M. S. Ramaiah School of Advanced Studies 1 M. Sc. (Engg.) in Electronics System Design Engineering GREESHMA S CWB0913004 , FT-2013 4 th Module Presentation Module code : ESE2513 Module name : Low Voltage Electronics Module leader : Ms. Nireeksha/ Ms. Malathi Presentation on : 14/02/2014
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Application of Micro fabricated valves based on the principles of thermo pneumatic actuation
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M. S. Ramaiah School of Advanced Studies 1
M. Sc. (Engg.) in Electronics System Design
Engineering
GREESHMA SCWB0913004 , FT-2013
4th Module Presentation
Module code : ESE2513
Module name : Low Voltage Electronics
Module leader : Ms. Nireeksha/ Ms. Malathi
Presentation on : 14/02/2014
M. S. Ramaiah School of Advanced Studies 2
Application of Micro fabricated
valves based on the principles of
thermo pneumatic actuation
Presentation on
M. S. Ramaiah School of Advanced Studies 3
• ABSTRACT
• INTRODUCTION
• THERMOPNEUMATIC MICROVALVE TECHNOLOGY
• REFRIGERATION APPLICATION
• SEMICONDUCTOR PROCESS APPLICATION
• MASS FLOW MEASUREMENT PRINCIPLE
• ADVANTAGES
• DISADVANTAGES
• CONCLUSION
• REFERENCES
Overview
M. S. Ramaiah School of Advanced Studies 4
Abstract
In terms of control and distribution of liquids and gases (microfluidics), MEMS-
based devices offers opportunities to achieve increased performance and higher
levels of functional integration , at lower cost, with decreased size and increased
reliability
Microfluidic actuators include distribution microchannels and orifices, microvalves,
micropumps, and microcompressors
Related microsensors are required to measure temperature, flow, pressure,
viscosity, and density
A brief comparison to other actuation techniques is made, science and technology of
silicon-based thermopneumatic microvalves
Expansion valves for refrigeration control
M. S. Ramaiah School of Advanced Studies 5
Introduction
Actuators such as pumps, compressors, and valves are used to alter the state of the
fluid pressure, temperature, or flow
Microfabrication techniques created for the semiconductor integrated circuit
industry have found new applications in MEMS research, development and
manufacture
Microvalves are a primary component of microfluidic systems
Actuators rely on a variety of activation mechanism, such as electromagnetic,