 2.4 614 2.4 31

In-Line DC (ID)

1 0.43 4602 1.08 1843 1.95 924 2.40 46

Side mounted stepper motor (SS)

1 1.50 6672 0.92 2003 2.07 804 2.40 40


1 1.00 7502 1.53 1203 2.40 604 2.40 30

MD35MD35H


1 0.86 2302 1.95 923 3.90 464 4.50 23

In-Line DC (ID)

1 0.43 4602 1.08 1843 1.95 924 3.90 46


1 2.00 5002 1.22 1503 2.76 604 4.50 30


1 1.00 5002 1.53 1203 2.76 604 4.50 30

MD64MD64H


1 1.73 2452 4.31 983 7.88 494 10.00 25

In-Line DC (ID)

1 0.92 4402 1.84 2203 4.20 884 8.40 44


1 3.45 1602 6.90 803 10.00 324 10.00 16


1 4.60 3002 3.68 1503 8.40 604 10.00 30


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Smallest possible UHV compatible rotary feedthrough Large torque Very compact

Order Code DescriptionMD10TX000Z MD10 rotary feedthrough, manual, standard bearing

MagiDrive Series with DN10CF Flange Connection

Technical data Type description MD10 Flange connection DN10CF Design machined from one piece, stainless steel 316L Shaft style stub, Ø 3.5 mm, with flattening Break-away torque 0.18 Nm Max. no load spin speed 230 U/min Max. axial thrust 9 N Max. bakeout temperature 250 °C

Size Actuation Gearing Option

Shaft Bearings

MD10 X000 Z

T

TF

CF

P

IS (1-4)*

ID (1-4)*

RA

RAI

*Gearing options - We are glad to help you selecting the suitable product.

For explanations of the abbreviations see page 10-13f.

Available options with flange connection DN10CF


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Two types MD16 and MD19 with different magnetic force Established and variable usable design Robust and powerful



MD19TX000Z MD19 rotary feedthrough, manual, standard bearing

Technical data Flange connection DN16CF Design machined from one piece, stainless steel 316L Shaft style stub, Ø 9 mm, with female thread M5 Break-away torque - MD16 0.45 Nm - MD19 0.56 Nm Max. no load spin speed 1000 U/min Max. shaft axial thrust 20 N Max. bakeout temperature 250 °C


Shaft Bearing

MD16MD19

T X000 Z

TF X030 CE

BF XM

P

CF

K

KF

D

IS (1-4)*

ISS (1-4)*

ID (1-6)*

RA

RAI



*Gearing options - We are glad to help you selecting the suitable product.


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5 model with 4 magnetic forces 3 shaft types and axial loadings Robust and powerful Numerous options for actuation and ball bearings Model MD35 optional with rear side flange and hollow shaft Optionally 2 stage with 2 coaxial rotation axes

MD20 / MD21

MD25

MD35






MD35HTX000Z MD35H rotary feedthrough, manual, with hollow shaft, standard bearing

Technical data Flange connection DN40CF Rear flange DN16CF (MD35H only) Design machined from one piece, stainless steel 316L Shaft style - MD20 / MD21 Ø 9 mm, with female thread M5 - MD25 Ø 9.53 mm, solid - MD35 / MD35H tubular shaft with mounted flange and 3 x M3 threaded holes Break-away torque - MD20 0.45 Nm - MD21 0.56 Nm - MD25 2.4 Nm - MD35 / MD35H 4.5 Nm Max. no load spin speed 500...1000 U/min Max. shaft axial thrust - MD20 / MD21 20 N - MD25 142.5 N - MD35 / MD35H 142.5 N Max. bakeout temperature 250 °C


Shaft Bearing

MD20MD21MD25MD35

T X000 Z

TF 030 CE

BF M

P

CF

K

KF

D

IS (1-4)*

ISS (1-4)*

ID (1-6)*

RA

RAI


*Actuation and gearing options - We are glad to help you selecting the suitable product.



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MD64HTX000Z MD64 rotary feedthrough with hollow shaft, manual, standard bearing

3 models with or without rear flange Very large torque Optionally 2 stage with 2 coaxial rotation axes Constructed for high loadings

Technical data Flange connection DN63CF Rear flange DN40CF (MD64H only) DN63CF (MD64LBH only) Design machined from one piece, stainless steel 316L Shaft style tubular shaft with mounted flange and 6 x M3 threaded holes Break-away torque 10 Nm Max. no load spin speed 440 U/min Max. shaft axial thrust 415 N Max. bakeout temperature 250 °C


Shaft Bearing

X000

MD64MD64H

T Z

BF SE

CB

P

IS* (1-4)*

ISS* (1-4)*

SS* (1-4)*

SSS* (1-4)*

ID* (1-4)*

SD* (1-4)*

RA

RAI






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MD100HTX000Z MD100 rotary feedthrough with hollow shaft, manual, standard bearing

2 models with or without rear flange Very large torques Optionally 3 stage with 3 coaxial rotation axes Constructed for high loadings

Technical data Flange connection DN100CF Rear flange DN63CF (MD100H only) Design welded housing, stainless steel 316L Shaft style tube with mounted flange and 6 x M5 threaded holes Break-away torque 40 Nm Max. no load spin speed 230 U/min Max. shaft axial thrust 415 N Max. bakeout temperature 250 °C

Size Actuation Shaft Bearing

X000 Z

MD100MD100H

T

P

SS*

SSS*

SD





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UHV Rotary Source Shutters

Introduction

High quality rotary source shutters by UHV Design are becoming an industry standard. The pneumatic actuation provides a low cost solution for shutter applications such as sputter sources, ion guns or viewport shutters.

Based on the MagiDrive rotary feedthroughs (see MagiDrive Introduction on page 10-11), the product range includes six different sizes to match the torque requirements for an array of applications. Each drive is fitted with an external pneumatic actuator, providing adjustable sweep between 30 - 170°. Flow control valves are also supplied to adjust the speed of actuation. Use of the MagiDrive range ensures ultimate vacuum integrity through a homogenous design of the vacuum system.

A solenoid operated spool valve switches compressed gas between the actuator ports. Energising the solenoid will sweep the shutter through the required angle. De-energising the solenoid returns the shutter to its start position. Actuators can also be fitted with 'Auto Switch' assemblies, complete with reed switches for system feedback and visual position indicators.

Source shutters are supplied with the standard MagiDrive shaft options.Customised shafts can be quoted on request. Extended bearing housings can be provided for longer shafts.

You can find an overview of the available viewport shutters in chapter 7, "Vacuum Optics".


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Size Flange Connection Max. Torque [Nm]MD10 DN10CF 0.18

MD16 DN16CF 0.45

MD20 DN40CF 0.45

MD25 DN40CF 1.00

MD35 DN40CF 2.5

MD64 DN63CF 10

UHV Rotary Source Shutters Switching between two fixed end positions Pneumatic actuation Compact Robust and reliable Powerful Adjustable tilt Variable speed of actuation

Technical data Connection CF flanges Actuation pneumatic, double-acting Tilt 30° - 170°, adjustable end positions Mechanic shaft connection Ø 9 mm shaft stub with M5 female thread or tube with mounted flange (see MagiDrive) Max. compressed air supply max. 6.8 bar Compressed air connection M5 x 0.8 mm Flow rate regulating valve 2 pieces Limit switches 2 Reed switches (optional) Option baffles and holding fixtures on request

Size Actuation Shaft Bearing

Z

MD10 RA X000

MD16 RAI XM

MD20MD25 MD35MD64

Available options



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Rotary-Linear Feedthroughs and Transfer Systems

MPP / MPPL / MPPRL – Push Pull Series

Introduction

Push Pull feedthroughs are available with linear or linear plus rotary motion with up to 250 mm stroke. This compact range is specifically designed for low load applications in high and ultra high vacuum such as probe transfer or manual shutters.

Advantage of the Push Pull Series is a high power-to-size ratio. The rigid linear coupling results in a linear thrust of over 90 N and torque of more than 0.4 Nm.

The magnetic coupling technology of UHV Design removes the need for edge-welded bellows. The elimination of welded bellows maximises the vacuum integrity and provides a robust, cost effective solution. Unlike bellow-sealed designs, the magnetic Push Pull feedthroughs are not subject to the thrust due to vacuum, resulting in smooth, free-moving operation.

The magnetic Push Pull feedthroughs offer a simple and safe alternative to push pull systems with bellows.

The range consists of three series with varying actuation options (manual, pneumatic, stepper or DC motorised).

MPPRL series provides a linear and continuous rotary motion of the vacuum shaft. Linear strokes between 50 mm and 250 mm are offered as standard. Special strokes are available on request.

MPPL series provides internally guided linear motion of the vacuum shaft, guaranteeing a rotation-free motion. Furthermore, the high axial thrust coupling produces no torque and so external rotation of the thimble does not apply a rotational force internally, ensuring smooth motion.

In contrast to MPPL series, MPP series provides linear motion of an 'unguided' vacuum shaft. This is used to manipulate slides or pivot arms where a guided system may conflict with the mechanism. Please note that although the vacuum shaft is free to rotate the MPP does not provide rotation.

PP Series - Sample Transfer SystemsIntroduction

PP series (PowerProbe) provides a magnetically linked actuation which enables linear motion with or without rotation. The standard option has a break-away force of 180 N. Additionally, there are two versions available: with low (70 N) and with high power (310 N).

WSL / WSLR Series - Wobble Stick SeriesIntroduction

Wobble Sticks (WSL and WSLR) are one of the simplest manipulation tools to transfer manual movements into vacuum systems. Wobble Sticks by UHV Design provide a modular design: WSL series enables a lateral/tilt movement through a robust hydroformed bellows adaptor and a linear push/pull motion through a magnetic coupling. Additionally, the WSLR series also provides continuous rotation. The magnetic coupling technology eliminates the need for edge-welded bellows. This reduces the risk of leaks and in doing so, improves the reliability of the system for sensitive applications.


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MPPRL

MPPL and MPP

Serie MPP / MPPL / MPPRL

Order Code Flange Connection StrokeMPPRL16-50-H DN16CF 50

MPPRL16-100-H DN16CF 100



MPPL16-50-H DN16CF 50

MPPL16-100-H DN16CF 100

MPPL16-150-H DN16CF 150

MPPL16-200-H DN16CF 200

MPP16-50-H DN16CF 50

MPP16-100-H DN16CF 100

MPP16-150-H DN16CF 150

MPP16-200-H DN16CF 200

Push pull feedthroughs for linear and rotary motion with magnetically linked drive

Three models MPPRL linear and rotary motion MPPL linear motion - guided vacuum shaft MPP linear motion - unguided vacuum shaft Small and compact UHV compatible Smooth operation Bellows-free construction Bakeable up to 250 °C Standard stroke 50…250 mm

Technical data Flange connection DN16CF, DN40CF Drive shaft hollow shaft Ø 8 mm, with flat area and 2 x M3 tapped holes Max. axial force 98 N Max. torque 0.45 Nm Position fixing locking screw for linear motion only (not available for model MPP) Max. bakeout temperature 250 °C

Series Stroke Actuation

MPP

50 HPIDIS

100

150

250

Available options for MPP and MPPL:


Series Stroke Actuation

MPPL

50 HPIDIS

100

150

250

To order a DN40CF flange connection please insert 35 instead of 16.


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WSL

WSLR

WSL / WSLR Series

Order Code Flange Connection StrokeWSL-150-H DN40CF 150

WSL-250-H DN40CF 250

WSLR-150-H DN40CF 150

WSLR-250-H DN40CF 250

Wobble stick feedthroughs for linear and rotary motion with magnetically linked drive

Two types with 3 or 4 axes of motionWSL linear and tilt motion WSLR linear, rotary and tilt motion WSLR-F linear, rotary and tilt motion and pincer (Flag) WSLR-E linear, rotary and tilt motion and gripper (ESCA) WSLR-P linear, rotary and tilt motion

and gripper (Puck) UHV compatible Bakeable up to 250 °C Standard stroke 150 or 250 mm Optional with gripper or pincer

Technical data Flange connection DN40CF Drive shaft round shaft Ø 8 mm Max. break-away force 65 N Max. torque 0.45 Nm Max. suggested sample mass 260 g Max. bakeout temperature 250 °C Max. tilt ±15°

Gripper

Pincer

WSL


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5 model series Linear motion with and without rotation Applicable also for big loads UHV applicable Round shafts of stainless steel Huge axial force (180 N standard) Optional 2 further forces (70 N or 310 N) Very high torque Low deflection Robust, precise and repeatable Suitable for horizontal and vertical mounting Locking screw for position fixing Bakeable up to 250 °C

Technical data Flange connection DN40CF DN63CF (only with stroke 1524 mm) Axial force – Standard 180 N – High 310 N (LPP, PP only) – Low 70 N (LPP, PP only) Torque see chart Max. torque with horizontal mounting see chart Max. load with vertical mounting see chart Actuation options see table Max. bakeout temperature 250 °C Position fixing locking screw Actuation options H = hand wheel HR = hand wheel with 2 bakeable limit switches for retracted position E = hand wheel with extension SD = side mounted 24 V DC motor with 2 bakeable limit switches SS = side mounted stepper motor with 2 bakeable limit switches

PP Series

Transfer rod useable for all application – also for big loads

Model Description Max. Stroke [mm]

LPP Linear motion only 1219

PP Linear and rotary motion 1524

EPP Linear motion with vertical lift mechanismfor sample transfer at the shaft cone point 1219

DAP Linear and separate rotary motion, 2 coaxial round shafts, outer shaft only with linear motion 1219

MagiDriveType

Coupling Actuation

Low Standard High H HR E SS SD

LPPPPEPPDAP

= Standard

= Option

= not available


10


PP Series

Stroke 250 304 457 609 914 1219

A 461 515 692 870 1225 1530

Stroke 304 457 609 914 1219 1524

A 515 692 870 1225 1530 1845

Model LPP

Stroke 250…1219 mm Drive shaft Ø 15 mm with M8 inner thread and guidance for linear motion

Stroke 304…1524 mm Stroke up to 1219 mm with flange DN40CF, stroke 1524 mm with flange

DN63CF Drive shaft Ø 15 mm with M8 inner thread

Model PP35


10

Stroke 304 457 609 914 1219

A 566 721 931 1290 1594


Model DAP

PP Series

Stroke 304 457 609 914 1219

A 566 717 870 1290 1594

Model EPP

Stroke 304…1219 mm Drive shaft with lift mechanism in front (plate 20 x 60 mm, stroke 12 mm)

Stroke 304…1219 mm Drive shaft Ø 15 mm with M8 inner thread and guidance for linear motion


10


PP Series

Model LPP

Model PP35

Model EPP

Model DAP

Series Flange Linear stroke Actuation

LPP 35

250 H

304 HR

457 E

609 SD

914 SS

1219

Available options:



PP

35 304 H

64* 457 HR

609

914

1219

1524*

*Stroke 1524 mm with flange DN63CF


EPP 35

304 H

457 HR

609

914

1219


DAP 35

304 H

457 HR

609

914

1219

LPP also available with low or high power axial force.

PP also available with low or high power axial force.


10


Introduction

Linear translators (linear shift mechanisms) provide linear motion along the port axis (Z). Typical applications are the positioning of beamline filters, the adjustment of sputter sources and deposition stages including industrial applications. The translators are equipped with CF flanges, bakeable up to 250 °C and totally UHV compatible.

Bellow-sealed linear translators provide a smooth, precise motion by means of kinematically designed external leadscrew driven mechanism with anti-rotation and anti-deflection system. The rigid construction provides a high load capability.

The edge welded bellows are manufactured from stainless steel 316L and have a minimum design life of 10,000 cycles. Systems with a design life of up to 1 million cycles are available on request.

Bellows sealed Robust Precise and smooth-running Repeatable Totally UHV compatible Various actuation possibilities 6 model series

Technical data Material diaphragm bellows stainless steel 316L Bakeout temperature 250 °C (without motor or pneumatic) Life cycle (diaphragm bellows) 10,000 cycles (optional to 1 m) Z stroke 25 mm…1000 mm (depending on series) Actuation manual, pneumatic, stepper or DC motor Accuracy 10 µm (optional)

Translators for Motion along the Z Axis

Actuation H = manual with hand wheel (with gear ratio for big dimensions) P = pneumatic SD = side mounted DC motor SS = side mounted stepper motor

Manual actuation Pneumatic actuation Motorised actuation

Graduations

ES = engraved scale (resolution 1 mm) DLA = digital scale with LCD display (resolution 0.01 mm) LP = linear potentiometer (resolution 2 µm)

DLA LP


10


Modell LSML Construction for big strokes Strengthened frame structure Nominal width DN40 and DN63 200 mm to 1000 mm standard stroke Flange with threaded holes (HLSML with through bolt holes in mounting flange)

Model LSM

Modell HLSM

Standard construction for all applications Largest number of flange connections, DN10 to DN160 Largest number of actuation options Up to 350 mm standard stroke Flange with threaded holes Model HLSM with through bolt holes (from DN40)

Type Series

Model Stroke [mm] ActuationLSM10 35 H

Model Stroke [mm] Actuation Scale(optional)

LSM16 ES

25 H

50 P

100


Wiring upgrade

(optional)UP

LSM38*LSM64*

HLSM100HLSM150

25 H ES

50 P DLA

75 SS LP

100 SD

150

200

250

300

350

*For HLSM with through bolt holes add "H" at the beginning of order code.


Wiringupgrade

(optional)UP

LSML38LSML64

HLSML38HLSML64

200 H ES

300 SD DLA

400 SS

500 P

600

800

1000



10



LSM / HLSM dimensions

A: expanded lengthB: compact length

manual actuation side mounted stepper motor

Order code A B C D E F G H J KLSM38LSM38-25 98.7 73.7 181 154.7 75 38 71.3 256.5 163 39

LSM38-50 123.7 73.7 205 154.7 75 38 71.3 256.5 163 39

LSM38-75 162 87 242.9 154.7 75 38 71.3 256.5 163 39

LSM38-100 187 87 268.3 154.7 75 38 71.3 256.5 163 39

LSM38-150 250 100 331 154.7 75 38 71.3 256.5 163 39

LSM38-200 312.5 112.5 394.3 154.7 75 38 71.3 256.5 163 39

LSM38-250 377.5 127.5 459.3 154.7 75 38 71.3 256.5 163 39

LSM38-300 446.5 146.5 531.6 154.7 75 38 71.3 256.5 163 39

LSM38-350 509 159 590.3 154.7 75 38 71.3 256.5 163 39

HLSM38HLSM38-25 106.7 81.7 189.2 154.7 75 38 71.3 256.5 163 39

HLSM38-50 131.7 81.7 212.6 154.7 75 38 71.3 256.5 163 39

HLSM38-75 170 95 250.9 154.7 75 38 71.3 256.5 163 39

HLSM38-100 194.5 94.5 275.8 154.7 75 38 71.3 256.5 163 39

HLSM38-150 260 110 341.9 154.7 75 38 71.3 256.5 163 39

HLSM38-200 322.5 122.5 408.3 154.7 75 38 71.3 256.5 163 39

HLSM38-250 387.5 137.5 468.3 154.7 75 38 71.3 256.5 163 39

HLSM38-300 456.5 156.5 538.3 154.7 75 38 71.3 256.5 163 39

HLSM38-350 519.1 169.1 600.9 154.7 75 38 71.3 256.5 163 39


10



LSM / HLSM dimensionsOrder code A B C D E F G H J KLSM64LSM64-25 136 111 224 203 122.5 65 75 296.4 212.2 64

LSM64-50 161 111 247.3 203 122.5 65 75 296.4 212.2 64

LSM64-75 186 111 271.8 203 122.5 65 75 296.4 212.2 64

LSM64-100 211 111 298.9 203 122.5 65 75 296.4 212.2 64

LSM64-150 261 111 348.9 203 122.5 65 75 296.4 212.2 64

LSM64-200 317 117 405.7 203 122.5 65 75 296.4 212.2 64

LSM64-250 378 128 460 203 122.5 65 75 296.4 212.2 64

LSM64-300 448 148 530 203 122.5 65 75 296.4 212.2 64

HLSM64HLSM64-25 135 111 244 203 122.5 65 75 296.4 212.2 64

HLSM64-50 161 111 249 203 122.5 65 75 296.4 212.2 64

HLSM64-75 186 111 274 203 122.5 65 75 296.4 212.2 64

HLSM64-100 211 111 299 203 122.5 65 75 296.4 212.2 64

HLSM64-150 274 124 362 203 122.5 65 75 296.4 212.2 64

HLSM64-200 336.2 136.2 418 203 122.5 65 75 296.4 212.2 64

HLSM64-250 417.3 117.3 505.2 203 122.5 65 75 296.4 212.2 64

HLSM64-300 467.3 167.3 555.2 203 122.5 65 75 296.4 212.2 64

HLSM100HLSM100-25 175 150 287.2 266 177 102 105 350.2 272.5 92.2

HLSM100-50 200 150 312.5 266 177 102 105 350.2 272.5 92.2

HLSM100-75 225 150 337.2 266 177 102 105 350.2 272.5 92.2

HLSM100-100 250 150 362.2 266 177 102 105 350.2 272.5 92.2

HLSM100-150 300 150 412.2 266 177 102 105 350.2 272.5 92.2

HLSM100-200 381.5 181.5 493.7 266 177 102 105 350.2 272.5 92.2

HLSM150HLSM150-25 176 151 287.8 304.7 229 150 104.7 389 310.7 105.4

HLSM150-50 201 151 312.9 304.7 229 150 104.7 389 310.7 105.4

HLSM150-75 226 151 337.9 304.7 229 150 104.7 389 310.7 105.4

HLSM150-100 251 151 362.9 304.7 229 150 104.7 389 310.7 105.4

HLSM150-150 322 172 433.9 304.7 229 150 104.7 389 310.7 105.4

HLSM150-200 372 172 483.8 304.7 229 150 104.7 389 310.7 105.4


10


Translators for Motion along the Z AxisLSML / HLSML dimensions


actuation: manual/motor

Order code A B C D E F G H J KHLSML38HLSML38-200 330.3 130.3 415.3 160.8 103 38 71.5 265.5 163 39

HLSML38-300 462.5 162.5 542.4 160.8 103 38 71.5 265.5 163 39

HLSML38-400 591.4 191.4 674.9 160.8 103 38 71.5 265.5 163 39

HLSML38-500 717 217 799 160.8 103 38 71.5 265.5 163 39

HLSML64HLSML64-200 325 125 408.2 204 161.4 65 72 313.7 219 64

HLSML64-300 467.3 167.3 550.5 204 161.4 65 72 313.7 219 64

HLSML64-400 592 192 675.2 204 161.4 65 72 313.7 219 64

HLSML64-500 700 200 783.2 204 161.4 65 72 313.7 219 64

HLSML64-600 860 260 947.2 204 161.4 65 72 313.7 219 64

HLSML64-800 1101 301 1184.2 204 161.4 65 72 313.7 219 64


10


Type Series

Model CLSM Compact construction with short mounting length DN40 to DN63 Up to 100 mm standard stroke Flanges with mit threaded holes

Model LSMT

Model LSMX

Complies with model LSM, but with adjusting bellows (tilt ±2°) for the travelling flange

Nominal width DN40 and DN63 Up to 100 mm standard stroke Flanges with threaded holes

Complies with Model LSM, but with adjustment device (X axis ±5 mm) on the travelling flange

Nominal width DN40, DN64 and DN100 Up to 100 mm standard stroke Flanges with threaded holes

Model Stroke [mm] Actuation Scale Wiringupgrade

(optional)UP

CLSM38CLSM64

25 H ES

50 SD DLA

75 SS

100 P


Wiringupgrade

(optional)LSMT38 UP

50 H ES

75 P DLA

100 SS

SD

LSMT64 UP

25 H ES

50 P DLA

100 SS

SD


Wiringupgrade

(optional)ES UP

LSMX38LSMX64

LSMX100

50 H

100 P

SD

SS


10



CLSM dimensions



Order code A B C D E F G H J KCLSM38CLSM38-25 63 38 173 142 75 39 102 247 152 39

CLSM38-50 92 42 202 142 75 39 102 247 152 39

CLSM38-75 125 50 235 142 75 39 102 247 152 39

CLSM38-100 163 63 273 142 75 39 102 247 152 39

CLSM64CLSM64-25 106 81 221 206 122.5 65 73 259 215 67

CLSM64-50 131 81 221 206 122.5 65 73 259 215 67

CLSM64-75 156 81 221 206 122.5 65 73 259 215 67

CLSM64-100 188 88 221 206 122.5 65 73 259 215 67

LSMT dimensions



Order code A B C D E F G H J KLSMT38LSMT38-50 142 92 213 155 75 38 89 259 165 39

LSMT38-100 199.5 99.5 270.5 155 75 38 89 259 165 39

LSMT64LSMT64-25 180.5 130.5 307 203 122.5 65 55.5 298 213 64

LSMT64-50 230.5 130.5 307 203 122.5 65 55.5 298 213 64


10



LSMX dimensions

manual actuationA: expanded lengthB: compact length

side mounted stepper motor

Order code A B C D E F G H J KLSMX38LSMX38-50 143 93 205 155 105 26 52 257 183 39

LSMX38-100 206 106 267 155 105 26 52 257 183 39


10


Port Aligners Diaphragm Bellows for Length and Angle Compensation Robust Compact Highly stressable

Technical data Axial stroke ±5 mm Adjustment angle ±3° Bellow material stainless steel 316L Flange material stainless steel 316L Bakeout temperature 250 °C

Mountingflange A B C D E F G

PA-35 DN40CF 59 73.4 106 20 M8 38 88

PA-64 DN63CF 75 93 166 26 M12 65 140

PA-100 DN100CF 90 108 206 26 M12 102 180

PA-150 DN160CF 100 125 279.4 45 M16 127* 238.4

PA-200 DN200CF 100 125 329.4 44 M16 127* 290

* Options available

Order code Threaded holes (T) Through holes (H) PA-35H Ø 6.4

PA-35T M6

PA-64H Ø 8.3

PA-64T M8

PA-100H Ø 8.3

PA-100T M8

PA-150H Ø 8.3

PA-150T M16

PA-200H Ø 8.9

PA-200T M16

Model Flange HolesPA

35 H

64 T

100

150

200

100


10

Y, XY, XYZ Translators

Introduction

UHV translators enable mechanical XYZ-movements in vacuum systems with different tilt angles, which are e.g. required in connection with probe analysis. These manipulators are characterised by high resolution and enable a precise positioning of probes or metrology in a vacuum chamber. Typical applications are the electron spectroscopy, laser optical analysis, beamlines or thin film deposition (e. g. MBE, CVD). The British expert UHV Design, represented by VACOM, is specialised to build sophisticated manipulators for these applications by using different modular components.

Bellows sealed Robust Precise and smooth-running Repeatable Totally UHV compatible Various actuation possibilities 5 model series

Technical data Material diaphragm bellows stainless steel 316L Max. bakeout temperature 250 °C (without motor or pneumatic) Life cycle (diaphragm bellows) min. 10,000 cycles (optional to 1 million) Z stroke 25 mm…1000 mm (depending on series) XY stroke ±10 mm oder ±22 mm Actuation manual, pneumatic, stepper or DC motor Accuracy 10 µm (optional)

Translators for Motions along Multiple Axes


10

Y Translators

Y Translators for 1 Axis Linear Motion Mounting flange DN63CF or DN100CF Diaphragm bellows sealed Robust Precise and smooth-running Repeatable Totally UHV compatible Various actuation possibilities

Technical data Mounting flange CF flanges, screw orientation shifted, M8 threaded holes Diaphragm bellows stainless steel 316L Bellows durability 10,000 cycles Bakeout temperature 250 °C (motor demounted) Actuation options manual with hand wheel, stepper or DC motor

Model LDM64/38 LDM64/64 LDM100/38 LDM100/64Main flange DN63CF DN63CF DN100CF DN100CF

Trav. flange DN40CF DN63CF DN40CF DN63CF

Stroke ±7.5 ±7.5 ±31 ±31

Bellows ID 60 60 90 90

Free ID 38 60 38 60

Mounting height 87.5 87.5 182 182

LDM64-64-H

LDM100-64-H

Model Main Flange Trav. Flange ActuationLDM

64 38 H

100 64 IS

ID


10

XY Translators

Translators for 2 Axes Linear Motion Mounting flange DN63CF, DN100CF or DN160CF Diaphragm bellows sealed Robust Precise and smooth-running Repeatable Totally UHV compatible Hand or stepper motor actuationTechnical data Connection CF flanges, screw orientation shifted, M8 threaded holes Stroke max. ±14 mm or ±31 mm Bellows material stainless steel 316L Bellows durability 10,000 cycles XY resolution ±0,01 mm with manual drive ±0,0005 mm with stepper motor Bakeout temperature 250 °C (motor demounted) Actuation options hand wheel with micrometer scale, stepper motor with gear

XY14 (manual actuation)

Scale drawing for XY31 on page 10-43.

Model Inner Ø flange toflange XY stroke Sample Ø

XY14-64 38 135 ±14 mm (vector)±10 mm (per axis)

max. 22 mm(for full stroke)XY14-100 38 147

XY31-100-38 38 165.5±31 mm (vector)

±22 mm (per axis)max. 28 mm

(for full stroke)XY31-100-64 60 165.5

XY31-150-64 60 180

XY57-150-150 120 310 ±57 mm (vector)±40 mm (per axis)

max. 36 mm(for full stroke)

Series Main Flange Travelling Flange ActuationXY14 38

64 H

100 IS

XY31

100 38 H

150 64 IS

XY57

150 150 H, IS


10

XY Translators

Rotatable Axis MultiBase ManipulatorThe Rotatable Axis MultiBase X-Y manipulator enables the X and Y axes to be rotated about the axis of the manipulator, whilst under vacuum. The mounting flanges of the vacuum system and at the Z translator remain fixed while the actuation of the XY translator moves around them. This is a unique possibility to precisely align the movement axes with a port axis of the chamber. This feature is especially useful where e.g the user wants to move the sample along the axis of a lens, etc. mounted on ports which are not exactly parallel or perpendicular to the manipulator axes.

Using the Rotatable Axis MultiBase manipulator together with z-shifts, rotary drives and other options for sample handling, probe heating or cooling, a complete eucentric manipulator system can be assembled without a sliding seal or differentially pumped rotary housing being required.

Technical data Mounting flange DN63CF, DN100CF or DN160CF Max. stroke Max. ±14 mm or ±31 mm Material diaphragm bellows Stainless steel 316L XY resolution ±0,01 mm with manual drive ±0,0005 mm with stepper motor Rotation angle 360°

Translators for 2 Axes Linear Motion

Please find order codes at page 10-41, with -RH for manual and -RS for stepper motor actuation along the rotatable axis.


10

XYZ Translators

Modular Translators for Linear Motion along all 3 Axes

Combination of Z linear translator and XY translator 5 XY translator models Up to 1000 mm Z stroke Highly stressable Separate diaphragm bellows for motion in XY and Z (exchangeable) Optional manual or motor actuation

Technical data Main flange DN63CF, DN100CF or DN160CF (screw orientation shifted, M8 threaded holes) Travelling flange DN40CF or DN63CF, (screw orientation shifted, M6 or M8 threaded holes) Bakeout temperature 250 °C (motor demounted) XY resolution ±0,01 mm with manual actuation ±0,0005 mm with stepper motor Actuation options XY hand wheel with micrometer scale, stepper motor with gear Z stroke 25…1000 mm Z stroke resolution ±0,25 mm with manual drive ±0,01 mm with digital linear scale ±0,0005 mm (semi step mode) Actuation options Z manual, stepper or DC motor Diaphragm bellows material stainless steel 316L Mounting position any, without support

XY31 (manual drive)


10

XYZ Translators

Modular Translators for Linear Motion along all 3 Axes

Model XY Actuation Optional R.A.M.B* Z Stroke Z Actuation

XY14-64-38 H Z-50 H

XY14-100-38 S Z-100 SS

Z-200 SD

Z-400

Z-600

XY31-100-38 H R Z-50 H

XY31-100-64 S RS Z-100 SS

XY31-150-38 Z-200 SD

XY31-150-64 Z-400

Z-600

Z-800

Z-1000 (CF63 only)

* R.A.M.B: Rotable Axis MultiBase Actuation** Only limited strokes available

GH: Manual with geared-handwheelH: Manual handwheelR: Manual actuationRS: Stepper motorizedS: Side mounted stepper motorSD: Side-mounted DC motorSS: Side-mounted stepper motor

XY57-150-38 H Z-50** H

XY57-150-64 S Z-100** SS

XY57-150-100** Z-200** SD

XY57-150-150** Z-400 GH**

Z-600

Z-800

Z-1000 (CF63 only)


10

XYZT-Translatoren

Modular Translators for Linear Motion along all 3 Axes and Tilt Motion

XYZ Translator with tilt motion Exchangeable bellow UHV compatible High load capacity Precise and smooth-running Optional manual or motor actuation

Technical data Mounting flange DN63CF, DN100CF oder DN160CF Flange DN63CF (screw orientation shifted, M8 threaded holes) Z stroke 50, 100, 150 or 200 mm Z resolution ±0.25 mm with linear scale ±0.01 mm with digital scale ±0.0005 mm with stepper motor XY stroke ±12.5 mm XY resolution ±0.001 mm with manual actuation ±0.0005 mm with stepper motor (semi step mode) Tilt motion ±2° (manual) Actuation Manual, stepper or DC motor Max. bakeout temperature 250 °C (motor demounted)

Order Code Z Stroke Actuation*XYZT64-50-H 50 manual / micrometer scale

XYZT64-100-H 100 manual / micrometer scale



*For selection of other actuation: S for stepper motor (all axes without tilt motion) or D for DC motor (all axes without tilt motion)

114

Micrometer DriveFor 'X' Plane 12.5 mm

Micrometer DriveFor 'Y' Plane 12.5 mm

230 extended, 180 compressed188.80

315.4

60

84.2

2.00° TILT

Bolt spacersfor system

mounting

Linear scale for Z motion

Calibrated handwheel

Tilt adjustment screw


10

UHV Manipulators

MultiCentre UHV Probe Manipulators

Complete solution for research and analysis Translation in all 3 directions Up to 2 rotation axes (polar and azimuthal) Highly stressable High resolution and accuracy Probe transfer with bayonet connector Probe heating by PBN heater elements or e-beam heater Electrically isolated receptor Manual actuation or stepper motor Optional with LN2 or cryostatic cooling vectoria Optional with rotatable XY translator Custom solutions

Technical data Max. probe diameter max. 33 mm XY stroke ±12.5 mm or ±19 mm or ±40 mm Z stroke 25 mm…1000 mm XY stroke resolution manual actuation: 0.01 mm stepper motor: 0.0005 mm Z stroke resolution manual actuation: 0.25 mm

(optional 0.005 mm with digital linear scale)

stepper motor drive: 0.0005 mm Probe rotation polar: ±180° azimuthal: Continuous with LN2 cooling

(±90° with LHe cooling) Probe heater (optional) PBN heater element: > 1000 °C e-beam heater: > 1200 °C Probe cooling < -150 °C with LN2 cooling

< 30 K with LHe cooling Temperature measurement type K thermocouple (type N optional) Electrical probe isolation ±1000 V, > 500 MOhm

Manipulators for research and development in surface physics, synchrotron applications and otheranalytical methods in UHV

MultiCentre probe handling system

Introduction

MultiCentre provide a complete solution for probe transfer and manipulation. UHV manipulators enable mechanical motion in vacuum systems necessary in connection with probe analysis. For applications which require various axes, tilt, rotation or probe heating or cooling, the British expert UHV Design, represented by VACOM, is specialised to build sophisticated manipulators with up to 6 independently movable axes by using different modular components. These manipulators are characterised by high resolution and enable a precise positioning of probes or metrology in a vacuum chamber.Typical applications are the electron spectroscopy, laser optical analysis, beamlines or thin film deposition (e. g. MBE, CVD).

Puck Style Flag Style ESCA Stub Style


10

UHV Manipulators

EpiCentre MBE Manipulators

Manipulators for probe heating in MBE, CVD and sputter processes or other applications with heatedprobes

The modular EpiCentre manipulators offer a complete UHV solution for theheating, rotation, positioning, manipulation and insertion of probes or substrates.

2 series - EpiCentre 100 and EpiPRO Probe heating up to 1200 °C Sample size up to Ø 200 mm Temperature uniformity Heat-proof mechanical construction and bearing Applicable for corrosive processes Simultaneous probe rotation and heating Manual or motor drive PgG and PBNG graphite heating elements

Custom sample holder MagiGear rotary feedthrough forsample rotation

Differentially pumped quartzenclosure for heater elements

PBN heater elementwith heat-proof housing


10

UHV Manipulators

Technical data Sample diameter 25 mm…200 mm (1" - 8") (bigger diameters on request) Standard heater elements PgG and PBNG (others upon request) Max. temperature 1200 °C for standard heater modules, 1000 °C for quartz-enclosed heater modules (based on a test with a Mo block) Temperature uniformity nominally ±2.5 °C across the central 90 % of a Si wafer Rotation speed up to 80 rpm Thermocouples type C (tungsten rhenium) or type K (Chromel®/Alumel®) Biasing capability 2 kV DC or 2 kV DC isolated/ 80 W RF power Sample Ø / flange size /

rotary feedthrough -Ø 25 - 50 mm (1 - 2") / DN100 - 1 0CF / 1 stage -Ø 75 mm (3") / DN160CF / 1 stage -Ø 100 mm (4") / DN200CF / 1 or 2 stage -Ø 125 mm (5") / DN200CF / 2 stage -Ø 150 mm (6") / DN250CF / 2 stage -Ø 200 mm (8") / DN300CF / 2 stage Options - differential pumped quartz enclosure for

hot plates - motor drive for linear motion - special design of the grip

Individually configurable due to modular configuration Separate linear motion of sample holder and complete system Adjustable distance between heater element and sample Adjustable distance to coating source DC motor for probe rotation Optional quartz enclosure for heating element to protect from corrosive gases Custom sample holders Biasing capabilities up to 2 kV DC or 80 W HF Motorizable Process adjusted

EpiCentre Modell 100

Modular assembled heater manipulator with numerous options


10

UHV Manipulators

Technical data Wafer diameter 100 mm and 150 mm (4'' and 6'') as standard

(2'' and 8'' on request) Standard heating elements PgG (PBNG,SiC graphite and β-SiC heating elements on request) Max. temperature 1200 °C across the central 90 % of a Si wafer Temperature uniformity nominal ±2.5 °C across the central 90 % of a Si wafer Insertion length 240 mm or 300 mm Thermocouple two O-Ring sealed, sheathed type K thermo couples, UHV feedthroughs optional Bias options DC system or combined DC/RF system 2 kV DC isolation, 80 W RF power Sample transfer facility 25 mm magnetically coupled and pneuma-

tically actuated lowering of the bracket to facilitate probe transfer

Positioning magnetic proximity home switch assembly for position sensing as standard

System mounting flange DN300CF (CF 14''), others on request

Standard configuration for two wafer sizes Patented EpiCentre rotation and heating Reference sensor for adjustment of bracket Compact substrate lowering mechanism with magnetic coupling DC and RF biasing as standard option Identical design of all options from atmosphere side Individually configurable by modular design

EpiPRO

New development of the EpiCentre series and especially designed for deposition, sputter and CVD processes


10

Telescopic Manipulator for Radial Transfer

MD100 MagiDrive with hollow shafts for polar rotation of the arm:

Mounting flange DN100CF Max. axial load max. 400 N Max. radial load max. 400 N Max. torque max. 40 Nm Max. bakeout temperature max. 250 °C (without motor) Configuration laterally mounted stepper motor, tubular shaft with mounting flange and standard bearings Positioning external switch for ±180° rotation with reference point and end position

MD35H MagiDrive to drive the ‘Arm’ extension motion:

Mounting flange mounted at rear of MD100 Configuration side-mounted stepper motor, tubular shaft with mounting flange, standard bearings and special mechanical connection to MD100 to avoid „cross talk“ of arm rotation and extension Positioning internal switch with reference point and end position of linear motion

Telescopic transfer arm system:

Stroke 700 mm Reproducibility ≤ 0.5 mm fully extended to end position Configuration complete with telescopic actuation and roll supports

Linear lift/lower mechanism:

Vertical travel 22 mm with 100 CF transfer opening 50 mm with 150 CF transfer opening Bellows exchangeable Actuation side-mounted stepper motor

Radial Telescopic Transfer Arm

Refer to chapter 1 "Vacuum Chambers"

Chapter 10 Mechanical Feedthroughs

Documents

semi step

screw orientation

visual position

laser optical

thin film

safety clamp

pbn heater

magnetically