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CA-DR MEMS SERVO Accelerometer

MEMS processing craft manufacture Single power 15V

High Accuracy

Modal output

Static or dynamic acceleration response

High linearity

DesciptionCA - DR - 50 MEMS accelerometer is a newest design of high precision inertial sensor, it compose

by MEMS sensitive unit and control circuit. MEMS sensitive unit uses comb capacitance structure

and body silicon deep etching technology processing, high precisio , good consistency. The System

adopts high precision closed loop feedback control circuit, this type of accelerator have good stability

and linearity performance.The internal design of over range structure limit, can endure high impact and

acceleration load affect, 15V operating voltage, low output impedance, strong drive capability.

ApplicationsInertial navigation: inertial guidance, integrated navigation, stable platform

Short-term navigation: flight control, trajectory correction, telemetry remote control

Attitude control: Ships, aircraft, missiles, vehicle unmanned aerial vehicle (uav)

Structure

Red

Black

White

Green

Vdd

GND

OUT

NC

+PWR

GND

Output signal

Min.

24.6

19.6

18.6

13.6

10.8

≥100

Typ.

25.0

20.0

M2.5

19

14

11.2

Max.

25.4

20.4

19.4

14.4

11.6

Specifications

*All values are typical at Vdd=15V±1V,TA=25℃±5℃ unless otherwise statement

±50

1000×10-6@±50g

100×10-6@±30g

±0.5

0.085±0.015

5×10-4

5×10-3

5000×10-6

5×10-3

1×10-3

100

≥100

Remark:

1.The direction of acceleration sensitive is paralleled with acceleration installation surface

2.Use, packaging and transportation process must have the electrostatic protection measures

3. Limit operationg voltage: 17V

±30

1000×10-6

100×10-6

±0.5

0.085±0.015

5×10-4

5×10-3

5000×10-6

5×10-3

1×10-3

100

≥100

-45～85

-55～100

200g，2ms，Half-sine wave

0.04g2/Hz，20～2000Hz，Random Vibration，30min/Direction，Three directions

4572

Level 2，HBM 2000V

14