Bldg. 360 Lab Status LAPPD Meeting Jan. 8, 2013

Bldg. 360 Lab StatusLAPPD Meeting Jan. 8, 2013

Jeff Williams

Edwards iQDP80 Dry Pump

Below: iQDP80 pump w/o acoustic enclosures. These are on order and will reduce noise in the lab.

Above: 1QDP80 pump, flex line to building exhaust. Proposed location of air cooled closed loop water chiller next to the pump. If noise and/or heat dissipation are an issue, the Wet Lab or the basement are possible alternate locations.

Thermoflex (Neslab) 7500 Chiller

Closed loop water chiller:-7.5KW capacity (iQDP80 requires about 2.75KW cooling)-4.8 gallon reservoir-200-230VAC 3 ph-20gpm at 60 psid-Flow control readout-Anti-drainback option-RS232/485-Capable of pumping 30 ft. vertical-Water OK as coolant

Small STPS in Vacuum Lab

Rough line/ foreline routed to iQDP80.

Process chamber at central Shops for modification.

Original frame had warped. Frame redone with double wide 80/20 front and back.

High Purity Gas Panels

3 panels are in use. N2, O2, and 3% H2 in N2.

N2 dewar currently out of service.

N2 Usage

- High pressure dewar (230psig) had frequent vent off of gaseous N2, but this may not happen with higher and consistent usage. Low pressure dewar (23psig) did not vent off significantly and may provide sufficient pressure for iQDP80 purge.

- A Parker N2 generator is being obtained from GSA Excess. We will have to weigh pros and cons of N2 generation vs. N2 from dewars or cylinders.

- What is the compressed air usage for N2 generator, can our compressed air system keep up?

- What is the cost of compressed air that is used, cost of running the N2 generator, and other costs associated with it compared to cost of N2 from dewars or cylinders?

- How much advantage is there in having a constant supply, no cylinder changes to do, less risk of running out of N2.

- Additional noise?- Clean dry air system for pump purge seems too risky. One of the failure

modes listed is the air dryer delivering wet air, and there were 9 possible causes for this. We do not want to send moisture to the iQDP80 shaft seal purge, the shaft and rotors are made of cast iron.

Vacuum Desiccator for transport between buildings

This is intended mainly to transport glass between bldgs. 360 and 382 (where the sputter system and Elnik furnace are located). Uses a 4 slot cassette. Dedicated pump mounted to cart, which has pneumatic tires.

Replacement turbo on Bldg. 382 sputter system

Turbo running at rated speed of 600Hz at 140VDC and just under 1A current. Chamber pressure at 1.6E-7 Torr.Plan is to coat dummy parts this afternoon (1/8/2013) to verify sputter functionality, check and adjust settings, and general troubleshooting of sputter process.