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An Emerging Dimension of Internet-of-Things System – Chemical MEMS Sensors

Chih-Ting LinAssociate Professor

Department of Electrical EngineeringNational Taiwan University

Outline

• Introduction•Devices for Internet-of-Thing System• CMOS Integrated Chemical Sensing System

– MEMS Chemical Sensors– CMOS-MEMS Biomolecular Sensors

• Conclusion

Introduction

• 3S in 3C– Simple– Secure– Smart

• IBM: smart planet – Ability to harness data giving competitive

advantages

• Intel: extended computing technology– Connect and enrich the lives on earth

How to be Smart?• Learning from natures

Proposed Systems• Internet of Things (IoT)•Machine-to-Machine

(M2M)

Outline

• Introduction•Devices for Internet-of-Thing System• CMOS Integrated Chemical Sensing System

– MEMS Chemical Sensors– CMOS-MEMS Biomolecular Sensors

• Conclusion

Devices for Internet-of-Thing System

• Scalable– Orders of magnitude more (volume and variety)

• Sustainable– Orders of consumption less

• Smart– Autonomous and self-regulated

Technologies in IoT Devices•Nature of de-centralization• Trend of miniaturization•Ubiquity of installation

8

Sensing

Communication

ComputationCos

t/mea

sure

men

t

Performance

9

90

250

MCU (MSP430)RF (Zigbee)

Gas Sensor (Fiagro)

Unit: mW

9

90

2.5 MCU (MSP430)

RF (Zigbee)

Gas Sensor (inkjet printed)

Unit: mW

MEMS Devices• Boost the wave of smart technologies

– Acceleration, pressure, and gyros– Developed with over 20-year MEMS research– Major at the physical quantity sensing

Freescale accelerometer STMicro gyroscope MicroSesnorSystemPressure sensor

9

Something Missing…

•Another dimension of worlds: chemical sensing– An emerging research field and market– Sensitivity, selectivity, and reliability

• In networking system– Limited resources– Local calibration– Collaborative sensing

10

Outline

• Introduction•Devices for Internet-of-Thing System• CMOS Integrated Chemical Sensing System

– MEMS Chemical Sensors– CMOS-MEMS Chemical Sensors

• Conclusion

Why Chemical Sensing in MEMS?

•Harness the momentum of CMOS industries– MEMS

12

MEMS Chemical Sensors• Surface acoustic wave (SAW) sensors

– Based on piezoelectric resonators– Different recognition materials to promote

selectivity

Afzal, et al., Analytica Chimica Acta, 2013

E-Nose Based on SAW Sensors•Multiple sensing devices for different targets

Hao et al., Sensors Actuators B, 2010Pietrantonio et al., Biosensors Bioelectronics, 2013

MEMS Chemical Sensors• Piezoresistive membrane with recognition

polymers

Guo et al., Sensors Actuators B, 2011

MEMS Chemical Sensors• Capacitive micromachined ultrasonic

transducer (CMUT)

Park et al., Sensors Actuators B, 2011

CMOS-MEMS Chemical Sensors• CMOS-MEMS capacitive humidity sensors

Lazarus et al., J Microelectromechanical Systems, 2010

CMOS-MEMS Biomolecular Sensors• CMOS compatible biomolecular detection

technology– Microcantilever biosensors

Zheng, et al., Nature Biotechnology, 2005Boisen and Thundat, Materials Today, 2009

Fully Integrated Microcantilever Biosensors

• CMOS Integrated Design– Piezoresistor can be used to monitor micro-

cantilever deflection

P-type (100) Silicon substrateField oxide 2900AWSix/Poly 1 2750A

Oxide 370AN+ Poly 2 (Resistance) 1800A

ILD-BPTEOS 4280A

M1 : TiN(ARC)/Al/TiN&Ti(glue layer) 6650A

Au/Ti 3000A+500A14430A

Etching position

Fully Integrated Microcantilever Biosensors

Huang et al., Sensors Actuators B, 2013

Fully Integrated Microcantilever Biosensors

Huang et al., Sensors Actuators B, 2013

• Fully integrated with CMOS circuits– Analog interface circuit– Full functional micro-controller

(8051 core)– 433MHz OOK TX/RX– Micro-cantilever biosensing

capability

Conclusion

• IoT systems offer a value-up momentum for MEMS technologies

• A paradigm shift for sensor designs is needed in IoT– Communication promotes collaborative sensing

• MEMS platform offers a vehicle for devices in IoTsystems– Low cost, low power, and high computational capability

• CMOS-MEMS chemical sensor is an emerging direction to enrich IoT systems