MAKIMOTO LIBRARY / Exhibit VI / No.2 Automation in Semiconductor Manufacturing IEDM, San Francisco, 1982 Keynote Speech Commentary Alongside ISSCC, IEDM is the most traditional academic conference in the semiconductor field, and it is held in December every year, centering on the device technology and manufacturing process. The keynote speeches are given on the first day, and it is customary for three people selected from North America, Europe, and Asia to deliver speeches. In this year, IBM in US, Siemens in Germany, and Hitachi in Japan were selected. In 1981, Japan was at the top of the world in the memory technology, and a lot of attention was gathered in Japanese manufacturing technology. I think that the turn has come around for Hitachi, since Hitachi was a leader in advanced devices of 3 micron process, such as 64K DRAM and 16K SRAM. The paper on the Technical Digest was jointly written with Hiroto Nagatomo, Manager of Production Engineering Department, and I made the presentation. It was my first experience to make a speech at a large overseas academic conference with over 2,000 audience, and it was not easy to keep talking without letting the audience get tired for an hour. It is most important that the content itself is fulfilling, but it is also necessary to incorporate some appropriate humor and to moderate the atmosphere of the venue. The first and the last slides were prepared with such intention, and I took in the taste that would invite laughter even in the middle. I wish it would help as a reference for your speech. As a result, this keynote speech was accepted very favorably. After the conference, Michael Adler, Program Chairman, sent me the following thank you note: "--- In particular, as to your speech, many people gave me comments that it was the best one in the past IEDM speeches. Not only was the content excellent, but also the presentation with humor was very well accepted. A lot of people were surprised at the depth of your understanding about American humor ---- " This is not simply a compliment to my speech, but I think that it was the high evaluation given to Japanese semiconductor technology that had reached the world's top. Continue to slides 1
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MAKIMOTO LIBRARY / Exhibit VI / No.2
Automation in Semiconductor ManufacturingIEDM, San Francisco, 1982
Keynote Speech
Commentary
Alongside ISSCC, IEDM is the most traditional academic conference in the semiconductor field, and it is held in
December every year, centering on the device technology and manufacturing process. The keynote speeches are given
on the first day, and it is customary for three people selected from North America, Europe, and Asia to deliver speeches.
In this year, IBM in US, Siemens in Germany, and Hitachi in Japan were selected.
In 1981, Japan was at the top of the world in the memory technology, and a lot of attention was gathered in Japanese
manufacturing technology. I think that the turn has come around for Hitachi, since Hitachi was a leader in advanced
devices of 3 micron process, such as 64K DRAM and 16K SRAM.
The paper on the Technical Digest was jointly written with Hiroto Nagatomo, Manager of Production Engineering
Department, and I made the presentation. It was my first experience to make a speech at a large overseas academic
conference with over 2,000 audience, and it was not easy to keep talking without letting the audience get tired for an
hour.
It is most important that the content itself is fulfilling, but it is also necessary to incorporate some appropriate humor
and to moderate the atmosphere of the venue. The first and the last slides were prepared with such intention, and I took
in the taste that would invite laughter even in the middle. I wish it would help as a reference for your speech.
As a result, this keynote speech was accepted very favorably. After the conference, Michael Adler, Program Chairman,
sent me the following thank you note:
"--- In particular, as to your speech, many people gave me comments that it was the best one in the past IEDM
speeches. Not only was the content excellent, but also the presentation with humor was very well accepted. A lot of
people were surprised at the depth of your understanding about American humor ---- "
This is not simply a compliment to my speech, but I think that it was the high evaluation given to Japanese
semiconductor technology that had reached the world's top.
Continue to slides
1
MAKIMOTO LIBRARY / Exhibit VI / No.2
Keynote speech at IEDM in 1982. I talked as a representative of the Asian region.
It was a comprehensive speech on the automation of manufacturing advanced devices.
IBM person talked on Device Technology for LSI, and Siemens person on Power Device.
2
MAKIMOTO LIBRARY / Exhibit VI / No.2
I started with a slide that took the audience by surprise, and it roused the laughter and applause in the hall.
"Today's story is the same as a chef's story about how delicious dishes can be made. Let me talk about
various kitchen utensils and how to use them. However, the secrete treasure of traditional family seasoning is
not included!”3
MAKIMOTO LIBRARY / Exhibit VI / No.2
4
MAKIMOTO LIBRARY / Exhibit VI / No.2
Technology in the semiconductor field has several characteristics.
We must keep these points in mind prior to the implementation of automation.
5
MAKIMOTO LIBRARY / Exhibit VI / No.2
Advances in semiconductor technology are extremely fast, and new waves rise with the period of about seven
years. Beginning with the Ge transistor, going through Si transistors, ICs and LSIs, VLSI started to rise. VLSI will
be the biggest segment in the 1990s.
In promoting the automation of manufacturing, technological changes have to be taken into considerations.6
MAKIMOTO LIBRARY / Exhibit VI / No.2
Starting with 1K DRAM, and going through 4K and 16K, 64K DRAM is starting to rise. However, within the next
few years the new generation 256 Kbit will surpass 64 Kbit.
7
MAKIMOTO LIBRARY / Exhibit VI / No.2
Although the number of bits grows rapidly, the growth in the value and quantity is moderate. This is because the
cost per bit keeps falling, and the integration density keeps going up. This point has also to be considered in
manufacturing automation.
8
MAKIMOTO LIBRARY / Exhibit VI / No.2
The trend of complexity, feature size, and chip area are shown from 1 K to 256 K DRAM. The integration level
increases 4 times every 3 years, the pattern size is reduced to 70% (the density is doubled) in 3 years, and the
chip area is doubled in 3 years.
9
MAKIMOTO LIBRARY / Exhibit VI / No.2
The trend of new technologies introduced after 1970. All these technologies were "innovative" at the time of
introduction.
10
MAKIMOTO LIBRARY / Exhibit VI / No.2
Actually this slide was also the one that invited big laughter in the hall.
"Everyone, this shows pictures of memory cells after 16 K. It is getting smaller and smaller in every generation.
The 1 Mbit cell is so small that you probably cannot see it from your seat. "
11
MAKIMOTO LIBRARY / Exhibit VI / No.2
The following three points are challenges for automation.
1) decrease in yield, 2) decrease in throughput, 3) increase in investment amount
12
MAKIMOTO LIBRARY / Exhibit VI / No.2
13
MAKIMOTO LIBRARY / Exhibit VI / No.2
14
MAKIMOTO LIBRARY / Exhibit VI / No.2
The basis of the wafer processing is that the following three processes are repeated.