Boning Models of Process Variations in Device and Interconnects

8/9/2019 Boning Models of Process Variations in Device and Interconnects

http://slidepdf.com/reader/full/boning-models-of-process-variations-in-device-and-interconnects 1/21

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8/9/2019 Boning Models of Process Variations in Device and Interconnects

http://slidepdf.com/reader/full/boning-models-of-process-variations-in-device-and-interconnects 2/21

8/9/2019 Boning Models of Process Variations in Device and Interconnects

http://slidepdf.com/reader/full/boning-models-of-process-variations-in-device-and-interconnects 3/21

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DIE

8/9/2019 Boning Models of Process Variations in Device and Interconnects

http://slidepdf.com/reader/full/boning-models-of-process-variations-in-device-and-interconnects 4/21

8/9/2019 Boning Models of Process Variations in Device and Interconnects

http://slidepdf.com/reader/full/boning-models-of-process-variations-in-device-and-interconnects 5/21

8/9/2019 Boning Models of Process Variations in Device and Interconnects

http://slidepdf.com/reader/full/boning-models-of-process-variations-in-device-and-interconnects 6/21

8/9/2019 Boning Models of Process Variations in Device and Interconnects

http://slidepdf.com/reader/full/boning-models-of-process-variations-in-device-and-interconnects 7/21

8/9/2019 Boning Models of Process Variations in Device and Interconnects

http://slidepdf.com/reader/full/boning-models-of-process-variations-in-device-and-interconnects 8/21

8/9/2019 Boning Models of Process Variations in Device and Interconnects

http://slidepdf.com/reader/full/boning-models-of-process-variations-in-device-and-interconnects 9/21

8/9/2019 Boning Models of Process Variations in Device and Interconnects

http://slidepdf.com/reader/full/boning-models-of-process-variations-in-device-and-interconnects 10/21

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8/9/2019 Boning Models of Process Variations in Device and Interconnects

http://slidepdf.com/reader/full/boning-models-of-process-variations-in-device-and-interconnects 11/21

8/9/2019 Boning Models of Process Variations in Device and Interconnects

http://slidepdf.com/reader/full/boning-models-of-process-variations-in-device-and-interconnects 12/21

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8/9/2019 Boning Models of Process Variations in Device and Interconnects

http://slidepdf.com/reader/full/boning-models-of-process-variations-in-device-and-interconnects 13/21

(a) (b)

(c)

8/9/2019 Boning Models of Process Variations in Device and Interconnects

http://slidepdf.com/reader/full/boning-models-of-process-variations-in-device-and-interconnects 14/21

8/9/2019 Boning Models of Process Variations in Device and Interconnects

http://slidepdf.com/reader/full/boning-models-of-process-variations-in-device-and-interconnects 15/21

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8/9/2019 Boning Models of Process Variations in Device and Interconnects

http://slidepdf.com/reader/full/boning-models-of-process-variations-in-device-and-interconnects 16/21

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ILD thickness variation (metal fill)

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48ps

8/9/2019 Boning Models of Process Variations in Device and Interconnects

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8/9/2019 Boning Models of Process Variations in Device and Interconnects

http://slidepdf.com/reader/full/boning-models-of-process-variations-in-device-and-interconnects 18/21

8/9/2019 Boning Models of Process Variations in Device and Interconnects

http://slidepdf.com/reader/full/boning-models-of-process-variations-in-device-and-interconnects 19/21

8/9/2019 Boning Models of Process Variations in Device and Interconnects

http://slidepdf.com/reader/full/boning-models-of-process-variations-in-device-and-interconnects 20/21

8/9/2019 Boning Models of Process Variations in Device and Interconnects

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