This document is posted to help you gain knowledge. Please leave a comment to let me know what you think about it! Share it to your friends and learn new things together.
Transcript
This educational seminar discusses creating, measuring, and troubleshooting Rough Vacuum.
Specifically, today’s talk will cover:• Brief review of Vacuum Fundamentals• Applications Using Rough Vacuum• Rough Vacuum Pumps• Rough Vacuum Gauges• Troubleshooting Rough Vacuum Applications• Summary and Preview of High Vacuum Webinar
Previous Webinar (Vacuum Fundamentals) is available for download at:http://www.agilent.com/en-us/training-events/eseminars/vacuum
Vacuum History Review
• Credited with first Vacuum Pump• Magdeburg Experiment (1657)
Von Guericke(1602-1686)
Varian Brothers (1898-1961)
• Vacuum Tubes for Radio & Radar applications (Klystron linear vacuum-tube amp)
• Invented ‘sputter-ion’ pump to improve tube life (1956)• Inventors of Nuclear Magnetic Resonance (NMR)
2010
Pressure: Molecular Collisions
Momentum transfer from a particle hitting a fixed surface creates a Force on the wall.
High Vacuum 10-3 - 10-9 Displacement Pumps Capture Pumps
Diffusion PumpsTurbo Molecular PumpsCryo Pumps
Ultra High Vacuum < 10-10 Capture Pumps
Cryo Pumps, Ion PumpsSublimation Pumps
• ROUGH VACUUM pumps are most effective when gas is moving in VISCOUS FLOW
Displacement Pumps: Rough Vacuum
ROUGH VACUUM PUMPS
DIAPHRAGM PUMPS• Pressure differential created by deformation of elastic membrane allows gas
to enter the space above the piston• Inlet valve closes & exhaust valve opens (discharge to atmosphere or to inlet
of a second chamber)• Single and multi-stage models available
Limited base pressure Frequent replacement of
diaphragms (annual) Maintenance can be
complicated
Rough Vacuum: Oil-Sealed RVP
OIL-SEALED ROTARY VANE PUMPS• 1.5 m3/hr – 600 m3/hr• Molecules in VISCOUS FLOW enter the pump inlet• Gas is Isolated, Compressed (to above 760 Torr),
then Exhausted (or to 2nd stage)
Inlet Isolation Compression/Exhaust
Rough Vacuum: Oil-Free Scroll Pump
DRY SCROLL PUMPS (3 m3/hr – 35 m3/hr)• Compact, Oil-free pumps with high pump speed and low mTorr base pressure• Without OIL to achieve sealing, SCROLL PUMPS rely on (field replaceable)
TIP SEALS to achieve vacuum• Single and Dual Stage Versions available:
- Maintenance Simplicity vs Base Pressure!
15m3/hr • <50 dB15m3/hr• Hermetically Sealed
ROUGH VACUUM PUMPS
PISTON PUMPS • Piston pumps use coated PISTONS (eg.Teflon) and
CYLINDERS, and valving to achieve compression:- Inline, V-Twin, and Opposed Piston designs
Monitoring the CHANGE in Pressure over Time can help to determine if there is a leak in the vacuum system
• A leak-tight system will display steadily decreasing slope until we reach the limits of the ROUGH VACUUM pumps
The slope of this line is proportional to the pumping speed
Time (min)0 5 15 2510 20 30
Pre
ssur
e (T
orr)
10+3
10+1
10-1
10-3
P
T Base Pressure
Troubleshooting Rough Vacuum Pumpdown
Time (min)0 5 15 2510 20 30
Pre
ssur
e (T
orr)
10+3
10+1
10-1
10-3
P
T
Monitoring the CHANGE in Pressure over Time can help to determine if there is a leak in the vacuum system
• A vacuum system with OUTGASSING issues will display a fairly constant rate of decrease in pressure over time
Base PressureOutgassing
Troubleshooting Rough Vacuum Pumpdown
Base Pressure
Time (min)0 5 15 2510 20 30
Pre
ssur
e (T
orr)
10+3
10+1
10-1
10-3
Real leak
Outgassing
Monitoring the CHANGE in Pressure over Time can help to determine if there is a leak in the vacuum system
• A vacuum system with a REAL LEAK will show a pressure change that drops, then flattens at the level of the leak
Rough Vacuum Troubleshooting: Rate of Rise TEST
Pres
sure
Time
TP
TP
Pre
ssur
e
Time
T
P
TPOutgassing/Virtual Leak:
- Rate of Rise (P/ T) DECREASES over time
Real Leak:- Rate of Rise (P/ T) remains
STEADY over time
Summary: Rough Vacuum Rough Vacuum Pumps (displacement pumps) require gas to be in
Viscous Flow to be effective. EFFECTIVE pumping speed approaches ZERO around 1 x 10-3 Torr.
Vacuum Pump choice depends on the importance to the user of:• Oil vs Oil-free Process• Base Pressure Requirements• Initial cost vs Lifetime Cost• Process Gas Limitations
Vacuum gauge selection depends on the accuracy required vs the cost. Gas dependent gauges require correction factor.
When approaching the lower limits of Rough Vacuum, OUTGASSING (Desorption and Diffusion) is the dominant factor (vs chamber volume)
Techniques for troubleshooting ROUGH VACUUM applications include Pumpdown Curves (P/T) and Rate-of-Rise or ‘Leak-Up’ Tests.
• Pump Speed at Operating Pressure• Maintenance Simplicity• Audible Noise
Vacuum Education Programs
For Information on Agilent’s Vacuum Technology Products and Services, please e-mail [email protected] or call 800-882 7426, and select option 3.
To learn about more Agilent Vacuum Technology Education programs, including• UHV Seminars at your institution• Scheduled multi-day classes in Vacuum Practice and Leak Detection• Custom multi-day classes at your site• Other custom training classes to fit your needs
Please e-mail Robin Arons ([email protected]), or call Customer Care at 800-882-7426 (Option 3) for more details on these programs
December 12, 2016
Confidentiality Label
29
Next Live Webinar: High Vacuum (Feb-7)
High Vacuum Webinar deals with the process of generating, measuring, and maintaining High Vacuum Pressure (10^-3 Torr to approx. 10^-8 Torr). ‘Roots’ type pumps (covering ‘Transition’ vacuum region) will also be discussed.Participants will learn about the benefits and drawbacks of different High Vacuum pump and Gauge technologies, and what to consider when constructing a vacuum system or troubleshooting leaks in the High Vacuum regime.