The information contained herein is, as far as we are aware, true and accurate. However, no representations or warranties, either express or implied, whether of merchantable quality, fitness for any particular purpose or of any other nature are hereby made in respect of the information contained in this presentation or the product or products which are the subject of it. In providing this material, no license or other rights, whether express or implied, are given with respect to any existing or pending patent, patent application, trademarks, or other intellectual property right. AZ ® 50XT Photoresist Thick Positive Novolak Photoresist For Plating & Etch Applications
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AZ® 50XT Photoresist - Pennsylvania State University · AZ, the AZ logo, BARLi, Aquatar, nLOF, Kwik Strip, Klebosol, and Spinfil are registered trademarks and AX, DX, HERB, HiR,
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The information contained herein is, as far as we are aware, true and accurate. However, no representations or warranties, either express or implied, whether of merchantable quality, fitness for any particular purpose or of any other nature are hereby made in respect of the information contained in this presentation or the product or products which are the subject of it. In providing this material, no license or other rights, whether express or implied, are given with respect to any existing or pending patent, patent application, trademarks, or other intellectual property right.
AZ, the AZ logo, BARLi, Aquatar, nLOF, Kwik Strip, Klebosol, and Spinfil are registered trademarks and AX, DX, HERB, HiR, MiR, NCD, PLP, Signiflow, SWG, and TARP are trademarks of AZ Electronic Materials.
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AZ® 50XT Photoresist
Positive resist for developing plating and wafer bumping applications50 to 80 micron single coat capability. Up to 120µm FTdouble coat capability3 to 1 aspect ratio. Excellent sidewall profiles. Wide process latitudeInorganic developer recommendedCompatible with existing thick film processes
Copper studsAZ® 50XT at 75µm Film Thickness
Solder studs (SnPb)AZ® 50XT at 75µm Film Thickness
AZ, the AZ logo, BARLi, Aquatar, nLOF, Kwik Strip, Klebosol, and Spinfil are registered trademarks and AX, DX, HERB, HiR, MiR, NCD, PLP, Signiflow, SWG, and TARP are trademarks of AZ Electronic Materials.
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AZ® 50XT Spectral Response Curve
1.45
1.5
1.55
1.6
1.65
1.7
1.75
1.8
1.85
1.9
1.95
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242
247
252
257
262
268
274
280
287
293
301
308
316
324
333
342
352
362
373
385
397
410
424
439
455
472
491
Wavelength
Inde
x of
Ref
ract
ion
'n'
0
0.02
0.04
0.06
0.08
0.1
0.12
Extic
tion
Coe
ffici
ent '
k'
nk
AZ, the AZ logo, BARLi, Aquatar, nLOF, Kwik Strip, Klebosol, and Spinfil are registered trademarks and AX, DX, HERB, HiR, MiR, NCD, PLP, Signiflow, SWG, and TARP are trademarks of AZ Electronic Materials.
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2400 mJ 2600 mJ2500 mJ 2700 mJ 2800 mJ
2900 mJ 3100 mJ3000 mJ 3200 mJ 3300 mJ
AZ® 50XT on CopperExpose on Ultratech-Saturn, 75µm FT, 100µm CH,
AZ, the AZ logo, BARLi, Aquatar, nLOF, Kwik Strip, Klebosol, and Spinfil are registered trademarks and AX, DX, HERB, HiR, MiR, NCD, PLP, Signiflow, SWG, and TARP are trademarks of AZ Electronic Materials.
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AZ® 50XT on Cu – Plating PerformanceExpose on Ultratech-Saturn, 75µm FT, 100µm CH,
2400 mJ 2600 mJ2500 mJ 2700 mJ 2800 mJ
2900 mJ 3100 mJ3000 mJ 3200 mJ 3300 mJ
Post Copper Plating and Strip
AZ, the AZ logo, BARLi, Aquatar, nLOF, Kwik Strip, Klebosol, and Spinfil are registered trademarks and AX, DX, HERB, HiR, MiR, NCD, PLP, Signiflow, SWG, and TARP are trademarks of AZ Electronic Materials.
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AZ® 50XT PhotoresistExposure Latitude on Si, 20µm Contact Holes, FT = 25µm
2100 mJ/cm2 2200 mJ/cm2 2300 mJ/cm2
2500 mJ/cm2
2400 mJ/cm2
2600 mJ/cm2 2700 mJ/cm2 2800 mJ/cm2
AZ, the AZ logo, BARLi, Aquatar, nLOF, Kwik Strip, Klebosol, and Spinfil are registered trademarks and AX, DX, HERB, HiR, MiR, NCD, PLP, Signiflow, SWG, and TARP are trademarks of AZ Electronic Materials.
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AZ® 50XT PhotoresistCopper Plating - ~20µm High Bumps